KR20040110933A - Bender-typed Actuator with Inter-digital Electrode - Google Patents

Bender-typed Actuator with Inter-digital Electrode Download PDF

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KR20040110933A
KR20040110933A KR1020030040491A KR20030040491A KR20040110933A KR 20040110933 A KR20040110933 A KR 20040110933A KR 1020030040491 A KR1020030040491 A KR 1020030040491A KR 20030040491 A KR20030040491 A KR 20030040491A KR 20040110933 A KR20040110933 A KR 20040110933A
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actuator
piezoelectric
displacement
inter
bender
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KR1020030040491A
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KR100586305B1 (en
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윤석진
김현재
최지원
강종윤
이동균
김진상
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한국과학기술연구원
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE: A bender type actuator having an inter-digital electrode is provided to increase a displacement of the actuator by determining the displacement using a piezoelectric constant d33. CONSTITUTION: A bender type actuator having an inter-digital electrode includes a plurality of piezoelectric ceramics(1,2,3,4). A polarization, a driving voltage, and a generation displacement of the piezoelectric ceramics are all same to one another in a length direction. Electrode patterns(8,9) of an inter-digital type are formed on upper and lower surfaces of the piezoelectric ceramic and each of the electrodes are separated to be alternating one by one, thereby determining a displacement of the actuator by a piezoelectric constant d33.

Description

교번전극구조를 갖는 밴더형 액츄에이터 {Bender-typed Actuator with Inter-digital Electrode}Bender-type Actuator with Inter-digital Electrode

본 발명은 압전 액츄에이터의 한쪽 끝을 고정시킨 외팔보(cantilever) 형태를 말하는 것으로서 액츄에이터의 상층부와 하층부의 각각에서 발생하는 길이방향의 변위차이에 의해 굴곡변위를 발생시키는 바이모프(bimorph)에 관한 것으로, 더 상세하게는 압전 세라믹에 인터디지털(Inter-digital) 형태의 전극패턴을 형성하고, 길이방향으로 서로 교번되도록 분극을 한 후 길이방향으로 직류전원을 인가했을 때 상층부와 하층부에서 발생되는 변위차이에 의해 굴곡변위가 발생하는 밴더형 액츄에이터에 관한 것이다.The present invention relates to a cantilever shape in which one end of a piezoelectric actuator is fixed. The present invention relates to a bimorph that generates a bending displacement due to a longitudinal displacement difference occurring in each of an upper and a lower part of an actuator. More specifically, inter-digital electrode patterns are formed on piezoelectric ceramics, polarized to alternate with each other in the longitudinal direction, and the displacement difference generated in the upper and lower layers when DC power is applied in the longitudinal direction. It relates to a band-type actuator in which bending displacement occurs.

일반적으로 압전 엑츄에이터는 전기/기계 상호변환 작용을 하는 압전 세라믹에 전기에너지를 가하여 기계적 진동이 발생하는 역압전 효과를 이용하는 것을 말하며, 액츄에이터의 구조에 따라 유니모프(unimorph), 바이모프(bimorph), 그리고 적층(multilayer)형으로 구분된다.In general, a piezoelectric actuator is a reverse piezoelectric effect in which mechanical vibration is generated by applying electrical energy to a piezoelectric ceramic having electrical / mechanical interconversion, and according to the structure of the actuator, unimorph, bimorph, And it is divided into a multilayer type.

이 중에서 바이모프의 동작원리는 동일한 두께의 압전 세라믹 2장을 접합하고 한쪽 끝 부분을 고정시킨 외팔보 형태로 두께방향으로 순방향과 역방향 전압을 인가할 때 길이 방향으로 한쪽은 신장되고 다른 쪽은 수축되어, 전체적으로는 두께방향으로 굴곡변위(bending displacement)를 발생시키는 방식이다.Among them, bimorph's operation principle is cantilever shape in which two piezoelectric ceramics of the same thickness are bonded and one end is fixed. In general, bending bending occurs in the thickness direction.

이와 같이 N=2, 4, 6, …층인 바이모프에 전압을 인가한 경우 끝 부분에서 발생하는 변위()와 발생력()은 수학식 1과 수학식 2로 나타낼 수 있다.Thus N = 2, 4, 6,... Displacement at the end when voltage is applied to the bimorph layer ) And developmental force ( ) May be represented by equations (1) and (2).

상기 수학식 1과 2에서은 두께방향을 분극하고 길이방향으로 변위발생하는 압전정수,은 바이모프 길이,는 바이모프의 두께,는 바이모프의 폭,은 탄성계수, 그리고는 인가전압이다.In Equations 1 and 2 Is a piezoelectric constant that polarizes the thickness direction and generates displacement in the longitudinal direction, Silver bimorph length, Is the thickness of the bimorph, Is the width of the bimorph, Is the elastic modulus, and Is the applied voltage.

