CN102259491B - Piezoelectric drive jet-type dotting device - Google Patents
Piezoelectric drive jet-type dotting device Download PDFInfo
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- CN102259491B CN102259491B CN2011101558261A CN201110155826A CN102259491B CN 102259491 B CN102259491 B CN 102259491B CN 2011101558261 A CN2011101558261 A CN 2011101558261A CN 201110155826 A CN201110155826 A CN 201110155826A CN 102259491 B CN102259491 B CN 102259491B
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Abstract
The invention provides a piezoelectric drive jet-type dotting device. The dotting device comprises a main body supporting frame for providing an installation base, a driving mechanism for providing linear reciprocating impacts and a liquid supply mechanism for providing marking liquid, wherein the driving mechanism and the liquid supply mechanism are fixedly arranged on the main body supporting frame; the driving mechanism comprises a piezoelectric ceramic block and an impact pin which is driven by the piezoelectric ceramic block; the liquid supply mechanism comprises a nozzle; and the impact pin is used for impacting the nozzle intermittently. The invention has the advantages that: (1) due to the adoption of a non-contact injection technology, the dotting device does not do motion in the direction vertical to the surface of a wafer, so that ink-jet dotting efficiency is improved, and a motion control system is simplified; (2) different from the operating mode that the conventional contact type dotting device is required to dip ink for dotting every time, a storage type material supplying mode is used for the dotting device, and the dotting device can dot continuously within a period of time, so that dotting efficiency is greatly improved; and (3) the dotting device has a compact design structure, and is easy to assemble and control.
Description
Technical field
The invention belongs to micro-fluid ejection printing technique field, be specifically related to a kind of towards the Piezoelectric Driving tapper that can at a high speed stably spray homogeneity good ink dot of wafer inspection with the sorting operation.
Background technology
In the wafer manufacturing and detecting, because each wafer that comprises complete IC circuit will pass through electro-detection on the wafer, cut down from former again, for guaranteeing the accurate sorting of the rear wafer of cutting, the wafer of all tested being decided to be " inefficacy " all needs to indicate with small ink dot on the surface, thereby distinguishes with qualified wafer.Statistics shows that the average chip yield of every wafer is about 70% in the batch production, and in test was produced, yield rate can be low to moderate 30%, and visible ink dot is indicated in the high speed detection of wafer and the sorting and plays the very crucial effect of accepting.The high strength that IC makes and high precision require tapper stably to generate evenly clean and tidy ink dot at the inefficacy wafer rapidly.The main contact tapper inefficiency that uses generate an ink dot 0.1s consuming time approximately, and the ink dot shape homogeneity of institute's mark is relatively poor in producing at present.
Simultaneously, in many emerging field of semiconductor manufacture, all show absorber thickness less than the trend of the ultra thin wafer of 100 μ m, ultra thin wafer has become smart card, MEMS, photovoltaic cell, has stacked crystal grain and the required stock of power component.In facing the detection and sort process of ultra-thin wafers sheet, when wafer bears the External Force Acting of tapper contact crystal column surface and vibration, all may cause crackle even damage, if local pressure (through the concentrated crack position of stress of being everlasting) surpasses the ultimate strength of silicon, then suffer easily the immediately breaking-up of brokenness.Therefore, contactless the getting ready guaranteeing that wafer quality has extremely important meaning of development.
Summary of the invention
In order to solve above-mentioned existing technical problem, the invention provides a kind of piezoelectric drive jet-type dotting device, it significantly improves gets operating efficiency ready, and eliminate since the contact of tapper and vibration on the impact of wafer quality.
The present invention solves above-mentioned existing technical problem, and a kind of piezoelectric drive jet-type dotting device is provided, and described tapper comprises provides main bracing frame, the driving mechanism that the linear reciprocation bump is provided that the basis is installed, the liquid supplying device that index liquid is provided; Described driving mechanism and described liquid supplying device all are fixedly installed on described main bracing frame; Described driving mechanism comprises piezoelectric ceramics block and the striker that drives through this piezoelectric ceramics block; Described liquid supplying device comprises nozzle; The described nozzle of the intermittent bump of described striker.
The present invention further improves as described below.
Described main bracing frame comprises framework, and described framework has the first through hole; Described driving mechanism comprises bogie, Compress Spring and caging bolt; Described caging bolt passes described the first through hole and links to each other with described bogie, described Compress Spring be sheathed on described caging bolt and be dissolved in described bogie and described framework between; Between described framework and the described bogie guiding mechanism is set, the glide direction of described guiding mechanism and the axial line of described bolt are parallel to each other; Described piezoelectric ceramics block is connected to described framework on one side, another side is connected to described bogie, and described piezoelectric ceramics block and described Compress Spring force in respectively the both sides of described bogie; Described striker is fixedly connected on described bogie, and this bogie linear reciprocation moves with this striker linear reciprocation clashes into described nozzle.
