KR101231645B1 - Connection apparatus for vacuum pipe of semiconductor and liquid crystal display manufacturing equipment - Google Patents

Abstract

PURPOSE: A connection device for a vacuum pipe for semiconductor and LCD manufacturing apparatuses is provided to improve combination between tubes by combining a connection part with a fixture, a first connector, a second connector, and a gasket. CONSTITUTION: A gasket(20) is made of elastic and airtight materials and surrounds the side of a tube(10). A first combination part(30) is combined with the gasket. A second combination part(40) is combined with a flange of the tube. The fixture fixes the first combination part.

Description

CONNECTION APPARATUS FOR VACUUM PIPE OF SEMICONDUCTOR AND LIQUID CRYSTAL DISPLAY MANUFACTURING EQUIPMENT}

The present invention relates to a connection device for vacuum piping of semiconductor and LCD manufacturing equipment, and more particularly, to a vacuum of semiconductor and LCD manufacturing equipment for sealing a connection portion of a vacuum pipe through which gas generated in the semiconductor and LED manufacturing equipment flows. It relates to a pipe connecting device.

In general, various pipes are used for various industrial facilities and oil transportation paths in addition to daily life such as water pipes and gas pipes.In particular, pipes are used for fluid or gas, semiconductor processing gas, vacuum piping and powder transportation for semiconductor processing equipment, or wire and cable. Used for protection

In this process, the pipe length is finite, so the pipe is joined by methods such as permanent coupling method and decomposed coupling method. The permanent coupling method saves maintenance costs and equipment costs, but it cannot be decomposed when the pipe breaks, so it is not possible to disassemble it. The law is used a lot.

In particular, vacuum pipes or gas pipes used in the semiconductor process may develop into serious safety problems when the gas flowing into the pipes leaks, and if the vacuum is not secured during the semiconductor manufacturing process, the quality of the semiconductor may affect the airtightness of the pipes. Securing is a very important factor.

Such a conventional pipe is provided with a pipe formed with connecting devices at both ends for easy disassembly and assembly.

However, when connecting the pipes using the connecting device at both ends of the pipe, the total connection length of the construction and the total connection length of the unit pipe do not coincide, the side pipe is generated.

Currently, there is no device to connect them properly, either by permanent bonding using electrofusion or by cutting off the last pipe joint, and after joining the ends of the side pipes, a rubber band is wrapped around the boundary of the two pipes and Connect it in a fixed way.

Here, the permanent bonding method using the electrofusion is difficult to disassemble when replacing the pipe due to the pipe breakage, and the connection structure using the rubber band and the fastening ring is simple, but if the ground is settled by groundwater, etc. over time Due to load, etc., the joints are displaced, which causes water leakage and oil leakage, thereby causing problems.

Related prior art is Korean Patent Publication No. 10-2004-0053023.

The present invention is a semiconductor to form a coupling flange at the other end of the tube through the first assembly, the fixing body and the gasket on the connection portion of the vacuum pipe through which the gas generated in the semiconductor and LED manufacturing equipment flows, so that the tube and the tube is sealed between the tube and It is to provide a connection device for vacuum piping of LCD manufacturing equipment.

The technical problems to be achieved by the present invention are not limited to the technical problems mentioned above.

Vacuum pipe connecting device of the semiconductor and LCD manufacturing equipment of the present invention for achieving the above object is formed in a tubular shape so that the gas generated in the semiconductor or LCD manufacturing equipment flows, in the vertical direction along the outer periphery at one end It is coupled to surround the other side of the pipe body is a flange is formed, the gasket made of a material having elasticity and sealing, and coupled to the other side of the gasket, one side is formed to correspond to the outer shape of the gasket, the outer vertical along the outer periphery A first coupling member having a coupling portion formed in a direction, a second coupling member coupled to the other side of the flange of the tubular body and coupled to a first coupling member coupled to the other side of the other tubular body connected to the tubular body, and coupled to the other outer periphery of the tubular body; It may be fixed to include a fixture for pulling and fixing the first assembly.

