KR200408900Y1 - The device for treatment to NMP gas - Google Patents

Abstract

The present invention relates to an NMP gas treatment apparatus for reducing the NMP concentration of NMP gas discharged through an NMP gas discharge facility such as a semiconductor, an ultra-thin liquid crystal display (TFT-LCD), and a production process of various electronic products, to be discharged to the atmosphere.

The NMP gas treatment apparatus of the present invention, in the NMP gas treatment absorption tower for reducing the concentration of NMP gas introduced from the NMP gas discharge facility through the washing water injected by the injection nozzle and discharge it to the atmosphere;

In order to form the process of reducing the concentration of NMP gas using the absorption tower in the form of a multi-stage, one or more absorption towers having a spray nozzle at the top and a washing water storage tank at the bottom are connected and installed in a series of multi-stage process conditions. It is characterized by that.

In addition, the spray nozzles are supplied by supplying the washing water discharged from the post process absorber to the washing water storage tank at the lower end of each absorber connected in series to the spray nozzle at the upper end of the preprocess absorber. Between the spray nozzle at the upper end of the pre-process absorption tower and the washing water storage tank at the bottom of the post-process absorption tower so as to lower the concentration of NMP gas flowing into each absorption tower through the washing water sprayed by Washing water supply pipes are connected to each other.

Therefore, according to the present invention, compared to the conventional NMP gas treatment device having a single step in which the absorption tower for reducing the concentration of the NMP gas introduced from the NMP gas discharge facility has a single structure, It is very effective in reducing the final emission concentration. In particular, by reducing the NMP concentration of NMP gas emitted to the atmosphere to the final emission concentration that is safe for atmospheric emission, it is prevented from contaminating the air environment and discharged to the conventional atmosphere. It can be used to protect people from the atmosphere contaminated by NMP.

Supply NMP gas treatment device, NMP gas, NMP gas discharge facility, NMP concentration, absorption tower, washing water station

Description

NMP gas processing unit {The device for treatment to NMP gas}

1 is a schematic view showing a conventional NMP gas treatment apparatus.

2 is a schematic view showing an NMP gas treatment apparatus of the present invention.

3 is a front view and a plan view of the NMP gas treatment apparatus of the present invention.

Figure 4 is another embodiment of the NMP gas treatment apparatus according to the present invention.

Figure 5 is a state diagram showing the operation of the NMP gas treatment apparatus according to the present invention.

Explanation of symbols on the main parts of the drawings

1. NMP gas discharge facility 5. Blower

20, 30, 40, 10. Absorption towers 21, 31, 41, 11. Casing

22, 32, 42, 12. Gas inlet 23, 33, 43, 13. Gas outlet

25, 35, 45, 15. Injection nozzle 26, 36, 46, 16. Filling material

27, 37, 47, 17. Demister 28, 38, 48, 18. Wash water reservoir

29, 29a, 39, 39a, 49, 49a. Washing water supply pipe

19. Raw water supply pipes 51a, 51b, 51c. Connector

52a, 52b, 52c. Tank connection 55. Concentrated washing water reservoir

The present invention relates to an NMP gas treatment device, and more particularly, to reduce the NMP concentration of NMP gas discharged through an NMP gas discharge facility such as a semiconductor, an ultra-thin liquid crystal display (TFT-LCD), and a production process of various electronic products. The NMP gas treatment apparatus of the present invention is constructed by connecting and installing one or more absorption towers having a spray nozzle at the top and a washing water storage tank at the bottom in a multi-stage process state so that the NMP treatment process can be performed in multiple stages. Compared to the conventional NMP gas treatment device having a single process in which an absorption tower for reducing the concentration of NMP gas introduced from the NMP gas discharge facility is a single step, it is very effective to reduce the NMP concentration of NMP gas to the final discharge concentration for air discharge. Effective, in particular by reducing the NMP concentration of NMP gas emitted to the atmosphere to a final emission concentration that is safe for atmospheric emissions. The present invention relates to an NMP gas treatment apparatus which prevents pollution of the air environment and protects people from the air environment contaminated by NMPs emitted on the conventional air.

In general, NMP gas processing apparatus is a gas form by heating after the cleaning is completed using NMP solution used as a cleaning agent in the production process of semiconductors, ultra-thin liquid crystal display (TFT-LCD) such as DRAM, and various electronic products. A device for reducing the concentration of the NMP gas as the NMP contained in the gas is absorbed into the washing water through contact between the phase-changed NMP gas, that is, the NMP gas discharged through the NMP gas discharge facility and the washing water injected from the injection nozzle. to be.

Here, NMP is a liquid solution with a substance name of N-methylpyrrolidinone (N-METHYL PYRROLIDINONE), which has a stable state that does not react at normal temperature and normal pressure, and is a substance causing odor in fishy fish. I am getting it.

As shown in FIG. 1, the conventional NMP gas treatment apparatus reduces the concentration of NMP gas introduced from the NMP gas discharge facility 1 through the washing water injected by the injection nozzle 15 and at the same time. It consists of a structure of one absorption tower 10 to be discharged to, the structure of the conventional absorption tower 10 is as follows.

In the case of the conventional absorption tower 10, as shown in Figure 1, the casing 11 of the hollow cylinder formed with a gas inlet 12 and the gas outlet 13, respectively; Raw water installed on the casing 11 and sprayed on the raw water (clean water) supplied from the raw water supply pipe 19 to inject NMP contained in the gas through contact with the NMP gas introduced into the casing 11. A spray nozzle 15 for receiving and absorbing water in the washing water; It is formed in communication with the lower end of the casing 11 is composed of a washing water storage tank 18 for storing the washing water absorbed and absorbed NMP. Reference numeral 14 denotes the discharge pipe 14.

In addition, raw water (clean water) injected from the injection nozzle 15 by NMP gas introduced into the casing 11, that is, into the absorption tower 10, through the gas suction port 12 at upper and lower ends of the injection nozzle 15. As it comes into contact with the air bubbles, it rises to a state accompanied with impurities such as fine particles, and the volume of air bubbles increases due to the inertia collision principle with the surface of the mesh pad. Absorption (17) acts as a filter so that impurities are discharged to the pure state removed, the washing water sprayed through the injection nozzle 15 and the inside of the casing (11) through the gas inlet 12, that is, absorption Fillers 16 for increasing the contact area between the NMP gas introduced into the tower 10 are installed, respectively, of the demister 17, PE, PP, glass fiber, SUS 304, 316, 316L, etc. Is formed of a material, more preferably PE and PP is made of the most frequently used network structure, and is built in the housing (not shown) of the hollow cylindrical body formed with a through hole in the upper and lower ends fixed installation between the injection nozzle 15 and the gas outlet (13) do.

In addition, the filler 16 is also formed of a material such as PE, PP, glass fiber, SUS, and more preferably, PE, PP is made of the most frequently used network structure, and the through hole is formed in the upper and lower ends It is built in the housing (not shown) of the hollow cylindrical body is fixed to be installed at the lower end of each injection nozzle (15).

In the case of the conventional NMP gas treatment device configured as described above, since the absorption tower 10 for reducing the concentration of the NMP gas introduced from the NMP gas discharge facility 1 is composed of a single process in one structure, In addition to the problem that the NMP concentration of the NMP gas discharged can not be reduced more effectively, a single NMP gas treatment process is limited to reduce the final concentration of NMP gas to discharge the NMP gas to the atmosphere. There was this.

In addition, when discharged to the atmosphere without lowering to the final discharge concentration for air discharge through the conventional NMP gas treatment device as described above, such that the air environment is greatly polluted such as odor generated by the NMP contained in the gas. There was also a problem.

In addition, when the air environment is contaminated by the NMP gas discharged to the air as described above, there was also a problem that NMP discharged on the air adversely affects people.

The present invention devised to solve the above-mentioned problems, the NMP concentration of the NMP gas discharged through the NMP gas discharge facility, such as semiconductor, ultra-thin liquid crystal display (TFT-LCD), the production process of various electronic products, such as The NMP gas treatment device of the present invention is constructed by connecting and installing one or more absorption towers having a spray nozzle at the top and a washing water storage tank at the bottom in a multistage process state so that the NMP treatment process can be achieved in multiple stages. In addition, the absorption tower for reducing the concentration of NMP gas introduced from the NMP gas discharge facility is discharged to the atmosphere such that the NMP concentration of the NMP gas can be effectively reduced as compared to the conventional NMP gas processing apparatus having a single process having a single structure. The aim is to reduce the NMP concentration of NMP gas to a stable final emission concentration.

