KR20040069496A - Microfluidic mixer and manufacturing method thereof - Google Patents

Abstract

PURPOSE: A microfluidic mixer and a manufacturing method thereof are provided to lessen a pressure loss, to shorten a distance to be required by a mixing and to apply to various fluidic elements. CONSTITUTION: The microfluidic mixer comprises a flowing channel that at lest two fluids flows and are mixed in, wherein the channel has a plurality of flowing zones interconnected in the direction that the fluid flows in, and the channel of the adjacent flowing zones have the same cross section area but different forms so that the fluids gradually rotate while flowing. The cross section(40) of the flowing zones are divided into a basic cross section(40a) and at least one strain section(40b,40c,40d,40e).

Description

Microfluidic mixer and manufacturing method thereof

The present invention relates to a microfluidic mixer, and more particularly, to a head array for an inkjet printer or to increase the mixing efficiency or the reaction efficiency in a device in which a fluid is mixed or a biochemical reaction occurs such as a microchemical reactor or a bio device. The present invention relates to a microfluidic mixer that can be applied to a microfluidic device for controlling the flow of a fluid such as an array and the like, and a method of manufacturing the same.

In microfluidic-based systems, for example biochemical analytical systems, mixing between different types of liquid samples has been known to be one of the most difficult tasks and an essential process that must be included to shorten the reaction time. In the mixing of such liquid samples, one of the important goals is to reduce the mixing distance, which is the distance that the liquid flows to achieve the required degree of mixing, and to reduce the pressure loss during the liquid flow.

Unlike systems based on microfluidics, mixing of two or more fluids at the usual macro-system level is very easy, for example, when you add milk to coffee, you only need to stir it a few times with a teaspoon to mix it. Soon it can be seen that a uniformly mixed milk coffee can be obtained. However, mixing two or more fluids in a microfluidic-based system, ie a microsystem, is not only possible using the same method as in the Macro-System, but also by Reynolds where the majority of the microfluidic flow is very low. It is not as easy as in the macro system because it has the characteristic of laminar flow with water, and it is not as easy as in the macro system, and the problem of reducing the mixing distance and pressure loss described above is related to miniaturization. This is an important issue.

Because of these points, there is a recent interest in research in this field, and several microfluidic mixers have been proposed. The conventional method of mixing fluids in the proposed microfluidic mixer is a method of forming a microstructure in the flow path through which the fluid flows to divide the fluid to increase the contact area with each other, and to complicate the flow of the fluid flowing inside the flow path. As a result, the flow paths are roughly formed in three dimensions in such a way that the area in which the different fluids come into contact with each other increases.

First, a method of installing microstructures in a flow path is described. This method installs microstructures formed by micromachining techniques such as microslit and microplume in a flow path and flows through the flow path by the microstructures. Since the fluid is separated finely, it can be effectively applied to highly viscous fluids. However, the conventional microfluidic mixer using such a microstructure has a problem that it is difficult to miniaturize the microfluidic mixer because the flow resistance is increased to increase the driving pressure of the microfluidic mixer as the structure is detailed and complicated to increase the fluid mixing effect.

Next, a method of increasing the mixing of different fluids by creating a three-dimensional winding of the flow path to complicate the flow of the fluid flowing through the flow path needs to refine the microstructure in order to increase the fluid mixing. Since there is an advantage that the pressure reduction is not relatively large, there is a problem in that the operating region of the flowing fluid is limited because a specific flow rate condition is required to increase the complexity of the flow.

Looking at the individual techniques to which the above methods are applied, the three-dimensional curved pipe type microfluidic mixer, published by Robin H. Liu et al. In the Journal of MEMS in 2000, is a three-dimensionally serpentine pipe-shaped flow path. As a result of this, the fluid flows in a spiral shape and a secondary flow occurs in the bend, which creates the complexity of the flow. However, this method requires a limited flow condition to allow the secondary flow to occur, there is a problem that mixing occurs only when a certain flow rate condition or more is satisfied.

In addition, the microfluidic mixer presented by Arnaud Bertsch et al. In 2001 at the MEMS Society used stereolithography to form a three-dimensional flow path to increase the flow complexity. This microfluidic mixer is made by reducing the size of a commercially available manual fluid mixer, which is already used in food mixing, polymer processing, etc .. Since it must be manufactured using stereolithography method, it is difficult to mass-produce other elements, For example, there is a problem that is difficult to integrate with a micro pump.

