KR200490376Y1

KR200490376Y1 - Sealing structure used in Substrate disposition apparatus

Info

Publication number: KR200490376Y1
Application number: KR2020150002764U
Authority: KR
Inventors: 양승용; 권형국; 김현오; 오웅교; 유광수; 이용현
Original assignee: 주성엔지니어링(주)
Priority date: 2015-04-29
Filing date: 2015-04-29
Publication date: 2019-11-06
Also published as: KR20160003846U

Abstract

One embodiment of the sealing structure, a flange protruding and provided in one end of the first pipe; A second pipe formed in a cylindrical shape and disposed to communicate with the first pipe; A push ring detachably mounted on an outer circumferential surface of the second pipe and mounted to face the flange; A sealing member disposed between the flange and the push ring to seal a communication portion between the first pipe and the second pipe as the flange and the push ring are in close contact with each other; And it may include a clamp for pressing the flange and the push ring in close contact with each other.

Description

Sealing structure used in Substrate disposition apparatus

Embodiments relate to a sealing structure used in a substrate processing apparatus that can be easily combined and separated, and can significantly reduce the occurrence of breakage during assembly.

The content described in this section merely provides background information on the embodiments and does not constitute a prior art.

In general, a semiconductor memory device, a liquid crystal display, an organic light emitting device and the like are manufactured by stacking a structure having a desired shape by performing a plurality of semiconductor processes on a substrate.

The semiconductor manufacturing process includes a process of depositing a predetermined thin film on a substrate, a photolithography process of exposing a selected region of the thin film, an etching process of removing the thin film of the selected region, a process of growing a crystal on the substrate, and the like. .

The substrate processing process of manufacturing such a semiconductor is performed in a substrate processing apparatus including a process chamber in which an optimal environment is formed for the process.

The substrate treating apparatus may include a plurality of lower apparatuses and components for carrying out a substrate treating process, and pipes for sending a source material, a process gas, and other fluids used in the substrate treating process to the lower apparatuses or components. have.

Such pipes may be connected to each other, and a sealing structure may be formed to prevent the fluid from flowing out to the gap formed in the connection portion.

In general, the sealing structure needs to combine several devices or components for sealing. As the coupling mechanism, fixing members such as bolts and screws having high coupling strength are generally used.

However, the fastening member having such a high bonding strength may damage the devices or components constituting the sealing structure during the bonding process. In addition, when the sealing structure is used for a long period of time, there is a fear that the device or parts constituting the sealing structure are damaged by the fixing member used for the coupling.

In addition, when the devices or components constituting the sealing structure are formed of a material having high hardness, such as ceramics, it is difficult to form through holes for joining the fixing member to the devices or parts, and as a result, assembly and disassembly of the sealing structure There is a problem that can be difficult.

Accordingly, the embodiment relates to a sealing structure for use in a substrate processing apparatus that can be easily coupled and separated and that can significantly reduce the occurrence of breakage during assembly.

Embodiments of the present invention are not limited to the above-mentioned technical problems, and other technical problems not mentioned above may be clearly understood by those skilled in the art to which the embodiments belong.

The sealing member may be provided to surround the outer peripheral surface of the second pipe.

The sealing member may be formed of an O-ring.

The flange may be formed along the outer circumferential surface of the second pipe and include a seating groove in which the sealing member is seated.

The sealing member seated in the seating groove may be pressurized by the flange to seal the communication portion of the first pipe and the second pipe.

The flange may be formed of at least a portion of the other surface of the surface in close contact with the push ring as an inclined surface.

The clamp may be to press the inclined surface of the flange.

The push ring may be at least a portion of the other surface of the surface in close contact with the flange is formed in a curved surface.

The clamp may be to press the curved surface of the push ring.

The push ring, the first pressing portion for pressing the flange; And a second pressing part protruding from the first pressing part and pressing the sealing member.

The sealing member may be pressurized by the second pressing unit to seal the communication portion between the first pipe and the second pipe.

The flange or the second pipe may be formed of a ceramic material.

In the sealing structure of the embodiment, since the coupling can be easily performed by using the clamp, the assembly of the parts can be facilitated.

In addition, since a fixing member such as a bolt is not used for each component, deformation and breakage of the component by the fixing member can be prevented.

