KR20040089081A - 편광 방위 검출형 2차원 수광 타이밍 검출 장치 및 그것을이용한 표면 형상 계측장치 - Google Patents
편광 방위 검출형 2차원 수광 타이밍 검출 장치 및 그것을이용한 표면 형상 계측장치 Download PDFInfo
- Publication number
- KR20040089081A KR20040089081A KR10-2004-7007526A KR20047007526A KR20040089081A KR 20040089081 A KR20040089081 A KR 20040089081A KR 20047007526 A KR20047007526 A KR 20047007526A KR 20040089081 A KR20040089081 A KR 20040089081A
- Authority
- KR
- South Korea
- Prior art keywords
- light
- polarization
- type image
- incident
- accumulation type
- Prior art date
Links
- 230000010287 polarization Effects 0.000 title claims abstract description 89
- 238000001514 detection method Methods 0.000 title claims abstract description 71
- 238000009825 accumulation Methods 0.000 claims abstract description 47
- 238000005259 measurement Methods 0.000 claims abstract description 46
- 238000003384 imaging method Methods 0.000 claims abstract description 33
- 230000003287 optical effect Effects 0.000 claims description 45
- 238000010226 confocal imaging Methods 0.000 claims description 13
- 238000010191 image analysis Methods 0.000 claims description 12
- 230000008859 change Effects 0.000 claims description 11
- 238000005286 illumination Methods 0.000 claims description 7
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 41
- 230000010363 phase shift Effects 0.000 description 16
- 230000007246 mechanism Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 5
- 238000002366 time-of-flight method Methods 0.000 description 5
- 238000000691 measurement method Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000028161 membrane depolarization Effects 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 241000196324 Embryophyta Species 0.000 description 1
- 241001465754 Metazoa Species 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000004624 confocal microscopy Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J4/00—Measuring polarisation of light
- G01J4/04—Polarimeters using electric detection means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002061575 | 2002-03-07 | ||
| JPJP-P-2002-00061575 | 2002-03-07 | ||
| PCT/JP2003/002434 WO2003074967A1 (fr) | 2002-03-07 | 2003-03-03 | Detecteur a synchronisation de photo-reception bidimensionnelle du type a detection d'angle de polarisation, et dispositif de mesure de forme superficielle l'utilisant |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20040089081A true KR20040089081A (ko) | 2004-10-20 |
Family
ID=27784859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR10-2004-7007526A KR20040089081A (ko) | 2002-03-07 | 2003-03-03 | 편광 방위 검출형 2차원 수광 타이밍 검출 장치 및 그것을이용한 표면 형상 계측장치 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7092093B2 (ja) |
| EP (1) | EP1482273A4 (ja) |
| JP (1) | JP3747471B2 (ja) |
| KR (1) | KR20040089081A (ja) |
| CN (1) | CN1271387C (ja) |
| WO (1) | WO2003074967A1 (ja) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2362117T3 (es) * | 2005-07-26 | 2011-06-28 | Koninklijke Philips Electronics N.V. | Sistema de eliminación de vello. |
| KR100752758B1 (ko) * | 2005-10-19 | 2007-08-29 | (주) 인텍플러스 | 영상 측정 장치 및 그 방법 |
| DE102006049846A1 (de) * | 2006-10-23 | 2008-05-08 | Schott Ag | Anordnung sowie ein Verfahren zur Vermeidung der Depolarisation von linear-polarisiertem Licht beim Durchstrahlen von Kristallen |
| JP5123522B2 (ja) * | 2006-12-25 | 2013-01-23 | パナソニック株式会社 | ３次元計測方法及びそれを用いた３次元形状計測装置 |
| WO2009147814A1 (ja) * | 2008-06-02 | 2009-12-10 | パナソニック株式会社 | 法線情報を生成する画像処理装置、方法、コンピュータプログラム、および、視点変換画像生成装置 |
| JP5412959B2 (ja) * | 2009-02-02 | 2014-02-12 | 株式会社高岳製作所 | 光応用計測装置 |
| TWI426296B (zh) * | 2009-06-19 | 2014-02-11 | Ind Tech Res Inst | 利用光學偏極特性之三維顯微共焦量測系統與方法 |
