KR20060052588A - A flash discharge lamp and a light energy irradiation apparatus - Google Patents

Abstract

Provided are a flash discharge lamp which has increased ultraviolet light radiation, particularly ultraviolet light radiation having a wavelength of 200 to 400 nm, and a light energy irradiation apparatus using the same.

The flash discharge lamp (HFL) has a translucent and long airtight container (SE), a pair of electrodes (E, E) and krypton (Kr), which are sealed and mounted inside both ends of the airtight container (SE). It contains xenon (Xe), the partial pressure ratio P (%) of krypton to krypton and xenon is composed of a rare gas satisfying the following equation, and is sealed in the airtight container SE A discharge medium which emits light when discharged is provided.

70≤P≤98

Description

A flash discharge lamp and a light energy irradiation apparatus}

BRIEF DESCRIPTION OF THE DRAWINGS The front view which shows one form for implementing the flash discharge lamp of this invention.

2 is an enlarged cross-sectional view of a state similarly excluding a trigger electrode.

Fig. 3 is a graph showing the spectral distribution curve of the embodiment in the flash discharge lamp of the present invention.

4 is a graph showing a spectral distribution curve of Comparative Example 1. FIG.

5 is a graph showing a spectral distribution curve of Comparative Example 2. FIG.

Fig. 6 is a graph showing the relationship of ultraviolet light emission intensity to change in Kr partial pressure ratio in mixed rare gas;

7 is a graph showing a relationship between a lamp current density and an ultraviolet light emission amount during lighting of a flash discharge lamp.

8 is a graph showing the relationship between the respective radiation doses of ultraviolet light, visible light and infrared light with respect to the change in the lamp current density of the flash discharge lamp.

9 is a conceptual cross-sectional view showing one embodiment for implementing the light energy irradiation apparatus of the present invention.

Fig. 10 is a circuit block diagram of the flash discharge lamp lighting device in the same manner.

11 is a graph showing a spectral distribution curve in a flash discharge lamp encapsulated with a conventional xenon.

<Description of Symbols for Main Parts of Drawings>

E: electrode HFL: flash discharge lamp

LW: Outer Lead SE: Airtight Container

TW: Trigger electrode

[Patent Document 1] Japanese Patent Application Laid-Open No. 2001-068057

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flash discharge lamp suitable for irradiating light energy of instantaneous large intensity including ultraviolet light and a light energy irradiation apparatus using the same.

When a pulsed lamp current is supplied to a flash discharge lamp encapsulated with a xenon discharge medium in a transparent long elongated airtight container, a flash of instantaneous intensity, i.e., ultraviolet light, visible light and infrared light is included. Can generate radiation instantaneously. By irradiating the flash emission of the flash discharge lamp, the surface such as surface modification, surface heating and surface sterilization in various fields such as semiconductor and liquid crystal process such as annealing and splitting of semiconductor materials Processing becomes possible.

Conventionally, a laser or a halogen bulb is mainly used for this kind of light irradiation, but a plurality of lamps of the above-described flash discharge lamps are arranged in parallel in place of the laser and the halogen bulb in a relatively short time. It is possible to irradiate the entire irradiated object with a large area at the same time. In addition, the flash discharge lamp is suitable for achieving a large area of the irradiated object because it is easy to make the size of the lamp relatively long.

The flash discharge lamp used for the above-mentioned application is made of quartz glass because the airtight container is thin and long, and a pair of electrodes are sealed inside both ends of the airtight container, and a xenon (Xe) or the like is placed inside the airtight container. The gas is sealed, and a trigger electrode is arranged close to the outer periphery of the airtight container.

The spectral distribution in the case where the flash discharge lamp in which the xenon was sealed at a pressure of 13.3 kPa in the discharge medium and the flash was turned on by using a discharge circuit having a charge voltage of 6 mA and a inductance of 0 μH is shown in Fig. 11. As shown to.

Fig. 11 is a graph showing a spectral distribution curve in a flash discharge lamp in which a conventional xenon is sealed. This spectral distribution is continuous light emission including an ultraviolet region, a visible region, and an infrared region, and has white light emission close to the spectral distribution of sunlight. Therefore, the flash discharge lamp and the lighting condition are used as a pseudo solar light source. In the spectral distribution of FIG. 11, the relative radiation energy, that is, the relative UV radiation energy of the ultraviolet light region having a wavelength of 200 to 400 nm is about 7.1%.

