KR20040018711A - Access floor assembly for vibartion isolation - Google Patents

Abstract

PURPOSE: An access floor assembly for insulating vibration is provided to be capable of supporting an equipment installation region of an access floor without using an additional structure for supporting the equipment installation region. CONSTITUTION: An access floor assembly for insulating vibration is provided with a plurality of first support parts(130) spaced apart from each other for forming an equipment installation region(100) at the upper portions of beams(111), and a plurality of second support parts(140) parallel with the first support parts at the upper portion of the beams. The access floor assembly further includes a panel part(120) installed at the upper portion of the first support parts and a plurality of gratings(160) installed at the upper portion of the second support parts. At this time, the grating has an opening portion corresponding to the panel part.

Description

Access floor assembly for vibration isolation {ACCESS FLOOR ASSEMBLY FOR VIBARTION ISOLATION}

The present invention relates to an access floor assembly for vibration insulation, and in particular, without installing a separate structure for supporting the plate member on which the predetermined equipment is installed, the plate member is directly installed on the beam on which the access floor is installed and accessed. An access floor assembly for vibration insulation that can insulate the floor and the plate member from vibration.

As the modern industry is advanced, the use of precision equipment is required in various technical fields such as research, development, production, and inspection processes. When using precision equipment, it is necessary to maintain a constant use environment such as temperature and humidity. In particular, it is necessary to block vibrations from the surroundings and to prevent vibrations generated from itself and transmitted to the surroundings.

Semiconductor production plants typically maintain constant temperature and humidity in clean rooms and are designed as access floors designed to block vibration between precision equipment. In other words, the area where the equipment is installed and the area where the worker works is isolated from vibration, and the dark vibration according to the operation of the plant is regulated below the specific vibration criteria.

Figure 1 shows an access floor assembly for separating the conventional equipment installation area and the work area to insulate from vibration. In the conventional vibration insulation access floor assembly, the work area consisting of a plurality of gratings (50) is supported by the grid beams (11, 13) of the building, while the equipment installation consisting of a plate member 20 for supporting the equipment The area is supported by installing a separate plate member support structure 30, the structure is separated from the work area and equipment installation area so that vibration is blocked.

Japanese Laid-Open Patent Publication No. 2000-336962 improves the problem of the prior art shown in FIG. 1, that is, the structure supporting the equipment installation area is not easy to install, so that precision equipment is installed. The structure of the access floor for vibration insulation is improved by the pillar which has the rigidity which can prevent a separate micro vibration.

In addition, Japanese Patent Laid-Open No. 2000-170362 discloses a plate material in which vibration damping material is inserted between a rigid material having a large mass to insulate vibration transmission between a part where precision equipment or the like is installed and an operator's work area. The structure provided in the same support body which supports grating is disclosed.

However, in the anti-vibration countermeasure disclosed in Japanese Patent Laid-Open No. 2000-336962, a pillar for separately supporting the equipment installation area must be installed at the bottom, so that the pillar is designed in the arrangement of pipes or wires at the bottom where the equipment is installed. It is disadvantageous in the factory design and maintenance of the installed equipment because it should be designed to avoid this installed area.

In addition, Japanese Laid-Open Patent Publication No. 2000-170362 has a merit that the equipment installation area uses a plurality of plate members of high rigidity and mass, and that anti-vibration measures are filled with a dustproof material inside the plate member. It is a structure that supports the equipment installation area and the working area made of grating as the same beam, and there is a defect that it is fundamentally a structure that cannot block vibration.

The present invention is to solve the problems of the conventional vibration insulation access floor assembly as described above, the present invention is to support the equipment installation area without using a separate structure for supporting the equipment installation area of the access floor. An object of the present invention is to provide an access floor assembly for vibration isolation.

In addition, an object of the present invention is to provide an access floor assembly for vibration insulation that can physically separate the work area and the equipment installation area while supporting the work area and the equipment installation area by the same beam.