In addition, by reducing the NMP concentration of the NMP gas discharged to the atmosphere by the NMP gas treatment device of the present invention configured to connect one or more absorption towers in a series of multi-stage process state as described above to the final discharge concentration safe for air discharge. Therefore, there is another purpose to prevent the pollution of the air environment due to this and to protect people from the air environment polluted by the NMP discharged on the conventional atmosphere.

The NMP gas treatment device of the present invention, in the NMP gas treatment absorption tower for reducing the concentration of the NMP gas introduced from the NMP gas discharge facility through the washing water injected by the injection nozzle and discharges it to the atmosphere;

In order to form the process of reducing the concentration of NMP gas using the absorption tower in the form of a multi-stage, one or more absorption towers having a spray nozzle at the top and a washing water storage tank at the bottom are connected and installed in a series of multi-stage process conditions. It is characterized by that.

At this time, the sprayed washing water discharged from the post process absorption tower to the washing water storage tank at the lower end of each absorption tower connected in series is supplied back to the spray nozzle at the upper end of the preprocess absorption tower. Between the spray nozzle at the top of the pre-process absorption tower and the wash water storage tank at the bottom of the post-process absorption tower so as to reduce the concentration of NMP gas flowing into each absorption tower through the washing water sprayed by the nozzle. It characterized in that the washing water supply pipe is connected to each.

In addition, the raw water supply is supplied to the injection nozzles of the final absorption tower among the absorption towers to which the washing water supply pipe is connected, so as to reduce the final discharge concentration to discharge the NMP gas whose concentration is sequentially lowered through each absorption tower to the atmosphere. It is characterized in that the raw water supply pipe is connected to be made.

In addition, the washing water supply pipe connecting the respective absorption towers discharges the washing water discharged from the absorption tower of the post process and stored in the washing water storage tank at the lower side to the injection nozzle side of the upper part of the absorption tower of the previous process. (Iii) characterized in that the washing water supply pump is installed so that the supply can be made.

In addition, the washing water discharged from the absorption tower of the post-process is discharged back to the injection nozzle side of the upper portion of the absorption tower of the previous process by the washing water sprayed. Among the absorption towers connected in series to reduce the concentration of NMP gas, the concentrated washing water storage tank for purifying NMP concentrated washing water stored in the washing water storage tank at the bottom of the initial absorption tower and storing it separately for reuse in other facilities is the initial stage. It is characterized in that it is connected to the wash water reservoir at the bottom of the absorption tower.

And, as an embodiment of the NMP gas treatment apparatus according to the present invention, the washing water discharged from the post-process absorption tower to the washing water storage tank of the lower stage of each absorption tower connected in series to the bottom of the pre-process absorption tower At the same time as flowing into the washing water storage tank to supply the stored washing water to the injection nozzle side of the upper end of the process absorption tower to reduce the concentration of NMP gas flowing into each absorption tower through the washing water injected by the injection nozzle. A washing water supply pipe is installed between the upper nozzle of the absorption tower of the pre-absorption tower and the washing water storage tank of the lower part of the absorption tower, and the washing water storage tank and the post-process absorption of the lower part of the absorption tower The reservoir connection pipe is installed between the washing water storage tank at the bottom of the tower.

Hereinafter, the NMP gas treatment apparatus of the present invention will be described in detail with reference to the drawings.

2 is a schematic view showing an NMP gas treating apparatus of the present invention, and FIG. 3 shows a front view and a plan view of the NMP gas treating apparatus of the present invention.

In the case of the NMP gas treatment apparatus according to the present invention, the same reference numerals apply to the same structure as the conventional NMP gas treatment apparatus to which the absorption tower 10 is applied.

Accordingly, before describing the NMP gas processing apparatus of the present invention in detail, the general NMP gas processing apparatus will be briefly described, which is a production process of semiconductors such as DRAM, ultra-thin liquid crystal display (TFT-LCD), and various electronic products. NMP gas phase-changed into a gas form, ie, NMP gas discharged through the NMP gas discharge facility (1) and the washing water sprayed from the injection nozzle (15) after the cleaning is finished using the NMP solution used as a cleaning agent in It is a device for reducing the concentration of the NMP gas while the NMP contained in the gas is absorbed and absorbed in the washing water through the contact of.