When the flash emission of the flash discharge lamp is used for the surface or the like, the relative radiant energy of the ultraviolet light in the region of the wavelength of 200 to 400 nm acts effectively. That is, when the amount of ultraviolet light is increased, the sterilization effect is increased by increasing the surface absorption amount, increasing the surface heating effect, and increasing the short wavelength ultraviolet light having a wavelength of 200 to 300 nm.

Conventionally, in order to increase the radiation intensity in the far ultraviolet region and to obtain a high sterilization effect, a sterilizing flash discharge lamp in which antimony or antimony compound is sealed in addition to rare gas is known (prior art literature information). See Patent Document 1.).

By the way, in the case of patent document 1, it is necessary for antimony encapsulated at the time of flash discharge to exist as a vapor | steam, and for that reason, it is desirable to heat at the temperature of 200 degreeC or more. In order to realize this, a heating means is disposed around the flash discharge lamp to heat the flash discharge lamp. For this reason, there is a problem that the light source device is complicated and enlarged, and at the same time, heating energy is used, so that energy efficiency is lowered.

On the other hand, the present inventors first investigated the light emitting mechanism in the flash discharge lamp, while examining the increase in the ultraviolet light of the flash discharge lamp. Light emission of the flash discharge lamp is classified into the following three types.

(1) continuous spectrum (short wavelength region-visible region) by f-b transition

^{Xe + + e - → Xe +} hν ( light)

(2) continuous spectrum (infrared region) by f-f transition

^{Xe + + ef - → Xe +} + e - + hν ( light)

(3) Spectrum emitted from excitation atom (other bright spectrum)

Xe ^* → Xe ^* ′ + hν (light)

In addition, the symbol used in the above means the following.

Xe ⁺ : Xe ion, Xe ^* : Excitation Xe atom, h: Frank's integer, ν: Frequency, e: Electron

Among the above light emitting mechanisms, (1) becomes continuous light emission that emits light from an ultraviolet region to a visible region when Xe ions and electrons recombine. This is f-b transition light emission. Denoted at (2) is continuous light emission in the infrared region when electrons are decelerated due to the influence of an electric field in the plasma. F-f transition light emission called braking radiation. (3) is light emission of the linear spectrum by Xe excitation atom. The light emission of the flash discharge lamp is comprised by the above mechanism.

Therefore, the present inventors have noted the increase in the continuous spectrum due to the f-b transition as a means for increasing the ultraviolet light. Then, by increasing the generation efficiency and the number of generation of rare gas ions and electrons contributing to the ultraviolet light emission, increasing the light emission due to the f-b transition was conceived and investigated. As a result, it was found that the ultraviolet light emission can be increased by sealing the mixed rare gas formed by mixing Kr with Xe in an appropriate pressure range. The present invention has been made based on this finding.

It is a main object of the present invention to provide a flash discharge lamp having increased ultraviolet light radiation, particularly ultraviolet light radiation having a wavelength of 200 to 400 nm, and a light energy irradiation device using the same.

Another object of the present invention is to provide a flash discharge lamp and a light energy irradiation apparatus using the same, which increase current density and increase new ultraviolet light emission.

The flash discharge lamp of the present invention comprises: a translucent and elongated hermetic container; A pair of electrodes sealed and mounted inside both ends of the hermetic container; It contains krypton (Kr) and xenon (Xe), and the partial pressure ratio P (%) of krypton to krypton and xenon is made of a rare gas satisfying the following formula, and is sealed in the airtight container. And a discharge medium that emits light upon flash discharge.

70≤P≤98

The present invention generates electrons by xenon having a low ionization voltage, promotes ionization of krypton, and realizes an increase in ultraviolet light. In other words, since the ionization voltage of the rare gas is 12.1 eV and Kr is 14.0 eV, the ionization of Kr is promoted by mixing Xe at an appropriate pressure, thereby increasing the ultraviolet light.

