KR20050029827A - Wafer loading/unloading apparatus - Google Patents

Abstract

A wafer loading/unloading apparatus is provided to prevent deflection of a pulley support shaft by using a shaft deflection prevention unit. A loading slider(220) is installed at one side of a main body(210) and includes a load arm(225) for supporting a lower side of a wafer, a first timing belt for reciprocating the load arm, a first driving pulley(223) and a first driven pulley(228) coupled to both sides of the first timing belt, first and second pulley support shafts(222,227) coupled to the main body, the first driving pulley, and the first driven pulley, and a first driving motor(221) for rotating the first driving pulley. An unloading slider(240) is installed at the other side of the main body and includes an unload arm(245) for supporting the lower side of the wafer, a second timing belt(246) for reciprocating the load arm, a second driving pulley(243) and a second driven pulley(248) coupled to both sides of the second timing belt, third and fourth pulley support shafts(242,247) coupled to the main body, the second driving pulley, and the second driven pulley, and a second driving motor(241) for rotating the second driving pulley. A shaft deflection prevention unit prevents the deflection of the first to the fourth pulley support shafts of the load slider and the unload slider to one direction.

Description

Wafer loading / unloading apparatus

The present invention relates to a wafer loading / unloading apparatus, and more particularly, to a wafer loading / unloading apparatus for transferring wafers through a timing belt.

In general, a semiconductor device is manufactured by repeating a process of laminating a plurality of thin films on a pure silicon wafer. Accordingly, in order to manufacture a semiconductor device, a plurality of unit processes such as a photo process, an etching process, a diffusion process, and a metal wiring process are repeatedly performed.

In the photo process, a photoresist, which is a photochemical reactant, is applied to an upper surface of the wafer, and a reticle having a predetermined circuit pattern is placed on the coated photoresist. An exposure step of transferring a pattern of a reticle to the upper surface of the photoresist by irradiating light having a predetermined wavelength and a developing step of developing the exposed wafer are mainly implemented by a photolithography facility.

Specifically, a photolithography apparatus includes a spinner for applying photoresist to an upper surface of a wafer, and a stepper for irradiating light having a predetermined wavelength to the photoresist-coated wafer. And a developing unit for developing the exposed wafer, a wafer alignment unit for aligning a reference position of the wafer before transferring the photoresist-coated wafer to the stepper, and a wafer alignment of the wafer of the spinner. A wafer transfer arm for transferring to the unit and a wafer loading / unloading device for loading / unloading the wafer between the wafer alignment unit and the stepper.

Accordingly, the wafer coated with the photoresist on the spinner is transferred to the wafer alignment unit by the wafer transfer arm to receive the reference position. After the alignment is completed, the wafer is transferred to the stepper by the wafer loading / unloading device to perform a photo process. You will receive.

Here, the wafer loading / unloading device serves to load or unload the wafer between the wafer alignment unit and the stepper. A load / unload arm supporting the lower side of the wafer to lift the wafer to a predetermined height arm), a timing belt coupled to the rod / unload arm and rotating in the forward and reverse directions so that the load / unload arm can be linearly reciprocated within a predetermined section, and both sides of the timing belt so that the timing belt can be rotated forward and backward while maintaining a predetermined tension. And a pair of pulley support shafts coupled to the drive pulley and the driven pulley, respectively, and coupled to the drive pulley and the driven pulley so that the drive pulley and the driven pulley can be rotated forward and backward, respectively, and having a bearing therein. It is coupled to the drive pulley and has a drive motor (Motor) for forward and reverse rotation of the drive pulley so that the timing belt forward and reverse rotation.

Accordingly, the conventional wafer loading / unloading apparatus loads or unloads wafers by forward and reverse rotation of the driving pulley and the timing belt using a driving motor as the process progresses.

However, in the conventional wafer loading / unloading apparatus configured as described above, the driving means for forward / reverse rotation of the timing belt is coupled not only to the driving pulley coupled to one side of the pulleys respectively coupled to both sides of the timing belt, but also to the pulley shaft coupled to the other side. Since only one side of the driven pulley extends and is mounted on the apparatus body, when the wafer loading / unloading device is used for a long time, a pulley shaft supporting the driven pulley gradually shifts toward the driving pulley.