As described above, the NMP gas treatment apparatus of the present invention for reducing the concentration of the NMP gas discharged through the NMP gas discharge facility 1 includes the NMP gas discharge facility 1 through the washing water injected by the injection nozzle 15. As shown in FIGS. 2 and 3 instead of the conventional NMP gas treating apparatus having a single absorption tower 10 structure to reduce the concentration of the NMP gas introduced from the NMP gas and discharge the same to the atmosphere. The injection nozzles 25, 35, 45, 15 are provided at the upper end and the washing water storage tanks 28, 38, 48, 18 are provided at the lower end to form the NMP treatment process for reducing the concentration of the polymer in a multi-step form. One or more absorption towers 20, 30, 40, and 10 are installed in series in a multistage process state.

In this case, in the case of the NMP gas treatment apparatus according to the present invention, the absorption towers 20, 30, 40, and 10 of each independent structure have a multi-stage, that is, four, sequential treatment process. In the case of the absorption towers 20, 30, 40, and 10 connected in series in the four stages, the hollow cylinders having the gas inlets 22, 32, 42, and 12 and the gas outlets 23, 33, 43, and 13, respectively, are formed. Casings 21, 31, 41, and 11; Installed at the upper end of the casing (21, 31, 41, 11) and the back water supplied from the wash water storage tank (38, 48, 18) of the post-process absorption tower (30, 40, 10) Injection nozzles (15, 25, 35, 45) to receive and absorb the NMP contained in the gas through the contact with the NMP gas introduced into the casing (21, 31, 41, 11) by injection and; The washing water storage tank 28, which is formed in communication with the lower end of the casing 21, 31, 41, 11, stores the washing water absorbed and absorbed by NMP to be used as the washing water for NMP gas treatment in a previous process. 38, 48, 18).

In addition, upper and lower ends of the injection nozzles 25, 35, 45, and 15 are provided inside the casings 21, 31, 41, and 11 through gas inlets 22, 32, 42, and 12, that is, absorption towers 20, 30, 40,10) The NMP gas introduced into the foam becomes contact with the washing water sprayed from the spray nozzles 25, 35, 45, and 15, and turns into bubbles, and the mesh pad rises with impurities such as fine particles. Demister (27, 37, 47, 17) acts as a filter so that the volume of bubbles increases due to the inertia collision principle with the surface so that particles containing impurities naturally fall and gases are discharged in the pure state free of impurities. ), The washing water sprayed through the spray nozzles 25, 35, 45, and 15 and the inside of the casing 21, 31, 41, 11 through the gas inlets 22, 32, 42, and 12, that is, absorption. Fillers 26, 36, 46, and 16 are provided to increase the contact area between NMP gases introduced into the towers 20, 30, 40, and 10. The demisters 27, 37, 47, and 17 are respectively installed. ) And chung In the case of material (26,36,46,16) because it forms a Mr 17 and the filling material 16 and having the same structure of NMP gas treatment apparatus described in the prior art for this repetitive descriptions will be omitted.

In addition, the injection nozzles 25, 35, 45, and 15 and the fillers 26, 36, 46, and 16 installed at the lower end thereof are provided in two stages to increase the amount of NMP contained in the gas to be absorbed and absorbed in the washing water. It consists of a structure.

In addition, the washing is discharged from the post-process absorption tower (30, 40, 10) of each of the absorption tower (20, 30, 40, 10) connected in series to the lower washing water storage tank (38, 48, 18) Washing water sprayed by the spray nozzles 25, 35, 45 by supplying water back to the spray nozzles 25, 35, 45 on the upper end of the pre-process absorption tower 20, 30, 40. Injection nozzles 25, 35, on top of the pre-process absorption tower (20, 30, 40) to reduce the concentration of NMP gas flowing into each absorption tower (20, 30, 40, 10) through the 45) and the washing water supply pipes 29, 39, and 49 are respectively connected between the washing water storage tanks 38, 48, and 18 at the lower stages of the absorption towers 30, 40, and 10, respectively.