As for the relationship between the kind of rare gas and the amount of ultraviolet light generation, light emission can be obtained in any of Xe, Kr, and Ar in the region having a wavelength of 200 to 300 nm. For example, when the flash discharge lamp is turned on at a charge voltage of 8 kW in the same capacitor capacity and discharge circuit, continuous flash light is strong in a wavelength region of 350 to 400 nm in a flash discharge lamp enclosed with Kr. This occurs. On the other hand, in the flash discharge lamp which enclosed Xe, such light emission is not seen, but the bright line spectrum strong in the band of wavelength 200-300 nm can be seen. In the flash discharge lamp encapsulated with argon, a relatively high bright line spectrum appears around 360 nm. Thus, when generating the ultraviolet light contained in the wavelength 200-400 nm among each said flash discharge lamp, the ultraviolet discharge lamp which enclosed Kr can obtain the most ultraviolet light. As an example, a flash discharge lamp containing Kr, Xe and Ar, respectively, was sealed in a hermetic container having a diameter of 10 mm and a length of 340 mm at a pressure of 40 kPa. A capacitor capacity of 40 kPa, a charging voltage of 11 kW, and an inductance of 0 mu H As a result of flash discharge at a constant pulse width of 20 mA and a peak current of 4000 A using a discharge circuit of, the relative radiation intensity at a wavelength of 300 to 500 nm is 100% when Ar is a flash discharge lamp in which Kr is sealed. 89% of the flash discharge lamps sealed and 72% of the flash discharge lamps sealed Xe.

In the present invention, since Kr and Xe are mixed within the above predetermined ratio range, the increase in ultraviolet light emission due to the promotion of Kr ionization by Xe and the wavelength region of 350 to 400 nm generated by Kr Continuous light emission can be effectively obtained together. As a result, the amount of ultraviolet light having a wavelength of 200 to 400 nm increases beyond that of the conventional flash discharge lamp containing 100% of Xe and the flash discharge lamp of 100% of Kr. In the case of the partial pressure ratio of Kr 90% and Xe 10%, about 112% of ultraviolet light can be obtained with respect to the flash discharge lamp in which Kr is sealed by 100%.

However, if the partial pressure ratio P of Kr is less than 70% or more than 98%, the generation amount of ultraviolet light having a wavelength of 200 to 400 nm is equal to or less than that of the flash discharge lamp containing 100% of Kr, and thus an improvement effect is obtained. Can't. In addition, the partial pressure ratio P of Kr is preferably in the range of 75 to 95%. If it exists in this range, generation | occurence | production of a much larger amount of ultraviolet light can be obtained.

According to the flash discharge lamp of the present invention, as described above, radiation of ultraviolet high frequency with a wavelength of 200 to 400 nm increases. Therefore, when it is used, for example, for surface treatment of semiconductors, liquid crystals, or the like, since ultraviolet light is easily absorbed from the surface of the irradiated object, it is appropriate because it effectively acts on surface treatment such as surface modification and surface heating. Moreover, since ultraviolet light increases, it is effective also for surface sterilization.

Next, more preferable aspect of this invention is demonstrated. In addition to the above-described configuration of the flash discharge lamp of the present invention, this embodiment is characterized by flashing light at a current density of 8000 A / cm 2 or more in a cross section orthogonal to the tube axis in the hermetic container.

In this embodiment, in addition to the improvement of the luminous efficiency obtained from the fb transition by the sealing of the mixed rare gas described above, the lamp current value is increased to increase the current density, so that the number of ions and electrons increases. In addition, the luminous efficiency can be improved by fb transition. As a result, the amount of ultraviolet light generated is further increased. On the other hand, the light emission in the visible light region hardly changes with respect to the increase in the current density. Infrared light decreases with increasing current density. In short, infrared light decreases as ultraviolet light increases with increasing current density.

The ultraviolet light shows a positive correlation with respect to the current density. However, when the current density is 8000 A / cm 2 or more, the increase in the ultraviolet light becomes remarkable, and the amount of ultraviolet light becomes a desired value. On the other hand, when the current density is less than 8000 A / cm 2, the degree of increase in the ultraviolet light is small, and a desired amount of ultraviolet light cannot be obtained. In addition, the current density is preferably 10000 A / cm 2 or more, and the increase in the ultraviolet light becomes particularly remarkable within this range.

By the way, the current density is obtained for the cross section of the portion orthogonal to the tube axis of the discharge space formed in the hermetic container, and is calculated by dividing the lamp current by the cross section in the main light emitting region.

