CN102259491A - Piezoelectric drive jet-type dotting device - Google Patents
Piezoelectric drive jet-type dotting device Download PDFInfo
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- CN102259491A CN102259491A CN2011101558261A CN201110155826A CN102259491A CN 102259491 A CN102259491 A CN 102259491A CN 2011101558261 A CN2011101558261 A CN 2011101558261A CN 201110155826 A CN201110155826 A CN 201110155826A CN 102259491 A CN102259491 A CN 102259491A
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Abstract
The invention provides a piezoelectric drive jet-type dotting device. The dotting device comprises a main body supporting frame for providing an installation base, a driving mechanism for providing linear reciprocating impacts and a liquid supply mechanism for providing marking liquid, wherein the driving mechanism and the liquid supply mechanism are fixedly arranged on the main body supporting frame; the driving mechanism comprises a piezoelectric ceramic block and an impact pin which is driven by the piezoelectric ceramic block; the liquid supply mechanism comprises a nozzle; and the impact pin is used for impacting the nozzle intermittently. The invention has the advantages that: (1) due to the adoption of a non-contact injection technology, the dotting device does not do motion in the direction vertical to the surface of a wafer, so that ink-jet dotting efficiency is improved, and a motion control system is simplified; (2) different from the operating mode that the conventional contact type dotting device is required to dip ink for dotting every time, a storage type material supplying mode is used for the dotting device, and the dotting device can dot continuously within a period of time, so that dotting efficiency is greatly improved; and (3) the dotting device has a compact design structure, and is easy to assemble and control.
Description
Technical field
The invention belongs to micro-fluid ejection printing technique field, be specifically related to a kind of towards the Piezoelectric Driving tapper that can stably spray the good ink dot of homogeneity at a high speed of wafer inspection with the letter sorting operation.
Background technology
In the wafer manufacturing and detecting, because each wafer that comprises complete IC circuit all will pass through electro-detection on the wafer, cut down from former again, for guaranteeing the accurate letter sorting of cutting back wafer, the wafer of all tested being decided to be " inefficacy " all needs to indicate with small ink dot on the surface, thereby distinguishes with qualified wafer.Statistics shows that the average chip yield of every wafer is about 70% in the batch process, and in test was produced, yield rate can be low to moderate 30%, and visible ink dot is indicated in the high speed detection of wafer and the letter sorting and plays the very crucial effect of accepting.High strength that IC makes and high precision require tapper can stably generate evenly clean and tidy ink dot rapidly on the inefficacy wafer.The main contact tapper inefficiency that uses generate an ink dot 0.1s consuming time approximately, and the ink dot shape homogeneity of institute's mark is relatively poor in producing at present.
Simultaneously, in many emerging field of semiconductor manufacture, all show the trend of absorber thickness less than the ultra thin wafer of 100 μ m, ultra thin wafer has become smart card, MEMS, photovoltaic cell, has stacked crystal grain and the required stock of power component.In facing the detection and sort process of ultra-thin wafers sheet, when wafer bears the external force effect of tapper contact crystal column surface and vibration, all may cause crackle even damage, if local pressure (through the concentrated crack position of stress of being everlasting) surpasses the ultimate strength of silicon, then suffer the breaking-up of brokenness immediately easily.Therefore, contactless the getting ready of development to guaranteeing that wafer quality has extremely important meaning.
Summary of the invention
In order to solve above-mentioned existing technical problem, the invention provides a kind of Piezoelectric Driving injecting type tapper, it significantly improves gets operating efficiency ready, and eliminate since the contact of tapper and vibration to the influence of wafer quality.
The present invention solves above-mentioned existing technical problem, and a kind of Piezoelectric Driving injecting type tapper is provided, and described tapper comprises provides body supports frame, the driving mechanism that the linear reciprocation bump is provided that the basis is installed, the liquid supplying device that index liquid is provided; Described driving mechanism and described liquid supplying device all are fixedly set in described body supports frame; Described driving mechanism comprises piezoelectric ceramics block and the striker that drives through this piezoelectric ceramics block; Described liquid supplying device comprises nozzle; The described nozzle of the intermittent bump of described striker.
