KR101807757B1

KR101807757B1 - Vaccum Pipping Device For Seal

Info

Publication number: KR101807757B1
Application number: KR1020150113743A
Authority: KR
Inventors: 이상은
Original assignee: 주식회사 에스이티
Priority date: 2015-08-12
Filing date: 2015-08-12
Publication date: 2017-12-11
Also published as: KR20170019660A

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum piping device for a vacuum, and is constructed in a vacuum piping line requiring a vacuum working process in semiconductor, LCD, LED, and other manufacturing fields. The vacuum piping device forms a vacuum hole for vacuum pumping of a vacuum piping line A flange pipe connected between two adjacent vacuum pipes of the plurality of vacuum pipes to connect the two vacuum pipes to each other, a centering ring interposed between the flange pipes to prevent leakage of the vacuum to the outside, And an O-ring that is seated along the circumference of the centering ring to seal the gap between the flange pipes to prevent secondary leakage of the vacuum.

Description

[0001] VACUUM PIPING DEVICE FOR SEAL [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum piping device for sealing, and more particularly, to a vacuum light distribution device for sealing that improves sealing of piping in vacuum piping lines constructed in semiconductor, LCD, LED, and other manufacturing apparatuses.

In general, many processes in the semiconductor manufacturing process require that the inside of the chamber be in a vacuum state during the process. In such a vacuum requiring process, the degree of vacuum in the chamber is determined by determining the semiconductor manufacturing yield and the quality As one of the important factors, it is becoming increasingly important as semiconductor devices become more highly integrated.

In recent years, environmental safety accidents are frequent due to the sealing problem, and serious and serious human and material damages are increasing.

FIGS. 1 and 2 are perspective views of SUS centering and Teflon centering according to a conventional technique, and FIGS. 3 and 4 are cross-sectional views illustrating connection states of vacuum lines based on FIGS. 1 and 2. FIG.

1 and 2 and FIGS. 3 and 4, the SUS centering ring 20 or the Teflon centering ring 30 is interposed between the flange pipes P connected to each other in the state of being adjacent to each other, The centering rings 20 and 30 interposed between the flange pipes P are interposed in such a manner as to be fitted in the stepped grooves PG formed in the flange pipe P. In this case,

During the process in the vacuum chamber, the centering rings 20 and 30 and the O-rings 10 are exposed to toxic gas and heat corrosion and cracks in the O-ring 100 and the centering rings 20 and 30, cracks or melting phenomenon occurs.

In other words, these problems lead to the failure of the vacuum inside the chamber, which causes the occurrence of the process accident, and it is exposed to the serious situation including the environmental safety accident and the life injury.

Accordingly, it has become necessary to improve the yield of the semiconductor, LCD, LED, and other manufacturing apparatuses and to secure a stable yield by improving the efficiency of preventing the leakage of the vacuum line, and furthermore, There is a demand for a method for avoiding this problem.

Patent Document 001 Patent No. 10-1455642 Patent Document 002 Patent No. 10-1448686 Patent Document 003: Registered Patent No. 10-1486192 Patent Document 004 Published Utility Model No. 20-2015-0001579 Patent Document 005: Japanese Patent Application Laid-Open No. 10-2014-0049653 Patent Document 006: Japanese Patent Application Laid-Open No. 10-2014-0051655 Patent Document 007 Registration Utility Model No. 20-0469901

In order to solve the above-mentioned problems, the present invention is directed to a vacuum lighting apparatus for ceiling for enhancing the vacuum state in the chamber by improving the sealing of piping in a vacuum piping line constructed in semiconductor, LCD, LED, The purpose of this is to provide.

According to an aspect of the present invention, there is provided a vacuum piping system including: a vacuum piping line including a plurality of vacuum piping having a vacuum hole for performing vacuum pumping, and a plurality of vacuum pipes connected to adjacent two vacuum piping, A centering ring disposed between the flange piping to prevent vacuum leakage to the outside, and a sealing member mounted along the periphery of the centering ring to seal a gap between the flange piping to prevent a vacuum leak, And the flange pipe and the flange pipe, wherein the center ring protrudes from the center at both sides along the circumference of the center ring, and the airtightness in the form of being crushed by the close contact with the side edge of the flange pipe To prevent pressure leakage in the piping, and to form a centering ring And a sealing member that is hermetically sealed between an end surface of the flange pipe closely contacting with the projection ring and an end surface of the center ring closely contacted with the projection ring formed in the flange pipe, wherein the sealing member is closed in the form of covering the outer side and the inner side, The back surface and the inner surface are characterized by a sealing piping system for sealing, which is an embossed surface in which concave and convex shapes are chained in a cascade for airtight sealing.
The flange pipe has a stepped portion formed along the outer periphery of the inner vacuum hole and a protruding portion protruded to both sides of the lower end along the circumference of the centering ring to engage with the inclined bent shape .
The centering is a kind of gasket and is characterized by a sealing piping system composed of any one of SUS, nickel, copper, and aluminum.