On the other hand, the microfluidic mixer presented by S.Bohm et al. At the μ-TAS conference in 2001 used a method of increasing the contact area between different fluids by using a rotation. There was a problem that a large pressure loss occurs, and there is also a problem that the complexity of the flow does not appear significantly because the twist of the wireline can not be expected only by the rotation in one axis direction.

In addition, the microfluidic mixer presented by Joon-Ho Kim et al. At the MEMS Conference in 2002, made a branched flow path that separates and combines the flow of fluid by making a two-layered flow path. The method of increasing the area where the other fluids contact each other was used. This microfluidic mixer can also increase the area in which the fluids are in contact with each other, but since the twisting of the streamline cannot be greatly expected, the improvement of the fluid mixing degree due to the complexity of the flow has not been significant.

Finally, in January 2002, Abraham D. Stroock et al., Published in SCIENCE, used a microfluidic mixer at the bottom of the flow path to form a herring bone-shaped comb-shaped groove to rotate the fluid. It is intended to promote mixing between them. In this case, since the complexity of the flow did not show much due to the effect of rotation in one direction, the grooves should be arranged obliquely to the right by 1/3 and to the left by 2/3, and periodically opposite to each other. Created a rotation. This increases the complexity of the flow and lowers the limit value of the flow condition under which the fluid mixer operates, but because the flow resistance in the groove is small, flow occurs along the groove, so that the rotation of the fluid occurs in the flow path. In order to make it pass through several grooves, there is a problem of lengthening the mixing distance and increasing the mixing time, and when the flow rate increases, the flow that proceeds in the axial direction prevails over the flow that rotates along the groove. Due to the complexity of the flow does not increase there was a problem that tends to decrease the mixing degree.

Accordingly, an object of the present invention, in order to solve this problem in the prior art, it is possible to reduce the pressure loss, the short distance required for mixing, and to increase the range of the flow rate of fluid mixing well, which is a disadvantage of the conventional microfluidic mixers. It is to provide a microfluidic mixer applicable to a fluid element.

In addition, another object of the present invention is to provide a method for producing a microfluidic mixer that can be made by applying a variety of microfabrication techniques, the production process is simple and mass production.

Figure 1a is a perspective view showing a flow path of the microfluidic mixer according to the first embodiment of the present invention,

Figure 1b is a perspective view of the upper plate and the lower plate formed with a flow path groove for the flow path of Figure 1a,

Figure 2a is an enlarged perspective view showing an enlarged cycle of one counterclockwise rotation flow path of the flow path of Figure 1a,

Figure 2b is a perspective view of the upper plate and the lower plate formed flow path groove for the counterclockwise rotation flow path of Figure 2a,

FIG. 2C is a cross-sectional view sequentially illustrating a cross section of a flow path in the flow direction of the fluid of FIG. 2B;

3A is an enlarged perspective view illustrating one cycle of a clockwise rotation flow path of the flow path of FIG. 1A;

3B is a perspective view of an upper plate and a lower plate formed with a flow path groove for the clockwise rotation flow path of FIG. 3A;

3C is a cross-sectional view sequentially illustrating a flow path cross section in the flow direction of the fluid of FIG. 3B;

4A is an enlarged perspective view showing an enlarged view of one cycle of the branch flow path in the flow path of FIG. 1A;

Figure 4b is a perspective view of the upper plate and the lower plate formed with a flow path groove for the branch flow path of Figure 4a,

4C is a cross-sectional view sequentially illustrating a cross-sectional view of a flow path that is horizontally branched along the 'A' flow direction of the fluid of FIG. 4B;

FIG. 4D is a cross-sectional view sequentially illustrating a flow path section that is horizontally branched along the 'B' flow direction of the fluid of FIG. 4B;

Figure 5a is an enlarged perspective view showing an enlarged view of one cycle of the flow path of the microfluidic mixer according to the second embodiment of the present invention,

5B is a perspective view of an upper plate and a lower plate on which a flow path groove for the flow path of FIG. 5A is formed;

6 is a perspective view of the upper and lower plates of the microfluidic mixer according to the third embodiment of the present invention;

7 is a perspective view of the upper and lower plates of the microfluidic mixer according to the fourth embodiment of the present invention;

8A to 8C are process conceptual diagrams for manufacturing the upper and lower plates of the microfluidic mixer of the present invention.