Specifically, the gasket may have an insertion groove formed in a cross-section 'c' shape so as to surround and join the other side of the tubular body, and an inclination may be formed on the outer circumference in the other direction.

The first assembly may have an inclined surface corresponding to the gasket on an inner circumference thereof, and a coupling groove in which the coupling table is inserted and fixed in one direction of the coupling portion may be formed.

In the coupling groove of the first assembly is inserted and fixed to the coupling rod coupled through the fixture, a fastening body is coupled to one end of the coupling rod penetrating the fixture to pull the coupling to the fixture side The first assembly, the gasket and the tube can be in close contact.

The fixed body is formed in a cylindrical shape is divided into two parts to surround the outer periphery of the tubular body is coupled, a plurality of through holes may be formed.

Protruding protrusions may be formed along the outer circumference of the outer circumference of the tubular body in contact with the fixed body, and a fixing groove into which the protruding protrusions are inserted may be formed in the inner circumferential edge of the fixed body.

As described above, the present invention is coupled to the connection portion of the gas flow vacuum pipe of the semiconductor and LCD manufacturing equipment through the fixing body and the first and second connectors and gaskets, so that the sealing property of the connection portion is increased, and the coupling force between the tubes is stronger. There is an advantage that the sealing between the tubes is increased.

1 is a view showing a vacuum pipe connecting device of the semiconductor and LCD manufacturing equipment according to an embodiment of the present invention.
2 is a view showing a second assembly of a connection device for vacuum piping of semiconductor and LCD manufacturing facilities according to the present invention.
3 is a view showing a first assembly, a gasket and a fixture of a connection device for a vacuum pipe of a semiconductor and LCD manufacturing facility according to the present invention.
Figure 4 is a cross-sectional view showing the overall configuration of the vacuum pipe connecting device of the semiconductor and LCD manufacturing equipment according to the present invention.
5 is an enlarged view of 'A' and 'B' of FIG. 4.
Figure 6 is a view showing a fixture of a vacuum pipe connecting device of the semiconductor and LCD manufacturing equipment according to the present invention.
7 is a cross-sectional view showing the coupling using the clamp to the configuration of the vacuum pipe connecting device of the semiconductor and LCD manufacturing equipment according to the present invention.
FIG. 8 is an enlarged view of 'C' of FIG. 7.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like elements in the figures are denoted by the same reference numerals wherever possible. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail.

1 is a view showing a vacuum pipe connecting device of the semiconductor and LCD manufacturing equipment according to an embodiment of the present invention, forming a vacuum pipe in which gas generated in the semiconductor and LCD manufacturing equipment flows, the flange 11 on one end surface The gasket 20 is coupled to surround the other end surface of the tubular body 10 is formed, coupled to the other side of the gasket 20, the first coupling member 30 is formed on the outer periphery and one side of the tubular body 10 It includes a second assembly 40 coupled to the outer circumference.

2 to 4, the tubular body 10 is formed in a cylindrical shape, and the flange 11 is formed in the vertical direction toward the outer side at the outer circumference of one side end.

The tube 10 is made of a metal material resistant to corrosion and breakage because the gas generated in the semiconductor and LED manufacturing equipment flows. This is because the gas generated in the semiconductor and LED manufacturing process is often a substance that is harmful to the human body or seriously causes environmental pollution, so that a safety accident may occur when the gas flowing through the pipe body 10 is leaked. to be.

As shown in FIGS. 4 and 5, a protruding protrusion 12 may be formed along the outer circumference at an outer circumference of the tube 10 and spaced apart from the other end.

A second coupling body 40 is coupled to the outer periphery of the tube body 10, which is the inner side of the flange 11 formed at one end of the tube body 10, to be in close contact with the flange 11.

The second assembly 40 is formed in the shape of a disc or a polygonal plate to form a hole into which the tube body 10 is inserted in the center, and the first assembly 30 and the bolt hole 41 through which the coupling bolt is formed. do.