The present invention further improves as described below.
Described body supports frame comprises framework, and described framework has first through hole; Described driving mechanism comprises bogie, compression spring and caging bolt; Described caging bolt passes described first through hole and links to each other with described bogie, described compression spring housing be located at described caging bolt and be dissolved in described bogie and described framework between; Between described framework and the described bogie guiding mechanism is set, the glide direction of described guiding mechanism and the axial line of described bolt are parallel to each other; Described piezoelectric ceramics block is connected to described framework on one side, another side is connected to described bogie, and described piezoelectric ceramics block and described compression spring force in the both sides of described bogie respectively; Described striker is fixedly connected on described bogie, and this bogie linear reciprocation moving belt this striker linear reciprocation and clashed into described nozzle.
Described guiding mechanism is guide pillar and the guide hole that cooperatively interacts; Described framework has described guide pillar, and described bogie has described guide hole.
Described bogie is the shape of the mouth as one speaks.
Described striker is arranged at the lower end of described bogie.
Described body supports frame comprises a portal and a cushion block; Described portal is fixedly connected on described framework, and described portal passes in the bottom of described bogie; Described cushion block is arranged between described portal and the described piezoelectric ceramics block.
Described liquid supplying device comprises storage bin, conduit, injection valve; The popular described conduit of index liquid in the described storage bin, described nozzle group valve are to described nozzle.
Described injection valve comprises main through hole and side through hole; Described nozzle comprises spray orifice; Described main through hole and described spray orifice be center line altogether; Described striker is arranged in described main through hole.
Described main through hole comprises a choke, and this choke and described striker fit tightly.
Described side through hole communicates with described main through hole, and described side through hole is between described choke and described nozzle.
Compared to prior art, the invention has the beneficial effects as follows: (one) owing to adopted the noncontact jetting technology, tapper is not taken exercises on the direction on vertical wafer surface, has improved ink-jet and has got efficient ready, and simplified kinetic control system.(2) with existing contact tapper be necessary for get ready at every turn dip in respectively the China ink working method different, the present invention has adopted warehouse style feed, tapper can be got ready in a period of time continuously, has significantly improved and has got efficient ready.(3) project organization compactness of the present invention is easy to assembling and control.
Description of drawings
Fig. 1 is the structural representation of Piezoelectric Driving injecting type tapper of the present invention.
Fig. 2 is the structural representation of described body supports frame.
Fig. 3 is the structural representation of described portal.
Fig. 4 is described driving mechanism structure schematic diagram.
Fig. 5 is the structural representation of described degree of lip-rounding bogie.
Fig. 6 is the structural representation of described piezoelectric ceramics block.
Fig. 7 is the structural representation of described cushion block.
Fig. 8 is the structural representation of described striker.
Fig. 9 is the structural representation of described injection valve.
Figure 10 is the cross-sectional schematic of described injection valve.
Figure 11 is described structure of nozzle schematic diagram.
Figure 12 is the cross-sectional schematic of described nozzle.
Figure 13 is described striker and the schematic diagram that cooperates of described injection valve.
Figure 14 is described striker and the schematic diagram that cooperates of described nozzle.
The specific embodiment
The present invention is further described below in conjunction with description of drawings and the specific embodiment.