상기 수학식 1에서 변위()를 증가시키시 위해서는 큰 압전정수를 갖는 압전 세라믹을 사용하거나 높은 전압 인가, 그리고 바이모프 길이/두께() 비를 증가시키는 방법에 있으나, 수학식 2에서와 같이 길이/두께 비가 증가하면 발생력()이 약해진다.Displacement in Equation 1 ), Use piezoelectric ceramics with large piezoelectric constants or apply high voltages, and bimorph length / thickness ( ), But when the length / thickness ratio is increased as in Equation 2, ) Weakens.

또한 일반적으로 높은 압전정수를 갖는 압전 세라믹은 에너지 변환시 발생되는 손실이 크기 때문에 연속적으로 동작하면 발열현상에 의한 특성저하를 나타내게 된다.In general, piezoelectric ceramics having a high piezoelectric constant have a large loss generated during energy conversion, and thus, when continuously operated, piezoelectric ceramics exhibit deterioration in characteristics due to heat generation.

본 발명은 상술한 문제점을 해결하기 위하여 안출된 것으로서, 두께방향으로 분극하고 길이방향으로 발생하는 변위를 이용하는 d31방식보다 2∼3배 큰 값을 갖는 분극방향과 발생변위방향이 같은 d33방식을 이용하기 위해 압전 세라믹의 표면에 인터디지털 형태의 전극패턴을 형성하고 분극한 후, 각 전극간에 전압을 가하여발생변위의 방향을 길이방향으로 함으로써 압전정수 d31을 이용해 변위가 발생하는 기존의 바이모프보다 더 큰 변위를 발생시킬 수 있는 밴더형 액츄에이터를 제공하는데 목적이 있다.The present invention been made in view of solving the problems described above, 2 to 3 times the d 33 the same way as this occurs the displacement direction and the polarization direction has a value greater than the d 31 method using the displacement of the polarization in the thickness direction and length generated in the direction In order to use, the interdigital electrode pattern is formed on the surface of the piezoelectric ceramic and polarized, and then a voltage is applied between the electrodes to lengthen the direction of the generated displacement so that the displacement is generated using the piezoelectric constant d 31 . It is an object to provide a banded actuator that can produce greater displacement than morphs.

상술한 목적을 달성하기 위하여 본 발명은, 밴더형 액츄에이터를 구성하는 압전 세라믹의 전극은 인터디지털 형태로 동일하게 하고 상하 중간선을 기준으로 상층부와 하층부의 분극방향이 서로 상이하도록 분극하여 순방향과 역방향 전압을 인가할 때 길이방향으로 한쪽은 신장되고 다른 쪽은 수축된 결과 두께방향으로 굴곡변위를 발생시키는 밴더형 액츄에이터를 제공하고자 한다.In order to achieve the above object, the present invention, the piezoelectric ceramic electrode constituting the band-type actuator is the same in the form of interdigital and polarized so that the polarization direction of the upper and lower layers are different from each other on the basis of the upper and lower middle lines, forward and reverse It is an object of the present invention to provide a vender-type actuator which generates a bending displacement in the thickness direction as a result of stretching one side in the longitudinal direction and the other side contracting when the voltage is applied.

도 1은 본 발명에 따른 인터디지털 전극 형태를 갖는 밴더형 액츄에이터의 개략도이다.1 is a schematic diagram of a bander actuator having an interdigital electrode form according to the present invention.

도 2는 도 1에 나타낸 전극 구조의 상세도이다.FIG. 2 is a detailed view of the electrode structure shown in FIG. 1. FIG.

도 3은 상향 굴곡변위를 위한 분극 및 인가전계의 방향을 나타내는 도면이다.3 is a diagram illustrating the direction of polarization and an applied electric field for upward bending displacement.

도 4는 하향 굴곡변위를 위한 분극 및 인가전계의 방향을 나타내는 도면이다.4 is a view showing the polarization and the direction of the applied electric field for the downward bending displacement.

<도면의 주요부분에 대한 부호의 설명><Description of the symbols for the main parts of the drawings>

1,2,3,4, : 압전 세라믹 5 : 상층부1,2,3,4, Piezoelectric Ceramic 5: Upper Layer

6 : 하층부 7 : 중간부6: lower part 7: middle part

8,9 : 전극패턴8,9: electrode pattern

이하 본 발명의 실시예에 대하여 첨부된 도면을 참고로 그 구성 및 작용을 설명하면 다음과 같다.Hereinafter, the configuration and operation of the present invention will be described with reference to the accompanying drawings.

