KR20060087919A - Depositing apparatus - Google Patents

Abstract

The present invention relates to a vapor deposition apparatus having a fastening structure capable of easily preventing leakage of metal vapor generated from an evaporation source portion in a fastening structure combining an evaporation source portion and a nozzle portion, and to be deposited on a substrate in an internal space. A crucible with a deposition material and a crucible to fasten the top of the crucible and a crucible cap and a hole formed with holes to allow the deposition material to flow are formed. And a nozzle unit in which two nozzles are formed. In addition, at least one leakage preventing jaw is formed on the fastening surface of the crucible, the crucible cap, and the nozzle portion, and the leakage preventing material is further applied to the fastening surface. Therefore, it is effective to prevent the leakage of steam in the crucible to the outside effectively prevents the process accident.

Evaporation source part, crucible, nozzle part, leakage

Description

Deposition Apparatus

1A is a partial cutaway perspective view showing a conventional deposition window.

FIG. 1B is an enlarged view of the symbol A shown in FIG. 1A.

2 is a partial cutaway perspective view showing a deposition apparatus of the present invention.

FIG. 3 is an enlarged view of the reference sign B shown in FIG. 2 for showing the first embodiment of the present invention.

4 is an enlarged view showing a second embodiment of the present invention.

5 is an enlarged view showing a third embodiment of the present invention.

6 is an enlarged view showing a fourth embodiment of the present invention.

** Explanation of Signs of Major Parts of Drawings **

100 nozzle part

110: nozzle

111: through hole

120: Neck

200: evaporation source

201: interior space

210: Crucible Cap

220: Crucible

300, 310: Leak prevention jaw

400: leakage preventing material

500: confidential means

The present invention relates to a vapor deposition apparatus, and more particularly, to a vapor deposition apparatus having a fastening structure in which a metal vapor generated in an evaporation source portion can easily prevent leakage in a fastening structure combining an evaporation source portion and a nozzle portion. .

In general, the deposition apparatus is used for thin film deposition of various electronic components, and is particularly used for forming thin films of electronic devices such as semiconductors, LCDs, organic field displays, and display devices.

The organic electroluminescent device of the organic light emitting display device is composed of an anode, an organic film, and a cathode that are stacked on a substrate. The organic film includes an organic light emitting layer, in which holes and electrons recombine to form excitons and light is generated. In order to improve the luminous efficiency, holes and electrons should be more smoothly transported to the organic light emitting layer (EML), and for this purpose, an electron transport layer (ETL) may be disposed between the cathode and the organic light emitting layer. A hole transport layer may be disposed between the organic light emitting layer, and a hole injection layer (HIL) may be disposed between the anode and the hole transport layer, and an electron injection layer (EIL) may be disposed between the cathode and the electron transport layer. ) May be arranged.

Typical methods of forming a thin film on a substrate include evaporation, physical vapor deposition (PVD) such as ion-plating and sputtering, and chemical vapor deposition by gas reaction. (CVD) and the like.

Among these, the vacuum vapor deposition method is mainly used for formation in thin films, such as an organic film of an organic electroluminescent element.

As an evaporation source used in the vacuum deposition method, an indirect heating (or induction heating) evaporation source (Effusion Cell) is used. The evaporation source is connected to a nozzle unit capable of moving and discharging metal vapor such as organic or inorganic matter. The structure is shown in FIGS. 1A and 1B.

1A and 1B, the fastening structure of the evaporation source unit and the nozzle unit of the conventional deposition apparatus will be described below.

The conventional deposition apparatus is largely composed of an evaporation source unit 200 for evaporating a material to be deposited on a substrate (not shown), and a nozzle unit 100 for discharging the gas evaporated from the evaporation source unit 200.

The evaporation source unit 200 is a crucible cap having a space formed therein and a crucible cap in which a hole 210a is formed to seal the upper portion of the crucible 220 and communicate with the nozzle unit 100, and a space 201 is formed therein. 210 and the nozzle unit 100 mounted to communicate with the hole 210a of the crucible cap 210 are provided with a through hole 111 communicating with the hole 210a, and a plurality of vapors may be discharged. Nozzles 110 are provided.

In addition, although not shown in the figure, a reaction tank in which a heating coil is installed is provided outside the crucible cap 210 to heat the evaporation material in the crucible 220.