That is, among the components of the NMP gas treatment device of the present invention, between the upper injection nozzle 25 of the absorption tower 20 of the first stage treatment step and the lower washing water storage 38 of the absorption tower 30 of the second stage treatment step, Between the upper injection nozzle 35 of the absorption tower 30 of the two-stage treatment process and the lower washing water storage tank 48 of the absorption tower 40 of the three-stage treatment process, and the upper portion of the absorption tower 40 of the three-stage treatment process. Each of the washing water supply pipes 29, 39, and 49 is connected between the injection nozzle 45 and the lower washing water storage tank 18 of the absorption tower 10 in the four-step treatment process. In particular, the washing water supply pipe ( Each of the absorption towers 20, 30, 40 is connected to the injection nozzles 15 of the final absorption tower 10, which is a four-stage process, among the absorption towers 20, 30, 40, 10 having 29, 39, 49 connected thereto. Raw water supply pipe (19) is provided so that the raw water supply can be reduced to the final discharge concentration for discharging the NMP gas whose concentration is sequentially lowered through the air to the atmosphere. All.

In addition, the washing water supply pipes 29, 39, and 49 connecting the absorption towers 20, 30, 40, and 10 are discharged from the absorption towers 30, 40, and 10 of the post-process. A smooth reverse supply of the washing water stored in the washing water storage tanks 38, 48, and 18 to the spray nozzles 25, 35, and 45 at the upper end of the pre-process absorption tower 20, 30, and 40 may be performed. Washing water supply pumps (Pa, Pb, Pc) are installed.

In addition, the absorption tower 20, which is discharged from the absorption towers 30, 40, and 10 of the post-process and stored in the washing water storage tanks 38, 48, and 18 at the lower stage, is used. 30,40 Each absorption tower 20, 30, 40, connected in series so as to reduce the concentration of NMP gas by the sprayed washing water by feeding back to the injection nozzles 25, 35, 45 on the upper side. 10 is a concentrated washing water storage tank 55 for purifying NMP concentrated washing water stored in the washing water storage tank 28 at the bottom of the initial absorption tower 20 to be recycled in another facility. It is connected to the washing water storage tank 28 at the bottom.

On the other hand, Figure 4 is another embodiment of the NMP gas treatment device according to the present invention, the NMP gas treatment device of another embodiment described above, as shown in Figure 4, each absorption tower 20, 30 connected in series Of the wash water discharged from the post process absorption towers 30, 40, and 10 to the wash water storage tanks 38, 48, and 18 at the lower end of the process 40, 10, and 40) while flowing into the wash water storage tank (28, 38, 48) at the bottom and supplying the stored washing water to the injection nozzle (25, 35, 45) of the upper end of the process absorption tower (20, 30, 40) Absorption tower of the previous process to reduce the concentration of NMP gas flowing into each absorption tower (20, 30, 40) through the washing water sprayed by the injection nozzles (25, 35, 45) ( 20, 30, 40 The washing water supply pipes 29a, 39a, between the upper injection nozzles 25, 35, 45 and the washing water reservoirs 28, 38, 48 at the lower ends of the absorption towers 20, 30, 40, respectively. 49a) is installed and the preprocess absorption Connection of the reservoir between the wash water reservoirs 28, 38 and 48 at the bottom of (20, 30 and 40) and the wash water reservoirs (38, 48 and 18) at the bottom of the post-process absorption towers (30, 40 and 10). The pipes 52a, 52b, 52c are provided.

In the case of the absorption towers 20, 30, 40, and 10 of the NMP gas treatment apparatus which is another embodiment of the present invention configured as described above, the components constituting the NMP gas treatment apparatus of the present invention shown in FIG. Since the same structure as each absorption tower (20, 30, 40, 10) connected in a multi-stage form, duplicate description thereof will be omitted.

In addition, in the case of the NMP gas treatment device according to another embodiment of the present invention, the same as in the NMP gas treatment device of the present invention shown in FIG. 2, the initial absorption tower (20, 30, 40, 10) of each absorption tower connected in series ( 20) A concentrated washing water storage tank 55 for purifying NMP concentrated washing water stored in the washing water storage tank 28 at the bottom and storing it separately for recycling in another facility is equipped with a washing water storage tank at the bottom of the initial absorption tower 20 ( 28) is installed in connection with.

Hereinafter, the operation of the NMP gas treatment device of the present invention will be described in detail with reference to the drawings.

Figure 5 shows the operation of the NMP gas treatment apparatus according to the present invention.

