KR20070012221A - Removing and washing agent for a resin composition - Google Patents

Abstract

Provided is a cleaning agent for removing a resin composition, which removes a resin composition adhered to a coating apparatus effectively and exhibits a cleaning property effective in removing a pigment-dispersible photosensitive resin composition. The cleaning agent for removing resin composition contains at least one solvent capable of dissolving and removing a resin composition adhered to the surface of an article, and a aromatic compound that disperses pigments contained in the adhered resin composition. The aromatic compound includes alkylbenzene. An alkyl group in the alkyl benzene has 3-5 carbon atoms. The alkylbenzene is contained in an amount of 5-50wt% based on the total weight of the cleaning agent.

Description

Removing and Washing Agent for a resin composition

The present invention is suitable for efficiently removing a resin composition adhering to the surface of an article such as a nozzle of a resin coating device, a priming roller, a pipe, or a photosensitive resin composition in which a pigment is dispersed, from the surface of the article. The present invention relates to a resin composition removal cleaner.

In the production of semiconductor devices and liquid crystal display devices, positive and negative photosensitive resin composition layers are patterned by photolithography techniques to form various patterns such as electric wiring patterns. The photosensitive resin composition is applied onto a substrate such as a semiconductor substrate or a glass substrate in the form of a coating liquid, and appropriately dried to form a photosensitive resin film (photosensitive resin layer). By selectively exposing this film and then developing, a patterned film is formed.

As a coating method to the board | substrate of the said photosensitive resin composition, the spin coating (rotary coating) method is common. However, in recent years, particularly in the field of liquid crystal display device manufacturing, in which the enlargement is progressing, since it is difficult to uniformly apply a large area by the spin method, coating means such as a coat-and-spin method and a non-spin method are proposed. It is becoming.

In the coating process of the photosensitive resin composition, since the discharge nozzle of the resin coating apparatus, the priming nozzle, the inner wall of these apparatuses, and the piping system of these apparatuses are polluted by adhesion of the photosensitive resin composition, including a board | substrate edge and a back surface of a substrate, From time to time these contaminants need to be cleaned. After the coating treatment, the amount of resin adhered to the coating apparatus is large, and in particular, the adhesion to the priming roller and the piping system tends to be relatively strong, and attention to cleaning is necessary.

In addition, in the resin composition to be cleaned, it is pointed out that the photosensitive resin composition in which the pigment is dispersed, for example, a pigment dispersion type photosensitive resin composition for forming a color filter or a black matrix pattern, is particularly difficult to remove. Several removal cleaners having excellent cleaning properties have been proposed for such pigment dispersion photosensitive resin compositions (for example, Japanese Patent Application Laid-Open No. 2001-188364 and Japanese Patent Application Laid-Open No. 2002-273370).

This conventional resin composition removal detergent is basically formed by adding an additive such as a surfactant or a pigment dispersant to a solvent, and is intended to improve cleaning performance by the composition of the additive. As a solvent, cyclohexanone, propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monomethyl ether (PGME), ethyl acetate, butyl acetate, ethyl lactate, acetone, methyl isobutyl ketone (MIBK), methyl ethyl ketone (MEK) , Conventional resin solvents such as methanol, ethanol, diethyl ether and phenol are used. Moreover, the same compound is used also as surfactant and a pigment dispersant, For example, cationic surfactants, such as a butalocyanine derivative and an organosiloxane polymer, polyoxyethylene lauryl ether, polyethyleneglycol dilaurate, and sorbitan Nonionic surfactants such as fatty acid esters, and other conventional fluorine-based surfactants and anionic surfactants are used.

However, the following problems to be improved with respect to the conventional photosensitive resin composition removal cleaner has been pointed out.

First, it is pointed out that further improvement in cleaning performance is required in the direction in which the cleaning area is enlarged in accordance with the enlargement of the substrate, the new proposal of the coating method, and the like.

Subsequently, when the photosensitive resin composition to which the pigment was added is used, it is pointed out that the pigment is easy to adhere to the ejection nozzle, the priming roller, and the piping system of the coating apparatus, and the cleaning and removal of the pigment of the portion is insufficient. If there is a cleaning residue of these pigments, the pigment aggregates over time, causing an abnormal discharge of the nozzle or a problem that the pigment aggregate aggregates as foreign matter in the coating film. In addition, when a non-protic polar solvent is used for the removal detergent, it is pointed out that problems such as the polarity is so strong that the pigment aggregates and precipitates and the piping system of the coating apparatus is blocked. Moreover, in the beginning, the conventional removal cleaners have poor cleaning performance in the cleaning removal of the pigment-dispersible photosensitive resin composition. Therefore, in order to obtain a sufficient cleaning effect, a large amount of the cleaning agent must be used, so that the amount of waste liquid increases and the environmental load increases. It is also a problem.