Shown in Fig. 1 to 14, a kind of Piezoelectric Driving injecting type tapper, this tapper comprise provides the driving mechanism (this driving mechanism comprises bogie 121, piezoelectric ceramics block 123, striker 124, compression spring 125, caging bolt 126) of basic body supports frame (this body supports frame comprises framework 111, portal 112) being installed, the linear reciprocation bump being provided, the liquid supplying device (this liquid supplying device comprises storage bin 131, conduit 132, injection valve 133 and nozzle 134) that index liquid is provided; Driving mechanism and liquid supplying device all are fixedly set in the body supports frame; Driving mechanism comprises piezoelectric ceramics block 123 and the striker 124 that drives through this piezoelectric ceramics block 123, and when piezoelectric ceramics reception voltage signal, this piezoelectric ceramics block 123 produces motive power, is being with the driving mechanism motion, realizes that promptly the diameter of striker 124 moves back and forth; Liquid supplying device comprises nozzle 134; Striker 124 intermittent bump nozzles 134 because striker 124 cyclical intermissions bump nozzle 134 makes stressed the sputtering of index liquid in the nozzle 134, are finally realized contactless mark.
Body supports frame of the present invention comprises framework 111, and framework 111 has first through hole 114; Driving mechanism comprises bogie 121, compression spring 125 and caging bolt 126; Caging bolt 126 passes first through hole 114 and links to each other with bogie 121, the compression spring 125 be sheathed on caging bolt 126 and be dissolved in bogie 121 and framework 111 between, caging bolt 126 can compress spring 125 pretightning forces, controls the movement travel of driving mechanism simultaneously; Between framework 111 and the bogie 121 guiding mechanism 113 is set, the glide direction of guiding mechanism 113 and the axial line of bolt are parallel to each other; Piezoelectric ceramics block 123 is connected to framework 111 on one side, another side is connected to bogie 121, and piezoelectric ceramics block 123 and compression spring 125 force in the both sides of bogie 121 respectively; Striker 124 is fixedly connected on bogie 121, and these bogie 121 linear reciprocation moving belts this striker 124 linear reciprocation bump nozzle 134.
Guide pillar and the guide hole of guiding mechanism 113 for cooperatively interacting; The present invention adopts framework 111 to have guide pillar, and bogie 121 has guide hole.
Bogie 121 of the present invention is the shape of the mouth as one speaks.Striker 124 is arranged at the lower end of bogie 121.The body supports frame comprises a portal 112 and a cushion block 122; Portal 112 is fixedly connected on framework 111, and portal 112 passes in the bottom of bogie 121; Cushion block 122 is arranged between portal 112 and the piezoelectric ceramics block 123.
Liquid supplying device comprises storage bin 131, conduit 132, injection valve 133; The popular conduit 132 of index liquid in the storage bin 131, nozzle 134 valves are to nozzle 134.
The operation principle of Piezoelectric Driving injecting type tapper of the present invention is as follows:
When giving piezoelectric ceramics block 123 loading cycle voltages, the piezoelectric ceramics stacked blocks produces corresponding deformation, and the output displacement promotes cushion block 122, force 125 compressions of compression spring, drive bogie 121 and be assemblied in striker 124 on the bogie 121 along z axle positive movement, the index liquid flow nozzle 134 in the injection valve 133.
Otherwise, when piezoelectric ceramics block 123 shrinks, compression spring 125 length that affranchises, striker 124 is got back to initial position with certain speed, acts on the index liquid, and it is spouting to make index liquid pass through nozzle 134 outlets, and finally drops on the target surface.
In the Piezoelectric Driving injecting type tapper course of work of the present invention, get frequency ready,, thereby in each cycle, obtain the uniform ink droplet of volume by spacing adjusting bolt control striker 124 strokes by the input voltage FREQUENCY CONTROL.
Dripping of injecting type technology of the present invention is a kind of fluid quantitative method of salary distribution of high speed, be particularly useful for diameter and drip generation, many application are arranged in hard-core technology fields such as semiconductor packages, MEMS manufacturing, biomedicine, inkjet printings less than the microbody hydrops of 0.2mm.Piezoelectric ceramic actuator is compared with the magnetic valve that general injection valve 133 is used always, has characteristics such as inertia is little, response is fast, control characteristic is good, motion is accurate.
