KR200414926Y1 - Cassette for loading board - Google Patents

Cassette for loading board Download PDF

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Publication number
KR200414926Y1
KR200414926Y1 KR2020060000600U KR20060000600U KR200414926Y1 KR 200414926 Y1 KR200414926 Y1 KR 200414926Y1 KR 2020060000600 U KR2020060000600 U KR 2020060000600U KR 20060000600 U KR20060000600 U KR 20060000600U KR 200414926 Y1 KR200414926 Y1 KR 200414926Y1
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South Korea
Prior art keywords
cassette
bottom frame
frame
wear
substrate loading
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KR2020060000600U
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Korean (ko)
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이영진
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(주)상아프론테크
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Publication of KR200414926Y1 publication Critical patent/KR200414926Y1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

본 고안은 기판 적재용 카세트에 관한 것으로, 톱 프레임과, 보텀 프레임과, 사이드 프레임과, 글라스 지지부를 포함하며, 상기 보텀 프레임의 저면에 부착되는 마모방지재를 더 포함하는 구성으로 되어 있다.The present invention relates to a cassette for loading a substrate, and includes a top frame, a bottom frame, a side frame, and a glass support, and further comprising an anti-wear material attached to the bottom of the bottom frame.

또한, 상기 보텀 프레임과 상기 마모방지재 사이에 설치되는 완충재를 더 포함하는 구성으로 되어 있다.In addition, it is configured to further include a cushioning material provided between the bottom frame and the wear protection material.

보텀 프레임, 마모방지재, 완충재 Bottom frame, wear protection material, cushioning material

Description

기판 적재용 카세트{CASSETTE FOR LOADING BOARD}Substrate loading cassette {CASSETTE FOR LOADING BOARD}

도 1은 본 고안의 실시예에 따른 기판 적재용 카세트의 보턴 프레임의 사시도, 및1 is a perspective view of a button frame of a substrate loading cassette according to an embodiment of the present invention, and

도 2는 도 1의 A-A선을 따른 단면도이다.2 is a cross-sectional view taken along the line A-A of FIG.

본 고안은 기판 적재용 카세트에 관한 것으로, 더욱 상세하게는, 카세트의 이동을 위해 카세트를 들어올리거나 내려놓을 때에 그리고 카세트가 컨베이어 상에서 이동할 때에 보텀 프레임의 저면의 마모가 방지되면서도 카세트에 가해지는 충격이 완화되도록 구성된 기판 적재용 카세트에 관한 것이다.The present invention relates to a cassette for loading a substrate, and more particularly, the impact applied to the cassette while preventing the abrasion of the bottom of the bottom frame when the cassette is lifted or put down to move the cassette and when the cassette is moved on a conveyor. A substrate stacking cassette configured to be relaxed.

PDP(Plasma Display Panel) 및 LCD(Liquid Crystal Display)와 같은 평판디스플레이에 사용되는 글라스 등의 기판은, 디스플레이의 크기에 따라 다양한 크기로 제작되는 것으로서, 외부의 작은 충격에도 손상될 우려가 크기 때문에 디스플레이의 제조 공정 중에 각별히 주의하여 취급해야 한다.Substrates such as glass used in flat panel displays such as plasma display panels (PDPs) and liquid crystal displays (LCDs) are manufactured in various sizes depending on the size of the display. Special care must be taken during the manufacturing process.

따라서, 이러한 글라스는 제조 공정 중에 캐리어(Carrier) 또는 카세트(Cassette)라 지칭되는 장치에 적재되어 운반된다.Thus, such glasses are loaded and transported in a device called a carrier or cassette during the manufacturing process.

일반적으로, 기판 적재용 카세트는 톱 프레임과 보텀 프레임을 포함하며, 톱 프레임과 보텀 프레임의 사이에는 이들이 상하 일정한 간격을 유지하도록 다수개의 사이드 프레임이 구비된다. 그리고, 좌우측의 사이드 프레임에는 각각 적재되는 글라스의 양단을 받쳐 지지하기 위한 다수개의 측면 지지 핑거나 크로스 바가 구비된다. 또한, 후방의 사이드 프레임에는 각각 적재되는 글라스의 중앙부를 받쳐 지지하기 위한 다수개의 중앙 지지 바가 구비될 수도 있다.In general, the substrate stacking cassette includes a top frame and a bottom frame, and a plurality of side frames are provided between the top frame and the bottom frame so that they maintain a constant vertical gap. In addition, the left and right side frames are provided with a plurality of side supporting fingers or cross bars for supporting both ends of the stacked glass. In addition, the rear side frame may be provided with a plurality of central support bars for supporting the central portion of the glass to be loaded, respectively.