| IL201110A (en) | 2009-09-22 | 2014-08-31 | Vorotec Ltd | Device and method of navigation |
| JP5248551B2 (ja) * | 2010-06-17 | 2013-07-31 | 株式会社東芝 | 高さ検出装置 |
| JP5955574B2 (ja) | 2012-02-03 | 2016-07-20 | 株式会社東光高岳 | 立体形状計測装置 |
| JP5987610B2 (ja) * | 2012-09-28 | 2016-09-07 | Ｊｆｅスチール株式会社 | 鋼板検査装置、鋼板検査方法、および鋼板製造方法 |
| WO2014057580A1 (ja) * | 2012-10-12 | 2014-04-17 | 株式会社ニレコ | 形状計測方法及び形状計測装置 |
| US9418431B2 (en) * | 2012-12-19 | 2016-08-16 | Tenaris Connections Limited | Straightness measurements of linear stock material |
| WO2015164868A1 (en) | 2014-04-26 | 2015-10-29 | Tetravue, Inc. | Method and system for robust and extended illumination waveforms for depth sensing in 3d imaging |
| AU2015101099A6 (en) * | 2015-08-10 | 2016-03-10 | Wisetech Global Limited | Volumetric estimation methods, devices, & systems |
| JP6807546B2 (ja) * | 2016-11-15 | 2021-01-06 | パナソニックＩｐマネジメント株式会社 | 画像形成装置 |
| US10197781B2 (en) * | 2016-12-29 | 2019-02-05 | Asm Technology Singapore Pte Ltd | Vertical chromatic confocal scanning method and system |
| CN106871811B (zh) * | 2017-01-21 | 2019-02-05 | 西安交通大学 | 基于变角度无透镜傅里叶数字全息的物体三维形貌测量装置及方法 |
| US10462444B2 (en) | 2017-04-17 | 2019-10-29 | Faro Technologies, Inc. | Three-dimensional inspection |
| JP7071633B2 (ja) * | 2018-07-06 | 2022-05-19 | 富士通株式会社 | 距離計測装置、距離計測方法および距離計測プログラム |
| US10924645B2 (en) | 2018-11-29 | 2021-02-16 | Microsoft Technology Licensing, Llc | Polarization imaging to detect display screen |
| US11050944B2 (en) * | 2018-11-29 | 2021-06-29 | Microsoft Technology Licensing, Llc | Switched polarization imaging to detect display screen |
| KR102279870B1 (ko) * | 2019-07-30 | 2021-07-21 | (주)칼리온 | 패턴 마스크 및 인버스 패턴 마스크를 이용한 3차원 스캐닝의 프로젝션 시스템 및 그 방법 |
| CN111092655B (zh) * | 2019-12-19 | 2021-03-05 | 汪扬帆 | 一种高速调制可见光通信系统 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL6918301A (ja) * | 1969-12-05 | 1971-06-08 | ||
| JPH03269205A (ja) | 1990-03-19 | 1991-11-29 | Mitsutoyo Corp | 非接触３次元形状計測装置 |
| US5365067A (en) * | 1993-06-30 | 1994-11-15 | National Research Council Of Canada | Method and device for evaluation of surface properties, especially molecular orientation, in non-transparent layers |
| JP2500379B2 (ja) | 1994-02-15 | 1996-05-29 | 工業技術院長 | 光パルスを用いた三次元形状測定装置 |
| JP3306858B2 (ja) * | 1995-11-02 | 2002-07-24 | 株式会社高岳製作所 | 立体形状計測装置 |
| JP3873401B2 (ja) * | 1996-11-19 | 2007-01-24 | コニカミノルタセンシング株式会社 | ３次元計測システム |
| DE19705889C2 (de) * | 1997-02-15 | 1999-12-09 | Daimler Chrysler Ag | Drehwinkelsensor |
| US6134011A (en) * | 1997-09-22 | 2000-10-17 | Hdi Instrumentation | Optical measurement system using polarized light |
| JPH11352054A (ja) | 1998-06-08 | 1999-12-24 | Mitsubishi Heavy Ind Ltd | エリプソメトリ装置 |
-
2003
- 2003-03-03 CN CNB038017946A patent/CN1271387C/zh not_active Expired - Fee Related
- 2003-03-03 KR KR10-2004-7007526A patent/KR20040089081A/ko not_active Application Discontinuation
- 2003-03-03 JP JP2003573381A patent/JP3747471B2/ja not_active Expired - Lifetime
- 2003-03-03 WO PCT/JP2003/002434 patent/WO2003074967A1/ja active Application Filing
- 2003-03-03 EP EP03707195A patent/EP1482273A4/en not_active Withdrawn
- 2003-03-03 US US10/494,374 patent/US7092093B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US20040257565A1 (en) | 2004-12-23 |
| EP1482273A1 (en) | 2004-12-01 |
| US7092093B2 (en) | 2006-08-15 |
| JP3747471B2 (ja) | 2006-02-22 |
| WO2003074967A1 (fr) | 2003-09-12 |
| CN1271387C (zh) | 2006-08-23 |
| EP1482273A4 (en) | 2008-02-27 |
| CN1610817A (zh) | 2005-04-27 |
| JPWO2003074967A1 (ja) | 2005-06-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |