KR20050020636A - Grinding material for use in forming partition walls of plasma display panel and method of manufacturing plasma display panel - Google Patents

Abstract

PURPOSE: A grinding material and a method for manufacturing a plasma display panel are provided to achieve improved quality of the plasma display panel by reducing damage to a glass substrate. CONSTITUTION: A grinding material is formed of a zircon bead having a mean particle diameter of 16 to 25§­ and a mean Vickers hardness of 700 to 900Kgf/mm¬2. A method for manufacturing a plasma display panel comprises a step of forming barrier ribs by exposing a barrier rib forming material layer on a substrate through a sand blast resistive mask, and sand blast processing the barrier rib forming material layer.

Description

GRADING MATERIAL FOR USE IN FORMING PARTITION WALLS OF PLASMA DISPLAY PANEL AND METHOD OF MANUFACTURING PLASMA DISPLAY PANEL}

The present invention relates to an abrasive for forming partition walls of a plasma display panel and a method of manufacturing a plasma display panel using the abrasive.

In recent years, plasma display panels (hereinafter referred to as PDPs) have attracted attention as large sized and thin color screen displays, and are rapidly spreading into homes and the like.

1 and 2 are diagrams schematically showing the structure of this PDP. FIG. 1 is a front view of the PDP, and FIG. 2 is a cross-sectional view taken along the line V-V in FIG.

1 and 2, the PDP covers a plurality of row electrode pairs (X, Y) and the row electrode pairs (X, Y) on the back surface of the front glass substrate 1 serving as the display surface of the panel. A dielectric layer 2 and a protective layer 3 made of MgO covering the back surface of the dielectric layer 2 are formed in this order.

Each row electrode X, Y is composed of T-shaped transparent electrodes Xa, Ya and bus electrodes Xb, Yb each formed of a band-shaped metal film.

The row electrodes X and Y are alternately arranged in the column direction so that the respective transparent electrodes Xa and Ya face each other with the discharge gap g interposed therebetween, and the row electrode pairs X and Y respectively. This constitutes one display line L of the matrix display.

Meanwhile, a plurality of column electrodes arranged on the rear glass substrate 4 disposed to face the front glass substrate 1 through the discharge space in which the discharge gas is enclosed so as to extend in a direction orthogonal to the row electrode pairs X and Y. (D), a column electrode protective layer 5 covering the column electrode D, partition walls 6 to be described later that partition discharge spaces, side surfaces of the partition walls 6, and a column electrode protective layer. On (5), phosphor layers 7 formed by dividing colors into red, green, and blue, respectively, are formed.

The partition wall 6 includes horizontal walls 6A extending in the row direction at positions facing the bus electrodes Xb and Yb positioned in the front and back relationship between the row electrode pairs X and Y adjacent to each other, and Vertical walls 6B extending in the column direction at positions opposite to the intermediate positions of the respective transparent electrodes Xa and Ya arranged at equal intervals along the bus electrodes Xb and Yb of the row electrodes X and Y, respectively. It is formed almost in a lattice shape.

In addition, the discharge cells C formed in the portions facing the transparent electrodes Xa and Ya facing each other through the discharge gaps g of the row electrode pairs X and Y in the discharge space are partition walls 6, respectively. It is partitioned by).

Thus, the partition wall 6 which partitions a discharge space for every discharge cell C is formed into a thick film on the back glass substrate 4 in which the column electrode protective layer 5 was formed, for example, insulating partition material, such as glass paste. ) By coating and drying to form a barrier rib material layer, laminating a sand blast resistant photosensitive resist film thereon, exposing the barrier rib material layer through the photosensitive resist film, and then developing to perform sand blast resistance. By forming a resist mask, sandblasting is carried out by polishing the layer forming material layer with a sandblast resistant resist mask by means of an abrasive (blast material), removing the resist mask, and finally firing Is formed.

Conventionally, in the sand blasting process when forming the above-mentioned PDP partition wall, glass beads, stainless beads (SUS beads), SiC, SiO ₂ , Al ₂ O ₃ , ZrO _2, etc. are used as the abrasive (blast material). It is becoming.

Moreover, it is proposed to use a zirconia or a zirconia compound whose particle diameter is 10-15 micrometers as an abrasive (blast material) (for example, refer patent document 1).

[Patent Document 1]

Japanese Patent Laid-Open No. 2001-113465

However, when glass beads are used as an abrasive (blast material), there arises a problem that a sufficient processing rate cannot be obtained because these glass beads are spherical particles.

In addition, when a metallic abrasive such as SUS beads is used, the SUS beads have a high hardness and a high specific gravity, so that the processing rate is high, but there is a problem that metal impurities remain on the processing surface of the panel. .