In this case, the crucible 220 and the crucible cap 210 are fastened to each other by being fitted in a fitting form, or are screwed and coupled to each other.

And the nozzle part neck 120 is fastened by the method of attaching and attaching it as mentioned above so that the hole 210a of the crucible cap 210 and the through-hole 111 of the nozzle part 100 may communicate.

In this state, the metal material in the crucible 220 when a metal material including organic or inorganic materials stored in the crucible 220 is heated to a high temperature through a heating coil while the connection source part 200 and the nozzle part 100 are fastened. The state is changed into a vapor in a gaseous state and is discharged to the nozzle 110 of the nozzle unit 100 through the hole 210a and the through hole 111.

At this time, the pressure in the crucible 220 is increased in proportion to the temperature, the space is generated on the fastening surface 10 between the crucible 220 and the crucible cap 210 is a problem that the steam leaks. In addition, the same phenomenon occurs in the fastening surface 10 between the crucible cap 210 and the neck 120 of the nozzle unit 100.

Therefore, if the phenomenon in which the vapor of the metal material deposited on the substrate leaks out of the crucible 220 continues as described above, the discharge pressure discharged to the nozzle unit 100 becomes uneven and eventually causes a process accident. There is a problem.

 Therefore, the present invention has been made to solve the above problems, the object of the present invention is to configure the vapor deposition apparatus by fastening the evaporation source and the nozzle unit, the leakage surface so that the fastening surface between the evaporation source and the nozzle unit can be airtight Deposition apparatus is formed by forming a jaw, and additionally applying a leakage preventing material and screw fastening to strengthen the tightening force, it is possible to easily prevent the vapor of the deposition material in the crucible to leak out of the crucible during the process In providing.

The deposition apparatus of the present invention for achieving the above object is a crucible having a deposition material to be deposited on a substrate in the interior space; A crucible cap screwed to seal the top of the crucible and having a hole formed therein to allow the deposition material to flow; And a nozzle part which is fastened to the crucible cap and through which the deposition material flows through the hole, and has a plurality of nozzles through which the deposition material is discharged.

Herein, the deposition material is preferably any one of an organic material and an inorganic metal.

And the crucible is screwed with the crucible cap, it is preferable that at least one leakage prevention jaw of a predetermined shape is formed on the fastening surface to be fastened.

In addition, the leakage preventing jaw is formed in a protruding shape on the fastening surface of the crucible, and the insertion groove is formed in the fastening surface of the crucible cap so that the leakage preventing jaw is inserted and fastened, or the leakproof jaw is protruding on the fastening surface of the crucible cap. It is preferably formed, the insertion groove is formed on the fastening surface of the crucible so that the leakage preventing jaw is inserted and fastened.

Furthermore, the leakage preventing jaw is preferably in the shape of forming at least one corner.

In addition, it is preferable that the leakage preventing material is further applied to the fastening surface between the crucible and the crucible cap.

Here, the leakage preventing material is preferably graphite.

And it is preferable that the airtight means such as a structure of graphite or ceramic material is further mounted on the outer surface of the leakage preventing jaw.

On the other hand, the crucible cap and the nozzle portion are screw-fastened, at least one leakage preventing jaw of a predetermined shape is formed on the fastening surface to be fastened.

Here, the leak prevention jaw is formed in a protruding shape on the fastening surface of the crucible cap, and an insertion groove is formed in the fastening surface of the nozzle portion so that the leak preventing jaw is inserted and fastened, or the leak preventing jaw is projected in the fastening surface of the nozzle portion. Is formed, it is preferable that the insertion groove is formed in the coupling surface of the crucible cap so that the leakage preventing jaw is inserted.

In addition, the leakage preventing jaw is preferably in the shape of forming at least one corner.

In addition, it is preferable that an airtight means such as a structure made of graphite or ceramic material is additionally installed on the outer surface of the leakage preventing jaw.

Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.

2 is a partially cutaway perspective view showing a deposition apparatus of the present invention, FIG. 3 is an enlarged view of a reference numeral B shown in FIG. 2 for showing a first embodiment of the present invention, and FIG. 4 is a second embodiment of the present invention. 5 is an enlarged view showing a third embodiment of the present invention, Figure 6 is an enlarged view showing a fourth embodiment of the present invention.

