KR20060043052A - Marking apparatus - Google Patents

Abstract

Provided are a marking apparatus capable of efficiently marking a defective part after inspection for various sizes of sub-straight substrates.

The marking part 5 is arrange | positioned so that the conveyance direction and the longitudinal direction of the board | substrate conveyance part 7 and the board | substrate conveyance part 7 which reciprocate to a recording position and hold | maintain the sheet | seat 30 may cross | intersect, and the sheet | seat 30 An ink jet head 8 for ejecting ink droplets from the nozzle based on the recording data on a corresponding defective piece of), and a dryer 9 for drying the sheet 30 from which the ink droplets were ejected.

 Sub Straight Substrate, Marking Device, Marking Part, Substrate Carrier, Inkjet Head, Ink Drop, Dryer

Description

Marking Device {MARKING APPARATUS}

1 is a block configuration diagram of an inspection apparatus and a marking apparatus,

2 is a block diagram showing the flow of data of the marking apparatus;

3 is a state diagram showing an input operation to an input unit,

4 is a block diagram showing a control system for ink ejection of an inkjet head,

5 is a top view, a front view, and a right side view of the marking apparatus.

6 is a perspective view, front view and right side view of the marking apparatus of the inkjet head moving mechanism,

7 is a state diagram illustrating a marking operation of the marking apparatus;

8 is a state diagram illustrating a marking operation of the marking apparatus;

9 is a state diagram showing a marking operation of the marking apparatus;

10 is a block diagram showing the flow of data of a marking apparatus according to another example;

11 is an explanatory diagram showing a flow of data processing according to another example;

12 is a block showing the configuration of an input unit and an output unit according to another example.

TECHNICAL FIELD This invention relates to the marking apparatus to the substraight substrate after an inspection, for example.

The sub-straight substrate on which the semiconductor chip is mounted is given an identification mark to the defective product after the determination of good or poor is performed by an automatic inspection machine. In order to improve the yield of a product, even if it is a sub straight board | substrate judged to be a defective product by this test | inspection, the operation | work which carries out marking by the operator visually again and judges a good defect is performed. The marking is performed by a worker lining up a defective part, attaching a thread, painting with a sign pen, or inputting a defective position by a digitizer.

In order to eliminate the trouble of marking operation by a said worker, and marking miss, the marking apparatus is proposed. This marking apparatus carries out belt conveyance of a printed wiring board to a marking position, performs marking by the sine pen which moves up and down, back and forth by cylinder drive, and makes it dry by a drying air blow (refer Japanese Unexamined-Japanese-Patent No. 2000-151070). .

Since the marking pens to be marked are arranged in a line and the number of the sign pens is limited, the marking apparatus has a limited type of printed wiring board that can be marked. The same applies to a case where a stamp, a thread, or a drill are drilled instead of a sign pen. Therefore, the printed wiring board in which the chip mounting part is arrange | positioned in matrix form may not be marked by one conveyance operation.

Moreover, since the up-down cylinder and the back-and-forth cylinder are operated by the printed wiring board conveyed to a marking position, and marking, respectively, a marking apparatus becomes large and marking work takes time. In addition, since the pen is scanned, marking becomes difficult when the size of the chip mounting surface to be marked is reduced.

In addition, since an air blow is made in the vicinity of the sign pen, there is also a problem that the ink of the sign pen close to the air blow tends to dry even if the tip of the pen is capped.

This invention is made | formed in order to solve the said subject, Comprising: It aims at providing the marking apparatus which can efficiently mark the defective location after inspection about the board | substrate of various size.

In order to achieve the above object, the present invention has the following configuration.

An input unit for inputting input data including a mark shape and mark coordinates marked at a defective part of the substrate, a control unit for creating image data from the input data and generating record data from the image data, and a substrate based on the recording data And a marking portion for marking by ejecting ink droplets from the nozzle at corresponding defective points of the marking portion, wherein the marking portion includes a substrate conveyance portion reciprocating to a recording position while holding the substrate, and a conveyance direction and head length direction of the substrate conveyance portion. And an inkjet head for discharging ink droplets from the nozzle based on the recording data at a corresponding defective portion of the substrate, and a dryer for drying the substrate from which the ink droplets are discharged.