The above-mentioned proposal to use zirconia or zirconia compounds having a ceramic particle diameter of 10 to 15 µm as an abrasive (blast material) has been made to solve such a problem, but since zirconia has high hardness and specific gravity, it is used for sand blasting. This causes a problem that the surface of the glass substrate is rough.

This invention makes it one of a subjects to solve the problem in the above-mentioned PDP partition formation abrasives.

In order to achieve the above object, the abrasive for forming partition walls of the plasma display panel according to the first invention (invention described in claim 1) is a sand blast in a manufacturing step of forming a partition wall that partitions the discharge space of the plasma display panel. The abrasive used for processing is characterized by consisting of zircon beads having an average particle diameter of 16 to 25 µm and an average Vickers hardness of 700 to 900 Kgf / mm 2.

Moreover, in order to achieve the said objective, the manufacturing method of the plasma display panel by 2nd invention (invention of Claim 2) is carried out through the sand blast resistive mask which laminated | stacked the layer formation material layer formed on the board | substrate on it. A method of manufacturing a plasma display panel comprising a step of forming a partition by sand blasting the material layer for forming a partition after exposure, wherein the sand blasting is performed with an average particle diameter of 16 to 25 µm and an average Vickers hardness. It is characterized by using an abrasive composed of zircon beads of 700 to 900 Kgf / mm 2.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of the abrasive for formation of the partition of PDP by this invention is described.

The abrasive (blast material) in the above embodiment is zircon beads (Zr + SiO ₄ ) having a specific gravity of about 4.0, a hardness of HV700 to 900, and an average particle diameter D ₅₀ = 16 to 25 µm.

And this zircon bead is used for sand blasting at the time of formation of the partition wall of PDP of 50 micrometers in width, 100-150 micrometers in height, and 100-300 micrometers in spacing.

As the abrasive (blast material), the upper limit of the particle diameter of the zircon beads is set in order to ensure the processing accuracy of the partition wall, and the lower limit of the particle diameter is set in order to ensure the processing capability.

This is because when the particle diameter of the zircon beads is too large as the abrasive (blast material), the required processing accuracy cannot be obtained, and when the particle diameter is too small, sufficient processing rate cannot be obtained.

As will be described later, the zircon beads are used as an abrasive (blast material) when sandblasting is performed in the partition formation process of the PDP.

That is, on the back glass substrate 4 in which the column electrode and the column electrode protective layer 5 were formed, an insulating partition material, such as glass paste, was thick-film-coated and dried, and a partition layer formation material layer is formed.

A sand blast resistant photosensitive resist film is laminated on the barrier rib material layer, the barrier layer material layer is exposed through the photosensitive resist film, and then developed to form a sand blast resistant resist mask.

Then, the above-mentioned zircon beads (Zr + SiO ₄ ) having a specific gravity of about 4.0, a hardness of HV700 to 900, and an average particle diameter D ₅₀ = 16 to 25 µm are used to grind the layer forming material layer through the sandblast resistant resist mask. Thereby, sand blasting is performed.

Thereafter, by removing the resist mask and firing, an almost lattice-shaped partition wall having a desired dimension is formed.

Here, zirconia-based zirconia beads of ZrY (zirconia + yttrium) and zircon beads of ZrSiO ₄ (zirconia + silica) are included.

Comparing the results of processing a glass substrate with two types of abrasives, namely, spherical zirconia abrasives and zircon abrasives, the substrates processed by zirconia beads (ZrY) have a glass surface in which the glass surface is formed as a PDP. Problems remain such as durability or adhesion of the frit when overlapping.

On the other hand, since the hardness of zircon beads (ZrSiO ₄ ) is only 700 to 900 kgf / mm 2 compared to the hardness of the zirconia bead (ZrY) of 1000 kgf / mm 2, the damage to the glass substrate is inferior. It is less than half as compared to zirconia beads (ZrY).

Therefore, the abrasive (blast material) of the above-described embodiment is processed by setting the average particle diameter from 10 to 15 µm to 16 to 25 µm and increasing the weight per particle instead of hardness in order to increase the processing rate. We plan to increase rate.

As a result, the processing rate of about 88% of zirconia beads (ZrY) was achieved by zircon beads (ZrSiO ₄ ).

By using this zircon bead (ZrSiO4) as an abrasive (blast material), a high processing rate can be achieved while reducing the damage to a glass substrate with a nonmetallic abrasive.

3 (a) and 3 (b) show the results when a damage comparison experiment was performed on a glass plate using zircon beads (ZrSiO ₄ ) and zirconia beads (ZrY) as abrasives (blast materials), respectively. have.

In addition, this experiment was carried out using zircon beads (ZrSiO ₄ ) and zirconia beads (ZrY) in the following forms.