Effect is: (one) owing to adopted the noncontact jetting technology, tapper is not taken exercises on the direction on vertical wafer surface, has improved ink-jet and has got efficient ready, and simplified kinetic control system.(2) with existing contact tapper be necessary for get ready at every turn dip in respectively the China ink working method different, the present invention has adopted warehouse style feed, tapper can be got ready in a period of time continuously, has significantly improved and has got efficient ready.(3) project organization compactness of the present invention is easy to assembling and control.
Above content be in conjunction with concrete preferred implementation to further describing that the present invention did, can not assert that concrete enforcement of the present invention is confined to these explanations.For the general technical staff of the technical field of the invention, without departing from the inventive concept of the premise, can also make some simple deduction or replace, all should be considered as belonging to protection scope of the present invention.
Claims (10)
1. Piezoelectric Driving injecting type tapper is characterized in that: described tapper comprises provides body supports frame, the driving mechanism that the linear reciprocation bump is provided that the basis is installed, the liquid supplying device that index liquid is provided; Described driving mechanism and described liquid supplying device all are fixedly set in described body supports frame; Described driving mechanism comprises piezoelectric ceramics block and the striker that drives through this piezoelectric ceramics block; Described liquid supplying device comprises nozzle; The described nozzle of the intermittent bump of described striker.
2. Piezoelectric Driving injecting type tapper according to claim 1 is characterized in that: described body supports frame comprises framework, and described framework has first through hole; Described driving mechanism comprises bogie, compression spring and caging bolt; Described caging bolt passes described first through hole and links to each other with described bogie, described compression spring housing be located at described caging bolt and be dissolved in described bogie and described framework between; Between described framework and the described bogie guiding mechanism is set, the glide direction of described guiding mechanism and the axial line of described bolt are parallel to each other; Described piezoelectric ceramics block is connected to described framework on one side, another side is connected to described bogie, and described piezoelectric ceramics block and described compression spring force in the both sides of described bogie respectively; Described striker is fixedly connected on described bogie, and this bogie linear reciprocation moving belt this striker linear reciprocation and clashed into described nozzle.
3. Piezoelectric Driving injecting type tapper according to claim 2 is characterized in that: described guiding mechanism is guide pillar and the guide hole that cooperatively interacts; Described framework has described guide pillar, and described bogie has described guide hole.
4. Piezoelectric Driving injecting type tapper according to claim 3 is characterized in that: described bogie is the shape of the mouth as one speaks.
5. Piezoelectric Driving injecting type tapper according to claim 4, it is characterized in that: described striker is arranged at the lower end of described bogie.
6. Piezoelectric Driving injecting type tapper according to claim 5 is characterized in that: described body supports frame comprises a portal and a cushion block; Described portal is fixedly connected on described framework, and described portal passes in the bottom of described bogie; Described cushion block is arranged between described portal and the described piezoelectric ceramics block.
7. Piezoelectric Driving injecting type tapper according to claim 6, it is characterized in that: described liquid supplying device comprises storage bin, conduit, injection valve; The popular described conduit of index liquid in the described storage bin, described nozzle group valve are to described nozzle.
8. Piezoelectric Driving injecting type tapper according to claim 7, it is characterized in that: described injection valve comprises main through hole and side through hole; Described nozzle comprises spray orifice; Described main through hole and described spray orifice be center line altogether; Described striker is arranged in described main through hole.
9. Piezoelectric Driving injecting type tapper according to claim 8 is characterized in that: described main through hole comprises a choke, and this choke and described striker fit tightly.