First, as shown in FIG. 2, the injection nozzles 25, 35, 45, and 15 are formed at the upper end so that the NMP treatment process for reducing the concentration of the NMP gas can be formed in a multi-step form. And one or more absorption towers 20, 30, 40, and 10 equipped with washing water storage tanks 28, 38, 48, and 18 at the bottom thereof in a series of stages, Spray nozzles 25, 35 at the upper end of the pre-process absorption tower 20, 30, 40 to discharge the stored washing water discharged from the absorption towers 30, 40, 10 to the lower washing water storage tanks 38, 48, 18. And (45) side to reduce the concentration of NMP gas flowing into each absorption tower (20, 30, 40, 10) through the washing water sprayed by the injection nozzles (25, 35, 45) The spray nozzles 25, 35, 45 on the upper end of the pre-process absorption tower 20, 30, and 40 and the wash water storage tank 38 on the bottom of the post-process absorption tower 30, 40, and 10 may be provided. Absorption tower 20 in a one-step treatment process However, between the injection nozzle 25 and the lower stage washing water storage tank 38 of the absorption tower 30 of the two-step treatment process, and the upper injection nozzle 35 of the absorption tower 30 of the two-step treatment process and the three-stage treatment process. Between the absorption tower 40, the lower washing water storage tank 48, and the upper injection nozzle 45 of the absorption tower 40 of the three-step treatment process, and the lower washing water storage tank 18 of the absorption tower 10 of the four-step treatment process. The washing water supply pipes 29, 39, and 49 are connected to each other, and the injection nozzle 15 of the final absorption tower 10, which is a four-step treatment process, is passed through the absorption towers 20, 30, and 40, respectively. The present invention through the blower (5) from each NMP gas discharge facility (1) in the state that the raw water supply pipe 19 is connected so that the concentration can be lowered to the final discharge concentration to discharge the NMP gas to the atmosphere sequentially If the NMP gas is introduced into the absorption tower 20 of the first step of the NMP gas treatment apparatus of the, as shown in Figure 5, The second stage absorption tower through a washing water supply pipe 29 connecting the spray nozzle 25 installed at the upper stage of the first stage absorption tower 20 and the washing water storage tank 38 installed at the bottom of the second stage absorption tower 30 ( The washing water stored in the 30 side cleaning water storage tank 38 is supplied back to the injection nozzle 25 on the upper stage of the first stage absorption tower 20 and introduced into the first stage absorption tower 20 at the same time. The washing water is injected to the NMP gas side.

At this time, when the washing water by the first stage injection nozzle 25 is injected into the NMP gas flow into the first stage absorption tower 20, the NMP gas and the injection nozzle 25 in the first stage absorption tower 20 NMP contained in the gas is absorbed and absorbed by the sprayed washing water while contacting the washing water sprayed from the gas is lower than the concentration of the NMP gas introduced into the initial stage 1 absorption tower 20. Into the second stage absorption tower 30 through a connection pipe 51a connecting the gas outlet 23 of the first stage absorption tower 20 to the gas inlet 32 of the second stage absorption tower 30. The NMP is contained in the first stage absorption tower 20 through contact with NMP gas, and the washing water is stored by dropping toward the washing water storage tank 28 at the bottom of the first stage absorption tower 20.

In particular, the washing water stored in the washing water storage tank 28 at the bottom of the first stage absorption tower 20 may include the two stage absorption tower 30, the three stage absorption tower 40, and the four stage absorption tower 10. The concentration of NMP is higher than that of the washing water stored in the washing water storage tanks (38, 48, 18), and the first step is possible to recycle such NMP concentrated washing water in another facility through a separate purification process. Supply and storage of the concentrated washing water storage tank 55 separate from the washing water storage tank 28 of the absorption tower 20.

In addition, the NMP gas having a lower NMP concentration than the initial NMP gas concentration due to contact with the washing water sprayed from the injection nozzle 25 in the first stage absorption tower 20, that is, the NMP concentration is lowered. 20 is introduced into the second stage absorption tower 30, as in the first stage absorption tower 20 described above, the injection nozzle 35 and the three stage absorption tower 40 of the upper stage of the second stage absorption tower 30. The washing water stored in the washing water storage tank 48 at the third stage absorption tower 40 through the washing water supply pipe 39 connecting the washing water storage tank 48 at the bottom thereof is sprayed on the upper portion of the second stage absorption tower 30. In addition to the reverse supply to the nozzle 35 side, the washing water is injected into the NMP gas introduced into the second stage absorption tower 30, and the NMP gas and the sprayed washing water in the second stage absorption tower 30. Contact with each other is made, and at the same time the NMP contained in the gas is injected into the washing water. The gas outlet 33 and the three-stage absorption tower of the two-stage absorption tower 30 in a state in which the concentration of the NMP gas is lower than the concentration of the NMP gas introduced into the two-stage absorption tower 30 while being absorbed and absorbed. It is introduced into the three-stage absorption tower 40 through the connecting pipe 51b connecting the gas inlet 42 of the 40.