* Explanation of symbols for main parts of the drawings

10: upper plate 11: counterclockwise rotation flow path upper plate

12: branch flow path top plate 13: clockwise rotation flow path top plate

14: top plate euro home 20: bottom plate

21: counterclockwise rotation flow path lower plate 22: branch flow path lower plate

23: clockwise rotation flow path lower plate 24: bottom plate euro groove

30: Euro 31: counterclockwise rotation euro

33: branch flow path 33: clockwise rotation flow path

40: flow path cross section 40a: first cross section

40b: second section 40c: third section

40d: fourth section 40e: fifth section

51: resistor 53: resistor

According to the present invention, in the microfluidic mixer in which a fluid flows and two or more fluids are mixed while the fluid flows, the flow path has a plurality of flow sections interconnected along a flow direction of the fluid. The microfluidic mixer is characterized in that the flow path cross-sections of the adjacent adjacent flow sections have substantially the same area but different in shape so that the fluid can gradually rotate in flow.

Here, the flow path cross section of the plurality of flow section, the vertical cross-section is at least one of the upper flow path cross section and the lower flow path cross section divided by the horizontal axis passing through the basic cross section vertically passing through the center of the basic cross section vertically. It is preferable to include at least one deformation | transformation cross section formed transversely and less than half of the width | variety of the said basic cross section from a center line.

The basic cross section and the deformed cross section are provided in contact with each other such that the upper plate and the lower plate on which the flow path grooves are formed are opposed to each other, and the basic cross section is the first cross section having a substantially rectangular shape. The cross section includes a second cross section in which the upper flow path cross section is positioned to the right in the first cross section, a third cross section in which the lower flow path cross section is positioned to the right in the first cross section, and a lower flow cross section in the first cross section. More preferably, the fourth cross-section repositioned to the left and the fifth cross-section relocated to the left from the first cross section.

In addition, the flow path has a flow path section of the plurality of flow sections so that the fluid flows gradually in the counterclockwise direction when viewed from the upstream side in the flow direction of the fluid flow through the flow path from the first cross section to the fifth cross section It is preferable to include a counterclockwise rotation flow path that is arranged at least one cycle sequentially.

The flow paths may include a flow path cross section of the plurality of flow sections such that the fluid flows gradually in a clockwise direction when viewed from an upstream side in the flow direction of the fluid while the fluid flows through the first cross section, the second cross section, And a clockwise rotation passage which is arranged at least one cycle sequentially in the fifth section, the fourth section, and the third section, wherein the counterclockwise rotation channel and the clockwise rotation channel are at least once. It can be configured to be connected in series.

In addition, if it is configured to further include a resistor disposed in the flow path for heating the fluid flowing through the flow path, and the electrical connection line for connecting the resistor to a power source it is possible to apply heat to the fluid flowing through the flow path.

In addition, a plurality of the flow paths may be spaced apart from each other in at least one of up, down, and left and right directions when viewed from an upstream side in the flow direction of the fluid, so that a plurality of fluids may be mixed at one time.

In addition, it is more preferable that the flow path further includes a branch flow path that is divided into a plurality of spaced apart from each other and then merged again.

On the other hand, according to another field of the present invention, the flow path cross section of the plurality of flow section is at least one of the upper cross section and the lower flow cross section is divided by the base cross section and the transverse axis transverse to the base cross section of the base cross section The plurality of flow sections including at least one deformable cross section formed by translating the transverse position from the longitudinal center line vertically passing through the center to less than half the width of the basic section, and when the upper and lower plates are opposed to each other. Providing flow path grooves each having substantially the same depth on a lower surface of the upper plate and an upper surface of the lower plate such that a flow path having a flow path cross section of the upper plate is formed; There is provided a method of manufacturing a microfluidic mixer, comprising the step of placing the lower surface of the upper plate and the upper surface of the lower plate to face each other and then combining the upper plate and the lower plate.

Here, the basic cross section is a first cross section of a substantially rectangular shape, the deformed cross section is a second cross section in which the upper flow path cross section moves to the right from the first cross section, and the lower flow path cross section from the first cross section It is preferable that the third cross section moves to the right side, the fourth cross section moves the lower flow path cross section to the left side from the first cross section, and the fifth cross section moves the upper flow path cross section to the left side from the first cross section.

The method may further include providing a resistor disposed in the flow path and an electrical connection line connecting the resistor to a power source before coupling the upper plate and the lower plate between the upper plate and the lower plate.