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As described above, according to the present invention, since the sealing of the piping in the vacuum piping line constructed in the semiconductor, LCD, LED, and other manufacturing apparatus is improved, Can be improved.

In addition, according to the present invention, since the leakage of the toxic gas is prevented by strengthening the vacuum state in the chamber through the vacuum piping line, it is possible to prevent human and material accidents.

In addition, according to the present invention, there is provided a vacuum vacuum piping system in which an O-ring is installed to cause a small scratch on the surface of a vacuum pipe during handling, thereby preventing pressure leakage There is an effect.

1 is a perspective view showing an SUS centering and an O-ring used in a conventional vacuum line;
FIG. 2 is a perspective view showing Teflon centering and O-rings used in a conventional vacuum line; FIG.
Fig. 3 is a cross-sectional view of the SUS centering and o-ring interposed in the flange pipe shown in Fig. 1 in an open state. Fig.
FIG. 4 is a cross-sectional view of the interposition of the Teflon centering and o-rings of FIG. 2 interposed in the flange piping in an open state.
5 is a perspective view of a first embodiment of a vacuum piping system for sealing according to the present invention.
FIG. 6 is a perspective view including the separation of the centering and the O-ring shown in FIG. 5; FIG.
7 is a cross-sectional view of the centering and o-ring interposed between the flange pipe and the flange pipe shown in Fig. 5; Fig.
FIG. 8 is a view of a second embodiment showing a cross-sectional state of centering and covering between a flange pipe and a flange pipe in a sealing vacuum piping apparatus according to the present invention. FIG.
9 is a view showing another modified example of the flange piping and centering shown in Fig.
10 is a view showing another modified example of the flange piping and the centering in the vacuum vacuum piping system according to the present invention.

The terms and words used in the present specification and claims should not be construed as limited to ordinary or dictionary terms and the inventor may appropriately define the concept of the term in order to best describe its invention And it should be construed as meaning and concept consistent with the technical idea of the present invention.

Therefore, the embodiments described in the present specification and the configurations shown in the drawings are only the most preferred embodiments of the present invention and do not represent all the technical ideas of the present invention. Therefore, It is to be understood that equivalents and modifications are possible.

In the following description of the various embodiments of the present invention, the same components are denoted by the same reference numerals, not the different reference numerals.

Such a vacuum piping system for sealing according to the present invention will be described in detail below with preferred embodiments.

As shown in FIGS. 5 and 6, the vacuum piping system of the present invention includes a plurality of vacuum pipes in which a vacuum hole is formed for vacuum pumping in a vacuum piping line, and a plurality of vacuum pipes A flange pipe (100, 101) connected between the vacuum pipes to connect the two vacuum pipes to each other, a centering ring (200) interposed between the flange pipes to prevent leakage of the vacuum to the outside for the first time, And an O-ring 300 that seals the gap between the flange pipes to prevent secondary leakage of the vacuum. Of course, it is noted that the plurality of vacuum pipes are not shown in the drawings.

That is, according to the present invention, as shown in FIG. 7, two neighboring flange pipes 100 and 101 are interposed between the flange pipes 100 and 101 to connect vacuum holes in the flange pipes 100 and 101, And an O-ring 300 installed around the centering ring 200 to seal a gap formed between the two flange pipes 100 and 101 and prevent secondary leakage of the vacuum to the outside .

Here, the centering 200 may be a gasket part configured for a sealing purpose. Although the O-ring 300 formed around the centering ring 200 has a purpose of preventing the vacuum leakage secondarily, it is difficult to prevent leakage of the vacuum due to defects or defects due to small scratches or exposure to toxic gas The vacuum state of the vacuum pipe (not shown) can be maintained due to the structural and physical characteristics of the centering 200.

In other words, as shown in FIG. 7, which is shown in the first embodiment, the centering 200 is coupled to the two flange pipes 100 and 101 in such a manner that the centering 200 is in close contact with the centering 200, And the protrusion rings 230 are formed at both sides of the center ring 200 at both sides of the center ring 200. Thus, Even if an O-ring is defective or defective due to an environment in which the O-ring 300 is exposed to a scratch or a toxic gas, the O-ring 300 is tightly adhered to the side ends of the pipes 100 and 101, Vacuum leakage can be prevented and the vacuum can be kept secret.