In addition, in the case of the washing water sprayed to the NMP gas side in the two-stage absorption tower 30 as described above to accommodate the NMP contained in the gas can be used in the NMP gas treatment process in the first-stage absorption tower 20. In order to be stored in the washing water storage tank 38 at the bottom of the second stage absorption tower 30 so that the NMP concentrated washing water stored in the washing water storage tank 38 is the washing water at the bottom of the first stage absorption tower 20. NMP concentration is lower than the NMP concentrated washing water stored in the reservoir (28).

In addition, the NMP gas, which is further lowered than the first NMP gas concentration by contact with the washing water injected from the injection nozzle 35, is absorbed by the second stage absorption tower 30 in the second stage absorption tower 30. When introduced into the tower 40, as in the first and second stage absorption towers 20 and 30 described above, the injection nozzle 45 and the fourth stage of the absorption tower 10 at the top of the three-stage absorption tower 40 are lower. The washing water stored in the washing water storage tank 18 of the fourth stage absorption tower 10 through the washing water supply pipe 49 connecting the washing water storage tank 18 of the injection nozzle (top) 45, the reverse supply is made, and the washing water is injected into the NMP gas introduced into the three-stage absorption tower 40 while the NMP gas in the three-stage absorption tower 40 is in contact with the sprayed washing water. When the NMP contained in the gas is received and absorbed in the sprayed washing water The gas outlet 43 and the fourth stage absorption tower 10 of the third stage absorption tower 40 in a state where the concentration of the NMP gas is lower than the concentration of the NMP gas introduced into the third stage absorption tower 40. Through the connecting pipe (51c) for connecting the gas inlet 12 of the NMP gas is introduced into the absorption tower 10, the final stage of the treatment step 10.

In addition, in the case of the washing water injected into the NMP gas side in the three-stage absorption tower 40 as described above, the NMP contained in the gas is absorbed and used for the NMP gas treatment in the two-stage absorption tower 30. In order to be stored in the washing water storage tank 48 at the bottom of the three-stage absorption tower 40 so that the NMP concentrated washing water stored in the washing water storage tank 48 is the washing water at the bottom of the two-stage absorption tower 30. The NMP concentration is lower than that of the NMP concentrated washing water stored in the reservoir 38.

Then, as a final treatment step of the NMP gas discharged from each NMP gas discharge facility (1) through the blower (5) to the NMP gas treatment device of the present invention, the injection nozzle 45 in the three-stage absorption tower 40 When the NMP gas, which is further lowered than the two-stage NMP gas concentration by the contact with the washing water sprayed from the inlet, flows into the four-stage absorption tower 10 from the three-stage absorption tower 40, the above-described 1, 2, As in the third stage absorption tower (20,30,40), the raw water from the water through the raw water supply pipe 19 connected to the injection nozzle 15 of the fourth stage absorption tower 10, the fourth stage absorption tower (10) The supply is made to the injection nozzle 15 on the upper side, and the raw water is injected into the NMP gas introduced into the fourth stage absorption tower 10 while contacting the NMP gas in the fourth stage absorption tower 10 with the raw water injected. Is made, and at the same time the remaining amount of NMP contained in the gas is injected The concentration of the NMP gas is absorbed and absorbed into the raw water is lower than the concentration of the NMP gas introduced into the four-stage absorption tower 10, that is, the state is reduced to the final discharge concentration for discharging the NMP gas to the atmosphere As it is discharged to the atmosphere through the discharge pipe 14 connected to the gas outlet 13 of the four-stage absorption tower 10, the process of NMP gas discharged from each NMP gas discharge facility 1 is completed.

In addition, in the case of raw water sprayed to the NMP gas side in the fourth stage absorption tower 10 through the raw water supply pipe 19 as described above to receive and absorb the NMP contained in the gas, the NMP in the third stage absorption tower 40. In order to be used in the gas treatment process to be stored in the washing water storage tank 18 at the bottom of the four-stage absorption tower 10, at this time, the raw water stored in the washing water storage tank 18, that is, the NMP concentrated washing water The NMP concentration is lower than the NMP concentrated washing water stored in the washing water storage tank 48 at the bottom of the three-stage absorption tower 40.