이러한 기판 적재용 카세트는, 한국등록실용신안공보 제20-029787호와 한국 등록실용신안공보 제20-0355573호 등에 개시되어 있다.Such substrate loading cassettes are disclosed in Korean Utility Model Utility Model Publication No. 20-029787, Korean Utility Model Utility Model Publication No. 20-0355573 and the like.

최근에 제작되는 글라스는 디스플레이의 대형화 추세로 제작되고 있으며, 대형화에 따라 기판 적재용 카세트 역시 대형화된 글라스를 적재할 수 있도록 대형으로 제작되고 있다.Recently produced glass is being produced in the trend of increasing the size of the display, and with the increase in size, the substrate stacking cassette is also produced in a large size to load the enlarged glass.

이러한 대형의 기판 적재용 카세트는, 제조 공장 내에서의 이동시, AGV(Automatic Guided Vehicle), MGV(Manual Guided Vehicle) 등의 운반장치나 컨베이어에 의해 운반된다. 이러한 운반장치를 이용할 때에는, 포크 형태의 리프팅 수단이 카세트의 보텀 프레임의 아래에 밀어 넣어져서 카세트를 들어올린 상태에서 소정의 장소로 이동시켜서 내려놓은 다음 보텀 프레임의 아래로부터 빠져나오게 된다. 따라서, 운반장치의 리프팅 수단이 보텀 프레임의 아래로 밀어 넣어지거나 보텀 프레임의 아래로부터 빠져나올 때 리프핑 수단과 보텀 프레임의 저면이 맞닿게 되면서 보텀 프레임의 저면이 마모되는 문제가 있다. 그리고, 기판 적재용 카세트가 컨베이어 상에서 이동될 때에도 보텀 프레임의 저면이 컨베이어 롤러와의 마찰 에 의해 마모되는 문제가 있다.Such a large substrate stacking cassette is conveyed by a conveying device or a conveyor such as an AGV (Automatic Guided Vehicle), MGV (Manual Guided Vehicle) or the like during movement in a manufacturing plant. When using such a conveying device, a fork-type lifting means is pushed under the bottom frame of the cassette to move the cassette to a predetermined place while lifting the cassette, and then comes out of the bottom frame. Therefore, there is a problem that the bottom surface of the bottom frame is worn while the lifting means is brought into contact with the bottom of the bottom frame when the lifting means of the transport device is pushed down or exits from the bottom of the bottom frame. And, even when the substrate stacking cassette is moved on the conveyor, there is a problem that the bottom surface of the bottom frame is worn by friction with the conveyor roller.

또한, 운반장치가 카세트를 들어올리거나 내려놓을 때에 그리고 카세트가 컨베이어 상에서 이동할 때에 카세트에 충격이 가해지는 문제가 있다. 카세트에 충격이 가해지면 카세트에 적재된 글라스가 손상될 우려가 있다.In addition, there is a problem in that the cassette is impacted when the conveyer is lifted up or down and the cassette moves on the conveyor. When a shock is applied to the cassette, there is a fear that the glass loaded on the cassette is damaged.

본 고안은 이러한 종래의 문제점을 해결하기 위한 것으로, 카세트의 이동을 위해 카세트를 들어올리거나 내려놓을 때에 그리고 카세트가 컨베이어 상에서 이동할 때에 보텀 프레임의 저면의 마모가 방지되도록 구성된 기판 적재용 카세트를 제공하는 데에 그 하나의 목적이 있다.The present invention is to solve this conventional problem, and to provide a substrate loading cassette configured to prevent abrasion of the bottom of the bottom frame when lifting or lowering the cassette for moving the cassette and when the cassette moves on the conveyor. There is only one purpose.