On the other hand, if the configuration further comprises the step of further providing the flow path groove on at least one surface of the upper surface and the lower surface of the upper plate is to produce an array-type micromixer in which a plurality of flow paths are formed in the vertical direction Become more efficient.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1A is a perspective view illustrating a flow path of the microfluidic mixer according to the first embodiment of the present invention, and FIG. 1B is a perspective view of an upper plate and a lower plate on which a flow path groove for the flow path of FIG. 1A is formed. As shown in these drawings, the microfluidic mixer according to the first embodiment of the present invention, the lower plate 20 and the lower plate euro groove 24 formed with a depression formed in a predetermined depth and the depth of the lower plate euro groove 24 and An upper plate 10 having an upper plate flow path groove 14 formed to have substantially the same depth, and the upper plate flow path groove 14 being disposed in contact with the lower plate flow path groove 24 of the lower plate 20 to be coupled to the lower plate 20. ). In the present embodiment, the microfluidic mixer is combined with one upper plate 10 and one lower plate 20 so as to be opposed to each other, but the upper plate 10 and the lower plate 20 are stacked in plural numbers, and one microplate is mixed. It is of course possible to construct a fluid mixer. In this case, flow path grooves 14 and 24 are formed on the upper surface of the upper plate 10 and the lower surface of the lower plate 20, so that the upper surface of the upper plate 10 serves as the lower plate 20, and the lower surface of the lower plate 20 is the upper plate. When laminated so as to play the role of (10), the flow path can be formed more efficiently.

FIG. 1A shows a flow path 30 formed therein when the upper plate and the lower plate shown in FIG. 1B are disposed in contact with each other so as to be opposed to each other. In this flow path 30, a fluid is connected to the flow path 30. Counterclockwise rotary flow path 31 which can gradually rotate in counterclockwise direction as seen from the upstream side of the fluid while flowing, and clockwise when viewed from the upstream side of the fluid as the fluid flows through the flow path 30. Clockwise rotation flow path 33 which can gradually rotate and flow with the counterclockwise rotation flow path 31 and the clockwise rotation flow path 33 are disposed between the two flow paths (30) that are combined in one upstream It is provided with a branching flow path 32 that is divided apart and then merged again on the downstream side. The counterclockwise rotation flow passage 31, the clockwise rotation flow passage 33 and the branch flow passage 32 each have a plurality of flow sections, and the flow path cross section 40 of each flow section has substantially the same area but different shapes. At least one of the upper cross-section 41 and the lower flow-path cross section 42, which is divided by the basic cross section and the horizontal axis passing transversely to the basic cross section, has a width of the basic cross section from a longitudinal center line vertically passing through the center of the basic cross section. It consists of a deformation section that changes its position horizontally in less than half. The basic section and the deformation section will be described later in detail.

Figure 2a is an enlarged perspective view showing an enlarged cycle of the counterclockwise rotation flow path of the flow path of Figure 1a, Figure 2b is a perspective view of the upper plate and the lower plate formed with a flow path groove for the counterclockwise rotation flow path of Figure 2a, Figure 2c FIG. 2 is a cross-sectional view sequentially illustrating a flow path cross section in the flow direction of the fluid of FIG. 2B. In FIG. 2A, the upper portion of the counterclockwise rotation flow passage 31 is formed by the upper plate flow path groove 14 of the upper plate 11 of the counterclockwise rotation flow passage portion, and the lower portion of the counterclockwise rotation flow passage 31 is clockwise. It is formed by the lower plate flow path groove 24 of the rotary flow path lower plate (21).