SUMMARY OF THE INVENTION The present invention has been made in view of the above conventional circumstances, and is particularly suitable for cleaning resin compositions adhering to surfaces of articles such as coating apparatuses, and particularly for cleaning pigment dispersion type photosensitive resin compositions for forming color filters or black matrix patterns. It is an object of the present invention to provide a removal detergent and a method for removing a resin composition having excellent properties.

MEANS TO SOLVE THE PROBLEM The present inventors discovered the following fact in detail as a result of repeating research and examination in order to solve the said subject.

This invention is made | formed based on such knowledge. That is, the photosensitive resin composition removal cleaner according to the present invention comprises an aromatic compound which disperses at least one solvent capable of dissolving and removing the resin composition fixed on the surface of the article and the pigment contained in the fixed resin composition. It is characterized by having.

Specifically, by using a conventional solvent for resin as a base solvent and mixing a predetermined amount of a predetermined aromatic compound with the base solvent, the washing and removing performance of the photosensitive resin composition is significantly increased, and the pigment dispersion which has been difficult to wash conventionally is difficult. Also with respect to the type photosensitive resin composition, it has been found that sufficient washing is possible even in a small amount.

By mix | blending the said aromatic type compound, after the resin is removed by the said cleaning agent, the effect which suppresses the phenomenon which the pigment disperse | distributed in resin (especially carbon with strong adhesive force to the surface of an article) aggregates can be acquired.

In order to disperse | distribute pigment particle | grains, such as carbon particle, efficiently in the resin component adhering to the article surface, it is preferable to add the compound containing an alkyl group as said aromatic type compound.

As a compound containing the said alkyl group, it is preferable to use the alkylbenzene of 3-5 carbon atoms of an containing alkyl group.

When the number of carbon atoms in the alkyl group of the alkylbenzene is 5 or more, the cleaning properties of the resin composition containing the pigment can be secured, but the volatility of the removal cleaner itself is weakened, and after the cleaning, the removal cleaner remains on the surface of the article, and thus the cleaning agent itself. May be a contaminant.

In the resin composition removal cleaner, it is also important to ensure not only the resin removal characteristics but also its own removal characteristics, that is, volatility. From this viewpoint, it is preferable to make carbon number of the alkyl group containing alkylbenzene to add 5 or less. Even in the range where carbon number of an alkyl group is 5 or less, the compounding quantity for exhibiting a constant removal performance differs in the alkylbenzene of 3 to 5 carbon atoms and the alkylbenzene of carbon number 2 or less. When C3-C5 alkylbenzene is used, a washing | cleaning effect can be acquired by a smaller compounding quantity. In addition, as the number of carbon increases, the volatility decreases, so it is necessary to specify a range that satisfactorily satisfies two conditions, namely, an improvement in washing characteristics due to an increase in the amount of the compound and a certain volatility. What was set from such a viewpoint is content of the said alkylbenzene (aromatic compound).

As for content in the case of using the alkylbenzene of 3-5 carbon atoms of an alkyl group, 5-50 mass% of the total amount of a removal detergent is preferable.

Examples of the alkylbenzene having 3 to 5 carbon atoms in the containing alkyl group include propylbenzene, indane, 1-methylethylbenzene, ethylmethylbenzene, trimethylbenzene, 1-methylpropylbenzene, 2-methylpropylbenzene, diethylbenzene, and ethyl. It is preferable to select from dimethylbenzene, tetramethylbenzene, tetramethylcyclopentadiene, diethylmethylbenzene, ethyltrimethylbenzene, and dimethylpropylbenzene.

As the alkylbenzene having 3 to 5 carbon atoms of the containing alkyl group, it is preferable to use petroleum oil, which is a mixture of two or more alkylbenzenes, in view of performance and cost. Commercially available products can be used as the petroleum fraction, and compared with purified alkylbenzenes alone or in combination thereof, there is no deterioration in the cleaning properties of the pigment-disperse photosensitive resin composition which is the object of the present invention. For example, sorbet 100, sorbet 150, sorbet 200 (above, the brand name of Exxon Chemical Co., Ltd. product) etc. can be used.