Described guiding mechanism is guide pillar and the guide hole that cooperatively interacts; Described framework has described guide pillar, and described bogie has described guide hole.
Described bogie is the shape of the mouth as one speaks.
Described striker is arranged at the lower end of described bogie.
Described main bracing frame comprises a portal and a cushion block; Described portal is fixedly connected on described framework, and described portal passes in the bottom of described bogie; Described cushion block is arranged between described portal and the described piezoelectric ceramics block.
Described liquid supplying device comprises storage bin, conduit, injection valve; The popular described conduit of index liquid in the described storage bin, described nozzle group valve are to described nozzle.
Described injection valve comprises main through hole and side through hole; Described nozzle comprises spray orifice; Described main through hole and described spray orifice be center line altogether; Described striker is arranged in described main through hole.
Described main through hole comprises a choke, and this choke and described striker fit tightly.
Described side through hole communicates with described main through hole, and described side through hole is between described choke and described nozzle.
Compared to prior art, the invention has the beneficial effects as follows: (one) owing to adopted the noncontact jetting technology, tapper is not taken exercises on the direction on vertical wafer surface, has improved ink-jet and has got efficient ready, and simplified kinetic control system.(2) from existing contact tapper be necessary for get ready at every turn dip in respectively the China ink working method different, the present invention has adopted warehouse style feed, tapper can be got ready within a period of time continuously, has significantly improved and has got efficient ready.(3) project organization of the present invention is compact, is easy to assembling and control.
Description of drawings
Fig. 1 is the structural representation of piezoelectric drive jet-type dotting device of the present invention.
Fig. 2 is the structural representation of described main bracing frame.
Fig. 3 is the structural representation of described portal.
Fig. 4 is described driving mechanism structure schematic diagram.
Fig. 5 is the structural representation of described degree of lip-rounding bogie.
Fig. 6 is the structural representation of described piezoelectric ceramics block.
Fig. 7 is the structural representation of described cushion block.
Fig. 8 is the structural representation of described striker.
Fig. 9 is the structural representation of described injection valve.
Figure 10 is the cross-sectional schematic of described injection valve.
Figure 11 is the structural representation of described nozzle.
Figure 12 is the cross-sectional schematic of described nozzle.
Figure 13 is described striker and the schematic diagram that cooperates of described injection valve.
Figure 14 is described striker and the schematic diagram that cooperates of described nozzle.
The specific embodiment
The present invention is further described below in conjunction with description of drawings and the specific embodiment.
Shown in Fig. 1 to 14, a kind of piezoelectric drive jet-type dotting device, this tapper comprise provides main bracing frame (this main bracing frame comprises framework 111, portal 112), the driving mechanism (this driving mechanism comprises bogie 121, piezoelectric ceramics block 123, striker 124, Compress Spring 125, caging bolt 126) that the linear reciprocation bump is provided that the basis is installed, the liquid supplying device (this liquid supplying device comprises storage bin 131, conduit 132, injection valve 133 and nozzle 134) that index liquid is provided; Driving mechanism and liquid supplying device all are fixedly installed on main bracing frame; Driving mechanism comprises piezoelectric ceramics block 123 and the striker 124 that drives through this piezoelectric ceramics block 123, and when piezoelectric ceramics receiver voltage signal, this piezoelectric ceramics block 123 produces motive power, with the driving mechanism motion, realizes that namely the diameter of striker 124 moves back and forth; Liquid supplying device comprises nozzle 134; Striker 124 intermittent bump nozzles 134 because striker 124 cyclical intermissions bump nozzle 134 makes stressed the sputtering of index liquid in the nozzle 134, are finally realized contactless mark.
Main bracing frame of the present invention comprises framework 111, and framework 111 has the first through hole 114; Driving mechanism comprises bogie 121, Compress Spring 125 and caging bolt 126; Caging bolt 126 passes the first through hole 114 and links to each other with bogie 121, Compress Spring 125 be sheathed on caging bolt 126 and be dissolved in bogie 121 and framework 111 between, caging bolt 126 can give Compress Spring 125 pretightning forces, controls simultaneously the movement travel of driving mechanism; Between framework 111 and the bogie 121 guiding mechanism 113 is set, the glide direction of guiding mechanism 113 and the axial line of bolt are parallel to each other; Piezoelectric ceramics block 123 is connected to framework 111 on one side, another side is connected to bogie 121, and piezoelectric ceramics block 123 and Compress Spring 125 force in respectively the both sides of bogie 121; Striker 124 is fixedly connected on bogie 121, and these bogie 121 linear reciprocation move with this striker 124 linear reciprocation bump nozzle 134.