First, a first embodiment of the deposition apparatus of the present invention will be described with reference to FIGS. 2 and 3.

In the deposition apparatus of the present invention, the inner space 201 is formed, and a crucible 220 for evaporating with a deposition material to be deposited on a substrate (not shown), and a crucible 220 to seal the top of the crucible 220. ) And a nozzle portion 100 having a neck 120 having a crucible cap 210 to be screwed together with a crucible cap 210 and a through-hole 111 communicating with a hole 210a of the crucible cap 210. It is composed of The nozzle unit 100 has a plurality of nozzles 110 are formed to discharge the deposition material.

On the other hand, although not shown in the figure, a reaction tank (not shown) in which a heating coil (not shown) that is heated to a high temperature to evaporate the deposition material is installed outside the crucible 220.

Here, the crucible 220 and the crucible cap 210 are fastened by screwing to strengthen the fastening force, and at least one leakage preventing jaw 300 is formed on the fastening surface S ′ to which the evaporation material is not leaked to the outside. , Leak prevention jaw 300 has a rectangular shape, is formed in a protrusion shape on the fastening surface (S ') of the crucible 220, fastening of the crucible cap 210 so that the leak prevention jaw 300 is inserted and fixed Insertion groove 211 is formed on the surface (S ').

In addition, the leakage preventing jaw 300 is formed in a protruding shape on the fastening surface (S ') of the crucible cap 210, and inserted into the crucible (220) fastening surface (S') so that the leakage preventing jaw 300 is inserted and fixed. Groove 211 may be formed.

Referring to FIG. 2, the leakage preventing material 400 formed of graphite or the like is additionally applied to the fastening surfaces S and S ′ including the leakage preventing jaw 300.

Here, the fastening surfaces (S, S ') includes a surface (S') formed with a leakage preventing jaw 300, including the surface (S) to be screwed.

Therefore, when the deposition material such as aluminum (Al) stored in the crucible 220 is heated by a heating coil in the reactor outside the crucible 220, the vapor state of the crucible cap 210 is changed to a gaseous state. After flowing to the through hole 111 of the nozzle unit 100 through the nozzle 110 is discharged at a constant pressure.

At this time, it is possible to easily prevent the leakage of steam by the leakage preventing jaw 300 formed on each of the fastening surface (S ') of the crucible 220, the crucible cap 210, and the nozzle portion 100, The leakage preventing material 400 is applied to the fastening surfaces S and S 'including the surface S ′ of the leakage preventing jaw 300 to prevent leakage of steam.

In addition, even when a minute amount of steam leaks through the fastening surfaces (S, S '), there is an effect that can delay the time until the leakage by the leakage prevention jaw 300.

Next, a second embodiment of the present invention will be described with reference to FIG. 4.

The deposition apparatus of the present invention is composed of a crucible 220, a crucible cap 210, and a nozzle part 100, as in the first embodiment, the fastening of each component is a screw fastening, screw fastening surface A plurality of rectangular leakage preventing jaws 300 are formed on the fastening surface S 'except for (S).

In addition, as shown in the first embodiment, the fastening surfaces S and S 'including the plurality of leakage preventing jaws 300 and the surface S' are additionally coated with a leakage preventing member 400 such as graphite and the crucible 220. The vapor deposition state changed into vapor in the c) is prevented from leaking outside the crucible 220.

In addition, as the leak prevention jaw 300 is formed in plural as described above, when the minute amount of steam leaks, it is possible to efficiently delay the time until leakage to proceed the process.

Next, a third embodiment of the present invention will be described with reference to FIG. 5.

In the first and second embodiments, a screw fastening structure of the crucible 220, the crucible cap 210, and the nozzle part 100 as described above is provided, except for the fastening surface S on which the screw is fastened ( S ') one or a plurality of leak prevention jaw 300 is formed, the airtight means 500, such as a structure of graphite or ceramic material is additionally fitted to the outer surface of the leak prevention jaw (300).

In addition, when a plurality of leak prevention jaw 300 is formed as in the second embodiment, the airtight means 500 may be mounted on the outer surface of each leak prevention jaw 300.