Moreover, as said alkylbenzene, the alkylbenzene whose carbon number of this alkyl group is 2 or less may be used, and the preferable content is 20-60 mass% of the whole detergent.

As the aromatic compound having 2 or less carbon atoms in the containing alkyl group, at least one selected from anisole, toluene and xylene can be used.

The compounding quantity with respect to the total amount of the aromatic compound of the said alkylbenzene is 70-100 mass%, Preferably it is 80-100 mass%, More preferably, it is 95-100 mass%.

As the resin solvent of the base solvent, a conventional resin solvent can be used. Specifically, cyclohexanone, propylene glycol monomethyl ether acetate (PGMEA), propylene glycol monomethyl ether (PGME), 3-methoxybutyl acetate, methoxypropyl acetate, 3-ethoxypropionate, ethyl acetate, butyl acetate , Propyl acetate, pentyl acetate, hexyl acetate, heptyl acetate, octyl acetate, ethyl lactate, butyl lactate, pentyl lactate, hexyl lactate, heptyl lactate, octyl lactate, acetone, methyl isobutyl ketone (MIBK), methyl ethyl ketone (MEK) , 2-heptanone, methanol, ethanol, propanol, butanol, pentanol, hexanol, heptanol, octanol, hexane, heptane, octane, nonan, decane, diethyl ether, cyclohexane, cyclohexanol, Dioxane, oxetane, phenol, cresol, and xylenol. As a usage form of the said base solvent comprised by these, these may be 1 type, or a mixture thereof, Furthermore, the combined mixed solvent marketed as a resin solvent may be sufficient, and it may combine individually.

Among them, propylene glycol monoalkyl ether acetate is preferred because it is effective in the removal of organic components in the photosensitive resin composition. As such propylene glycol monoalkyl ether acetate, propylene glycol monomethyl ether acetate (PGMEA) is most preferable.

In order to obtain the volatility (fast drying) of the removal detergent, propylene glycol monoalkyl ether is preferable, and in particular, propylene glycol monomethyl ether (PGME) is a preferable solvent, and thus the propylene glycol monoalkyl ether acetate, in particular It is preferable to mix with propylene glycol monomethyl ether acetate (PGMEA), and to use as a mixed solvent.

In addition, the method of removing the resin composition of the present invention is a method of removing a resin composition adhering to the surface of an article such as a nozzle, a priming roller, a pipe, or the like of a resin coating apparatus. The resin composition attached to the surface is removed.

As a method of removing the resin composition of the present invention, as described above, a removal cleaner having a desired composition may be prepared in advance, and the resin composition adhering to the surface of the article may be removed by using the removal cleaner. The resin composition may be removed from the surface of the article using a mixed solvent obtained by mixing a predetermined amount of a predetermined aromatic compound in the formulation product.

On the other hand, there is no restriction | limiting in particular in the resin composition which the removal detergent of this invention makes object, It can be used for the washing removal of all the resin compositions used conventionally. Here, the resin composition to be targeted is summarized as follows.

(Resin composition to be cleaned)

Although it was difficult in the conventional removal cleaner, the photosensitive resin composition which the pigment disperse | distributed is mentioned as the photosensitive resin composition which can exhibit sufficient washing | cleaning effect in the removal cleaner of this invention. Among such pigment-dispersible photosensitive resin compositions, red (R), green (G), and blue (B) photosensitive resin compositions for color filter formation and photosensitive resin compositions for black matrix pattern formation were more difficult to remove. The removal detergent of can exhibit a sufficient washing effect even in a small amount even for these pigment dispersion type photosensitive resin compositions. This pigment dispersion type photosensitive resin composition basically contains photosensitive components such as resin components and photopolymerization initiators as essential components, and also contains monomer components, surfactants, acid components, nitrogen-containing organic compounds, pigments, solvents and the like. do.

As the resin component, for example, one or more selected from monomers having a carboxyl group such as acrylic acid and methacrylic acid, methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate and 2-hydroxyethyl acrylate , 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate, N-butyl acrylate, N-butyl methacrylate, isobutyl acrylate, isobutyl methacrylate, benzyl acrylate, benzyl methacrylate With at least one selected from the group consisting of latex, phenoxy acrylate, phenoxy methacrylate, isobornyl acrylate, isobornyl methacrylate, glycidyl methacrylate, styrene, acrylamide, acrylonitrile and the like. Copolymer, phenol novolak type epoxy acrylate polymer, phenol novolak type epoxy methacrylate polymer, cresol novolak type epoxy ah Resin, such as a acrylate polymer, a cresol novolak-type epoxy methacrylate polymer, a bisphenol-A epoxy acrylate polymer, and a bisphenol S-type epoxy acrylate polymer, is mentioned.

