KR20060055703A - Substrates alignment apparatus - Google Patents

Abstract

The present invention provides a substrate joining machine, comprising: a chamber in which substrates are bonded together; A stage having upper and lower portions provided in upper and lower sides of the chamber and configured to load a substrate; UVW drive shaft for transmitting the driving force to the upper end is coupled to the lower stage to move the stage in the X, Y, θ direction; A UVW driving piece coupled to a lower end of the UVW driving shaft to move the UVW driving shaft in the X, Y, and θ directions by a moving means; A bellows having an upper end fixed to a lower chamber in a state in which the UVW drive shaft is accommodated therein; An intermediate connection member interposed between the lower end of the bellows and the UVW driving piece, the upper end of which is coupled to the lower end of the bellows, and the lower end of the bellows is located close to the UVW driving piece; It is disposed between the intermediate connecting member, the lower end is coupled to the UVW driving piece and interlocked with the UVW driving piece, the upper end is inserted into the concave portion of the circumferential surface of the intermediate connecting member by the appropriate position in a state of airtightness is maintained It provides a substrate bonder, characterized in that consisting of;

Board Bonder, Vehicle, UVW Drive Shaft, Bellows, Intermediate Connection, Interlocking, UVW Driven, Airtight, Align

Description

Substrate alignment apparatus

1 is a cross-sectional view showing a substrate aligning means provided in a conventional substrate joining machine.

FIG. 2 is an enlarged view of the substrate aligning means of FIG. 1.

3 is a schematic view showing a state in which the above-described substrate aligning means of the substrate combiner is moved by the moving means.

Figure 4 is a cross-sectional view showing the substrate alignment means provided in the substrate combiner according to an embodiment of the present invention.

FIG. 5 is an enlarged view of the substrate aligning means of FIG. 4.

<Explanation of symbols for the main parts of the drawings>

110: chamber 116, 118: upper, lower stage

130: UVW drive unit 132: UVW drive shaft

134: bellows 138: intermediate connecting member

144: interlocking members 150, 152, 154: moving means in the X, Y, θ direction

The present invention relates to a substrate combiner, and more particularly, to a substrate combiner provided with substrate alignment means in a lower stage on which a substrate is seated.

As the information society develops, the demand for display devices is increasing in various forms, and in recent years, various flat panel display devices such as liquid crystal devices (LCDs) and plasma display panels (PDPs) are utilized. Among the devices, LCD is currently being used most frequently as a substitute for CRT (Cathode Ray Tube) for mobile image display because of its excellent image quality and light weight, thinness, and low power consumption. In addition to the mobile use, various developments have been made for televisions and monitors for receiving and displaying broadcast signals.

A typical substrate joining machine is composed of a frame forming an outer appearance, a stage portion attaching a substrate, a chamber portion which is a space for bonding the substrate, and moving means for driving the chamber portion and the stage portion.

Here, the adsorption process attaches the color filter substrate to the upper stage installed in the chamber by the loading means using a vacuum chuck or the like, and attaches the TFT array substrate to the lower stage.

Since the structure of the substrate bonding machine corresponds to a structure generally used in a liquid crystal display device manufacturing process, the overall structure is omitted and only the structure of the stage in the surface plate will be described.

As shown in FIG. 1, the conventional substrate joining machine is provided with upper and lower stages 16 and 18 on the upper and lower sides of the chamber 10 including the upper and lower chambers 12 and 14. Two substrates (TFT array substrate and color filter substrate: 20) are horizontally disposed on the stages 16 and 18, and are bonded up and down.

Here, an alignment process by alignment means for aligning the substrate 20 disposed on the lower stage 18 to the correct position before the bonding of the substrate 20 is performed, and the substrate 20 described above is included. ), The moving means 40, 42, 44 for moving the arranging means for arranging the lower stage 18 in the lower side of the lower stage 18, in the X direction, the Y direction, and the? 22) is provided.