또한, 본 고안은 이러한 종래의 문제점을 해결하기 위한 것으로, 카세트의 이동을 위해 카세트를 들어올리거나 내려놓을 때에 그리고 카세트가 컨베이어 상에서 이동할 때에 카세트에 가해지는 충격이 완화되도록 구성된 기판 적재용 카세트를 제공하는 데에 그 다른 하나의 목적이 있다.In addition, the present invention is to solve such a conventional problem, to provide a substrate loading cassette configured to mitigate the impact on the cassette when lifting or lowering the cassette for movement of the cassette and when the cassette is moved on the conveyor. There is one other purpose.

상기한 바와 같은 목적 달성을 위하여, 본 고안에 의한 기판 적재용 카세트는, 톱 프레임과, 보텀 프레임과, 사이드 프레임과, 글라스 지지부를 포함하는 기판 적재용 카세트로서, 상기 보텀 프레임의 저면에 부착되는 마모방지재를 더 포함하는 구성으로 되어 있다.In order to achieve the above object, the substrate loading cassette according to the present invention is a substrate loading cassette including a top frame, a bottom frame, a side frame, and a glass support, which is attached to the bottom surface of the bottom frame. It is configured to further include an anti-wear material.

또한, 상기 보텀 프레임과 상기 마모방지재 사이에 설치되는 완충재를 더 포함하는 구성으로 되어 있다.In addition, it is configured to further include a cushioning material provided between the bottom frame and the wear protection material.

이하, 본 고안의 실시의 형태를 실시예에 근거하여 도면을 참조하면서 설명한다.EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described, referring drawings for an Example.

기판 적재용 카세트는 톱 프레임과, 보텀 프레임과, 사이드 프레임과, 글라스 지지부로 구성되어 있다. 여기에서, 특히 톱 프레임과 보텀 프레임은 일체형과 조립형으로 나누어질 수 있다. 일체형은 전체적으로 합성수지재로 사출하여 제조되거나 전체적으로 알루미늄 합금 등의 금속재로 주조하여 제조된 것이고, 조립형은 일부분이 합성수지재로 제조되고 이 합성수지재의 일부분을 금속재로 연결하여 조립하여 제조된 것이다.The substrate loading cassette is composed of a top frame, a bottom frame, a side frame, and a glass support portion. Here, in particular, the top frame and the bottom frame may be divided into an integrated type and an assembled type. The integral type is manufactured by injection molding a synthetic resin material as a whole or by casting a metal material such as an aluminum alloy as a whole, and the assembled type is manufactured by assembling a part of the synthetic resin material by assembling a part of the synthetic resin material with a metal material.

도 1 및 도 2에는 본 고안의 실시예에 따른 기판 적재용 카세트의 보텀 프레임이 예시되어 있다.1 and 2 illustrate a bottom frame of a cassette for loading a substrate according to an embodiment of the present invention.

이하의 실시예에서는 일체형의 보텀 프레임을 예시하고 있다. 그리고, 이 보텀 프레임(1)은 격자형 판인 것으로 예시되어 있다.In the following embodiment, an integral bottom frame is illustrated. The bottom frame 1 is illustrated as being a lattice plate.

본 고안의 기판 적재용 카세트는 보텀 프레임(1)의 저면에 완충재(3)와 마모방지재(5)가 부착된 것이다.In the substrate stacking cassette of the present invention, the cushioning material 3 and the wear preventing material 5 are attached to the bottom surface of the bottom frame 1.

완충재(3)와 마모방지재(5)는 보텀 프레임(1)의 형상과 동일한 형상으로 만들어진 격자형 판인 것이 바람직하다. 보텀 프레임(1)과 마모방지재(5) 사이에 완충재(3)가 설치된다.It is preferable that the shock absorbing material 3 and the abrasion prevention material 5 are grid | lattice-shaped boards made in the same shape as the shape of the bottom frame 1. A cushioning material 3 is provided between the bottom frame 1 and the wear preventing material 5.

보텀 프레임(1)의 저면에는 소정의 위치에 나사공이 형성되며, 이 나사공에 상응하는 위치의 마모방지재(5)에는 관통공이 형성되어 있다. 이 관통공의 하단에는 볼트의 헤드부를 수용할 수 있는 공간이 형성되는 것이 바람직하다.A screw hole is formed at a predetermined position on the bottom of the bottom frame 1, and a through hole is formed at the wear preventing material 5 at a position corresponding to the screw hole. Preferably, a space for accommodating the head portion of the bolt is formed at the lower end of the through hole.