As described above, the above-described embodiment is described with reference to the most preferred example of the present invention, but is not limited to the above embodiment, and it will be apparent to those skilled in the art that various modifications are possible without departing from the technical spirit of the present invention. .

The NMP gas treatment apparatus of the present invention has a multi-step NMP treatment process for reducing the NMP concentration of NMP gas discharged through an NMP gas discharge facility such as a semiconductor, an ultra-thin liquid crystal display (TFT-LCD), and a production process of various electronic products. The NMP gas treatment device of the present invention is constructed by connecting and installing one or more absorption towers having a spray nozzle at the top and a washing water storage tank at the bottom in a multistage process state so as to achieve Stable final discharge concentration to be discharged to the atmosphere, such as the absorption tower for reducing the concentration of the introduced NMP gas can effectively reduce the NMP concentration of the NMP gas compared to the conventional NMP gas treatment device consisting of a single process. There is an excellent effect to reduce the NMP concentration of the NMP gas.

In addition, by reducing the NMP concentration of the NMP gas discharged to the atmosphere by the NMP gas treatment device of the present invention configured to connect one or more absorption towers in a series of multi-stage process state as described above to the final discharge concentration safe for air discharge. Therefore, there is also the effect of preventing the pollution of the air environment caused by this, and also to protect people from the air environment polluted by the NMP emitted on the conventional air.

Claims (6)

In the absorption tower for NMP gas treatment to reduce the concentration of the NMP gas introduced from the NMP gas discharge facility through the washing water injected by the injection nozzle and to discharge it to the atmosphere; In order to form the process of reducing the concentration of NMP gas using the absorption tower in the form of a multi-stage, one or more absorption towers having a spray nozzle at the top and a washing water storage tank at the bottom are connected and installed in a series of multi-stage process conditions. NMP gas processing device, characterized in that. The method of claim 1, wherein the washing water discharged from the post-process absorber to the lower washing water reservoir from each of the series connected absorbers is supplied to the spray nozzle side of the upper part of the pre-process absorber. Cleaning of the injection nozzle at the top of the pre-process absorption tower and the bottom of the post-process absorption tower so as to lower the concentration of NMP gas flowing into each absorption tower through the washing water injected by the injection nozzle. NMP gas treatment device, characterized in that the washing water supply pipe is connected between the water reservoir. The method of claim 2, wherein the injection nozzle of the final absorption tower of each of the absorption tower is connected to the washing water supply pipe can be reduced to the final discharge concentration to discharge the NMP gas of the concentration sequentially through the absorption tower to the atmosphere. NMP gas treatment device, characterized in that the raw water supply pipe is connected so that the raw water supply is made. 3. The washing water supply pipe connecting each of the absorption towers is sprayed on the upper end of the absorption tower in the previous step by discharging the washing water discharged from the absorption tower in the post process and stored in the washing water storage tank at the lower step. NMP gas treatment device, characterized in that the washing water supply pump is installed to enable a smooth reverse supply to the nozzle side. 5. The washing machine according to claim 2 or 4, wherein the washing water discharged from the absorption tower of the post-process and stored in the washing water storage tank at the lower stage is supplied to the injection nozzle side of the upper stage of the absorption tower of the previous process. Purifying NMP concentrated washing water stored in the washing water storage tank at the bottom of the initial absorption tower among the absorption towers connected in series to reduce the concentration of NMP gas by spraying washing water, and storing it separately for recycling in other facilities. NMP gas treatment device characterized in that the concentrated washing water storage tank is connected to the washing water storage tank at the bottom of the initial absorption tower. According to claim 1, wherein each of the series of absorption tower connected to the washing water discharged from the post-process absorption tower to the bottom of the washing water storage tank stored in the lower side of the pre-process absorption tower flows at the same time as the stored The upper part of the absorption tower of the previous process is supplied to the washing nozzle side of the upper end of the absorption tower to reduce the concentration of NMP gas flowing into each absorption tower through the cleaning water injected by the injection nozzle. A washing water supply pipe is installed between the spray nozzle and the washing water storage tank at the bottom of the absorption tower, and is stored between the washing water storage tank at the bottom of the pre-process absorption tower and the washing water storage tank at the bottom of the absorption tower. NMP gas treatment device, characterized in that the connector is installed.

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