In addition, the marking portion discharges ink droplets from the nozzles of the ink jet head when the substrate held by the substrate conveying portion passes the recording position, and repeats the marking operation by changing the nozzle position of the ink jet head every time the ink droplets are ejected. It features.

Moreover, the input data which shows the defect location of a board | substrate is input through a liquid crystal tablet, It is characterized by the above-mentioned.

Alternatively, input data indicating a defective location of the substrate is input through the inspection apparatus.

Moreover, the positional information which shows the defective location of a board | substrate is input from a liquid crystal tablet or a scanner, the board | substrate identification information is input through a barcode reader, and a control part links the input board | substrate identification information and positional information, and stores it in a memory | storage part. It features.

(The best mode for carrying out the invention)

EMBODIMENT OF THE INVENTION Hereinafter, the best embodiment of the marking apparatus which concerns on this invention is described in detail with an accompanying drawing. The marking device of the present embodiment includes an input unit for inputting input data including a mark shape and mark coordinates marked at a defective point of a substrate, a control unit for creating image data from the input data and generating record data from the image data. And a marking apparatus having a marking portion for ejecting ink droplets from a nozzle to mark corresponding defective portions of the substrate on the basis of the recording data for marking. In this embodiment, the marking apparatus to the defective location of the sub straight substrate for semiconductor device manufacture is demonstrated.

A schematic structure of the marking apparatus will be described with reference to FIG. 1.

Prior to the marking operation, the inspection device (apparatus including conduction inspection, image inspection, and other functional inspection) 1 outputs a defective portion of the sub straight substrate (hereinafter referred to as "sheet") to the monitor screen. Based on the output screen of this test result, the operator inputs into the marking apparatus 2 while visually confirming the sheet.

Hereinafter, the structure of the marking apparatus 2 is demonstrated.

The input part 3 inputs input data containing the mark shape and mark coordinates which mark to the defective location of each IC chip (henceforth "piece") on a sub straight. As this input part 3, a liquid crystal tablet is used suitably, for example. The liquid crystal tablet can directly input position data such as mark shape and mark coordinates by pressing onto the monitor screen, and can output the input image.

2, when input data is transmitted from the input part 3, the control part 4 produces marking image data (bitmap file) from input data, and produces | generates recording data from this marking image data (bitmap file). do. As the controller 4, for example, a personal computer (PC) is used. The personal computer generates record data from the image data including the mark shape and the mark coordinates, and outputs it to the marking unit 5. Specifically, the mark shape and mark coordinates marking on the defective piece of the sheet displayed on the liquid crystal tablet are transmitted via the communication cable, respectively, and a bitmap file marking at the designated position is created based on each data. The bitmap file is created based on the application software.

The personal computer converts the bitmap file into a data structure for printing on the basis of the driver software, and transmits this recording data (nozzle data) to the marking section 5 via a communication cable (USB code). The marking part 5 discharges ink droplets from the nozzle of the inkjet head 8 to the corresponding defective piece among the pieces constituting the sheet based on the recording data (nozzle data) output from the control part 4 to perform marking. .

Next, the structure of each part of the marking apparatus 2 is demonstrated concretely.

In FIG. 3, the liquid crystal tablet used as the input part 3 is demonstrated. The same board | substrate image as the board | substrate image A which the board | substrate test | inspection result by the test | inspection apparatus 1 is output to a monitor screen is displayed on a liquid crystal tablet screen. The worker presses the sheet (sub-straight substrate) onto the screen-displayed substrate image and presses the sheet onto the sheet pen 6 using the marking pen 6 while visually confirming the defective portion corresponding to the defective portion by visual inspection. It is supposed to be displayed. The marking point may be the same as the inspection result, or may increase or decrease. On the other hand, as a sheet, the flexible resin board which transfers the pressurization by the marking pen 6 to the sheet to a screen input key is assumed. If a liquid crystal tablet is used, position input can be performed only by overwriting the defective part of a sub straight substrate with the marking pen 6. In addition, by removing the substrate embedded in the liquid tablet, the input position information can be confirmed on the screen.

In Fig. 1, the control unit 4 includes a personal computer, an input unit such as a keyboard or a mouse, a CPU for outputting arithmetic processing and control commands by the computer, a ROM storing a control program, a work area and data of the CPU. Memory, such as a RAM for temporarily storing data, and a monitor are provided.