In this case, the bearing provided in the pulley shaft is gradually worn out due to the bias of the pulley shaft, and the driven pulley causes a problem of starting to eccentric rotation due to the wear of such a bearing. In addition, such an eccentric rotation of the driven pulley causes a problem that causes the loosening of the timing belt.

Accordingly, the present invention has been made in view of such a problem, and an object of the present invention is to provide a wafer loading / unloading apparatus in which the biasing of the pulley shaft is prevented.

The wafer loading / unloading device of the present invention for realizing the above object is coupled to one side of the load body and the load arm mounted on one side of the device body and supporting the lower side of the wafer to load the wafer. The first timing belt and the first driving pulley, which are forward and backward, respectively coupled to both sides of the first timing belt so that the first timing belt and the first timing belt rotate forward and backward while maintaining a predetermined tension, so as to reciprocate and move within a predetermined section. One end is coupled to the driven pulley and the device body, and the other end is coupled to the first and second pulley shafts and the first driving pulley which are axially coupled to the first driving pulley and the first driven pulley, respectively. Load slider including a first driving motor to rotate, unload arm and unloading on the other side of the device body and supporting the lower side of the wafer to unload the wafer It is coupled to one side of the arm and is coupled to both sides of the second timing belt so that the forward and reverse rotation of the second timing belt and the second timing belt can be reversed while maintaining a predetermined tension. Third and fourth pulley shafts, one end of which is coupled to the second driving pulley, the second driven pulley and the device body, and the other end of which is axially coupled to the second driving pulley and the second driven pulley, respectively; An unload slider including a second driving motor coupled to the pulley and forward and reversely rotating the second driving pulley, and a shaft bias preventing means for preventing the pulley shaft axis of the rod slider and the unload slider from being biased in one direction.

At this time, the shaft deflection prevention means is preferably implemented as a shaft support member for connecting the pull-out axis of the rod slider and the pull-out axis of the unload slider.

The shaft support member preferably connects the second pulley shaft coupled to the first driven pulley and the fourth pulley shaft coupled to the second driven pulley.

Hereinafter, a preferred embodiment of the wafer loading / unloading apparatus 100 according to the present invention will be described in detail with reference to FIG. 1.

Figure 1 is a schematic diagram showing an embodiment of a wafer loading / unloading apparatus according to the present invention.

As shown in the drawings, the wafer loading / unloading device 200 according to the present invention is mounted on the device body 210 and on one side of the device body 210 to a wafer of a wafer alignment unit (not shown). Load slider 220 for loading the stepper (not shown), the unload slider 240 mounted on the other side of the apparatus body 210 to unload the stepper wafer into the wafer alignment unit, and the load slider ( 220 and the unload slider 240 is configured to prevent the shaft shift prevention means for preventing the bias in one direction.

In more detail, the load slider 220 is coupled to one side of the load arm 225 supporting the lower side of the wafer so as to lift and load the wafer, and the load arm 225 and the load arm 225 is a predetermined section. The first timing belt 226 is rotated forward and backward to allow the linear reciprocating movement within the rod arm, and the rod arm 225 is coupled to the other side of the rod arm 225 so that the rod arm 225 can be reciprocated within a predetermined section. The first drive is coupled to both sides of the first timing belt 226 so that the first LM guide (Guide, 224) and the first timing belt 226 can be rotated forward and backward while maintaining a predetermined tension. One end is coupled to the pulley 223 and the first driven pulley 228 and the device body 210, and the other end is axially coupled to the first driving pulley 223 and the first driven pulley 228, respectively. A first bearing (not shown) is provided therein to allow the driving pulley 223 and the first driven pulley 228 to rotate. ㆍ First driving motor coupled to the second pulley shaft (222,227) and the first driving pulley 223 and forward and reverse rotation of the first driving pulley 223 at a predetermined rotational force so that the first timing belt 226 can be reversed 221.