At this time, the material of the centering 200 is made of SUS material, and materials such as copper, nickel, aluminum and the like can be selectively used according to the purpose of use, and the centering 200 is adhered to the neighboring flange pipes 100 and 101 The protrusion ring 230 protruding from both sides along the circumference of the centering ring 200 is formed in a manner such that the protrusion ring 230 is crushed in shape by the close contact with the end portions of the flange pipes 100 and 101 It is possible to secure the airtightness by sealing the end portions of the flange pipes 100 and 101 and to prevent corrosion and cracking or melting phenomenon even when exposed to heat temperature and toxic gas to prevent leakage of the vacuum line Thereby improving yield and ensuring a stable yield in semiconductor, LCD, LED and other manufacturing apparatuses.

The flange pipes 100 and 101 form a stepped portion 110 around the inner diameter of the vacuum hole. The stepped portion 110 is formed at the lower end of the projection ring 230 formed on both sides of the center ring 200 And are coupled by protrusions 220 protruding from both sides.

8, when the centering 200 is coupled with the flange pipes 100 and 101 in such a manner that the centering 200 is joined to the centering 200, It is possible to prevent the leakage of the vacuum in the pipe.

That is, since the centering 200 is a centering using an existing part, the centering 200 has a structure in which a separate covering 250 is placed on the centering 200 to compensate for the unevenness on both sides along the circumference. The cover 250 covers the both ends of the centering 200 as an open space in the upper space and is provided with protrusion rings 230 like the first embodiment on both sides along the circumference at the outer left and right ends And these projecting rings 231 are tightly adhered to the side end portions of the flange pipes 100 and 101 and these projecting rings 231 are connected to the centering ring 231. Further, Tightly adhered to both end portions of the pipe 200, thereby preventing leakage of the vacuum in the pipe, thereby maintaining the airtightness of the vacuum.

Of course, in this case as well, the covering 250 may be made of SUS material which is a basic material of the centering 200 as in the first embodiment, and may be made of a material such as copper, nickel, and aluminum It is possible.

Therefore, the protrusion rings 230 and 231 formed in the cover ring 250 are also tightened by the adhesive force to increase the airtightness of both ends of the adjacent flange pipes 100 and 101 and both ends of the center ring 200, It can prevent corrosion and cracking or melting when exposed to gas, so it can improve the efficiency of preventing leakage of vacuum line and improve yield and stable yield in semiconductor, LCD, LED and other manufacturing equipment. have.

Of course, in the case of the covering 250 shown in the second embodiment, the covering 250 itself can perform the role of an O-ring without the need for the O-ring 300 required in the first embodiment.

In other words, the cover ring 250 can simultaneously perform the role of the center ring 200 (primary prevention of vacuum leakage) and the role of the o-ring (secondary prevention of vacuum leakage) when the centering 200 of the ready- Because.

The present invention as shown in the first and second embodiments is characterized in that the O-ring 300 is added or omitted while using the existing flange piping 100 and 101 as it is, while being characterized by the structure and material of the centering ring 200 and the covering ring 250 It is possible to improve the airtightness of the vacuum line and to reduce the manufacturing cost by using the existing flange pipe as it is.

7, which is a modification of the flange piping 100, 101 and the centering 200 shown in the first embodiment described above. This modification may be applied to the flange piping 100, 101 The O-ring 300 can prevent the leakage of the vacuum in the piping, and the O-ring 300 can prevent the leakage of the centering ring 200, (210) of the flange pipe (200) to tightly seal the gap between the flange pipes (100, 101) to prevent the leakage of the vacuum in the pipe.

In this case, the projection ring 120 formed on the flange pipes 100 and 101 is also joined to the side end of the centering ring 200 in the form of a crushed shape by the close contact force in the direction of the centering ring 200, ) Is basically made of SUS material, and materials such as nickel, aluminum, and copper can be selectively used for the purpose of use and in some cases.

In the flange pipes 100 and 101 and the centering ring 200 shown in Figs. 7 to 9, the stepped portion 110 formed at the side end portion of the flange pipes 100 and 101 and the centering ring 200 The shape of the projections 220 formed at the lower ends of both sides of the pipe can be formed to be inclined so as to maintain the airtightness of the vacuum in the pipe. Of course, in this case, the O-ring 300 is formed in the seat 210 of the centering 200.

In this case, since the shape of the stepped portion 110 and the protruded portion 220 is formed to be inclined, the effect of further improving the airtightness of the vacuum in the pipe can be expected.