As said photoinitiator, 1-hydroxycyclohexylphenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1- [4- (2-hydroxyethoxy) phenyl] -2- Hydroxy-2-methyl-1-propan-1-one, 1- (4-isopropylphenyl) -2-hydroxy-2-methylpropan-1-one, 1- (4-dodecylphenyl) -2 -Hydroxy-2-methylpropan-1-one, 2,2-dimethoxy-1,2-diphenylethan-1-one, bis (4-dimethylaminophenyl) ketone, 2-methyl-1- [4 -(Methylthio) phenyl] -2-monopolynopropan-1-one, 2-benzyl-2-dimethylamino-1- (4-monofolinophenyl) -butan-1-one, 2,4,6-trimethyl Benzoyldiphenylphosphine oxide, 4-benzoyl-4'-methyldimethylsulfide, 4-dimethylamino benzoic acid, 4-dimethylamino benzoic acid methyl, 4-dimethylamino benzoic acid ethyl, 4-dimethylamino butyl benzoate, 4-dimethylamino 2-ethylhexyl benzoic acid, 4-dimethylamino-2-isoamyl benzoic acid, benzyl-β-methoxyethylacetal, benzyldimethyl ketal, 1-phenyl-1, 2-propanedione-2- (o-ethoxycarbonyl) oxime, o-benzoyl benzoate, 2,4-diethyl thioxanthone, 2-chloro thioxanthone, 2,4-dimethyl thioxanthone, 1 -Chloro-4-propoxy thioxanthone, thioxanthene, 2-chlorothioxanthene, 2,4-diethyl thioxanthene, 2-methylthioxanthene, 2-isopropyl thioxanthene, 2-ethyl Anthraquinone, octamethylanthraquinone, 1,2-benzanthraquinone, 2,3-diphenylanthraquinone, azobis (isobutyro) nitrile, benzoylperoxide, cumeneperoxide, 2-mercaptobenzoimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, 2- (o-chlorophenyl) -4,5-di (m-methoxyphenyl) -imidazolyl dimer, benzophenone, 2-chloro Benzophenone, p, p'-bis (dimethylamino) benzophenone, 4,4'-bis (diethylamino) benzophenone, 4,4'-dichlorobenzophenone, 3,3'-dimethyl-4-methoxy Benzophenone, benzyl, benzoin, benzoin methyl ether, benzoin ethyl ether, benzo Phosphorus isopropyl ether, benzoin isobutyl ether, benzoin butyl ether, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, dichloroacetophenone, trichloroacetophenone , p-tert-butylacetophenone, p-dimethylaminoacetophenone, p-tert-butyltrichloroacetophenone, p-tert-butyldichloroacetophenone, α, α-dichloro-4-phenoxyacetophenone, thioxane Ton, 2-methylthioxanthone, 2-isopropylthioxanthone, dibenzosuberone, pentyl-4-dimethylaminobenzoate, 9-phenylacridine, 1,7-bis- (9- Acridinyl) heptane, 1,5-bis- (9-acridinyl) heptane, 1,3-bis- (9-acridinyl) propane, p-methoxytriazine, 2,4,6-tris (Trichloromethyl) -s-triazine, 2-methyl-4,6-bis (trichloromethyl) -s-triazine, 2- [2- (5-methylfuran-2-yl) ethenyl]- 4,6-bis (trichloromethyl) -s-triazine, 2- [2- (furan-2-yl) Tenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- [2- (4-diethylamino-2-methylphenyl) ethenyl] -4,6-bis (trichloromethyl)- s-triazine, 2- [2- (3,4-dimethoxyphenol) ethenyl] -4,6-bis (trichloromethyl) -s-triazine, 2- (4-methoxyphenyl) -4 , 6-bis (trichloromethyl) -s-triazine, 2- (4-ethoxystyryl) -4,6-bis (trichloromethyl) -s-triazine, 2- (4-n-part Methoxyphenyl) -4,6-bis (trichloromethyl) -s-triazine, 2,4-bis (trichloromethyl) -6- (3-bromo-4-methoxy) phenyl-s-triazine , 2,4-bis (trichloromethyl) -6- (2-bromo-4-methoxy) phenyl-s-triazine, 2,4-bis (trichloromethyl) -6- (3-bromo 4-methoxy) styrylphenyl-s-triazine, 2,4-bis (trichloromethyl) -6- (2-bromo-4-methoxy) styrylphenyl-s-triazine, etc. are mentioned. Can be.

