KR20060082917A - Inspection device - Google Patents

Abstract

The present invention relates to an inspection apparatus, and more particularly, to an inspection apparatus for a substrate for a display device.

An apparatus for inspecting a substrate for a display device includes a camera, a data processor connected to the camera, and a monitor connected to the data processor,

The data processing unit coordinates the defective portion and displays it on the monitor when the defective portion is present on the substrate, and enlarges the peripheral area of the defective portion on the monitor.

In this way, it is possible to reduce the time for visual inspection by accurately identifying a defective part or a defective location in a short process time, and to determine a good or bad product more accurately. Further, by accumulating data on defect sites, it is possible to make a database of defect causes and patterns.

Display, Substrate, Inspection, CCD, Camera, Pop-up Window, Data

Description

Inspection device {INSPECTION DEVICE}

1 is a block diagram of a display device according to an exemplary embodiment of the present invention.

2 is an equivalent circuit diagram of one pixel of a liquid crystal display according to an exemplary embodiment of the present invention.

3 is a block diagram of an inspection apparatus according to an embodiment of the present invention.

4A and 4B are examples of screens displayed on the inspector monitor shown in FIG.

The present invention relates to an inspection apparatus.

Recently, organic electroluminescence display (OLED), plasma display panel (PDP), liquid crystal display (LCD), instead of heavy and large cathode ray tube (CRT) Flat panel display devices such as are being actively developed.

PDP is a device for displaying characters or images using plasma generated by gas discharge, and the organic EL display device displays characters or images by using electroluminescence of specific organic materials or polymers. The liquid crystal display device applies an electric field to a liquid crystal layer interposed between two display panels, and adjusts the intensity of the electric field to adjust a transmittance of light passing through the liquid crystal layer to obtain a desired image.

Among such flat panel display devices, for example, a liquid crystal display and an organic EL display device may turn on / off a switching element of a pixel by emitting a gate signal to a pixel including a switching element, a display panel provided with a display signal line, and a gate line among the display signal lines. A gate driver to be turned off, a data driver to apply a data voltage to the data lines of the display signal lines, and a signal controller to control them.

On the other hand, such a flat panel display device is completed by forming a display signal line and a switching element on a mother glass (hereinafter referred to as a substrate) and separating the cells into individual cells.

At this time, before forming the display signal line, a process of inspecting whether foreign matter such as particles or dust is stuck on the substrate is performed.

This inspection is performed by transferring the substrate using a transfer unit such as a conveyor, photographing the surface of the substrate with a CCD camera positioned on the transfer unit, and sending the captured data to the inspector. At this time, the CCD camera sends the data regarding the defective part such as the position of the foreign object to a data processing unit such as a computer, and the data processing unit processes the data about the coordinates like a map and sends it to the monitor of the inspector. The inspector then roughly identifies the defective location and looks at the naked eye to determine whether it is good or bad.

However, this inspection method has a limitation when it is necessary to inspect several substrates in a short process time. For example, in the case of the liquid crystal display device, the 7th generation line is currently in operation, and the size of the substrate used for the 7th generation line is 1870 mm wide and 2200 mm long. There is a further limit to visually inspecting large substrates in a short process time of 2300 mm.

Accordingly, the technical problem to be achieved by the present invention is to provide a test apparatus that can solve the problems of the prior art.

An apparatus for inspecting a substrate for a display device according to an embodiment of the present invention for achieving the technical problem, comprising a camera, a data processing unit connected to the camera, and a monitor connected to the data processing unit, the data The processing unit coordinates the defective portion and displays it on the monitor when the defective portion is present on the substrate, and enlarges the peripheral area of the defective portion on the monitor.

In this case, the data processor may display a peripheral area of the defect portion in the form of a pop-up window, and the pop-up window may be generated automatically or manually.

The camera may be a charge coupled device (CCD) camera, and the data processor may store data about a peripheral area of the defective portion.                     

DETAILED DESCRIPTION Embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the present invention.

In the drawings, the thickness of layers, films, panels, regions, etc., are exaggerated for clarity. Like parts are designated by like reference numerals throughout the specification. When a portion of a layer, film, region, plate, etc. is said to be "on top" of another part, this includes not only when the other part is "right on" but also another part in the middle. On the contrary, when a part is "just above" another part, there is no other part in the middle.

A display device according to an embodiment of the present invention will now be described in detail with reference to the accompanying drawings.

1 is a block diagram of a display device according to an exemplary embodiment of the present invention, and FIG. 2 is an equivalent circuit diagram of one pixel of a liquid crystal display according to an exemplary embodiment of the present invention.

As shown in FIG. 1, a display device according to an exemplary embodiment of the present invention includes a liquid crystal panel assembly 300, a gate driver 400, a data driver 500, and a data driver 500 connected thereto. The gray voltage generator 800 connected to the signal control unit 600 to control them.

The display panel unit 300 includes a plurality of display signal lines G ₁ -G _n , D ₁ -D _m , and a plurality of pixels arranged in a substantially matrix form when viewed in an equivalent circuit.