In addition, since the primary sealing by the sealing member and the secondary sealing by the flange and the push ring is possible, it is possible to effectively block the outflow of the fluid at the communication portion of the pipe.

1 is an exploded perspective view showing a sealing structure according to an embodiment.
2 is an exploded cross-sectional view showing a sealing structure according to an embodiment.
3 is a sectional view showing a sealing structure according to an embodiment.
FIG. 4 is a diagram illustrating an embodiment of part A of FIG. 3.
FIG. 5 is a diagram illustrating another embodiment of part A of FIG. 3.

Hereinafter, exemplary embodiments will be described in detail with reference to the accompanying drawings. The embodiments may be modified in various ways and may have various forms. Specific embodiments are illustrated in the drawings and described in detail in the text. However, this is not intended to limit the embodiments to the specific forms disclosed, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the embodiments. In this process, the size or shape of the components shown in the drawings may be exaggerated for clarity and convenience of description.

Terms such as "first" and "second" may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. In addition, terms that are specifically defined in consideration of the configuration and operation of the embodiments are only intended to describe the embodiments, and do not limit the scope of the embodiments.

Furthermore, the relational terms such as "upper / top / up" and "bottom / bottom / bottom", etc., used below do not necessarily require or imply any physical or logical relationship or order between such entities or elements, It may be used only to distinguish one entity or element from another entity or element.

1 is an exploded perspective view showing a sealing structure according to an embodiment. 2 is an exploded cross-sectional view showing a sealing structure according to an embodiment. The sealing structure of the embodiment may include a flange 100, a second pipe 200, a push ring 300, a sealing member 400, and a clamp 500.

The flange 100 may protrude on one end of the first pipe 10 and be provided in a cylindrical shape. In this case, the flange 100 may be integrally formed at one end of the first pipe 10. On the other hand, the first pipe 10 is provided in the substrate processing apparatus, for example, may be provided as part of a block-type device for heating or cooling the fluid flowing from the second pipe (200).

When the sealing structure is coupled, the flange 100 may be provided to face the push ring 300, and the flange 100 and the push ring 300 may be in close contact with each other. have.

Due to the structure in which the flange 100 and the push ring 300 is in close contact, at least a portion of the flange 100 and the push ring 300 to face each other close to the first pipe 10 and the second pipe ( It may serve as a sealing to prevent the outflow of the fluid passing through the 200).

Specifically, when the sealing member 400 is coupled, the flange 100 is the first protrusion projecting in the longitudinal direction of the second direction from the first pipe 10 and the first bent from the first protrusion 2 may be provided as a protrusion.

The first protrusion and the first protrusion may be formed in a cylindrical shape as a whole. An end portion of the second pipe 200 may be inserted into an inner circumference of the first protruding portion so that the first pipe 10 and the second pipe 200 may communicate with each other.

One surface of the second protrusion may be formed perpendicular to the longitudinal direction of the second pipe 200, and one surface may be in close contact with each other by the clamp 500 to face one surface of the push ring 300. have.

Meanwhile, an inclined surface 100a may be formed on the second protrusion. The inclined surface 100a may be formed on at least a portion of the other surface of the one surface in close contact with the push ring 300 of the flange 100.

The inclined surface 100a is pressed by the clamp 500, and as the inclined surface 100a is pressed, the flange 100 and the push ring 300 having the first protruding portion may be in close contact with each other.

As the flange 100 and the push ring 300 are in close contact with each other, the sealing member 400 is pressed to closely contact the outer circumferential surface of the second pipe 200 so that the first pipe 10 and the second pipe are closed. The communication portion of 200 can be sealed.

Meanwhile, a seating groove 110 may be formed in the flange 100. The seating groove 110 is formed along the outer circumferential surface of the second pipe 200 and is a portion on which the sealing member 400 is seated.

Specifically, the seating groove 110, as shown in Figure 2, is formed by recessing a portion of the flange 100 in the lower portion of the second protrusion of the flange 100, curved in cross section It may be formed by being recessed into a shape and a fan shape.

In this case, the sealing member 400 seated in the seating groove 110 may be pressed by the flange 100 to seal the communication portion between the first pipe 10 and the second pipe 200. .