On the other hand, since the centering used in the past is a material related to physical properties, Teflon material is used. Therefore, it is changed into a gasket product in order to prevent corrosion and cracking due to heat and toxic gas or melting. By using metallic materials such as SUS, nickel, copper, and aluminum as the material of the gasket, it is possible to solve corrosion, cracking, or melting due to the heat and toxic gas.

Of course, the material of the centering 200 and the covering 250 may be made of SUS material, and nickel, copper, and aluminum may be used depending on various factors such as the variable factors such as the temperature of the heat and the degree of toxic components of the toxic gas, It is possible to selectively apply any one of materials.

In the flange pipings 100 and 101 and the centering ring 200 shown in Figs. 7 to 10, a sealing member made of rubber having elasticity is provided between the flange pipes 100 and 101 or between the protrusion rings 120 and 230 provided in the centering ring 200 400, 401 may be further provided to further compensate for the vacuum leakage that may occur between the flange tubing 100, 101 and the centering 200 interposed between these flange tubing.

That is, the sealing members 400 and 401 have the same shape as the protrusion ring 230 and are fitted to the protrusion ring 230. In this case, the two sealing members 400 and 401 are overlapped and joined together In this case, the rear surface of the sealing member 401 positioned on the inner side and the outer surface of the sealing member 400 located on the inner side are characterized by the embossments 410a, 410b, 410c, and 410d in which convex and concave shapes are formed in a chain .

In other words, convex and concave embossments 410a and 410b are formed on the outer surface of the sealing member 400 located on the inner side, and on the rear surface of the sealing member 401 located on the outer side of the sealing member 400, The embossments 410c and 410d are formed by engaging the embossments 410a and 410b.

The sealing members 400 and 401 are hermetically coupled to each other by the fitting method of the embossments 410a, 410b, 410c, and 410d to be closely attached to the protrusion ring 230 formed on the centering ring 200, 100 and 101 and the end faces of the center ring 200 closely contacted with the projection ring 120 formed on the flange pipes 100 and 101 are completely sealed so as to prevent leakage of the vacuum in the pipe and to maintain the vacuum state constantly .

As described above, the vacuum vacuum piping system according to the present invention can completely prevent pressure leakage in the piping even if it is exposed to the scratch phenomenon or the environment of heat and toxic gas on the piping surface, It is possible to improve the production yield of the product through the piping line constructed in semiconductor, LCD, LED, and other manufacturing apparatuses with stable preservation, and to prevent the loss of human life and property due to toxic gas leakage, thereby creating a stable environment. It is also characterized by supplementing the problem of heat generation.

It should be understood that the foregoing description of the present invention is not intended to be construed in a limiting sense by the person skilled in the art to which the present invention pertains, It is to be understood that they fall within the scope of the appended claims.

100, 101: flange piping 110:
120: projection ring
200: centering 210:
220: protrusion 230: projection ring
250: Covering
300: O ring
400, 401: sealing member 410a, 410b, 410c, 410d: embossed

Claims

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A plurality of vacuum pipes in which vacuum holes are formed in the vacuum piping line for conducting vacuum pumping; A flange pipe connected between two neighboring vacuum pipes of the plurality of vacuum pipes to connect the two vacuum pipes to each other; A centering ring interposed between the flange pipes for primarily preventing leakage of the vacuum to the outside; And an O-ring that is seated along the circumference of the centering ring to seal the gap between the flange pipes to prevent secondary leakage of the vacuum. / RTI >
The centering ring interposed between the flange pipe and the flange pipe includes a protrusion ring protruding from both sides of the center along the circumference of the center ring and providing airtightness in the form of a clogged contact with the side end of the flange pipe To prevent pressure leakage in the piping,
Further comprising a sealing member that is hermetically sealed between an end face of the flange pipe closely contacted with the projection ring formed in the centering ring and an end face of the center ring closely contacted with the projection ring formed in the flange pipe,
Wherein the sealing member is hermetically sealed in a form that the outer side and the inner side are overlapped and the recessed surface and the inner side surface of the outer side are embossed surfaces in which concave and convex shapes are chained to seal airtightly.

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3. The method of claim 2,
Wherein the step portion formed along the outer periphery of the inner vacuum hole of the flange pipe and the protruding portion projecting to both sides of the lower end along the periphery of the center ring and engaged with the step portion are engaged with the inclined bent shape.

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5. The method of claim 4,
Wherein the centering is a kind of gasket and is made of one of SUS, nickel, copper, and aluminum.