As shown in FIG. 2, the above-mentioned alignment means penetrates through the center of the lower chamber 14 so that an upper end thereof is fastened to the bottom of the lower stage 18 provided in the chamber 10. UVW drive shaft 32 which transmits the driving force in the X, Y, θ direction and the lower end of the above-described UVW drive shaft 32 is fastened to provide a UVW drive shaft 32 in the X, Y, θ direction UVW drive The piece 30 and the bellows 34 fixed to the lower part of the lower chamber 14 and the UVW drive piece 30 in the state which accommodated the UVW drive shaft 32 mentioned above inside. In addition, the bellows support member 36 having a disk-shaped bellows support member 36 which is fastened by bolts to the upper end and the lower end of the bellows 34 so that the above-described bellows 34 can be easily installed. The airtight member O which maintains airtightness is provided in the state in which the lower surface and the upper surface of the UVW drive piece 30 were interrupted. Here, the above-mentioned airtight member O is an O-ring.

The above-described moving means 40, 42, 44 are carried out in contact with the UVW drive piece 30 provided below the alignment means to move the above-described alignment means in the X, Y, and θ directions, and the X direction The movement means 40, the Y direction movement means 42, and the (theta) direction movement means 44 are comprised. Although the above-described moving means 40, 42, 44 are not shown in the drawings, the cam eccentrically driven by the cam driving method is brought into contact with the above-described UVW driving piece 30 to drive the above-mentioned X-direction moving means 40. When it moves in the X direction and drives the above-described Y direction moving means 42, it moves in the Y direction, and when the above-mentioned [theta] direction moving means 44 is driven, the center is rotated from the starting point.

Here, the above-mentioned X-direction moving means 40 is provided at one corner of the UVW driving piece 30 as shown in FIG. 3, and the above-mentioned Y-direction moving means 42 is the above-mentioned X-direction moving means ( 40 is provided at one corner of the front surface of the UVW driving piece 30 orthogonal to each other, and the above-described θ direction moving means 44 is provided at the other corner portion facing the X direction moving means 40 in the diagonal direction. do.

However, the bellows 34 in which the upper and lower ends of the bellows 34 are fixed to the lower chamber 14 and the UVW driving piece 30, respectively, is provided with the above-described UVW driving piece 30 moving in the X, Y, θ directions. 44, the above-described bellows 34 is aligned at both ends of the bellows 34 in the X, Y, and θ directions, so that the torsional stress is concentrated on the bellows 34 during rotation. There was a problem that the bellows 34 is broken.

The present invention has been made in order to solve the above problems, the object is to change the coupling structure of the bellows in the process of moving in the θ direction of the X, Y, θ direction to align the substrate, the bellows is broken by torsion It is to provide a substrate bonder that can be prevented from becoming.

In order to achieve the above object, the present invention provides a substrate joining machine, comprising: a chamber in which a substrate is bonded; A stage having upper and lower portions provided in upper and lower sides of the chamber and configured to load a substrate; UVW drive shaft for transmitting the driving force to the upper end is coupled to the lower stage to move the stage in the X, Y, θ direction; A UVW driving piece coupled to a lower end of the UVW driving shaft to move the UVW driving shaft in the X, Y, and θ directions by a moving means; A bellows having an upper end fixed to a lower chamber in a state in which the UVW drive shaft is accommodated therein; An intermediate connection member interposed between the lower end of the bellows and the UVW driving piece, the upper end of which is coupled to the lower end of the bellows, and the lower end of the bellows is located close to the UVW driving piece; It is disposed between the intermediate connecting member, the lower end is coupled to the UVW driving piece and interlocked with the UVW driving piece, the upper end is inserted into the concave portion of the circumferential surface of the intermediate connecting member by the appropriate position in a state of airtightness is maintained The interlocking member is configured to be connected to move the X, Y, and θ directions of the moving means to provide a driving force to the alignment means for moving and aligning the substrate in the X, Y, and θ directions when the substrates are bonded. When the lower stage is rotated in the θ direction by the moving means, the bellows fixed to the lower chamber and the UVW driving piece are twisted, and the intermediate connecting member fixed to the lower end of the bellows is hermetically maintained in the airtight state. It is preferable to rotate by the amount of torsion along the original, so that the torsional stress is concentrated on the bellows.                     