보텀 프레임(1)의 저면과 마모 방지재(5)의 사이에 완충재(3)를 끼운 상태에서 볼트(B)를 마모 방지재(5)의 관통공을 통해 보텀 프레임(1)의 나사공 내에 고정하면, 보텀 프레임(1)에 완충재(3)와 마모 방지재(5)가 고정된다. 본 실시예에서는 보텀 프레임과 완충재와 마모 방지재가 볼트에 의해 고정된 것으로 예시하였지만, 볼트 이외의 다른 다양한 고정 수단도 가능함을 알 수 있을 것이다.The bolt B is inserted into the threaded hole of the bottom frame 1 through the through hole of the wear protection material 5 with the cushioning material 3 sandwiched between the bottom face of the bottom frame 1 and the wear protection material 5. When it is fixed, the shock absorbing material 3 and the wear protection material 5 are fixed to the bottom frame 1. Although the bottom frame, the cushioning material, and the wear protection material are illustrated as being fixed by bolts in this embodiment, it will be appreciated that various other fixing means other than bolts are possible.

완충재(3)는 완충성이 우수한 실리콘 패드 또는 실리콘 시트를 사용하여 제조되는 것이 바람직하다.It is preferable that the cushioning material 3 is manufactured using the silicone pad or silicone sheet which was excellent in cushioning property.

또한, 마모방지재(5)는 내마모성이 우수한 스테인레스강 또는 엔지니어링 플라스틱을 사용하여 제조되는 것이 바람직하다.In addition, the wear protection material 5 is preferably manufactured using stainless steel or engineering plastics excellent in wear resistance.

이 엔지니어링 플라스틱에는 초고분자량 폴리에틸렌(UHMW-PE, Ultra High Molecular Weight - Polyethylene), 카본 섬유(C/F, Carbon Fiber)가 함유된 폴리카보네이트(Polycarbonate) 및 카본 섬유(C/F, Carbon Fiber)가 함유된 폴리에테르이미드(Polyetherimide) 등이 있다.The engineering plastics include ultra high molecular weight polyethylene (UHMW-PE), polycarbonate containing carbon fiber (C / F, carbon fiber) and carbon fiber (C / F, carbon fiber). Contained polyetherimide and the like.

이러한 구성에 의해, 운반장치의 리프팅 수단이 보텀 프레임(1)의 아래에서 적재 기판용 카세트를 들어올리거나 내려놓을 때에 운반장치의 리프팅 수단이 내마모성이 우수한 마모방지재(5)와 맞닿게 되므로 보텀 프레임(1)의 저면이 마모되는 일이 없게 된다. 그리고, 카세트가 컨베이어 상에서 이동할 때에도 컨베이어의 롤러가 내마모성이 우수한 마모방지재(5)와 맞닿게 되므로 보텀 프레임(1)의 저면이 마모되는 일이 없게 된다.With this arrangement, when the lifting means of the conveying device lifts or lowers the cassette for the loading substrate under the bottom frame 1, the lifting means of the conveying device is brought into contact with the wear protection material 5 having excellent wear resistance. The bottom of (1) does not wear out. Further, even when the cassette moves on the conveyor, the roller of the conveyor comes into contact with the wear preventing material 5 having excellent wear resistance, so that the bottom surface of the bottom frame 1 is not worn.

또한, 완충성이 우수한 완충재(3)가 보텀 프레임(1)과 마모방지재(5) 사이에 위치하고 있으므로, 운반장치의 리프팅 수단이 카세트를 들어올리거나 내려놓을 때에 그리고 카세트가 컨베이어 상에서 이동할 때에, 카세트에 가해지는 충격이 현저하게 완화된다.In addition, since the cushioning material 3 having excellent cushioning property is located between the bottom frame 1 and the wear preventing material 5, the cassette is used when the lifting means of the transport device lifts or lowers the cassette and when the cassette moves on the conveyor. The impact on is significantly alleviated.

이상에서는 보텀 프레임으로서 일체형의 보텀 프레임을 예시하였지만, 조립형의 보텀 프레임도 마찬가지로 적용될 수 있음을 알 수 있을 것이다.In the above, the bottom frame of the integrated type is exemplified as the bottom frame, but it will be appreciated that the assembled bottom frame may be similarly applied.