The other side of the tubular body 10 is coupled to the gasket 20 surrounding the other end surface of the tubular body 10.

As shown in FIG. 5, the gasket 20 has an insertion groove formed in a cross-section 'c' shape on one side and an inclined surface toward the other side on the outer circumference thereof.

The gasket 20 is made of an elastic material and is made of a material resistant to corrosion.

In general, the gasket 20 may be made of a material such as rubber or synthetic rubber.

The other side of the gasket 20 is coupled to the first assembly 30, the first assembly 30 is inclined so that the inner circumference corresponds to the outer circumference of the gasket 20, the other end in the vertical direction Protruding to form a joining portion along the outer circumference.

A plurality of coupling grooves 31 are formed at one side of the coupling portion of the first coupling member 30 so that the ends of the coupling members 60 connecting the fixing member 50 and the first coupling member 30 are inserted and joined. .

At this time, when the end of the coupling table 60 is bonded to the coupling groove 31 is bonded through fusion or welding.

The coupling portion of the first assembly 30 is formed with a bolt hole 41 that can be coupled to the second assembly 40 through the bolt.

The fixed body 50 pulling the first assembly 30 toward the tube body 10 is fixedly coupled to one outer circumference of the tube body 10.

As shown in FIGS. 3 to 6, the fixture 50 is formed by dividing into two parts of a semicircle shape, and the outer periphery of the tubular body 10 is surrounded by two semicircular fixtures 50 and is coupled to each other to form a tubular body ( A plurality of through holes 51 fixed to the outer circumference of the 10 and penetrating the coupling table 60 connecting to the first assembly 30 are formed.

In addition, the inner periphery of the fixing body 50 is formed so that the fixing projection 52 which can be inserted and fixed to the protrusion protrusion 12 formed on the outer periphery of the tubular body 10 is formed to correspond to the protrusion protrusion 12.

Due to the protrusion 12, when the fixing body 50 is fixed to the outer periphery of the tubular body 10, the fixing body 50 is pulled through the coupling unit 60 through the coupling table 60. It can be prevented from moving to the first assembly 30 side.

Referring again to the coupling of the first assembly 30, the gasket 20 and the fixture 50, the tube 10, the gasket 20 and the first assembly 30 in the state in which the first coupling 30 in order 1 is coupled to the coupling groove 31 of the coupling body 30 is fixed to the coupling table 60 through the fixed body 50, the end of the coupling table 60 is coupled through the fixed body 50 The fastening body 61 is coupled to the fastening body 61, and the threaded body to which the coupling table 60 can be rotated is formed so that the fastening body 61 is rotated along the thread so that the fastening table 60 is pulled toward the fixing body 50 side. do.

For this reason, the first assembly 30 to which the coupling table 60 is joined is pulled and fixed to the side of the fixture 50.

The configuration of the present invention configured as described above is configured in the same way to form a vacuum pipe is connected a plurality.

Thus, the method consisting of a plurality of configurations consisting of the tubular body 10 and the first and second assemblies and the fixing body 50 of the present invention are as follows.

When the second coupling body 40 is inserted into one end of the tubular body 10 through the other end of the tubular body 10, the first coupling body 30 and the gasket 20 are coupled to the other end of the tubular body 10, The stationary body 50 is fixedly coupled to the other outer circumference of the tube body 10.

Then, the coupling table 60 is inserted into the coupling groove 31 of the first assembly 30 in a state where the coupling table 60 penetrates the through hole 51 of the fixing body 50 to be joined.

The fastening body 61 is coupled to the end of the coupling table 60 which penetrates the fixing body 50, and the first assembly 30 is pulled toward the fixing body 50 by rotation. The gasket 20 and the tubular body 10 are brought into close contact with each other.

A plurality of the tubular body 10 of such a configuration, the first assembly 30 of the tubular body 10 and the second assembly 40 of the other tubular body 10 connected to the tubular body 10 is in close contact with the first assembly The first coupling 30 and the second coupling 40 are coupled by penetrating the coupling bolt through the bolt hole 41 formed in the 30 and the second coupling 40.