In addition, the movement means for providing a driving force to the UVW drive piece in the present invention, X direction movement means, Y direction movement means and θ direction movement means, the X direction movement means is provided on one side of the UVW drive piece The Y-direction moving means is provided on one side of the UVW driving piece orthogonal to the X-direction moving means, and the θ-direction moving means is a diagonal of the X-direction moving means so as to rotate about the center of the UVW driving piece as a starting point. By being provided on the other side opposite to the direction, it is preferable to move by a predetermined position in the X, Y and θ directions by the X, Y and θ direction moving means for providing a driving force to the above-described array stage means.

In addition, the intermediate connecting member in the present invention, the first through the inside, the first intermediate connecting member bent outward; And a second intermediate connecting member fastened in a state of interfering with an airtight member at a lower end of the first intermediate connecting member, thereby separating the aforementioned connecting member into a first intermediate connecting member and a second intermediate connecting member to protrude inwardly. The upper and lower surfaces are preferably interlocked members provided with an airtight member.

In addition, in the present invention, by providing an airtight member interposed between the groove portion of the intermediate connecting member and the interlocking member intervening in the groove portion of the intermediate connecting member to maintain the airtight, the intermediate connecting member intervenes therebetween. It is preferable to maintain the airtight by interposing the airtight member in the spaced apart from the interlocking member and to rotate the fine amount along the soft airtight member in the airtight state when the intermediate connecting member is rotated by a predetermined θ.                     

Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings.

As shown in FIG. 4, the substrate joining device of the present invention includes upper and lower stages 116 and 118 inside and below the chamber 110 including the upper chamber 112 and the lower chamber 114, respectively. The two substrates (TFT array substrate and color filter substrate: 120) are adsorbed and arranged horizontally on the upper and lower stages 116 and 118, and the substrates 120 are vertically bonded.

Here, an alignment process by alignment means for aligning the substrate 120 disposed on the lower stage 118 to the correct position before the bonding of the substrate 120 is performed, and the substrate 120 described above is included. Moving means 150, 152 for providing power to move the arranging means for arranging the lower stage 118 in the X direction, the Y direction and the? 154 is provided in the base 122.

As shown in FIG. 4, the alignment means includes a UVW driving piece 130, a UVW driving shaft 132, a bellows 134, a bellows supporting member 136, an intermediate connecting member 138, It consists of the interlocking member 144 and the airtight member O, and preferably consists of two pairs.

The above-described UVW drive piece 130 is fastened to the lower end of the above-described UVW drive shaft 132, the X, Y, θ direction moving means 150 to transfer the driving force to the UVW drive shaft 132 in the X, Y, θ direction , 152, 154 are provided in contact with both side walls and the front side wall, respectively.

The UVW drive shaft 132 described above is fastened to the bottom of the lower stage 118 provided inside the chamber 110 through the central portion of the lower chamber 114 described above, and the lower stage 118 X. The driving force of the moving means 150, 152, 154 in the X, Y, θ direction in the Y, θ direction.

The bellows 134 is fixed to the lower surface of the lower chamber 114 and the upper surface of the UVW driving piece 130 in a state in which the above-described UVW driving shaft 132 is accommodated therein, and is fixed because it is formed of a flexible material. The disk-shaped bellows support members 136 having a central portion penetrated at the upper and lower ends thereof are provided to prevent damages and to easily fix them.