도 1은 본 발명에 따른 인터디지털 전극 형태를 갖는 밴더형 액츄에이터의 개략도이다.1 is a schematic diagram of a bander actuator having an interdigital electrode form according to the present invention.

도 2는 도 1에 나타낸 전극 구조의 상세도이다.FIG. 2 is a detailed view of the electrode structure shown in FIG. 1. FIG.

도 3은 상향 굴곡변위를 위한 분극 및 인가전계의 방향을 나타내는 도면이다.3 is a diagram illustrating the direction of polarization and an applied electric field for upward bending displacement.

도 4는 하향 굴곡변위를 위한 분극 및 인가전계의 방향을 나타내는 도면이다.4 is a view showing the polarization and the direction of the applied electric field for the downward bending displacement.

도 1에 도시된 바와 같이, 동일한 두께를 갖는 압전 세라믹(1,2,3,4)을 제작하여 도 2에 도시된 바와 같이 압전 세라믹의 상하 표면에 전극패턴(8,9)을 형성한 후 상하 중간을 기준으로 상하로 적층한다.As shown in FIG. 1, piezoelectric ceramics 1, 2, 3, and 4 having the same thickness are fabricated to form electrode patterns 8 and 9 on upper and lower surfaces of the piezoelectric ceramics, as shown in FIG. 2. Lay up and down on the basis of the top and bottom middle.

또한 밴더형 액츄에이터의 분극방향은 도 3에서와 같이 순차적으로 서로 교번되도록 하고 중간부(7)를 기준으로 상층부(5)에 있는 압전 세락믹(1,2)과 하층부(6)에 있는 압전 세라믹(3,4)의 분극방향은 서로 반대가 되도록 한다.In addition, the polarization directions of the band-type actuators are alternated with each other sequentially as shown in FIG. 3, and the piezoelectric ceramics 1 and 2 in the upper layer 5 and the piezoelectric ceramics in the lower layer 6 with respect to the middle portion 7. The polarization directions of (3, 4) are opposite to each other.

이와 같이 밴더형 액츄에이터는 압전 세라믹(1,2,3,4)과 전극패턴(8,9)의 층으로 이루어지며 상층부(5)와 하층부(6)에 (+)와 (-)전원이 인가되는 전극층이 각각 연결되어 결국 양 외측에 형성된 전극패턴(9)이 2개의 입력단자가 된다.As described above, the band-type actuator is composed of a layer of piezoelectric ceramics (1, 2, 3, 4) and electrode patterns (8, 9), and positive and negative powers are applied to the upper layer (5) and the lower layer (6). Each electrode layer is connected to each other, and thus the electrode patterns 9 formed on both outer sides become two input terminals.

일반적인 바이모프는 두께방향으로 분극된 압전 세라믹에 전압을 인가했을 때 길이방향으로 신장/수축하는 압전 세라믹을 접합한 구조로, 분극방향과 동일한 순방향 전압이 인가된 쪽은 수축되고, 역방향 전압이 인가된 쪽은 신장되는 원리를 이용한 것이지만, 상술한 구성으로 이루어진 본 발명의 밴더형 액츄에이터는 길이방향으로 분극된 복수의 압전 세라믹(1,2,3,4)에 직류전원을 인가하여 상, 하층부(5,6)에 수축과 신장을 일으켜 굴곡변위를 발생시킨다.The general bimorph has a structure in which a piezoelectric ceramic that is stretched / contracted in the longitudinal direction is bonded when a voltage is applied to the piezoelectric ceramic polarized in the thickness direction, and the reverse voltage is applied to the side to which the same forward voltage as the polarization direction is applied. Although the one using the principle of elongation, the vendor-type actuator of the present invention having the above-described configuration applies a direct current power source to a plurality of piezoelectric ceramics 1, 2, 3, and 4 polarized in the longitudinal direction, so that the upper and lower layers ( 5,6) causes contraction and elongation, causing bending displacement.

도 3에 나타낸 것과 같이 밴더형 액츄에이터의 입력단자에 상층부(5)에 분극방향과 동일한 순방향 직류전원을 인가하면 길이방향으로 수축하고, 분극방향이 반대인 하층부(6)는 신장하기 때문에, 전체적으로 액츄에이터는 두께방향의 상향의 굴곡변위가 발생된다.As shown in FIG. 3, when the forward DC power supply in the same direction as the polarization direction is applied to the upper terminal portion 5 to the input terminal of the vender-type actuator, it contracts in the longitudinal direction, and the lower layer portion 6 opposite to the polarization direction extends, so that the overall actuator Is an upward bending displacement in the thickness direction.

또한 도 4에 나타낸 것과 같이, 상층부(5)의 분극방향과 반대인 역방향 직류전원을 인가하면 하향의 굴곡변위가 발생된다.In addition, as shown in FIG. 4, when a reverse DC power source opposite to the polarization direction of the upper layer part 5 is applied, downward bending displacement occurs.