In FIG. 5A, B and C, the marking part 5 is made so that the conveyance direction and the longitudinal direction of the board | substrate conveyance part 7 and the board | substrate conveyance part 7 which reciprocate to a recording position may hold | maintain a sheet | seat. And a full-line inkjet head 8 arranged to discharge ink on a corresponding defective piece of sheet based on input data, and a UV dryer 9 for irradiating and drying UV light onto the sheet on which ink is discharged. have. The board | substrate conveyance part 7 conveys to a recording position, holding a sheet | seat, ink is discharged from the inkjet head 8, it conveys to the UV dryer 9, and repeats the operation which dries ink. Each time the recording operation is performed, the marking is performed by moving the inkjet head 8 only in a longitudinal direction by a predetermined pitch and recording ink droplets having the required number of dots on the sheet. The inkjet head 8 is supplied with ink from the ink supply section 10 through the ink tube 11. The ink supply unit 10 is provided with an ink bottle for storing UV-curable ink, a pump for sending ink to the inkjet head 8, and the like.

An ink discharge control system of the inkjet head 8 will be described with reference to FIG. 4. The CPU 12 controls the write operation. The ink ejection method may be either a piezoelectric element type or a thermal resistance element type. Record data (nozzle data) is transmitted to the USB controller 13 from the personal computer which is the control unit 4. The USB controller 13 transmits write data directly to the synchronous DRAM (SDRAM) 14 by direct memory access (DMA), and the write data transmitted in synchronization with the input clock signal is temporarily stored in the SDRAM 14. . The recording data is transferred from the SDRAM 14 to the ink discharge control element of each nozzle of the inkjet head 8 through the FPGA (Field Program Gate Array) 15 by the DMA transmission by the operation command of the CPU 12. It is transmitted as an energized signal.

Next, the moving mechanism of the inkjet head 8 in the longitudinal direction will be described with reference to FIGS. 6A, B, and C. FIG. The inkjet head 8 is supported and fixed to the moving plate 16. The moving plate 16 is movably supported by the leaf springs 40 which stand on both sides of the mounting plate 17. The mounting plate 17 is mounted on the supporting plate 18 (see Fig. 6B). The nozzle part of the inkjet head 8 is provided downward through the hole part 19 of the moving plate 16 (refer FIG. 6A). The step motor 20 is provided in the lower surface side of the support plate 18. Moreover, the standing part 21 is erected on the upper surface side of the support plate 18 (refer FIG. 6C). The standing portion 21 is fixed with a micrometer head 22 inscribed with a scale. The screw shaft 23 is fitted in this micrometer head 22, and these micrometer heads comprise a micrometer. A pulley 24 is fitted to one end of the screw shaft 23, and the other end abuts on the side surface of the moving plate 16 via the leaf spring 40 (see FIG. 6B). An endless timing belt 26 is interposed between the pulley 24 and the motor pulley 25 (see FIG. 6C). On both ends of the moving plate 16, an origin sensor 27 defining a moving origin and a limit sensor 28 defining a moving end are supported by the apparatus frame 41, respectively (see FIG. 6B).

When the step motor 20 is driven to rotate in the predetermined direction, the screw shaft 23 rotates through the timing belt 26, and the screw motor 23 moves forward and backward in the longitudinal direction by the screw fitting with the micrometer head 22. At this time, the screw shaft 23 moves the moving plate 16 against the elastic force of the leaf spring 40 to move the mounting plate 17 in the left and right directions of FIG. 6B, and moves the inkjet head 8 in the head longitudinal direction. Only a predetermined amount can be moved. When the micrometer is returned to the origin position, the leaf spring 40 returns to the position standing up with respect to the installation plate 17 by its restoring force, and the inkjet head 8 can be returned to the original position.

In addition, the end plate of the screw shaft 23 of the micrometer is connected with the moving plate 16 without installing the plate spring 40 or the mounting plate 17, so that the moving plate 16 is supported by the support plate 18. The support may be slidable from above.

Next, the structure of the board | substrate conveyance part 7 is demonstrated with reference to FIG.

The slide plate 29 suctions and holds the sheet (substrate) 30 to reciprocate. A suction hole for adsorbing the sheet is provided on the surface of the slide plate 29. The slide plate 29 is integrally supported by the support part 32 provided to stand by the moving base part 31. As shown in FIG. The movement base 31 is movably linked along the slide axis 33. The slide shaft 33 is provided with an origin sensor 34 that defines the origin of the moving base 31, and a limit sensor 35 that defines the moving end. The movement base part 31 is made to reciprocate in the range detected by the origin sensor 34 and the limit sensor 35.