The above-described intermediate connecting member 138 is composed of a first intermediate connecting member 140 and a second intermediate connecting member 142, the first intermediate connecting member 140 described above is the outer side of the upper end of the hollow pipe The bellows support member 136 is coupled to the upper surface by a bolt in a bent shape, and the second intermediate connection member 142 described above can be coupled to the lower end of the first intermediate connection member 140 described above. The airtight member O which maintains airtightness in the contact surface of the 2nd intermediate connection member 142 fastened by the bolt at the lower end of the above-mentioned 1st intermediate connection member 140 in the shape corresponding to is intervened.

The reason for separating the above-described intermediate connecting member 138 into the first and second intermediate connecting members 140 and 142 is that the middle portion of the circumferential surface of the interlocking member 144 is smaller in diameter than both edge portions thereof. This is because the diameter of the installation portion must be smaller than the outer diameter of the intermediate connecting member 138 in order to be installed at the small diameter portion, so that one of the two ends of the large diameter must be separated. On the other hand, the above-described intermediate connecting member 138 is not fixed to the UVW driving piece 130 is located close to each other to have individuality.                     

The interlocking member 144 described above is located at a central portion having a smaller diameter among the circumferential surfaces of the intermediate connecting member 138, and the shape of the interlocking member 144 is a disc shape in which a central portion penetrates and an upper end thereof is bent inwardly. Since the height of the recess is smaller than the height of the recessed portion of the intermediate connecting member 138, a gap that can be moved up and down by an appropriate position is generated during the intervention, so that the airtight oil (O) on the upper and lower surfaces can be maintained to enter the gap. It is provided.

Here, the interlocking member 144 described above is fastened to the UVW driving piece 130 by a bolt at the lower side of the UVW driving piece 130.

The above-mentioned airtight member O is an O-ring, and the provided position is a contact surface of the upper bellows support member 136 fastened to the bottom of the lower chamber 114 and the lower bellows support member 136. The contact surface with the first intermediate connection member 140 fastened to the bottom surface, the contact surface with the second intermediate connection member 142 fastened to the bottom surface of the first intermediate connection member 140 described above, and the UVW driving piece 130 described above. ) Is provided on the contact surface of the upper surface of the) and the lower surface of the interlocking member 144 described above to maintain airtightness on the contact surface.

Meanwhile, the airtight member O provided between the upper and lower gaps with the interlocking member 144 intervened in the intermediate connecting member 138 described above among the above airtight members O maintains a vacuum state by the gap. In addition, when the intermediate connecting member 138 rotates by an appropriate fine angle θ, the intermediate connecting member 138 rotates along the airtight member O to maintain airtightness. Here, the airtight member O interposed between the gap with the interlocking member 144 intervened in the intermediate connecting member 138 is characterized in that the intermediate connecting member 138 rotating in the θ direction slides by a fine angle. Apply fluorine-based grease to reduce friction.                     

Here, the above-described X, Y, θ direction moving means 150, 152, 154 is a cam driving method, and is not limited to this, various modifications can be made to the moving means for providing straightness, the UVW driving piece 130 described above The spring is provided as a restoring means for rotating the eccentric cams contacting at three points of) to provide restoring force on both sides of the moving means 150, 152, and 154 in the X, Y, and θ directions with the movement distance. .

Therefore, in order to precisely bond the substrate 120 disposed on the lower stage 118 of the substrate combiner according to the present invention, the alignment process in the X, Y, and θ directions may be performed as shown in FIGS. 4 and 5. Although the substrate 120 is disposed on the stage 116 and the lower stage 118, a process of aligning the substrate 120 mounted on the lower stage 118 will be described.

First, the substrate 120 is adsorbed to the lower stage 118 provided inside the chamber 110 by an external transfer means (not shown in the drawing), and is arranged on the array means provided below the lower stage 118. The substrate 120 is aligned.

Here, the UVW driving shaft 132 coupled to the bottom surface of the central portion of the lower stage 118 when the above-described substrate 120 is aligned in the θ direction of the X, Y, θ direction to align the lower stage 118 is mounted UVW X, Y, θ direction moving means fixed to the drive piece 130 and provided in contact with the three points of the UVW drive piece 130 described above to move the UVW drive piece 130 in the X, Y, θ directions ( Of the 150, 152 and 154, the θ direction moving means 154 is operated to rotate in the θ direction from the center of the UVW driving piece 130, UVW provided between the lower chamber 114 and the UVW driving piece 130 The bellows 134 wrapped to prevent the exposure of the drive shaft 132 is rotated.