Next, the light energy irradiation apparatus of the present invention will be described. The light energy irradiating apparatus includes: a light energy irradiating apparatus main body; The flash discharge lamp of Claim 1 or 2 arrange | positioned at the optical energy irradiation apparatus main body; And a flash discharge lamp lighting device for flashing on the flash discharge lamp.

In the light energy irradiating apparatus of the present invention, the above-described configuration is provided. When the flash discharge lamp performs flash discharge, the generated flash light is irradiated to the irradiated object, but the ultraviolet light emitted from the flash discharge lamp Since there are many, the surface treatment, the sterilization process, etc. of an irradiated object can be performed effectively, for example.

Embodiment of the Invention

EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing this invention is demonstrated with reference to drawings.

1 and 2 show a first embodiment for implementing a flash discharge lamp of the present invention, FIG. 1 is a front view of the flash discharge lamp, and FIG. 2 is an enlarged cross-sectional view of a state excluding a trigger electrode. .

In this embodiment, the flash discharge lamp HFL comprises an airtight container SE, a pair of electrodes E and E, and a discharge medium. Moreover, the trigger electrode TW can be provided as desired.

[Confidential Container SE]

The airtight container SE is translucent, thin and long, and has an empty inside. The light transmittance herein may transmit substantially the ultraviolet light of the desired wavelength band, and therefore at least the desired wavelength, to be derived and used outside, and may be substantially transparent to the vacuum ultraviolet light if necessary. In addition, at least the principal part of the airtight container SE may be translucent.

In addition, the airtight container SE has an elongate shape extending in the tube axis direction, and a portion of the inside of which is empty is used as the discharge space 1b. The length of the airtight container SE can be set to a desired value in accordance with the size of the inspected object. For example, a flash discharge lamp HFL having an airtight container SE having a length of about 0.4 to 2 m may be obtained. In addition, the hermetic container SE, Preferably, the outer diameter D (mm) exists in the range of 6 <= D <= 30. In the above formula, the outer diameter D (mm) is a value when the magnitude of the average value of the outer circumference in the main part described later in the tube axis direction is converted into a circle having the same outer circumference.

In addition, the hermetic container SE has a first region having an internal cross-sectional area, for example, a certain value, and a second region having an internal cross-sectional area that is different from the above, in the tube axis direction of the portion where the hollow is desired. It is provided in the tube axis direction, and can be comprised so that the cross-sectional area ratio of such an area may satisfy | fill predetermined relationship. The change in the internal cross-sectional area may be either stepwise or continuous. The change of internal cross-sectional area can be set suitably according to the objective illustrated below. Regardless of the purpose, when the internal cross-sectional area of a certain region is relatively small, the current density flowing in the corresponding region is increased, and the intensity of light emission is relatively increased with this, on the contrary, when the internal cross-sectional area is relatively large, the corresponding The current density flowing through the region becomes small, and with this, the intensity of light emission becomes relatively small.

1. A uniform light irradiation effect along the direction of the tube axis can be obtained over a relatively long distance.

2. A region having a relatively strong light emission is formed in the middle portion of the tube axis direction.

3. A region having relatively strong light emission is formed at both ends in the tube axis direction. It is set.

In addition, the airtight container SE hermetically seals the inside with respect to the outside air and seals and mounts and supports the electrodes E and E to be described later. It can be provided with the sealing part 2 of the end. In addition, in FIG. 1, the code | symbol 1a is an exhaust tip off part arrange | positioned at the side surface of the pipe 1. Although the sealing part 2 can employ | adopt a suitable structure, when flash discharge, thousands of amperes of large electric current flows instantly, and it is necessary to employ | adopt the sealing structure which can withstand this. It is preferable to employ a graded seal structure.

[Pair of electrodes E, E]

The pair of electrodes E and E are sealed and mounted opposite both ends of the hermetic container SE. In addition, a cold cathode electrode of a portion which is conventionally used for a flash discharge lamp can be used. In this case, for example, one or more kinds of refractory metals selected from the group of nickel (Ni), tungsten (W), molybdenum (Mo), tantalum (Ta) and titanium (Ti) or an alloy composed of such a plurality or The electrode can be formed using stainless steel or the like.