The unload slider 240 is coupled to one side of the unload arm 245 for supporting the lower side of the wafer so as to lift and unload the wafer, and straightens the unload arm 245 within a predetermined section. The second timing belt 246 is rotated forward and reverse to reciprocate, and coupled to the other side of the unload arm 245 and sliding the unload arm 245 so that the unload arm 245 can be reciprocated straight within a predetermined section. A second driving pulley 243 coupled to both sides of the second timing belt 246 so that the second LM guide 244 and the second timing belt 246 can be rotated forward and backward while maintaining a predetermined tension; One end is coupled to the second driven pulley 248 and the device body 210, and the other end is axially coupled to the second driving pulley 243 and the second driven pulley 248, respectively, and the second driving pulley 243. And third and fourth pulleys having bearings therein to allow the second driven pulley 248 to rotate. To the second drive motor 241 is coupled to the shaft (242,247) and the second drive pulley (243) for forward and reverse rotation of the second drive pulley (243) with a predetermined rotational force so that the second timing belt (246) can be rotated forward and backward. It is composed.

At this time, the rod slider 220 is mounted on one side of the device body 210 and the unload slider 240 is mounted on the other side of the device body 210, the first drive pulley 223 of the rod slider 220 and The first driven pulley 228 and the first and second pulley shafts 222 and 227 are each the second driving pulley 243 and the second driven pulley 248 and the third and fourth pulley shafts of the unload slider 240, respectively. (242, 247) or the like is preferably installed to face each other.

On the other hand, the shaft bias preventing means for preventing the shaft of the rod slider 220 and the unload slider 240 in one direction is implemented as a shaft support member 260 that supports the shaft that is biased in one direction as the process proceeds.

That is, the wafer loading / unloading apparatus 100 according to the present invention is provided with four pulley shafts 222, 227, 242, 247. Among the four pulley shafts 222, 227, 242, 247, the first pulley shaft 222 and the third pulley shaft 242. ) Are the pulley shafts 222 and 242 of the driving unit coupled to the driving pulleys 223 and 243, and the second pulley shaft 227 and the fourth pulley shaft 247 are the pulley shaft shafts 227 and 247 coupled to the driven pulleys 228 and 248. )to be. Therefore, in order to drive the timing belts 226 and 246 connecting the driving unit and the driven unit, the driving unit should always generate a force and transmit it to the driven unit. When the process is performed for a long time, the unfastening shafts 227 and 247 of the driven unit are driven. It is biased to the side. Accordingly, the shaft support member 260 according to the present invention is installed on the pulley support shafts 227 and 247 of the follower to prevent the follower pulley support shafts 227 and 247 from being biased toward the driving part side.

Specifically, the first driven pulley 228 and the second driven pulley 248, which are driven parts, are disposed to face each other, and are arranged to be spaced apart by a predetermined interval, and the second and the second through the one side direction that do not face each other. 4, the pulley support shaft 227, 247 is mounted on the device body 210, the shaft support member 260, which prevents shaft misalignment, that the pulley support shafts 227, 247 of the follower are biased in the direction of the drive unit as the process proceeds. In order to prevent the mutually spaced portions of the first driven pulley 228 and the second driven pulley 248 are interconnected to prevent the shaft from being biased. Accordingly, the first and second driven pulleys 228 and 248 and the second and fourth unfastening shafts 227 and 247, which are the driven parts of the wafer loading / unloading apparatus 100, are assembled by the shaft supporting member 260 as one assembly. Because it is combined with, the shaft will not be skewed even if the process is progressed for a long time.

Hereinafter, the operation and effects of the wafer loading / unloading apparatus 100 according to the present invention will be described in detail.

First, when it is necessary to load the wafer, the load arm 225 of the load slider 220 is lifted to a certain height by supporting the lower side of the wafer to be loaded.

Thereafter, the first driving motor 221 rotates the first driving pulley 223 by generating a predetermined rotational force. Accordingly, the first timing belt 226 coupled to the first driving pulley 223 and the first driven pulley 228 transfers the load arm 225 by a predetermined distance according to the rotation of the first driving pulley 223. Done. Accordingly, the load arm 225 of the rod slider 220 loads the wafer through the first driving motor 221, the first driving pulley 223, the first timing belt 226, and the like.