Guide pillar and the guide hole of guiding mechanism 113 for cooperatively interacting; The present invention adopts framework 111 to have guide pillar, and bogie 121 has guide hole.
Bogie 121 of the present invention is the shape of the mouth as one speaks.Striker 124 is arranged at the lower end of bogie 121.Main bracing frame comprises a portal 112 and a cushion block 122; Portal 112 is fixedly connected on framework 111, and portal 112 passes in the bottom of bogie 121; Cushion block 122 is arranged between portal 112 and the piezoelectric ceramics block 123.
Liquid supplying device comprises storage bin 131, conduit 132, injection valve 133; The popular conduit 132 of index liquid in the storage bin 131, nozzle 134 valves are to nozzle 134.
The operation principle of piezoelectric drive jet-type dotting device of the present invention is as follows:
When giving piezoelectric ceramics block 123 loading cycle voltage, stacking of piezoelectric ceramics produces corresponding deformation, and output displacement promotes cushion block 122, force Compress Spring 125 compressions, drive bogie 121 and be assemblied in striker 124 on the bogie 121 along z axle positive movement, the index liquid flow nozzle 134 in the injection valve 133.
Otherwise, when piezoelectric ceramics block 123 shrinks, Compress Spring 125 length that affranchises, striker 124 is got back to initial position with certain speed, acts on the index liquid, and it is spouting to make index liquid pass through nozzle 134 outlets, and finally drops on the target surface.
In the piezoelectric drive jet-type dotting device course of work of the present invention, get frequency ready by the input voltage FREQUENCY CONTROL, by spacing adjusting bolt control striker 124 strokes, thereby within each cycle, obtain the uniform ink droplet of volume.
Dripping of injecting type technology of the present invention is a kind of fluid quantitative method of salary distribution of high speed, be particularly useful for diameter less than the micro volume drop formation of 0.2mm, in hard-core technology fields such as semiconductor packages, MEMS manufacturing, biomedicine, inkjet printings many application arranged.Piezoelectric ceramic actuator is compared with the magnetic valve that general injection valve 133 is commonly used, and has the characteristics such as inertia is little, response is fast, control characteristic is good, motion is accurate.
Effect is: (one) owing to adopted the noncontact jetting technology, tapper is not taken exercises on the direction on vertical wafer surface, has improved ink-jet and has got efficient ready, and simplified kinetic control system.(2) from existing contact tapper be necessary for get ready at every turn dip in respectively the China ink working method different, the present invention has adopted warehouse style feed, tapper can be got ready within a period of time continuously, has significantly improved and has got efficient ready.(3) project organization of the present invention is compact, is easy to assembling and control.
Above content is the further description of the present invention being done in conjunction with concrete preferred embodiment, can not assert that implementation of the present invention is confined to these explanations.For the general technical staff of the technical field of the invention, without departing from the inventive concept of the premise, can also make some simple deduction or replace, all should be considered as belonging to protection scope of the present invention.
Claims (9)
1. piezoelectric drive jet-type dotting device is characterized in that:
Described tapper comprises provides main bracing frame, the driving mechanism that the linear reciprocation bump is provided that the basis is installed, the liquid supplying device that index liquid is provided; Described driving mechanism and described liquid supplying device all are fixedly installed on described main bracing frame; Described driving mechanism comprises piezoelectric ceramics block and the striker that drives through this piezoelectric ceramics block; Described liquid supplying device comprises nozzle; The described nozzle of the intermittent bump of described striker; Described main bracing frame comprises framework, and described framework has the first through hole; Described driving mechanism comprises bogie, Compress Spring and caging bolt; Described caging bolt passes described the first through hole and links to each other with described bogie, described Compress Spring be sheathed on described caging bolt and be dissolved in described bogie and described framework between; Between described framework and the described bogie guiding mechanism is set, the glide direction of described guiding mechanism and the axial line of described caging bolt are parallel to each other; Described piezoelectric ceramics block is connected to described framework on one side, another side is connected to described bogie, and described piezoelectric ceramics block and described Compress Spring force in respectively the both sides of described bogie; Described striker is fixedly connected on described bogie, and this bogie linear reciprocation moves with this striker linear reciprocation clashes into described nozzle.