Specifically, the sealing member 400 is pressed by the surface of the seating groove 110, the outer peripheral surface of the first pressing portion 310 and the second pipe 200 of the push ring 300, By contact with the surface of the seating groove 110, the first pressing portion 310 of the push ring 300 and the outer peripheral surface of the second pipe 200 in close contact with the first pipe 10 and the second pipe ( The communication portion of 200) can be sealed. Detailed description thereof will be described with reference to FIGS. 3, 4, and 5.

The second pipe 200 may be formed in a cylindrical shape and may be disposed to communicate with the first pipe 10. Fluid may flow in the second pipe 200, and the fluid may flow from the first pipe 10 to the second pipe 200, or vice versa from the second pipe 200. 10) may flow.

Meanwhile, the flange 100 or the second pipe 200 may be formed of a ceramic material. In general, in the case of using a coupling member of a first pipe and a second pipe using a fastening member such as a bolt and a screw having a high coupling strength, a groove or a hole into which the fastening member is inserted into the flange 100 or the second pipe 200. It is necessary to form a plurality.

However, in the embodiment, when the flange 100 or the second pipe 200 is formed of a ceramic material, it is difficult to form the groove or hole due to the property of the ceramic (property) properties, the flange in the forming process 100 or the second pipe 200 may be damaged.

In addition, when the fixing member is fastened to a groove or hole formed in the flange 100 or the second pipe 200, the flange 100 or the second pipe 200 is damaged by the fastening member. There is concern.

Therefore, when the flange 100 or the second pipe 200 is formed of a ceramic material, the sealing structure of the embodiment has the effect of preventing damage to the flange 100 or the second pipe 200.

The push ring 300 may be mounted to be detachable from the outer circumferential surface of the second pipe 200 and may be mounted to face the flange 100. When the sealing structure is coupled, the push ring 300 may be provided to face the flange 100, and may be pressed by the clamp 500 so that the flange 100 and the push ring 300 are mutually connected. Facing parts may be in close contact with each other.

As described above, due to the structure in which the flange 100 and the push ring 300 is in close contact, at least a portion of the flange 100 and the push ring 300 is in close contact with each other, the first pipe 10 to a certain degree And may serve as a sealing to prevent the outflow of the fluid passing through the second pipe 200.

As shown in FIG. 2, the push ring 300 may include a first pressing unit 310 and a second pressing unit 320. The first pressing part 310 may be in close contact with one surface of the flange 100, and may press the flange 100 as it is pressed by the clamp 500.

As described above, a portion of one surface of the flange 100 and one surface of the push ring 300 is pressed by the clamp 500 to form a portion in close contact with each other. It may serve as a sealing to prevent the outflow of the fluid passing through the second pipe 200.

The second pressing unit 320 protrudes from the first pressing unit 310 toward the first pipe 10 and is provided at a position opposite to the sealing member 400, so that the sealing structure is coupled. In this case, the sealing member 400 may pressurize in the longitudinal direction of the second pipe 200.

As described above, the sealing member 400 is pressed by the surface of the seating groove 110, the first pressing portion 310 of the push ring 300 and the outer circumferential surface of the second pipe 200. The communication portion of the first pipe 10 and the second pipe 200 may be sealed.

Meanwhile, the curved surface 300a may be formed on the push ring 300. The curved surface 300a may be formed in the first pressing part 310, and at least a portion of the other surface of one surface of the first pressing part 310, which is in close contact with the flange 100 of the push ring 300. Can be formed on.

The curved surface 300a, like the curved surface 300a, is pressed by the clamp 500, and the push ring 300 having the first pressing portion 310 as the curved surface 300a is pressed and the The flanges 100 may be in close contact with each other. Therefore, as the flange 100 and the push ring 300 are in close contact with each other, the sealing member 400 is pressed to adhere to the outer circumferential surface of the second pipe 200 so that the first pipe 10 and the first pipe are closed. The communication portion of the two pipes 200 can be sealed.

The sealing member 400 may be disposed between the flange 100 and the push ring 300. The sealing member 400 may be pressed by the second pressing unit 320 to seal the communication portion between the first pipe 10 and the second pipe 200.

Specifically, the sealing member 400, when the sealing structure is coupled, is seated in the seating groove 110 of the flange 100, by the second pressing portion 320 of the push ring 300 The second pipe 200 may be pressed in the longitudinal direction. In addition, the sealing member 400 may be provided to surround the outer circumferential surface of the second pipe 200.