On the other hand, when the wafer needs to be unloaded, the unload arm 245 of the unload slider 240 is supported by the lower side of the wafer to be unloaded and lifted to a certain height.

Thereafter, the second driving motor 241 generates a predetermined rotational force to rotate the second driving pulley 243. Accordingly, the second timing belt 246 coupled to the second driving pulley 243 and the second driven pulley 248 transfers the unload arm 245 by a predetermined distance according to the rotation of the second driving pulley 243. And the unloading of the wafer is complete.

At this time, in order to continuously load or unload the wafer, the first and second driven motors 221 and 241, which are driving units, the first and second driving pulleys 223 and 243, and the like are driven first and second driven pulleys 228 and 248. And the second and fourth pulley shafts 227 and 247 are continuously transmitted to a predetermined force. In the conventional case, the pulley shaft shafts 27 and 247 of the driven part are gradually shifted toward the driving part side. ㆍ The second driven pulley (228,248) and the second and fourth pulley shafts (227,247) and the like are combined by the shaft support member 260 into one assembly so that the shaft is not biased as in the past even if the process is progressed for a long time. Will not. Therefore, problems such as bearing wear, eccentric rotation, and loosening of the timing belt, which are caused by the shaft bias, are all prevented in advance.

In the above, the present invention has been described with reference to the specific embodiments shown, but this is merely exemplary, those skilled in the art will understand that various modifications and embodiments can be made therefrom. . Therefore, the scope of the present invention should be defined by the appended claims and their equivalents.

As described above, since the wafer loading / unloading apparatus according to the present invention is provided with a shaft shift preventing means such as a shaft support member, the driven part, which is a continuously receiving portion, is combined into a single assembly, thereby prolonging the process. Even if it proceeds for a while, the shaft is prevented from being biased as in the prior art.

1 is a schematic view showing an embodiment of a wafer loading / unloading apparatus according to the present invention.

<Description of the symbols for the main parts of the drawings>

200: wafer loading / unloading device 220: load slider

225: load arm 224: first LM guide

226: first timing belt 240: unload slider

245: unloading arm 246: second timing belt

Claims (3)

Device body; A load arm mounted on one side of the apparatus body and supporting a lower side of the wafer so as to transfer the wafer, and coupled to one side of the load arm, and having a forward and reverse rotation to reciprocate the load arm within a predetermined section; A belt, a first driving pulley and a first driven pulley coupled to both sides of the first timing belt so as to be rotated forward and backward while maintaining the predetermined tension, and the first timing pulley, and one end of the device body. First and second pulley shafts coupled to each other and axially coupled to the first driving pulley and the first driven pulley, and a first coupled to the first driving pulley and forward-reversely rotating the first driving pulley. A load slider including a drive motor and loading the wafer; An unload arm mounted on the other side of the apparatus body and supporting the lower side of the wafer to transfer the wafer, and coupled to one side of the unload arm and forward and reversely rotated to reciprocate the unload arm within a predetermined period; A second driving pulley and a second driven pulley which are respectively coupled to both sides of the second timing belt so that the timing belt and the second timing belt can be rotated forward and backward while maintaining a predetermined tension, and once in the apparatus body. The third and fourth pulley support shafts coupled to the second driving pulley and the second driving pulley, respectively, and the other end coupled to the second driving pulley, and configured to forward and reverse rotation of the second driving pulley. An unload slider comprising a two-drive motor and unloading the wafer; Wafer loading / unloading device characterized in that it comprises a shaft skew prevention means for preventing the unzipping shaft axis of the rod slider and the unload slider from biasing in one direction. According to claim 1, wherein the declination prevention means Wafer loading / unloading device, characterized in that the shaft support member for connecting the release axis of the load slider and the release axis of the unload slider. 3. The wafer according to claim 2, wherein the shaft support member is coupled to interconnect the second pulley support shaft axially coupled to the first driven pulley and the fourth pulley support shaft axially coupled to the second driven pulley. Loading / unloading device.