In addition, the electrode E includes, for example, an electrode main portion 3a and an electrode shaft 3b as shown, and can be configured by supporting the electrode main portion 3a at the front end of the electrode shaft 3b. have. The base end of the electrode shaft 3b is hermetically sealed to the sealing portion 2 of the hermetic container SE. In the case of a graded sealing structure, the outer lead LW can also be used as the electrode shaft 3b. Therefore, the outer lead LW is allowed to pass through the sealing portion 2 of the hermetic container SE. It protrudes into SE) and can support the electrode main part 3a in the front end.

If desired, the electrode shaft 3b can be coated with a ceramic. As a result, impurities such as carbon (C) are released into the hermetic container SE from the electrode shaft 3b heated to a high temperature by turning on the flash discharge lamp HFL, and the inner surface of the hermetic container SE is opened. It is possible to suppress blackening and shortening the life of the flash discharge lamp HFL. In addition, by forming the ceramic in an appropriate size, it can also act as an electrode holding member for holding the electrode E at a predetermined position. In addition, a getter may be retained in the ceramic as desired.

[Discharge medium]

The discharge medium is a medium that emits light in a desired wavelength region by the discharge, and mainly includes a mixed rare gas having a predetermined ratio of krypton (Kr) and xenon (Xe). Predetermined ratio shall satisfy | fill Formula 70 <= P <= 98 when the mixing ratio (Kr / (Kr + Xe)) of krypton to krypton and xenon is P (%). Incidentally, the sealing pressure of the mixed rare gas is allowed to be in the same pressure range as that generally used in flash discharge lamps, for example, about 50 to 200 kPa.

[Trigger Electrode (TW)]

The trigger electrode TW is allowed to be provided as desired. And it is arrange | positioned near the outer surface of the airtight container SE, and forms the strong electric potential hardness between the at least one electrode E, and breaks down the inside in the airtight container SE, It can function as a means for generating a discharge between a pair of electrodes E and E. FIG.

Further, the trigger electrode TW can be disposed so as to form a spiral shape having a pitch P (mm) of the formula 5? P? 50 near the outer periphery of the airtight container SE. If the pitch P is in the above range, the tube length of the airtight container SE is about 2 m or less, so that the center of the arc in the flash discharge is substantially straight along the tube axis and is formed stably. It is suitable to derive the desired degree of light energy generated by the outside. Moreover, since the optimum range of the pitch of the trigger electrode TW changes with the tube length of the airtight container SE, an optimal condition can be selected within the said range according to a tube length. For example, when a tube length is about 300-2000 mm and outer diameter D (mm) exists in the range of 6 <= D <= 30, the pitch of a trigger electrode TW is 20-20 mm is preferable. . In the above formula, the outer diameter D (mm) is a value when the magnitude of the average value of the outer circumference in the main part described later in the tube axis direction is converted into a circle having the same outer circumference. However, if the pitch P is less than 5 mm, the stability of the arc is not a problem, but the light shielding rate becomes too large, which is not preferable. In addition, if the pitch P exceeds 30 mm, there is no problem of light shielding rate, but the stability of the arc deteriorates, which is also undesirable.

Further, the trigger electrode TW preferably has no influence due to thermal expansion when it is turned on when the wire diameter d (mm) is in the range of 0.1 ≦ d ≦ 2.0, in addition to the above, and further, the light shielding rate is not too large. Does not. On the other hand, when the wire diameter is less than 0.1 mm, the thermal expansion at the time of turning on becomes large, a gap is formed easily between airtight vessels, and the pitch of the trigger electrode TW tends to be disturbed. If the gap between the trigger electrode TW and the airtight container SE becomes large, startability is impaired. Also, if the pitch is disturbed, the stability of the arc is impaired. In addition, when the line diameter exceeds 2.0 mm, the light shielding rate is increased, and the uniformity accuracy of the light energy distribution in the tube axis direction, which is drawn out, is deteriorated. In addition, as long as the trigger electrode TW is not bound to the stability along the tube axis of the arc, the trigger electrode TW may be sensed throughout the spiral as described above, or may have a configuration such as a linear shape along the tube axis.

In addition, in order to form a strong electric potential hardness between the one electrode E by the trigger electrode TW, it is mentioned later between the trigger electrode TW and the said one electrode E, for example. The high voltage generation circuit HVC may be connected or the trigger electrode TW may be connected to the other electrode E. FIG. In addition, by adjusting the length between the electrodes E and E of the trigger electrode TW, the discharge start voltage between the pair of electrodes E and E can be controlled to be a desired value. .