Zircon Beads:

Specific gravity 4.0, hardness HV700-900, average particle diameter 20 ㎛

Zirconia Beads:

Specific gravity 6.0, hardness HV1300, average particle diameter 15 ㎛

4 (a) and 4 (b) show damage of SUS plates using the same zircon beads (ZrSiO ₄ ) and zirconia beads (ZrY) as abrasives (blast materials), respectively, as used for the experiments on the glass plates. The result at the time of performing a comparative experiment is shown.

From the above experimental results, zircon beads (ZrSiO ₄ ) having a hardness of HV700 to 900 and an average particle diameter D ₅₀ = 16 to 25 µm were used as an abrasive (blast material) when sandblasting was performed in the formation process of the partition wall of the PDP. In this case, it was found that the damage to the glass plate can be suppressed to almost 1/23 to 1/50 as compared with the zirconia beads (ZrY) while securing a processing rate almost equivalent to that of the zirconia beads (ZrY).

In addition, since the zircon beads (ZrSiO ₄ ) can suppress the damage to the SUS plate by almost 0.87 times as compared to the zirconia beads (ZrY), in the conventional PDP manufacturing apparatus on the premise of using zirconia beads (ZrY). Even in this case, damage to the device can be reduced, whereby the failure frequency of the PDP manufacturing device can be reduced.

In addition, when zircon beads (ZrSiO ₄ ) are used as the abrasive (blast material), the particle diameter thereof is set such that the maximum work rate is achieved within the upper limit of 25 μm in accordance with the dimension of the opening of the partition wall.

The abrasive material (blast material) in the above embodiment is an abrasive material for forming partition walls of PDP composed of zircon beads having an average particle diameter of 16 to 25 µm and an average Vickers hardness of 700 to 900 Kgf / mm 2. I'm doing it.

In the PDP partition wall forming abrasive constituting the above-described embodiment, the average particle diameter of the zircon beads is set to 16 to 25 µm, compared to the conventional particle size of the zirconia beads of 10 to 15 µm, and per particle. When the weight is increased and used as an abrasive for sand blasting in the manufacturing process of the PDP, the decrease in the processing rate due to the smaller hardness as compared with the zirconia beads is suppressed, and the glass substrate is more than the zirconia beads. Since the damage is small, it is possible to manufacture high quality PDP.

Moreover, in the manufacturing method of the PDP in the said embodiment, after exposing the partition formation material layer formed on the board | substrate through the sandblast resistant mask laminated | stacked on it, a partition wall is formed by sandblasting this partition formation material layer. In the manufacturing method of PDP including the process of forming a WHEREIN, Embodiment which performs the said sandblasting process using the abrasive which consists of zircon beads whose average particle diameter is 16-25 micrometers and average Vickers hardness is 700-800 Kgf / mm <2>. The manufacturing method of PDP of the above is made into embodiment of the higher concept.

According to the manufacturing method of the PDP which comprises this higher concept embodiment, when sandblasting a partition formation material layer, zircon beads are used as an abrasive, and the average particle diameter of the zircon beads is the particle diameter of the conventional zirconia beads. It is set to 16-25 micrometers compared with what was 10-15 micrometers, and the weight per particle increases, and the fall of the processing rate by the hardness which is small compared with zirconia bead is suppressed, Since the damage is small, it is possible to manufacture high quality PDP.

According to the PDP manufacturing method and the PDP partition forming abrasive according to the present invention, since the hardness is smaller than that of the conventional zirconia beads, the decrease in the processing rate is suppressed, and the damage to the glass substrate is smaller than that of the zirconia beads. It can manufacture.

1 is a front view showing a panel structure of a conventional PDP.

2 is a cross-sectional view taken along the line V-V of FIG.

Figure 3 is a view showing the results of the damage experiment on the glass plate by the abrasive for forming partition walls of the PDP according to the present invention.

4 is a view showing the results of a damage experiment on the SUS plate by the abrasive for forming the partition wall of the PDP according to the present invention.

<Explanation of symbols for the main parts of the drawings>

1: front glass substrate

2: dielectric layer

3: protective layer

4: back glass substrate

5: thermal electrode protective layer

6: bulkhead

7: phosphor layer

Claims (2)

As an abrasive used for sandblasting in the manufacturing process of forming the partition which partitions the discharge space of a plasma display panel, An abrasive for forming partition walls of a plasma display panel, comprising zircon beads having an average particle diameter of 16 to 25 µm and an average Vickers hardness of 700 to 900 Kgf / mm 2. A method of manufacturing a plasma display panel comprising exposing a barrier layer material layer formed on a substrate through a sand blast resistive mask stacked thereon, and then forming the barrier rib by sand blasting the barrier layer material layer. In The sand blasting process is performed using an abrasive composed of zircon beads having an average particle diameter of 16 to 25 µm and an average Vickers hardness of 700 to 900 Kgf / mm 2.