FIG. 2C is a cross-sectional view of a flow path taken along a-a 'line, b-b' line, c-c 'line, d-d' line, e-e 'line, and f-f' line of FIG. As shown in the drawing, the flow path cross section 40 of the plurality of flow sections of the counterclockwise rotation flow passage 31 has a basic cross section and a deformation cross section as described above. In this embodiment, the basic cross section has a substantially rectangular shape. The first end face 40a is a deformed end face, in which the upper flow path end face 41 is right by one fourth of the width of the first end face 40a from the longitudinal center line of the first end face 40a. The second cross section 40b and the lower flow cross section 42 in the first cross section 40a are moved to the right by a quarter of the width of the first cross section 40a from the longitudinal center line of the first cross section 40a. The repositioned third end face 40c and the lower flow path end face 42 in the first end face 40a are positioned to the left by a quarter of the width of the first end face 40a from the longitudinal center line of the first end face 40a. The changed fourth end face 40d and the upper flow path end at the first end face 40a. 41 is composed of a fifth section (40e) by a width 1/4 the changed position to the left of the first end face (40a) a first end face (40a) from the longitudinal center line of the. In FIG. 2C, the first cross section 40a is the flow path cross section 40 along the a-a 'line and the f-f' line, and the second cross section 40b is the flow path cross section 40 along the b-b 'line and the third cross section. The cross section 40c is the channel section 40 along the line c-c ', the fourth section 40d is the channel section 40 along the line d-d' and the fifth section 40e is the line e-e '. Corresponds to the cross section according to. The counterclockwise rotation flow path 31 is formed when the first end surfaces 40a to the fifth end surfaces 40e are sequentially arranged, and when the fluid flows through the counterclockwise rotation flow path 31. Rotate counterclockwise. Here, it can be easily seen that the areas of the first end face 40a to the fifth end face 40e are substantially the same.

Figure 3a is an enlarged perspective view showing an enlarged cycle of the clockwise rotation flow path of the flow path of Figure 1a, Figure 3b is a perspective view of the upper plate and the lower plate formed with a flow path groove for the clockwise rotation flow path of Figure 3a, Figure 3c It is sectional drawing which shows the flow path cross section along the flow direction of the fluid of 3b sequentially. As shown therein, the clockwise rotation passage 33 formed by the combination of the upper plate 13 and the lower plate 23 of the clockwise rotation flow passage part may include a first end face 40a, a second end face 40b, and a fifth end face. In the case where the end face 40e, the fourth end face 40d, and the third end face 40c are sequentially arranged, the clockwise rotation passage 33 gradually rotates clockwise as the fluid flows.

Figure 4a is an enlarged perspective view showing an enlarged one cycle of the branch flow path of the flow path of Figure 1a, Figure 4b is a perspective view of the upper plate and the lower plate formed with a flow path groove for the branch flow path of Figure 4a, Figure 4c is a view of the fluid of Figure 4b FIG. 4D is a cross-sectional view sequentially illustrating a flow path cross section horizontally branched along the 'A' flow direction, and FIG. 4D is a cross-sectional view sequentially illustrating a flow path cross section horizontally branched along the 'B' flow direction of the fluid of FIG. 4B. Branch flow path 40 of the a-a line in FIG. 4C when the flow direction of the fluid is the same as 'A' by the branch flow path 32 formed by the combination of the branch flow path upper plate 12 and the lower plate 22. Flows with flow path cross section 40 along the line c-c 'are separated from the flow section with flow path cross section 40 along the line b-b' The different fluids coming in from the bottom and up are combined in the section and the thinning occurs with respect to the horizontal plane. If the flow direction of the fluid is the same as 'B' and different fluids flow left and right in the flow section having the flow path section 40 of the a-a 'line of Figure 4d, the introduced fluid is along the line b-b' Separated in the flow section having the flow path cross-section 40 and coupled to the flow section having the flow path cross-section 40 along the c-c 'line so that different fluids flowing into the left and right flows in a thin layer with respect to the vertical plane. do.

5A is an enlarged perspective view illustrating one cycle of a flow path of the microfluidic mixer according to the second embodiment of the present invention, and FIG. 5B is a perspective view of an upper plate and a lower plate on which a flow path groove for the flow path of FIG. 5A is formed. As shown in these figures, in the flow path 30a of the microfluidic mixer according to the second embodiment of the present invention, the counterclockwise rotation channel 31a and the clockwise rotation channel 33a are connected in series. Flow path grooves 14a and 24a are formed in the lower plate 20a and the upper plate 10a. As a result, the fluid flowing through the flow path 30a gradually rotates counterclockwise while passing through the counterclockwise rotation flow path 31a, and gradually rotates clockwise while passing through the clockwise rotation flow path 33a, thereby counterclockwise. And rotate clockwise alternately.

6 is a perspective view of an upper plate and a lower plate of the microfluidic mixer according to the third embodiment of the present invention. As shown therein, the upper plate 10b and the lower plate 20b of the microfluidic mixer according to the third embodiment of the present invention. ), Flow path grooves 14b and 24b are formed in parallel so that two flow paths 30 of the microfluidic mixer according to the first embodiment of the present invention are arranged in parallel. This allows the mixing of fluids to occur simultaneously in two flow paths 30 arranged in parallel.