그리고, 본 실시예에서는 완충재와 마모방지재를 보텀 프레임과 동일한 형상의 격자형 판으로 예시하였지만, 완충재와 마모방지재는 보텀 프레임의 가장자리부나 중앙의 일부분에만 부착될 수도 있음을 알 수 있을 것이다.In the present embodiment, the cushioning material and the wear protection material are exemplified by a lattice plate having the same shape as the bottom frame, but it will be appreciated that the cushioning material and the wear protection material may be attached only to the edge portion or the center portion of the bottom frame.

전술한 본 고안의 기판 적재용 카세트에 의하면, 보텀 프레임의 저면에 완충재와 마모방지재가 부착되어 있으므로, 카세트의 이동을 위해 카세트를 들어올리거나 내려놓을 때에 그리고 카세트가 컨베이어 상에서 이동할 때에 보텀 프레임의 저면의 마모가 방지되면서도 카세트에 가해지는 충격이 완화될 수 있는 효과가 있다.According to the above-described substrate loading cassette of the present invention, since the cushioning material and the abrasion prevention material are attached to the bottom of the bottom frame, the bottom of the bottom frame when the cassette is lifted or put down for moving the cassette and when the cassette is moved on the conveyor. While the wear is prevented, there is an effect that the impact on the cassette can be alleviated.

Claims (7)

톱 프레임과, 보텀 프레임과, 사이드 프레임과, 글라스 지지부를 포함하는 기판 적재용 카세트로서,A substrate loading cassette comprising a top frame, a bottom frame, a side frame, and a glass support portion, 상기 보텀 프레임의 저면에 부착되는 마모방지재를 더 포함하는 것을 특징으로 하는 기판 적재용 카세트.And a wear protection material attached to the bottom of the bottom frame. 제1 항에 있어서,According to claim 1, 상기 마모방지재는 스테인레스강 또는 강화 플라스틱인 것을 특징으로 하는 기판 적재용 카세트.The wear protection material is a substrate loading cassette, characterized in that the stainless steel or reinforced plastic. 제2 항에 있어서,The method of claim 2, 상기 강화 플라스틱은 초고분자량 폴리에틸렌, 카본 섬유가 함유된 폴리카보네이트 및 카본 섬유가 함유된 폴리에테르이미드로 이루어진 군 중에서 선택된 어느 하나인 것을 특징으로 하는 기판 적재용 카세트.The reinforced plastic is any one selected from the group consisting of ultra high molecular weight polyethylene, polycarbonate containing carbon fiber and polyetherimide containing carbon fiber. 제2 항에 있어서,The method of claim 2, 상기 마모방지재는 상기 보텀 프레임에 볼트로 고정되는 것을 특징으로 하는 기판 적재용 카세트.The wear preventing material is a substrate loading cassette, characterized in that the bolt is fixed to the bottom frame. 제1 항에 있어서,According to claim 1, 상기 보텀 프레임과 상기 마모방지재 사이에 설치되는 완충재를 더 포함하는 것을 특징으로 하는 기판 적재용 카세트.And a buffer material disposed between the bottom frame and the wear preventing material. 제5 항에 있어서,The method of claim 5, 상기 완충재는 실리콘 패드 또는 실리콘 시트인 것을 특징으로 하는 기판 적재용 카세트.The cushioning material is a substrate loading cassette, characterized in that the silicon pad or silicon sheet. 제5 항에 있어서,The method of claim 5, 상기 보텀 프레임은 격자형 판이고,The bottom frame is a grid plate, 상기 마모방지재와 완충재는 상기 보텀 프레임의 형상과 동일한 형상으로 만들어진 격자형 판인 것을 특징으로 하는 기판 적재용 카세트.The wear preventing material and the cushioning material is a substrate loading cassette, characterized in that the grid plate made in the same shape as the shape of the bottom frame.
KR2020060000600U 2006-01-09 2006-01-09 Cassette for loading board KR200414926Y1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100998206B1 (en) * 2008-08-05 2010-12-03 주식회사 에스에프에이 Stocker Apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100998206B1 (en) * 2008-08-05 2010-12-03 주식회사 에스에프에이 Stocker Apparatus

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