Further, in order to fix the trigger electrode TW to a predetermined position in contact with the outer circumferential surface of the hermetic container SE, as shown in FIG. 1, both ends of the trigger electrode TW are preferably made of metal. It can be firmly tied by the ring-shaped member (4). In this case, the lead wire 8 can be derived from the metal ring-shaped member 4. In such a configuration, even if an unwanted tension acts on the lead wire, it is possible to prevent the pitch of the trigger electrode TW from being disturbed.

Moreover, it is permissible to arrange | position the getter G in the vicinity of the electrode E as needed. As a getter material, what is already known, such as a barium (Ba) getter and a ZrAl alloy getter, can be used. The barium (Ba) getter can form this as a vapor deposition film in the vicinity of the electrode E on the inner surface of the hermetic container SE. The ZrAl alloy getter can be disposed by welding to a position close to the electrode main portion 3a of the electrode shaft 3b.

(Example)

Airtight container: outer diameter 12mm, inner diameter 10mm, light emission length 340mm

Discharge medium: Kr 90% + Xe 10%, sealing pressure 40㎪

Lighting condition: Capacitor capacity 40㎌, discharge circuit 0μH, charging voltage 12㎸,

           Current density 12760 (A / ㎠), half width 20㎲

Comparative Example 1

Airtight container: same as the embodiment.

Discharge medium: Kr 100%, sealing pressure 40㎪

Lighting condition: Capacitor capacity 40㎌, discharge circuit 0μH, charge voltage 11㎸,

           Current density 11700 (A / ㎠), half width 20mA

Lighting condition: same as in Example.

Comparative Example 2

Airtight container: same as the embodiment.

Discharge medium: Xe 100%, sealing pressure 40㎪

Lighting condition: the same as in Comparative Example 1.

3 to 5 show spectral distribution curves of Examples and Comparative Examples 1 and 2 of the present invention, FIG. 3 is an Example, FIG. 4 is Comparative Example 1, and FIG. 5 is Comparative Example 2. FIG. In each figure, the horizontal axis represents wavelength (nm) and the vertical axis represents relative emission intensity, respectively.

As apparent from the contrast of Figs. 3 to 5, for the examples, the radiation amount in the ultraviolet ray having a wavelength of 200 to 400 nm, especially the region having the wavelength of 300 to 400 nm is significantly increased than that of Comparative Examples 1 and 2. It can be seen that. In Examples and Comparative Examples 1 and 2, although the charging voltage values do not coincide, there is no large difference, and there is no major change in the spectral distribution.

FIG. 6 is a graph showing the relationship between the ultraviolet light emission intensity and the change in the Kr partial pressure ratio in the mixed rare gas. FIG. In the figure, the horizontal axis represents Kr partial pressure ratio {Kr / (Kr + Xe)}, and the vertical axis represents% UV. In addition,% UV means the relative ultraviolet light emission intensity (%) with respect to the total emission in wavelength 200-950nm. As for the flash discharge lamp provided for the measurement, specifications other than Kr partial pressure ratio are the same as that of an Example.

As can be understood from the drawing, when the Kr partial pressure ratio is 70 to 98%, the ultraviolet light is clearly increased than in the case of Kr 100%. Moreover, when it is 75 to 95%, ultraviolet light will increase remarkably. In the case of the Kr partial pressure ratio of 90%, the increase in the ultraviolet light is maximized.

Fig. 7 is a graph showing the relationship between the ultraviolet light radiation amount and the change in the lamp current density of the flash discharge lamp. In the figure, the horizontal axis represents lamp current density A / cm 2 and the vertical axis represents% UV, respectively. In addition,% UV and a flash discharge lamp are the same as that of FIG.

As can be understood from FIG. 7, when the lamp current density is 8000 (A / cm 2) or more, preferably 10000 (A / cm 2) or more, the amount of ultraviolet light, especially the ultraviolet light in the region having a wavelength of 300 to 400 nm increases. When the lamp current density is less than 8000 (A / cm 2), the amount of ultraviolet light decreases significantly.

Fig. 8 is a graph showing the relationship between the radiation doses of ultraviolet light, visible light and infrared light with respect to the change in the lamp current density of the flash discharge lamp. In the figure, the horizontal axis represents lamp current density A / cm 2 and the vertical axis represents radial intensity (%), respectively.