Due to this structure, when the sealing structure is coupled, as the flange 100 and the push ring 300 is in close contact with each other, the sealing member 400 is the first pipe 10 and the second pipe ( The communication portion of 200) can be effectively sealed.

On the other hand, the sealing member 400 is pressed by the outer circumferential surface of the flange 100, the push ring 300 and the second pipe 200 to communicate the communication portion of the first pipe 10 and the second pipe 200. In order to seal effectively, it may be formed of a material that can be somewhat deformed by the pressing force.

This is because the sealing member 400 is deformed by the pressing force, thereby effectively sealing a gap in which the fluid flowing through the first pipe 10 and the second pipe 200 can flow out.

Accordingly, the sealing member 400 may be formed of a material, for example, aluminum, a polymer, or the like, in which deformation of the shape occurs due to a pressing force to effectively seal the gap.

On the other hand, when the fluid flowing in the first pipe 10 and the second pipe 200 is a high temperature or when the first pipe 10 or the second pipe 200 is heated, the sealing member 400 May be formed of a material that can withstand high temperatures.

In addition, the sealing member 400 is disposed so as to surround the cylindrical second pipe 200 can be used to have a shape suitable for this. Therefore, the sealing member 400 may be formed of, for example, an O-ring having a circular, elliptical, or other curved shape in cross section.

The clamp 500 may serve to press the flange 100 and the push ring 300 to closely contact each other. 1 and 2, the clamp 500 is formed to be hollow and both sides are formed to protrude inward in the radial direction, the pair of protrusions are each the flange 100 and the push ring By pressing the 300 can be brought into close contact with each other.

The clamp 500 may be provided in a pair cut across the diameter, for example, to facilitate attachment and detachment of the flange 100 and the push ring 300. Accordingly, each piece of the clamp 500 may be coupled to the flange 100 and the push ring 300 to bring the flange 100 and the push ring 300 into close contact with each other.

In order to keep the clamp 500 firmly coupled to the flange 100 and the push ring 300, the pieces of the clamp 500 may be coupled to each other by a coupling mechanism (not shown). In addition, in order to facilitate the coupling and separation between the respective pieces of the clamp 500, for example, the coupling mechanism is a screw coupling that can be combined or separated from each other by manual operation of the operator without a separate mechanism An instrument (not shown) can be used.

In addition, the clamp 500 is in close contact with the flange 100 and the push ring 300, and if the flange 100 and the push ring 300 can be easily coupled and separated other structures than the above embodiment You can also use things with.

3 is a sectional view showing a sealing structure according to an embodiment. FIG. 4 is a diagram illustrating an embodiment of part A of FIG. 3. As shown in FIG. 3, the second pipe 200 may be connected between the pair of first pipes 10 and 10 ′, and thus, the first pipe 10 and the second pipe 200 may be connected. The communicating portion of may also be formed in two. Accordingly, the flange 100, the push ring 300, the sealing member 400 and the clamp 500 may also be provided in pairs.

When the sealing structure is coupled, as shown in FIG. 4, one of the pair of protrusions of the clamp 500 presses the inclined surface 100a of the flange 100, and the other push ring ( The curved surface 300a of 300 may be pressurized.

As the inclined surface 100a and the curved surface 300a are pressed by the clamp 500, the second protruding portion of the flange 100 and the second pressing portion 320 of the push ring 300 are in close contact with each other, thereby providing a fluid. The secondary sealing can be prevented by passing through the sealing member 400 to prevent the outflow to the outside.

In addition, as the inclined surface 100a and the curved surface 300a are pressed by the clamp 500, the flange 100 and the push ring 300 are pressed to seal the member 400 disposed therebetween, The primary sealing may be performed by preventing the fluid from flowing out through the gap between the communication portions of the first pipe 10 and the second pipe 200.

In this case, the sealing member 400 may be pressed by the surface of the seating groove 110, the first pressing portion 310 of the push ring 300 and the outer circumferential surface of the second pipe 200. Therefore, the sealing member 400 may be pressed to cause deformation.

The sealing member 400 is in close contact with the outer circumferential surface of the surface of the seating groove 110, the first pressing portion 310 of the push ring 300 and the second pipe 200 due to this deformation, the fluid is external It can effectively block gaps that can leak out.