본 발명에서 상기 압전 세라믹(1,2,3,4)의 상하 표면에서만 진동특성이 발생하기 때문에, 두께가 두꺼우면 진동특성이 저하되고, 너무 얇으면 동작시 기계적 결함이 발생할 수 있으나, 적층형 구조를 형성함으로서 이같은 문제를 해결할 수 있다.In the present invention, because the vibration characteristics are generated only on the upper and lower surfaces of the piezoelectric ceramics (1, 2, 3, 4), if the thickness is too thick, the vibration characteristics are reduced, if too thin, mechanical defects may occur during operation, laminated structure This problem can be solved by forming.

본 발명에 의한 밴더형 액츄에이터를 구성하는 압전 세락믹의 분극, 구동전압, 그리고 발생변위가 모두 길이방향으로 형성되어 압전정수 d33에 의해 액츄에이터의 변위가 결정되기 때문에 압전정수 d33보다 2∼3배 낮은 d31를 이용하는 기존의 바이모프 액츄에이터보다 높은 변위가 발생하게 된다.Because of polarization, the drive voltage, and generate displacement of the piezoelectric serak mix constituting the vendor-type actuator according to the present invention are all formed in a longitudinal direction to the displacement of the actuator is determined by the piezoelectric constant d 33 than the piezoelectric constant d 33 2~3 Higher displacements occur than conventional bimorph actuators, which use a double d 31 .

그리고 밴더형 액츄에이터의 구동전압 크기는 압전 세라믹의 크기와 무관하며 단지 전극의 선폭에 의해 결정되기 때문에 이를 좁힘으로써 구동 전압의 크기도 낮출 수 있다.In addition, the size of the driving voltage of the band-type actuator is independent of the size of the piezoelectric ceramic and is only determined by the line width of the electrode, so that the driving voltage can be reduced by narrowing it.

Claims (4)

복수개의 압전세라믹을 적층하여 이루어지는 압전 액츄에이터에 있어서;A piezoelectric actuator formed by laminating a plurality of piezoelectric ceramics; 상기 압전 세라믹의 분극, 구동전압, 발생변위가 모두 길이방향으로 동일함을 특징으로 하는 교번전극구조를 갖는 밴더형 액츄에이터.Bender type actuator having an alternating electrode structure, characterized in that the polarization, the driving voltage, and the generated displacement of the piezoelectric ceramic are all equal in the longitudinal direction. 청구항 1에 있어서, 상기 압전 세라믹의 상하 표면에 인터디지털(Inter-digital) 형태의 전극패턴을 형성하고 길이방향으로 서로 교번되도록 분극을 하여, 액츄에이터의 변위가 압전정수 d33에 의해 결정되도록 함을 특징으로 하는 교번전극구조를 갖는 밴더형 액츄에이터.The method of claim 1, wherein an interdigital electrode pattern is formed on upper and lower surfaces of the piezoelectric ceramic and polarized so as to alternate with each other in the longitudinal direction, so that the displacement of the actuator is determined by the piezoelectric constant d 33 . Bender-type actuator having an alternating electrode structure, characterized in that. 청구항 2에 있어서, 상기 구동전압이 전극패턴의 선폭에 의해 결정됨을 특징으로 하는 교번전극구조를 갖는 밴더형 액츄에이터.The vender-type actuator having an alternating electrode structure according to claim 2, wherein the driving voltage is determined by a line width of an electrode pattern. 청구항 2에 있어서, 중간부를 기준으로 상층부와 하층부의 압전 세라믹 분극방향이 서로 반대인 것을 특징으로 하는 교번전극구조를 갖는 밴더형 액츄에이터.The band-type actuator having an alternating electrode structure according to claim 2, wherein the piezoelectric ceramic polarization directions of the upper and lower layers are opposite to each other with respect to the middle portion.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102820422A (en) * 2012-07-17 2012-12-12 北京大学 Monolithic piezoelectric transducer and manufacturing method thereof
CN103023372A (en) * 2012-11-23 2013-04-03 上海交通大学 Single-phase-driven SMD (Surface-Mounted Device) longitudinal-torsional ultrasonic micromotor

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KR101768811B1 (en) * 2016-06-28 2017-08-17 한국세라믹기술원 Multilayer piezoelectric device structure and multilayer piezoelectric device structure comprising magnetostrictive material

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102820422A (en) * 2012-07-17 2012-12-12 北京大学 Monolithic piezoelectric transducer and manufacturing method thereof
CN103023372A (en) * 2012-11-23 2013-04-03 上海交通大学 Single-phase-driven SMD (Surface-Mounted Device) longitudinal-torsional ultrasonic micromotor

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