As said pigment, it is C.I. Pigment yellow 11, 24, 31, 53, 83, 99, 108, 109, 139, 150, 151, 154, 167, 180, 185, 193; C.I. Pigment orange 36, 38, 43; C.I. Pigment red 105, 122, 149, 150, 155, 171, 175, 176, 177, 209, 224, 254, 264; C.I. Pigment violet 19, 23, 32, 39; C.I. Pigment blue 1, 2, 15: 1, 15: 2, 15: 3, 16, 22, 60, 66; C.I. Pigment green 7, 36, 37; C.I. Pigment brown 25, 28; C.I. Pigment black 1, 7; And carbon black.

As a material of the pigment dispersion type photosensitive resin composition mentioned above, for example, Unexamined-Japanese-Patent No. 2004-69754, Unexamined-Japanese-Patent No. 11-231523, Unexamined-Japanese-Patent No. 11-84125, Unexamined-Japanese-Patent No. 10- 221843, Japanese Patent Application Laid-Open No. 9-269410, Japanese Patent Application Laid-Open No. 10-90516, and the like. For these photosensitive materials, the removal cleaner can exhibit a sufficient cleaning effect in the present invention.

Hereinafter, the Example of the resin composition removal detergent which concerns on this invention is shown. The following examples are only suitable examples for describing the present invention, and do not limit the present invention.

(Example 1)

As a resin composition removal detergent, a mixed washing liquid of PGMEA: PGME: Sorbetso 100 = 6: 2: 2 (mass ratio) was prepared. The main components of Sorbetso 100 are trimethylbenzene, indane, diethylbenzene, ethyldimethylbenzene, 1-methylpropylbenzene, 2-methylpropylbenzene, ethylmethylbenzene, propylbenzene and 1-methylethylbenzene.

(Example 2)

As a resin composition removal detergent, a mixed washing liquid of PGMEA: PGME: Sorbetso 200 = 6: 2: 2 (mass ratio) was prepared.

(Example 3)

As a resin composition removal cleaning agent, the mixed washing liquid of PGMEA: PGME: toluene = 6: 2: 2 (mass ratio) was prepared.

(Example 4)

As a resin composition removal cleaning agent, the mixed washing liquid of PGMEA: PGME: xylene = 6: 2: 2 (mass ratio) was prepared.

(Example 5)

As a resin composition removal detergent, a mixed washing liquid of PGMEA: PGME: anisole = 6: 2: 2 (mass ratio) was prepared.

(Comparative Example 1)

A washing solution of PGMEA alone was prepared as a resin composition removing detergent.

(Comparative Example 2)

As a resin composition removal detergent, a mixed washing liquid of PGMEA: PGME = 7: 3 (mass ratio) was prepared.

(Comparative Example 3)

As a resin composition removal cleaning agent, the washing | cleaning liquid of sorbose 100 individual was prepared.

The following pipe cleaning test and sedimentation test were carried out using the resin composition removal cleaners of the respective examples and comparative examples, and the respective resin composition removal cleaners were evaluated.

(Pipe cleaning test)

A pigment-dispersed resin composition is attached to the inner surface of the pipette by sucking and discharging the CFPR BK-5005SL (trade name: manufactured by Tokyo Oka Co., Ltd.), a photosensitive resin composition for forming a black matrix pattern, into a 1 ml glass pipette. I was. Subsequently, the pipette was repeatedly washed with 1 ml of each of the above-described removal cleaners, and the degree of washing was visually checked to record how many ml were required for washing. The number of washings was up to 10 times. When it could not wash by 10 times of washing, it was set as "washing impossible". The results are shown in Table 1 below.

(Sedimentation Test)

10 ml of CFPR GH-1004 (trade name: manufactured by Tokyo Oka Co., Ltd.), a green pigment dispersion-type photosensitive resin composition for color filter formation, and 90 ml of the above-described removal cleaners were filled into a glass tube having an inner diameter of 12 mm, and then Left vertically for 3 weeks. After 3 weeks, the mixed solution in the tube was removed and the coagulation sedimentation of the pigment on the inner wall of each glass tube was confirmed. The results are shown in Table 1 below. In the table, the case where there is no coagulation sedimentation is indicated by o, and when coagulation sedimentation is confirmed, it is indicated by x.