On the other hand, the first pipe 10 and the second pipe 200 may be easily detachable for cleaning, repair, and the like. To this end, the push ring 300 may be provided to be detachable to the outer circumference of the second pipe (200).

Due to this structure, as shown in FIG. 4, a space S may be formed on the inner circumferential surface of the push ring 300 and the outer circumferential surface of the second pipe 200, and pass through the sealing member 400. One fluid may flow out through the separation space (S).

In order to block the external outflow of the fluid, for example, the separation space S may be filled with a blocking material having a form of a tape, a film, or the like, to perform a third sealing.

On the other hand, the surface in contact with the sealing member 400 of the flange 100 to press the sealing member 400 may be formed as a curved surface to form an inclination in the upward direction as shown in FIG.

The curved surface may simultaneously press the sealing member 400 in the lateral direction and the lower direction. Due to this structure, the sealing member 400 is pressed by the flange 100 in the lateral direction and the lower direction, and in close contact with the surface of the lower second pipe 200 and at the same time close to the end face of the second pressing portion. Can be.

Therefore, the sealing member 400 may seal the communication space between the first pipe 10 and the second pipe 200 by effectively sealing the separation space (S).

FIG. 5 is a diagram illustrating another embodiment of part A of FIG. 3. As shown in FIG. 5, in contrast to the embodiment of FIG. 4, a curved surface may be formed in the second pressing part 320 of the push ring 300.

The curved surface formed on the second pressing part 300 may simultaneously press the sealing member 400 in the lateral direction and the lower direction. Accordingly, the sealing member 400 may be pressed in the lateral direction and the downward direction by the push ring 300 to be in close contact with the surface of the lower second pipe 200 and to be in close contact with the end face of the second pressing part. .

Therefore, similar to the embodiment of FIG. 4, the sealing member 400 may effectively seal the separation space S to seal the communication portion between the first pipe 10 and the second pipe 200. have.

In the sealing structure of the embodiment, since the clamp 500 can be easily coupled and separated, the assembly of the parts can be facilitated.

In addition, since the primary sealing by the sealing member 400 and the secondary sealing by the flange 100 and the push ring 300 is possible, it is possible to effectively block the outflow of the fluid at the communication portion of the pipe.

As described above in connection with the embodiment, only a few are described, but other forms of implementation are possible. The technical contents of the above-described embodiments may be combined in various forms as long as they are not incompatible with each other, and thus may be implemented in a new embodiment.

10, 10 ': first pipe
100: flange
100a: slope
110: seating groove
200: second piping
300: push ring
300a: surface
310: first pressing unit
320: second pressure unit
400: sealing member
500: clamp
S: separation space

Claims

A flange protruding from one end of the first pipe and having a cylindrical shape, the flange having a seating groove formed on an inner lower portion of the protrusion;
A second pipe formed in a cylindrical shape and disposed to communicate with the first pipe;
A push ring having a first pressing portion for pressing the flange and a second pressing portion for pressing the seating groove, the push ring being detachably mounted on an outer circumferential surface of the second pipe to face the flange;
Disposed between the flange and the push ring to surround the outer circumferential surface of the second pipe, the first pipe and the first pipe being inserted into the seating groove by the second pressing part as the flange and the push ring come into close contact with each other; Sealing member for sealing the communication portion of the two pipe; And
Sealing structure comprising a clamp detachably coupled to the coupling portion of the flange and the push ring to press the flange and the push ring in close contact with each other.

The method of claim 1,
The push ring is formed to protrude from the first pressing portion,
The clamp has a hollow structure and a sealing structure having a pair of protrusions protruding radially inwardly on both sides to press the flange and the push ring.

The method of claim 1,
The sealing member is a sealing structure, characterized in that formed by O-ring (O-ring).

delete

The method of claim 1,
The flange is a sealing structure, characterized in that at least part of the other surface of the surface in close contact with the push ring is formed as an inclined surface.

The method of claim 6,
The clamp is a sealing structure, characterized in that for pressing the inclined surface of the flange.

The method of claim 1,
The push ring is a sealing structure, characterized in that at least a part of the other surface of the surface in close contact with the flange is formed in a curved surface.

The method of claim 8,
And the clamp presses the curved surface of the push ring.

delete

The method of claim 1,
The flange or the second pipe sealing structure, characterized in that formed of a ceramic (ceramic) material.