The display signal lines G ₁ -G _n and D ₁ -D _m are a plurality of gate lines G ₁ -G _n for transmitting a gate signal (also called a “scan signal”) and a data signal line or data for transmitting a data signal. Line D ₁ -D _m . The gate lines G ₁ -G _n extend substantially in the row direction and are substantially parallel to each other, and the data lines D ₁ -D _m extend substantially in the column direction and are substantially parallel to each other.

Each pixel includes a switching element Q connected to the display signal lines G ₁ -G _n , D ₁ -D _m , and a pixel circuit PX connected thereto.

The switching element Q is a three-terminal element whose control terminal and input terminal are connected to the gate line G ₁ -G _n and the data line D ₁ -D _m, respectively, and the output terminal is the pixel circuit PX. Is connected to. In addition, the switching element Q is preferably a thin film transistor, and particularly preferably comprises amorphous silicon.

In the case of a liquid crystal display, which is a representative example of a flat panel display, the lower panel 100, the upper panel 200, and a liquid crystal layer 3 therebetween are included as shown in FIG. 2. The display signal lines G ₁ -G _n , D ₁ -D _m and the switching elements Q are provided on the lower display panel 100. The pixel circuit PX of the liquid crystal display includes a liquid crystal capacitor C _LC and a storage capacitor C _ST connected to the switching element Q. The holding capacitor C _ST can be omitted as necessary.

The liquid crystal capacitor C _LC has two terminals, the pixel electrode 190 of the lower panel 100 and the common electrode 270 of the upper panel 200, and the liquid crystal layer 3 between the two electrodes 190 and 270. It functions as a dielectric. The pixel electrode 190 is connected to the switching element Q, and the common electrode 270 is formed on the front surface of the upper panel 200 and receives a common voltage V _com . Unlike in FIG. 2, the common electrode 270 may be provided in the lower panel 100. In this case, both electrodes 190 and 270 may be linear or rod-shaped.

The storage capacitor C _ST is formed by overlapping a separate signal line (not shown) and the pixel electrode 190 provided on the lower panel 100, and a predetermined voltage such as a common voltage V _com is applied to the separate signal line. Is approved. However, the storage capacitor C _ST may be formed such that the pixel electrode 190 overlaps the front end gate line directly above the insulator.

On the other hand, in order to implement color display, each pixel should be able to display color, which is provided with a color filter 230 of three primary colors, for example, red, green, or blue, in a region corresponding to the pixel electrode 190. It is possible by doing. In FIG. 2, the color filter 230 is formed on the upper panel 200. Alternatively, the color filter 230 may be formed above or below the pixel electrode 190 of the lower panel 100.

Polarizers (not shown) for polarizing light are attached to outer surfaces of at least one of the two display panels 100 and 200 of the display panel unit 300 of the liquid crystal display device.

Referring back to FIG. 1, the gray voltage generator 800 generates one or two gray voltages related to the luminance of the pixel. If there are two sets, one of the sets has a positive value for the common voltage (V _com ) and the other set has a negative value.

The gate driver 400 is connected to the gate lines G ₁ -G _n of the display panel 300 to gate a gate signal formed by a combination of a gate on voltage V _on and a gate off voltage V _off from the outside. Applies to lines G ₁ -G _n . The gate driver 400 includes a plurality of stages arranged substantially in a row as a shift register.

The data driver 500 is connected to the data lines D ₁ -D _m of the display panel 300 to select the gray voltage from the gray voltage generator 800 and apply the gray voltage to the pixel as a data signal.

The signal controller 600 controls operations of the gate driver 400 and the data driver 500.

The display operation of such a display device will now be described in more detail.

The signal controller 600 inputs an input control signal for controlling the RGB image signals R, G, and B and their display from an external graphic controller (not shown), for example, a vertical sync signal V _sync and a horizontal sync signal. (H _sync ), a main clock (MCLK), a data enable signal (DE) is provided. The signal controller 600 generates a gate control signal CONT1 and a data control signal CONT2 based on the input control signal and the input image signals R, G, and B, and generates the image signals R, G, and B. After appropriately processing the display panel 300 according to the operating conditions, the gate control signal CONT1 is sent to the gate driver 400, and the data control signal CONT2 and the processed image signal DAT are transferred to the data driver 500. Export.

The gate control signal (CONT1) is the gate-on start vertical sync indicating the start of output of a voltage (V _on) signal (STV), a gate-on voltage gated clock signal that controls the output timing of the (V _on) (CPV) and the gate An output enable signal OE or the like that defines the duration of the on voltage V _on .

The data control signal CONT2 is a load signal LOAD and a data clock signal for applying a corresponding data voltage to the horizontal synchronization start signal STH indicating the start of input of the image data DAT and the data lines D ₁ -D _m . (HCLK). In the case of the liquid crystal display or the like shown in FIG. 2, the polarity of the data voltage with respect to the common voltage V _com (hereinafter referred to as "polarization of the data voltage" by reducing the "polarity of the data voltage with respect to the common voltage") is inverted. The inversion signal RVS may also be included.