As can be understood from the drawing, as the lamp current density increases, the ultraviolet light increases as described above, but the infrared light decreases. On the other hand, visible light hardly changes. In addition, although the lamp current density range is out of Figs. 7 and 8, it can be estimated that the trend shown in Fig. 8 is the same even if the lamp current density is further increased.

9 and 10 show one embodiment for implementing the light energy irradiation apparatus of the present invention, FIG. 9 is a conceptual sectional view, and FIG. 10 is a circuit block diagram. In this embodiment, the light energy irradiation device flashes the light energy irradiation device main body LE, the flash discharge lamp HFL disposed on the light energy irradiation device main body LE, and the flash discharge lamp HFL. The flash discharge lamp lighting device FOD is provided, and flash energy is irradiated to the irradiated object SM.

The light energy irradiating apparatus main body LE refers to the remaining portions of the light energy irradiating apparatus except for the flash discharge lamp HFL and the flash discharge lamp lighting device FOD, and the specific structure does not matter. The optical energy irradiator main body LE is provided with the reflection mirror M and the filter F as an example. The reflection mirror M reflects the flash energy radiated from the flash discharge lamp HFL toward the irradiated object SM. The filter F is made of quartz glass containing, for example, 80% by mass or more of silica that transmits ultraviolet rays, and prevents contaminants from the irradiated object SM and the like from scattering on the flash discharge lamp HFL.

The flash discharge lamp HFL has the structure of the 1st form shown in FIG. 1 and FIG. 2, and has the specification of an Example.

The flash discharge lamp lighting apparatus FOD is a circuit structure shown in FIG. That is, the flash discharge lamp lighting device FOD is provided with the flash lighting circuit OC and the high voltage generation circuit HVG.

The flash lighting circuit OC mainly comprises the charging and discharging capacitor C1 and the charging circuit CC. In addition, the charge and discharge capacitor C1 can be configured by connecting a plurality of capacitors in parallel as shown in the figure. In the lighting condition of the embodiment, the capacitance of the charge and discharge capacitor C1 is 40 mu F, the charge voltage is 12 mA, and the peak value of the lamp current is current density 12760 (A / cm 2) and half width 20 mA.

The high voltage generation circuit HVG includes a pulse transformer, and when a pulse voltage output from a pulse power supply (not shown) is input to the primary coil of the pulse transformer, a high voltage pulse is output from the secondary coil, It is comprised so that it may apply between the electrode E and the trigger electrode TW.

The irradiated object SM is, for example, an object to be subjected to a surface treatment, but any object may be used. In addition, the purpose of light energy irradiation does not matter.

In this way, when the light-discharge lamp (HFL) is turned on by operating the light-energy irradiating device, the radiated energy by light energy irradiation mainly composed of ultraviolet rays and visible light is instantaneously concentrated and irradiated to the irradiated object SM. Applied to the processing surface. As a result, the irradiated object SM is subjected to a desired light irradiation treatment, for example, a surface treatment.

According to the invention of claim 1, by mixing and sealing xenon in a predetermined pressure ratio range with respect to krypton, a flash discharge lamp in which ultraviolet light having a wavelength of 200 to 400 nm increases can be provided.

According to the second aspect of the present invention, a flash discharge lamp can be provided in which ultraviolet light having a wavelength of 200 to 400 nm is further increased when the current density is within a predetermined range.

According to the invention of claim 3, it is possible to provide a light energy irradiation apparatus having the effects of claims 1 and 2.

Claims (3)

Translucent and elongated hermetic container; A pair of electrodes sealed and mounted inside both ends of the hermetic container; Crypton (Kr) and xenon (Xe), the partial pressure ratio P (%) of krypton to krypton and xenon is made of a rare gas that satisfies the following formula, to be sealed in the airtight container And a discharge medium that emits light upon flash discharge. 70≤P≤98 2. The flash discharge lamp according to claim 1, wherein the flash light turns on when the current density in the cross section orthogonal to the tube axis in the hermetic container is equal to or greater than 8000 A / cm &lt; 2 &gt;. A light energy irradiation apparatus main body; A flash discharge lamp according to claim 1 or 2 disposed on the main body of the light energy irradiation apparatus; An optical energy irradiation apparatus comprising a flash discharge lamp lighting device for flashing a flash discharge lamp.

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