A part of the support part 32 is linked with the endless timing belt 36. As shown in FIG. The timing belt 36 is interposed between the motor pulley of the step motor 37 provided on the moving origin side, and the pulley provided on the moving end side. The tension roller 38 abuts at two places on the timing belt 36 to maintain a constant tension. Moreover, the encoder 39 which detects the movement amount of the slide plate 29 is coaxially installed in the pulley provided in the movement end side. By driving the step motor 37 forward and reverse rotation, the sheet 30 moves reciprocally between the suction position and the dry position via the recording position.

Next, the marking operation | movement in the marking part 5 is demonstrated with reference to FIGS. 7 shows a state in which the slide plate 29 is in the home position. The movement base part 31 is detected by the origin sensor 34, and the step motor 37 stops. In this state, the sheet 30 is adsorbed and held on the slide plate 29.

Next, when the step motor 37 is started in FIG. 8, the moving base part 31 moves along the slide axis 33, and the slide plate 29 is conveyed to the recording position which opposes the inkjet head 8 next. do. At this time, ink droplets (for one dot) are discharged from the inkjet head 8 to the defective piece of the sheet 30 based on the recording data transmitted from the controller 4. When the ink droplets are ejected, the step motor 20 is started to extrude the screw shaft 23 from the micrometer head 22 to move the ink jet head 8 one pitch in the longitudinal direction.

Next, in Fig. 9, the step motor 37 is further driven to rotate, and the slide plate 29 is irradiated with UV light to one dot of ink droplets when passing through the drying position of the UV dryer 9, thereby Drying is performed. When the movement base part 31 is detected by the limit sensor 35, the rotation drive of the step motor 37 is stopped. Subsequently, the moving base part 31 reversely drives the step motor 37 from the moving end position so that the moving base part 31 moves along the slide axis 33, and the slide plate 29 moves the inkjet head 8. Is sent to the recording position opposite to the? At this time, ink droplets (for one dot) are discharged from the inkjet head 8 to the defective piece of the sheet 30 based on the recording data transmitted from the controller 4. When the ink droplets are ejected, the stepper 20 is started to extrude the screw shaft 23 from the micrometer head by a predetermined amount to further move the ink jet head 8 one pitch in the longitudinal direction.

When the moving base part 31 returns the slide plate 29 to the origin position (position of FIG. 7) detected by the origin sensor 34 once again, the step motor 37 is driven forward rotation again and the slide plate 29 is carried out. Is conveyed to the recording position opposite to the inkjet head 8. At this time, ink droplets (for one dot) are discharged from the inkjet head 8 to the defective piece of the sheet 30 based on the recording data transmitted from the control unit 4. When the ink droplets are ejected, the step motor 20 is started to extrude the screw shaft 23 from the micrometer head 22 to move the ink jet head 8 one pitch further in the longitudinal direction.

When the slide plate 29 passes through the drying position of the UV dryer 9, UV light is irradiated to the ink droplets for 2 dots of reciprocation, and the ink is dried. When the movement base part 31 is detected by the limit sensor 35, the rotation drive of the step motor 37 is stopped. When the slide plate 29 reciprocates the recording position by repeating the operation of the same method, ink droplets are ejected and dried, and the ink image of the required dots is marked on the defective piece.

In order to prevent the inkjet head 8 from clogging the nozzle, an air blow is performed before the marking is started. An ink pad portion capable of absorbing ink droplets is provided below the recording position, and ink droplets from the nozzle before the marking operation are started. May be discharged to the ink pad portion to perform the recovery process. Although the number of the inkjet heads 8 may be single, it may be provided in multiple numbers. In this case, since the required number of dots can be obtained only by passing the substrate once directly under the inkjet head 8, printing can be performed efficiently. The inkjet head 8 is not limited to being disposed orthogonally to the substrate conveyance direction, and may be disposed at an oblique angle.