In addition, the present invention provides an access floor assembly for vibration insulation that can reduce vibration amplification caused by unbalance due to deformation of the support by using a pad made of concrete with little deformation as a plate member in a region for supporting the equipment. The purpose is to provide.

1 is a schematic view showing an assembly of a conventional vibration insulation access floor.

2 is an exploded perspective view of the vibration floor access floor assembly according to the present invention;

3 is a cross-sectional view taken along the line A-A of FIG.

4 is a detailed view of the portion D of FIG.

5 is a detail view of the portion E of FIG.

6 is a cross-sectional view taken along the line B-B of FIG.

FIG. 7 is a detailed view of the F portion of FIG. 6

8 is a cross-sectional view taken along the line C-C of FIG.

9 is a detail view of the portion G of FIG. 8;

FIG. 10 is a graph showing vertical (Z-axis) acceleration of arm vibration versus frequency measured on a plate member of a vibration insulation access floor assembly and a conventional vibration insulation access floor assembly according to an embodiment of the present invention.

FIG. 11 is a graph showing horizontal (X, Y-axis) accelerations of arm vibration versus frequency measured on a plate member of a vibration insulation access floor assembly and a conventional vibration insulation access floor assembly according to an embodiment of the present invention.

12 is a graph showing the vertical (Z-axis) displacement of the arm vibration relative to the frequency measured on the plate member of the vibration insulation access floor assembly and the conventional vibration insulation access floor assembly according to an embodiment of the present invention.

<Description of Symbols for Main Parts of Drawings>

11,13 lattice beam 20 plate member

30 Plate Support Structure 50 Grating

100 Equipment installation area 111,113 Grid

120 plate 128 concrete

130 First supporting member 132 First dustproof plate

140 Second supporting member 142 Stud bolt

150 3rd support member 152 2nd dustproof plate

160 Grating 162 3rd Dustproof Plate

170,180 4th support member

The vibration floor access floor assembly according to the present invention for achieving the above object is a long shape installed in parallel with a constant interval and a constant height in order to form the equipment installation area on a plurality of beams provided on the top of the plurality of pillars A plurality of elongated shapes having a plurality of first supporting members of a plurality of first supporting members, the length of which is parallel to the plurality of first supporting members on the beam other than the equipment installation region, and is set at a constant height higher than an installation height of the first supporting members. A plurality of gratings provided on the second support member at the same height as the plate member, having a second support member, a plate member provided on the first support member, and a gap between the outside of the plate member and a predetermined clearance; Characterized in that it comprises a.

In addition, when the length of the first support member is longer than the length of the plate member, the vibration insulation access floor assembly according to the present invention is installed lower than the installation height of the first support member, and extends to the second support member A plurality of third supporting members having a long shape installed in the equipment installation area and the same length as the second supporting member on the exposed portion of the third supporting member exposed through the plate member; And a plurality of fourth supporting members having a shape and a plurality of gratings provided on the fourth supporting member at the same height as the plate member, having a predetermined clearance with the outer portion of the plate member.

In addition, the vibration insulation access floor assembly according to the present invention, the first dustproof plate having elasticity provided between the first support member and the beam, and the second dustproof having elasticity provided between the third support member and the beam. It further comprises a plate.

In addition, the vibration insulation access floor assembly according to the present invention is characterized in that it further comprises a third dustproof plate provided between the second support member and the grating and between the fourth support member and the grating.

In addition, the vibration floor access floor assembly according to the present invention, the plate member is a bottom plate, an outer plate formed to extend upward along the outer periphery of the bottom plate, and the bottom plate and the outer plate is placed in the container formed It is characterized by including the concrete.

In addition, the vibration floor access floor assembly according to the present invention, the bottom plate of the plate member is a plurality of joints of each side end welded to the upper surface of the adjacent first support member, and the upper surface of the first support member The joint plate is made of an exposed part because it is not overlapped, and the outer plate is formed of two side plates welded on both sides of the bottom plate, and a front plate and a back plate welded to both ends of the bottom plate in the longitudinal direction. It is done.