10. Piezoelectric Driving injecting type tapper according to claim 9 is characterized in that: described side through hole communicates with described main through hole, and described side through hole is between described choke and described nozzle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101558261A CN102259491B (en) | 2011-06-10 | 2011-06-10 | Piezoelectric drive jet-type dotting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101558261A CN102259491B (en) | 2011-06-10 | 2011-06-10 | Piezoelectric drive jet-type dotting device |
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| Publication Number | Publication Date |
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| CN102259491A true CN102259491A (en) | 2011-11-30 |
| CN102259491B CN102259491B (en) | 2013-04-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2011101558261A Expired - Fee Related CN102259491B (en) | 2011-06-10 | 2011-06-10 | Piezoelectric drive jet-type dotting device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102700258A (en) * | 2012-06-05 | 2012-10-03 | 杭州威士德喷码技术有限公司 | Upper ink fountain of spray head of large character code spraying machine |
| CN102700255A (en) * | 2012-06-05 | 2012-10-03 | 杭州威士德喷码技术有限公司 | Impact needle of spray head of large character code spraying machine |
| CN103157577A (en) * | 2013-04-03 | 2013-06-19 | 哈尔滨工业大学（威海） | Piezoelectrically-driven jet type glue dispensing device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6031246A (en) * | 1983-08-01 | 1985-02-18 | Nec Corp | Marking method and device therefor |
| JP2004086640A (en) * | 2002-08-28 | 2004-03-18 | Toppan Forms Co Ltd | Defective product identifying device and method for ic inlet roll |
| CN1660577A (en) * | 2004-02-24 | 2005-08-31 | 信浓绢糸株式会社 | Mark jet printing appts. |
| CN1790042A (en) * | 2005-12-05 | 2006-06-21 | 深圳市矽电半导体设备有限公司 | Multiplex test method for semiconductor wafer and multiplex test probe station therefor |
| CN201147741Y (en) * | 2007-12-20 | 2008-11-12 | 上海富奇凡机电科技有限公司 | Piezoelectric microsphere sprayer head |
| CN201439072U (en) * | 2009-06-22 | 2010-04-21 | 上海富奇凡机电科技有限公司 | Motor-boosting micro-injection spray head |
| CN102069050A (en) * | 2011-02-22 | 2011-05-25 | 上海大学 | Double-fluid injector |
-
2011
- 2011-06-10 CN CN2011101558261A patent/CN102259491B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6031246A (en) * | 1983-08-01 | 1985-02-18 | Nec Corp | Marking method and device therefor |
| JP2004086640A (en) * | 2002-08-28 | 2004-03-18 | Toppan Forms Co Ltd | Defective product identifying device and method for ic inlet roll |
| CN1660577A (en) * | 2004-02-24 | 2005-08-31 | 信浓绢糸株式会社 | Mark jet printing appts. |
| CN1790042A (en) * | 2005-12-05 | 2006-06-21 | 深圳市矽电半导体设备有限公司 | Multiplex test method for semiconductor wafer and multiplex test probe station therefor |
| CN201147741Y (en) * | 2007-12-20 | 2008-11-12 | 上海富奇凡机电科技有限公司 | Piezoelectric microsphere sprayer head |
| CN201439072U (en) * | 2009-06-22 | 2010-04-21 | 上海富奇凡机电科技有限公司 | Motor-boosting micro-injection spray head |
| CN102069050A (en) * | 2011-02-22 | 2011-05-25 | 上海大学 | Double-fluid injector |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102700258A (en) * | 2012-06-05 | 2012-10-03 | 杭州威士德喷码技术有限公司 | Upper ink fountain of spray head of large character code spraying machine |
| CN102700255A (en) * | 2012-06-05 | 2012-10-03 | 杭州威士德喷码技术有限公司 | Impact needle of spray head of large character code spraying machine |
| CN103157577A (en) * | 2013-04-03 | 2013-06-19 | 哈尔滨工业大学（威海） | Piezoelectrically-driven jet type glue dispensing device |
| CN103157577B (en) * | 2013-04-03 | 2015-03-18 | 哈尔滨工业大学（威海） | Piezoelectrically-driven jet type glue dispensing device |
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| CN102259491B (en) | 2013-04-24 |
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Granted publication date: 20130424 Termination date: 20200610 |