2. piezoelectric drive jet-type dotting device according to claim 1, it is characterized in that: described guiding mechanism is guide pillar and the guide hole that cooperatively interacts; Described framework has described guide pillar, and described bogie has described guide hole.
3. piezoelectric drive jet-type dotting device according to claim 2, it is characterized in that: described bogie is the shape of the mouth as one speaks.
4. piezoelectric drive jet-type dotting device according to claim 3, it is characterized in that: described striker is arranged at the lower end of described bogie.
5. piezoelectric drive jet-type dotting device according to claim 4, it is characterized in that: described main bracing frame comprises a portal and a cushion block; Described portal is fixedly connected on described framework, and described portal passes in the bottom of described bogie; Described cushion block is arranged between described portal and the described piezoelectric ceramics block.
6. piezoelectric drive jet-type dotting device according to claim 5, it is characterized in that: described liquid supplying device comprises storage bin, conduit, injection valve; The popular described conduit of index liquid in the described storage bin, described injection valve are to described nozzle.
7. piezoelectric drive jet-type dotting device according to claim 6, it is characterized in that: described injection valve comprises main through hole and side through hole; Described nozzle comprises spray orifice; Described main through hole and described spray orifice be center line altogether; Described striker is arranged in described main through hole.
8. piezoelectric drive jet-type dotting device according to claim 7, it is characterized in that: described main through hole comprises a choke, this choke and described striker fit tightly.
9. piezoelectric drive jet-type dotting device according to claim 8, it is characterized in that: described side through hole communicates with described main through hole, and described side through hole is between described choke and described nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101558261A CN102259491B (en) | 2011-06-10 | 2011-06-10 | Piezoelectric drive jet-type dotting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101558261A CN102259491B (en) | 2011-06-10 | 2011-06-10 | Piezoelectric drive jet-type dotting device |
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| Publication Number | Publication Date |
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| CN102259491A CN102259491A (en) | 2011-11-30 |
| CN102259491B true CN102259491B (en) | 2013-04-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011101558261A Expired - Fee Related CN102259491B (en) | 2011-06-10 | 2011-06-10 | Piezoelectric drive jet-type dotting device |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102700255A (en) * | 2012-06-05 | 2012-10-03 | 杭州威士德喷码技术有限公司 | Impact needle of spray head of large character code spraying machine |
| CN102700258A (en) * | 2012-06-05 | 2012-10-03 | 杭州威士德喷码技术有限公司 | Upper ink fountain of spray head of large character code spraying machine |
| CN103157577B (en) * | 2013-04-03 | 2015-03-18 | 哈尔滨工业大学（威海） | Piezoelectrically-driven jet type glue dispensing device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1660577A (en) * | 2004-02-24 | 2005-08-31 | 信浓绢糸株式会社 | Mark jet printing appts. |
| CN1790042A (en) * | 2005-12-05 | 2006-06-21 | 深圳市矽电半导体设备有限公司 | Multiplex test method for semiconductor wafer and multiplex test probe station therefor |
| CN201147741Y (en) * | 2007-12-20 | 2008-11-12 | 上海富奇凡机电科技有限公司 | Piezoelectric microsphere sprayer head |
| CN201439072U (en) * | 2009-06-22 | 2010-04-21 | 上海富奇凡机电科技有限公司 | Motor-boosting micro-injection spray head |
| CN102069050A (en) * | 2011-02-22 | 2011-05-25 | 上海大学 | Double-fluid injector |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6031246A (en) * | 1983-08-01 | 1985-02-18 | Nec Corp | Marking method and device therefor |
| JP2004086640A (en) * | 2002-08-28 | 2004-03-18 | Toppan Forms Co Ltd | Defective product identifying device and method for ic inlet roll |
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2011
- 2011-06-10 CN CN2011101558261A patent/CN102259491B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1660577A (en) * | 2004-02-24 | 2005-08-31 | 信浓绢糸株式会社 | Mark jet printing appts. |
| CN1790042A (en) * | 2005-12-05 | 2006-06-21 | 深圳市矽电半导体设备有限公司 | Multiplex test method for semiconductor wafer and multiplex test probe station therefor |
| CN201147741Y (en) * | 2007-12-20 | 2008-11-12 | 上海富奇凡机电科技有限公司 | Piezoelectric microsphere sprayer head |
| CN201439072U (en) * | 2009-06-22 | 2010-04-21 | 上海富奇凡机电科技有限公司 | Motor-boosting micro-injection spray head |
| CN102069050A (en) * | 2011-02-22 | 2011-05-25 | 上海大学 | Double-fluid injector |
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