The data driver 500 sequentially receives the image data DAT corresponding to one row of pixels according to the data control signal CONT2 from the signal controller 600, and among the gray voltages from the gray voltage generator 800. By selecting the gray scale voltage corresponding to each image data DAT, the image data DAT is converted into a corresponding data voltage and applied to the data lines D ₁ -D _m .

The gate driver 400 applies the gate-on voltage V _on to the gate lines G ₁ -G _n in response to the gate control signal CONT1 from the signal controller 600, thereby applying the gate lines G ₁ -G _n. Turn on the switching element (Q) connected to. The data voltage supplied to the data lines D ₁ -D _m is applied to the corresponding pixel through the turned-on switching element Q.

In the case of the liquid crystal display shown in FIG. 2, the difference between the data voltage applied to the pixel and the common voltage V _com is represented as the charging voltage of the liquid crystal capacitor C _LC , that is, the pixel voltage. The liquid crystal molecules vary in arrangement depending on the magnitude of the pixel voltage. As a result, the polarization of light passing through the liquid crystal layer 3 changes. The change in polarization is represented by a change in transmittance of light by a polarizer (not shown) attached to the display panels 100 and 200.

After one horizontal period (or “1H”) (one period of the horizontal sync signal H _sync , the data enable signal DE, and the gate clock CPV), the data driver 500 and the gate driver 400 are next. The same operation is repeated for the pixels in the row. In this manner, the gate-on voltages V _{on are} sequentially applied to all the gate lines G ₁ -G _n during one frame to apply data voltages to all the pixels. In the case of the liquid crystal display shown in FIG. 2, in particular, when one frame ends, the next frame starts and an inversion signal applied to the data driver 500 such that the polarity of the data voltage applied to each pixel is opposite to the polarity of the previous frame. The state of (RVS) is controlled ("frame inversion"). At this time, the polarity of the data voltage flowing through one data line is changed according to the characteristics of the inversion signal RVS even in one frame (eg, "row inversion", "point inversion"), The polarities can also be different (eg "invert columns", "invert points")

Next, an inspection apparatus for a display device according to an exemplary embodiment of the present invention will be described in detail with reference to FIGS. 3 to 4B.

3 is a block diagram of a test apparatus according to an exemplary embodiment of the present invention, and FIGS. 4A and 4B are examples of screens displayed on the tester monitor shown in FIG. 3.

3 to 4B, the inspection apparatus according to the exemplary embodiment includes a CCD camera 31, a data processor 32, and an inspector monitor 33.

The charge coupled device (CCD) cameras 31 are arranged in a line and photograph the passing substrates GLS in predetermined units.

The data processing unit 32 receives data from the CCD camera unit 31 and coordinates the defective position to the inspector monitor 33 when there is a defect such as dust or particles.

The examiner monitor 33 displays the screens shown in FIGS. 4A and 4B. A plurality of substrates GLS appear on the inspector monitor 33, and in the case of a defect therein, the position is indicated by an x mark or the like as shown.

In particular, the data processing unit 32 shows the defective position in more detail by using a pop-up window (puw) as shown in FIG. 4B. That is, the defective position is enlarged through a pop-up window (puw) as well as a tick mark under it to display a more accurate position.

Such an operation may be performed by an inspector by using a mouse or the like, or may be automatically performed. In particular, in the case of automatic operation, a record of the defect may be left and a pop-up window may automatically pop up when the same defect is repeated a predetermined number of times.

In addition, when generating a pop-up window (puw), it is possible to cut out a certain size around the defective location. For example, when a defective position is (a, b), it can cut out by setting a predetermined range to (a-x, b-y)-(a + x, b + y).                     

In addition, the data processing unit 32 stores the data from the CCD camera 31 and the substrate unique number into a database. In this case, even when a failure occurs in a display device that is made later, the cause and pattern of the failure may be verified using data stored on the failure, and the inspector may be used as a standard corresponding to the failure.

In this case, when the volume of data increases, the amount of data may be reduced by storing some data on the defective portion.

In this way, it is possible to reduce the time for visual inspection by accurately identifying a defective part or a defective location in a short process time, and to determine a good or bad product more accurately. Further, by accumulating data on defect sites, it is possible to make a database of defect causes and patterns.

Although the preferred embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements of those skilled in the art using the basic concepts of the present invention defined in the following claims are also provided. It belongs to the scope of right.

Claims (5)

An apparatus for inspecting a substrate for a display device, camera, A data processor connected to the camera, and A monitor connected to the data processor Including, The data processing unit coordinates the defective portion and displays it on the monitor when the defective portion is present on the substrate, and enlarges the peripheral area of the defective portion to display on the monitor. Inspection device. In claim 1, And the data processing unit displays a peripheral area of the defective portion in the form of a pop-up window. In claim 2, The pop-up window is automatically or manually generated. In claim 1, And the camera is a charge coupled device (CCD) camera. In claim 1, And the data processing unit stores data relating to a peripheral area of the defective portion.

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