As a result, the tubular body 10 and the other tubular body 10 are connected to each other.

7 and 8, a sealing gasket 80 may be inserted between the first assembly 30 of the tube body 10 and the second assembly 40 of the other tube body 10.

The sealing gasket 80 seals between the tube body 10 and the other tube body 10 so that gas does not flow out.

At this time, the sealing gasket (80) is formed in the cross-section 'c' covering the outer side of the flange 11 formed on one side of the tubular body 10 may be formed to be in close contact with one end surface of the tubular body (10).

When the first assembly 30 and the second assembly 40 are coupled, they may be coupled through the clamp 70.

To this end, a separation prevention groove is formed on one side and the other side of the first assembly 30 and the second assembly 40 so that the clamp 70 is not separated, and an end of the clamp 70 is inserted into the separation prevention groove. Thus, the first assembly 30 and the second assembly 40 may be tightened to be coupled.

When the clamp 70 is installed, a gap adjusting adjustment groove is formed on the outer side of the first assembly 30 and the second assembly 40 so that the interval between the clamps 70 is constantly installed, thereby installing the clamp 70. It can be easy to do.

The present invention configured as described above is coupled to the connection portion of the vacuum pipe for gas flow in the semiconductor and LCD manufacturing equipment through the fixing body and the first and second connectors and gaskets, thereby increasing the sealing property of the connection portion, the coupling force between the tube is stronger between the tube body There is an advantage that the sealability is increased.

The connecting device for vacuum piping of the semiconductor and LCD manufacturing facilities as described above is not limited to the configuration and operation of the embodiments described above. The above embodiments may be configured such that various modifications may be made by selectively combining all or part of the embodiments.

10 tube 11 flange
12: protrusion
20: gasket
30: first assembly 31: coupling groove
40: second assembly 41: bolt hole
50: fixed body 51: through hole
52: fixing groove
60: coupling table 61: fastener
70: clamp
80: sealed gasket

Claims (6)

A gasket is formed in a tubular shape so that gas generated from a semiconductor or LCD manufacturing facility flows. The gasket is made of a material having elasticity and sealing property. ;
A first assembly coupled to the other side of the gasket and having one side corresponding to the outer shape of the gasket and having a coupling portion formed in an outer vertical direction along an outer circumference;
A second coupling coupled to the other side of the flange of the tubular body and coupled to a first coupling coupled to the other side of the other tubular body connected to the tubular body; And
Includes and fixed to the other outer circumference of the tubular body to pull and fix the first assembly;
The first assembly is an inclined surface corresponding to the gasket is formed on the inner circumference, the coupling device for forming a vacuum pipe of the semiconductor and LCD manufacturing equipment is formed with a coupling groove is inserted into the coupling portion in one direction of the coupling portion.
The method according to claim 1,
The gasket is a connecting device for the vacuum piping of the semiconductor and LCD manufacturing equipment, the insertion groove is formed in the cross-section '''shape so as to surround and coupled to the other side of the tube, the inclination is formed in the other direction on the outer periphery.
delete The method according to claim 1,
In the coupling groove of the first assembly is inserted and fixed to the coupling rod coupled through the fixture, a fastening body is coupled to one end of the coupling rod penetrating the fixture to pull the coupling to the fixture side Connection device for a vacuum pipe of the semiconductor and LCD manufacturing equipment to the first assembly, the gasket and the tube to be in close contact.
The method according to claim 1,
The fixture is formed in a cylindrical shape is separated into two parts to surround the outer periphery of the tube is coupled, the connection device for the vacuum pipe of the semiconductor and LCD manufacturing equipment is formed with a plurality of through holes.
The method according to claim 1,
Vacuum of semiconductor and LCD manufacturing equipment is provided with a protrusion formed along the outer periphery of the outer peripheral edge of the tube in contact with the tube body and the fixing body, and a fixing groove into which the protrusion is inserted at the inner peripheral edge of the fixture. Piping connection.

Images