7 is a perspective view of an upper plate and a lower plate of the microfluidic mixer according to the fourth embodiment of the present invention. As shown therein, the microfluidic mixer according to the fourth embodiment of the present invention includes flow path grooves 14c and 24c. The formed upper plate 10c and lower plate 20c, a resistor 51 disposed in the flow path for heating the fluid flowing through the flow path, and an electrical connection line 53 connecting the resistor 51 to a power source. As a result, heat may be supplied to the fluid flowing through the flow path 30, thereby facilitating mixing of two or more fluids.

With this configuration, the manufacturing method of the microfluidic mixer according to the present invention will be described.

First, if necessary, the upper plate 10 may form a flow path of each of the clockwise rotation flow passage 33, the counterclockwise rotation flow passage 31, and the branch flow passage 32, or a flow path 30 in which these are arranged in an appropriate order. ) And flow path grooves 14 and 24 in the lower plate 20. At this time, it is preferable that the flow path grooves 14 and 24 formed in the upper plate 10 and the lower plate 20 have substantially the same depth, and an array form in which the plurality of flow paths 30 are formed in the vertical direction. In order to manufacture the microfluidic mixer of the flow path grooves 14 and 24 not only on the lower surface of the upper plate 10 and the upper surface of the lower plate 20, but also the upper surface of the upper plate 10 and the lower surface of the lower plate 20 as necessary. Form.

8A to 8C are process conceptual diagrams for manufacturing the upper and lower plates of the microfluidic mixer of the present invention. As shown therein, the flow path grooves 14 and 24 in the upper plate 10 and the lower plate 20 in various ways. ) Can be formed. As shown in FIG. 8A, the silicon substrate 61 is directly processed using an ICP etching system, that is, a silicon etching method such as DRIE or KOH etching, or as shown in FIG. 8B, a thick photoresist (PR: photoresist). By using the (62) and the electroplating method on the silicon substrate 61, the silicon etching method or the electroplating method using a thick photoresist (PR: photoresist) (62) to produce a mold as shown in Figure 8c The method of shape | molding with the various polymer 63, etc. are mentioned. Molds can be molded from a variety of polymer materials to facilitate mass production.

After the flow path grooves 14 and 24 are formed in the upper plate 10 and the lower plate 20, if necessary, the resistor 51 disposed in the flow path 30 and the electric power for connecting the resistor 51 to a power source. The connecting line 53 is disposed between the upper plate 10 and the lower plate 20.

And the upper plate flow path groove 14 and the lower plate flow path groove 24 is arranged to contact the upper plate 10 and the lower plate 20 so as to face each other and then coupled.

As described above, the flow path grooves 14 and 24 in the upper plate 10 and the lower plate 20 so that the flow path cross-sections 40 of the plurality of flow sections connected to each other along the flow direction of the fluid have substantially the same area but differ in shape. ) And a microfluidic mixer in which the upper plate 10 and the lower plate 20 are contacted to each other so that the corresponding flow path grooves 14 and 24 are opposed to each other, thereby forming the flow path 30. It is possible to reduce the pressure loss, shorten the distance required for mixing, and increase the range of flow rate in which fluid mixing is well performed.

In the above-described embodiment, the basic cross section has been described with respect to a cross section having a substantially rectangular shape, but the basic cross section may be a circular cross section or a hexagonal cross section.

In the above-described embodiment, the flow path 30 has been described above in which one or two flow paths 30 are formed in parallel, but of course, two or more flow paths 30 may be formed in parallel. Of course, it is also possible to configure a microfluidic mixer in the form of an array (array) stacked in the vertical direction.

In addition, in the above-described embodiment, the counterclockwise rotation passage 31, the branch passage 32 and the clockwise rotation passage 33 are sequentially connected or the counterclockwise rotation passage 31 and the clockwise rotation passage 33 ) Has been described above with respect to the flow path 30 connected in series, the counterclockwise rotation flow passage 31, the branch flow passage 32 and the clockwise rotation flow passage 33 may be variously combined, and the counterclockwise rotation flow passage 31 ), The branch flow path 32 and the clockwise rotation flow path 33 may be configured, of course, in the above-described embodiment, the counterclockwise rotation flow path 31, the branch flow path 32, and The case in which the clockwise rotation flow path 33 necessarily includes one cycle is described above, but may be properly connected as necessary, such as being connected every 1/2 cycle.