Detergent cleaner Piping cleaning test Sedimentation test Example 1 PGMEA: PGME: SORBESO 100 = 6: 2: 2 8ml ○ Example 2 PGMEA: PGME: SORBESO 200 = 6: 2: 2 8ml ○ Example 3 PGMEA: PGME: Toluene = 6: 2: 2 9 ml ○ Example 4 PGMEA: PGME: Xylene = 6: 2: 2 9 ml ○ Example 5 PGMEA: PGME: Anisole = 6: 2: 2 9 ml ○ Comparative Example 1 PGMEA only Not washable × Comparative Example 2 PGMEA: PGME = 7: 3 Not washable × Comparative Example 3 Sorbetso 100 Sole Not washable ×

As apparent from Table 1, it was confirmed that the pigment dispersion type photosensitive resin composition can be effectively washed with a small amount of the removal detergent by using a mixed solution obtained by mixing an aromatic compound with the resin solvent as the removal detergent.

As described above, the resin composition removing cleaner according to the present invention is useful for cleaning and removing the resin composition attached to the surface of the article, and in particular, a pigment dispersion type adhered to the surface of the article such as nozzles, priming rollers and pipes of the resin coating apparatus. It is suitable for a removal detergent for effectively removing the photosensitive resin composition.

The resin composition removal cleaner according to the present invention can efficiently remove the resin composition adhering to the surface of articles such as nozzles, priming rollers, pipes, and the like of the resin coating apparatus. In the resin composition attached to the article, the photosensitive resin composition is difficult to remove, and the pigment dispersion type photosensitive resin composition is difficult to remove, but the removal cleaner of the present invention is based on a resin solvent and contains an aromatic group having 5 or less carbon atoms in the containing alkyl group. By adding a predetermined amount of the compound, the removal performance of the adhesion resin component, especially the pigment dispersion resin component, to the article surface is greatly enhanced. Therefore, the resin composition removal cleaner of the present invention can exert a sufficient cleaning effect even with a small amount of use even for cleaning in a portion where the contact area of the cleaning agent such as a nozzle or a piping system of the coating apparatus, which has conventionally been difficult to remove.

Claims (7)

A resin composition removal and cleaning agent comprising at least one solvent capable of dissolving and removing a fixed resin composition fixed to a surface of an article, and an aromatic compound dispersing a pigment contained in the fixed resin composition. The method of claim 1, The resin composition removal detergent, characterized in that the aromatic compound comprises alkylbenzene. The method of claim 2, The carbon number of the alkyl group in the said alkylbenzene is 3-5, and the content of the said alkylbenzene is 5 mass%-50 mass% with respect to the quantity of the said removal detergent, The resin composition removal detergent characterized by the above-mentioned. The method of claim 1, A resin composition removal and cleaning agent, characterized in that the aromatic compound contains a mixture of two or more kinds of alkylbenzenes, and petroleum oil is used as the alkylbenzene mixture. The method of claim 2, The alkylbenzene further comprises an alkylbenzene having 2 or less carbon atoms in the alkyl group, and the resin composition has a content of 20% by mass to 60% by mass with respect to the total amount of the removal detergent for the alkylbenzene having 2 or less carbon atoms in the alkyl group. Remove cleaner. The method of claim 1, And the aromatic compound is at least one member selected from the group consisting of anisole, toluene, and xylene. The method of claim 1, The solvent is cyclohexanone, propylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, 3-methoxybutyl acetate, methoxypropyl acetate, 3-ethoxypropionate ethyl, ethyl acetate, butyl acetate, propyl acetate, acetic acid Pentyl, hexyl acetate, heptyl acetate, octyl acetate, ethyl lactate, butyl lactate, pentyl lactate, hexyl lactate, heptyl lactate, octyl lactate, acetone, methyl isobutyl ketone, methyl ethyl ketone, 2-heptanone, methanol, ethanol, propanol Butanol, pentanol, hexanol, heptanol, octanol, hexane, heptane, octane, nonan, decane, diethyl ether, cyclohexane, cyclohexanol, dioxane, oxetane, phenol, cresol, xylenol Resin composition removal detergent, characterized in that at least one selected from the group consisting of.