In addition, the input unit 3 may use a mouse or the like instead of the liquid crystal tablet. Alternatively, when sufficient inspection accuracy can be obtained by the inspection device (apparatus including conduction inspection, image inspection, and other functional inspection) 1, input data indicating a defective part of the substrate in FIG. It may be input through 1). In this case, as shown in FIG. 11, the control part 4 produces | generates mark image data (bitmap file) based on application software from the board | substrate image data and coordinate information from the inspection apparatus 1. Subsequently, the control unit 4 converts the bitmap file into a data structure for printing based on the driver software, and transmits this recording data (nozzle data) to the marking unit 5 via a communication cable (USB cord). .

12, the liquid crystal tablet 42, the scanner (image input device) 43, and the barcode reader 44 may be provided as the input part 3. As shown in FIG. The control unit 4 receives positional information indicating a defective position of the substrate from the liquid crystal tablet 42 or the scanner (image input device) 43, and inputs identification information of the substrate through the barcode reader 44. The control unit 4 also links the board identification information and the position information and stores them in the image storage unit 45a, the position information storage unit 45b, and the board identification information storage unit 45c, respectively. Each storage unit may be an internal memory of the control unit 4, but may be an external storage unit (database server, external hard disk, etc.). The control unit 4 uses the data stored in each storage unit to generate the recording data, and stores the data through the output unit 46 in order to receive the data in a post-marking process (for example, a resin sealing process). The data can be output. As the output unit 46, for example, a communication server or an external storage device connected to the control unit 4 via a LAN line or a communication line is used. Thereby, data management of the board | substrate for every lot received by the post process after marking becomes easy.

In addition, the board | substrate is not limited to the sub straight substrate for semiconductor device (IC chip) manufacture, A resin substrate, film substrate, glass substrate, etc. for other electronic component manufacture may be sufficient.

By using the above-described marking apparatus, since the inkjet head is arranged so that the conveyance direction of the substrate conveyance part and the head length direction cross each other, it is possible to mark defective parts on substrates of various sizes. Ink droplets are ejected from the nozzles of the inkjet head when the substrate held in the substrate conveying part passes the recording position, and the nozzle position of the inkjet head is changed every time the ink droplets are ejected, and the marking operation is repeated, thereby making it necessary to mark the ink droplets. Only the number of dots can be discharged and the substrate can be marked by drying with a dryer.

When the defective part of a board | substrate is input through a liquid crystal tablet, since the operator can confirm the defect of the board | substrate after inspection visually, and a defect part can be directly inputted, the yield improves and the input miss of a bad point is also improved. You can stop it.

In addition, when the inspection precision by the inspection apparatus can be sufficiently obtained, the recording data can be generated directly on the basis of the substrate information (image data and coordinate data) transmitted from the inspection apparatus to the control unit. It can omit and marking can be performed quickly.

In addition, when the position information indicating the defective position of the substrate is input from the liquid crystal tablet or the scanner, and the identification information of the substrate is input through the barcode reader, the control unit links these substrate identification information and the position information and stores them in the storage unit. The marking data can be automatically generated by generating recording data from the data stored in the storage unit, and the data management of the substrates for each lot received in the post-marking post process becomes easy.

Claims (5)

An input unit for inputting input data including a mark shape and mark coordinates to mark a defective portion of the substrate; A control unit which creates image data from the input data and generates record data from the image data; A marking portion for marking by ejecting ink droplets from the nozzle at corresponding defective points of the substrate based on the recording data; The marking portion is disposed so that the substrate conveying portion reciprocating to the recording position while holding the substrate and the conveying direction of the substrate conveying portion and the head longitudinal direction intersect, and drops ink from the nozzle based on the recording data at a corresponding defective point of the substrate. And a drier for drying the substrate on which the ink droplets are discharged. 2. The marking portion according to claim 1, wherein the marking portion discharges ink droplets from the nozzles of the inkjet head when the substrate held by the substrate conveying portion passes the recording position, and changes the nozzle position of the inkjet head every time the ink droplets are ejected to perform the marking operation. Marking device, characterized in that repeated. The marking apparatus according to claim 1, wherein input data representing a defective part of the substrate is input through a liquid crystal tablet. The marking apparatus according to claim 1, wherein input data representing a defective part of the substrate is input through an inspection apparatus. The position information indicating a defective position of the substrate is input from a liquid crystal tablet or a scanner, the identification information of the substrate is input through a barcode reader, and the control unit links the inputted substrate identification information and position information to the storage unit. Marking apparatus, characterized in that the memory.

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