As described above, according to the present invention, it is possible to reduce the pressure loss which is a disadvantage of the conventional microfluidic mixers, to shorten the distance required for mixing, and to increase the range of flow rates in which fluid mixing is well performed, thereby making it applicable to various fluid elements. Microfluidic mixers are provided.

In addition, there is provided a method of manufacturing a microfluidic mixer that can be made by applying a variety of microfabrication techniques, the production process is simple and mass production is possible.

Claims (12)

In a microfluidic mixer having a fluid flow path and mixed with two or more fluids flowing in the flow path, The flow path has a plurality of flow sections interconnected along the direction in which the fluid flows, and the cross-sections of the flow paths of the adjacent flow paths have substantially the same area but differ in shape from each other so that the fluid may gradually rotate in flow. Microfluidic mixer, characterized in that. The method of claim 1, The flow path cross section of the plurality of flow sections may include a base cross section and a vertical center line in which at least one of an upper flow cross section and a lower flow cross section divided by a horizontal axis passing through the basic cross section passes vertically through the center of the basic cross section. A microfluidic mixer comprising at least one deformable cross-section formed transversely to less than half the width of the basic section. The method of claim 2, The basic cross section and the deformed cross section are provided so that the upper plate and the lower plate on which the flow path grooves are formed are in contact with each other. The basic cross section is a first cross section having a substantially rectangular shape, and the deformed cross section includes a second cross section in which the upper flow path cross section is positioned to the right in the first cross section, and the lower flow cross section is right in the first cross section. And a third cross-section relocated to a second cross-section, a fourth cross-section relocated from the first cross-section to the left side, and a fifth cross-section relocated to the left from the first cross-section. . The method of claim 3, The flow path has a flow path section of the plurality of flow sections sequentially from the first cross section to the fifth cross section so that the fluid flows gradually in a counterclockwise direction when viewed from the upstream side in the flow direction of the fluid. Microfluidic mixer comprising a counterclockwise rotary flow passage arranged in at least one cycle. The method of claim 4, wherein The flow path has a flow path cross section of the plurality of flow sections such that the fluid flows gradually in a clockwise direction when viewed from an upstream side in the flow direction of the fluid while the fluid flows through the first cross section, the second cross section, and the first cross section. And a clockwise rotation flow passage arranged in at least one cycle sequentially in the fifth section, the fourth section and the third section, wherein the counterclockwise rotation flow passage and the clockwise rotation flow passage are at least once in series. Microfluidic mixer, characterized in that connected. The method of claim 1, And a resistor disposed in the passage for heating the fluid flowing through the passage, and an electrical connection line connecting the resistor to a power source. The method of claim 1, And a plurality of flow paths spaced apart from each other in at least one of up, down, left, and right directions when viewed from an upstream side in the flow direction of the fluid. The method according to any one of claims 1 to 7, The flow path, the microfluidic mixer further comprises a branched flow path is divided into a plurality of spaced apart from each other and then merged again. The flow path cross section of the plurality of flow sections is the basic cross-section and at least one of the upper flow path cross section and the lower flow path cross section divided by the horizontal axis passing through the basic cross section from the longitudinal center line vertically passing through the center of the basic cross section; The lower surface of the upper plate includes at least one deformable end surface formed by changing the horizontal position to less than half of the width of the cross section, so that a flow path having the plurality of flow sections is formed when the upper plate and the lower plate are opposed to each other. Providing flow path grooves on the upper surface of the lower plate and having substantially the same depth; And arranging the lower surface of the upper plate and the upper surface of the lower plate to face each other and then coupling the upper plate and the lower plate to each other. The method of claim 9, The basic cross section is a first cross section having a substantially rectangular shape, and the deformed cross section includes a second cross section in which the upper flow cross section moves to the right from the first cross section, and the lower flow cross section is right in the first cross section. A third cross section moving to the first cross section, a fourth cross section moving the lower flow path cross section from the first cross section to the left side, and a fifth cross section moving the upper flow cross section cross section to the left side from the first cross section; How to make. The method of claim 9, The method of manufacturing a microfluidic mixer further comprises providing a resistor disposed in the flow path and an electrical connection line connecting the resistor to a power source before the upper plate and the lower plate are coupled between the upper plate and the lower plate. . The method according to any one of claims 9 to 11, The method of manufacturing a microfluidic mixer further comprising the step of further providing the flow path groove on at least one surface of the upper surface and the lower surface of the upper plate.