That is, the bellows support member 136 provided at the lower end of the bellows 134 and the bellows support member 136 are coupled to the lower surface of the bellows support member 136. It is located close to the piece 130 and fixed to the UVW driving piece 130 in a state in which the interlocking member 144 intervened in the groove portion formed on the outer circumferential surface of the intermediate connecting member 138.

At this time, the airtight member O is interposed between the upper and lower surfaces of the groove portion of the intermediate connecting member 138 and the upper and lower surfaces of the interlocking member 144 to maintain the airtightness and at the same time, the airtight member O for a predetermined length or a predetermined angle. When the bellows 134 is rotated so that the bellows 134 rotates, the intermediate connecting member 138 provided below the bellows 134 also rotates corresponding to the bellows 134. The intermediate connecting member 138 is described above. Since the inner end of the) is rotated by the airtight member O in a state where the airtight is maintained, the bellows 134 is prevented from being damaged when the bellows 134 is twisted.

The substrate joining device of the present invention moves in the θ direction in the process of arranging the alignment means provided in the stage on which the substrate is seated by moving the substrate in the X, Y, θ directions by the X, Y, θ direction moving means. When the upper end of the bellows provided between the chamber lower part and the UVW driving piece to maintain airtightness is fixed to the bottom of the chamber and connects the intermediate connecting member to the lower end, and is intervened in the groove of the circumferential surface of the intermediate connecting member described above. The interlocking member is provided in a maintained state, and the intermediate connecting member provided in the state interposed on the inner side of the interlocking member can be rotated along the airtight member, thereby preventing the damage due to the concentration of torsional stress on the bellows.

Claims (5)

In the substrate adhering machine, A chamber in which the substrate is bonded together; A stage having upper and lower portions provided in upper and lower sides of the chamber and configured to load a substrate; UVW drive shaft for transmitting the driving force to the upper end is coupled to the lower stage to move the stage in the X, Y, θ direction; A UVW driving piece coupled to a lower end of the UVW driving shaft to move the UVW driving shaft in the X, Y, and θ directions by a moving means; A bellows having an upper end fixed to a lower chamber in a state in which the UVW drive shaft is accommodated therein; An intermediate connection member interposed between the lower end of the bellows and the UVW driving piece, the upper end of which is coupled to the lower end of the bellows, and the lower end of the bellows is located close to the UVW driving piece; It is disposed between the intermediate connecting member, the lower end is coupled to the UVW driving piece and interlocked with the UVW driving piece, the upper end is inserted into the concave portion of the circumferential surface of the intermediate connecting member by the appropriate position in a state of airtightness is maintained Substrate bonder, characterized in that consisting of; interlocking member connected to be movable. The method of claim 1, Moving means for providing a driving force to the UVW drive piece, X direction moving means, Y direction moving means and θ direction moving means, The X-direction moving means is provided on one side of the UVW drive piece, The Y direction moving means is provided on one side of the UVW driving piece orthogonal to the X direction moving means, The θ direction moving means is provided on the other side facing the diagonal direction of the X direction moving means to rotate the center of the UVW driving piece as a starting point. The method of claim 1 or 2, wherein the intermediate connecting member, A first intermediate connecting member penetrating the inside and the upper end of which is bent outwardly; And a second intermediate connecting member fastened in a state interposed between an airtight member at a lower end of the first intermediate connecting member. The method of claim 3, wherein And an airtight member interposed between the groove portion of the intermediate connecting member and the interlocking member interposed between the groove portion of the intermediate connecting member to maintain the airtightness. The method of claim 3, wherein And a disk-shaped bellows support member is further provided on upper and lower ends of the bellows.

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