In addition, the crucible 220 is further coated with a leakproof material 400 such as graphite on the fastening surfaces S and S 'including the surface S' of the leakage preventing jaw 300 on which the airtight means 500 is mounted. The high temperature steam in the inside can be prevented from leaking to the outside.

Next, a fourth embodiment of the present invention will be described with reference to FIG. 6.

Referring to FIG. 6, as in the first, second, and third embodiments, the shape of the leakage preventing jaw 300 formed on each of the fastening surfaces S ′ is 90 degrees or 90 degrees based on the inner surface of the crucible 220. By forming the following angle is formed in a triangular shape, even if the steam inside the crucible 220 leaks through the fastening surface (S ') can be more efficiently delay the leakage time.

In addition, in such a state, as in the first to third embodiments, the leak prevention material 400 such as graphite may be additionally applied to further prevent the leakage of steam, and the triangular leak prevention jaw 300 may be fastened. It may be formed in plural on the surface S '.

Although not shown in the figure, the leakage of the vapor by applying and fastening the leakage preventing member 400 in a state in which an airtight means such as a graphite or ceramic structure is additionally mounted on the outer surface of the leakage preventing jaw 300. Can be prevented.

Therefore, according to the present invention, in the fastening structure of a deposition source part including a crucible for heating a deposition material such as aluminum to a nozzle part to be supplied to the nozzle part in a vapor state and a nozzle part for discharging steam generated from the deposition source part, the deposition source part By screwing the nozzle unit together with the leak prevention jaw between the fastening stars there is an effect to effectively prevent the leakage of steam in the crucible to the outside to prevent process accidents.

In addition, by further applying a leak prevention material such as graphite to prevent the minute leakage of steam between the fastening surface, it is possible to additionally prevent the leakage of steam.

Claims (14)

A crucible having a deposition material to be deposited on a substrate in an inner space; A crucible cap screwed to seal the upper part of the crucible, a leakage preventing jaw is formed on a fastening surface of the crucible, and a hole formed to allow the deposition material to flow; And The nozzle cap is screwed to the crucible cap, and the leakage preventing jaw is formed on the mating surface of the crucible cap, and a through hole through which the deposition material flows is formed through the hole to discharge the deposition material. Vapor deposition apparatus. The method of claim 1, And the deposition material is any one of an organic material and an inorganic metal. The method of claim 1, The crucible is screwed with the crucible cap, the deposition surface, characterized in that the fastening surface is formed with at least one or more of the leakage preventing jaw of a predetermined shape. The method of claim 1, The leakage preventing jaw is formed in a protruding shape on the fastening surface of the crucible, the deposition apparatus, characterized in that the insertion groove is formed on the fastening surface of the crucible cap so that the leakage preventing jaw is inserted and fastened. The method of claim 1, The leakage preventing jaw is formed in a protrusion shape on the fastening surface of the crucible cap, the deposition apparatus, characterized in that the insertion groove is formed in the fastening surface of the crucible so that the leakage preventing jaw is inserted. The method of claim 1, The leak prevention jaw is a deposition apparatus, characterized in that the shape formed at least one corner. The method of claim 1, Deposition apparatus, characterized in that the airtight means is further mounted on the outer surface of the leakage preventing jaw. The method of claim 1, Deposition apparatus, characterized in that the coupling surface is further coated with a leakage preventing material. The method of claim 8, The leak preventing material is a deposition apparatus characterized in that the graphite (Graphite). The method of claim 1, Wherein the crucible cap and the nozzle portion is screw-fastened, the fastening device characterized in that at least one or more leakage preventing jaw of a predetermined shape is formed on the fastening surface. The method of claim 10, The leak prevention jaw is formed in a protruding shape on the fastening surface of the crucible cap, the deposition apparatus, characterized in that the insertion groove is formed on the fastening surface of the nozzle portion so that the leak prevention jaw is inserted. The method of claim 10, The leakage preventing jaw is formed in a protruding shape on the fastening surface of the nozzle portion, the deposition apparatus, characterized in that the insertion groove is formed in the fastening surface of the crucible cap so that the leakage preventing jaw is inserted and fastened. The method of claim 10, The leak prevention jaw is a deposition apparatus, characterized in that the shape formed at least one corner. The method of claim 10, Deposition apparatus, characterized in that the airtight means is further mounted on the outer surface of the leakage preventing jaw.

Images