In addition, the vibration insulation access floor assembly according to the invention, the plate member is characterized in that it further comprises a plurality of reinforcing bars installed inside the concrete.

In addition, in the vibration floor access floor assembly according to the present invention, the first to third support members are H-shaped cross-sections of the beams, and the width of the fourth support members is at the boundary between the plate member and the grating. The fourth supporting member fixed between the third supporting member positioned above and the grating is a c-shaped beam in cross section, the remaining fourth supporting member is an H-shaped beam in cross section, and the second supporting member is Spaced from the beam by a stud bolt and is fixed on the beam.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic view showing a conventional installation structure of the vibration insulation access floor, Figure 2 is an exploded perspective view of the vibration insulation access floor assembly according to the invention, Figure 3 is a cross-sectional view taken along line AA of Figure 2, Figure 4 3 is a detailed view of part D of FIG. 3, FIG. 5 is a detailed view of part E of FIG. 3, FIG. 6 is a cross-sectional view taken along line BB of FIG. 2, FIG. 7 is a detail view of part F of FIG. 6, and FIG. 8. 2 is a cross-sectional view taken along line CC of FIG. 2, and FIG. 9 is a detailed view of the portion G of FIG. 8.

10 is a graph showing vertical (Z-axis) acceleration of the arm vibration relative to frequency measured on the plate member of the vibration insulation access floor assembly and the conventional vibration insulation access floor assembly according to an embodiment of the present invention. FIG. 11 is a graph showing horizontal (X, Y-axis) accelerations of the frequency vibration of the arm vibration measured on the plate member of the vibration insulation access floor assembly and the conventional vibration insulation access floor assembly, and FIG. 12 is a graph showing the vertical (Z-axis) displacement of the arm vibration relative to the frequency measured on the plate member of the vibration insulation access floor assembly and the conventional vibration insulation access floor assembly according to an embodiment of the present invention.

2 to 9, the vibration floor access floor assembly according to an embodiment of the present invention includes a plurality of first support members 130, a plate member 120, and a plurality of second support members 140. , A plurality of third support members 150, a plurality of fourth support members 170 and 180, a plurality of gratings 160, a plurality of first dustproof plates 132, a plurality of second dustproof plates 152, a plurality of The third dustproof plate 162 of the.

The semiconductor factory to which the embodiment according to the present invention is mainly applied has a lattice beams 111 and 113 as a unique structure for maintaining the cleanliness of the semiconductor manufacturing line. The lattice beams 111 and 113 are vulnerable to vibration.

The grid beams 111 and 113 are formed by vertically intersecting a plurality of transverse beams 111 and a plurality of longitudinal beams 113, and are made of steel or concrete such as an H beam (reinforced concrete or reinforced with steel (RC concrete). Including), and the attached grid is shown in the grid gratings 111,113 made of concrete.

The grid beams 111 and 113 are fixed to the upper ends of the plurality of pillars 110 positioned at the intersection of the transverse beams 111 and the longitudinal beams 113 and are supported by the pillars 110.

The pillar 110 is made of a cylindrical iron pipe, steel frame or concrete (including concrete reinforced concrete (RC concrete) reinforced with steel or steel frame).

The plurality of first support members 130 are installed in parallel to each other in the equipment installation area 100 on which the precision equipment on the grid beams 111 and 113 are to be installed.

As the first support member 130, an H-shaped beam having a cross section formed by connecting the center of each of the first lower plate 134 and the first upper plate 136 with the first connecting plate 135 is mainly used.

The first support member 130 spans at least two or more of the transverse beams 111 and is arranged in a direction parallel to the longitudinal beams 113 at regular intervals, respectively.

2 to 4, in the vibration floor access floor assembly according to the present embodiment, four first supporting members 130 span three transverse beams 111 and each of the first supporting members is provided. Both ends of 130 are located on two transverse beams 111 positioned outward of the three transverse beams 111.

The four first supporting members 130 are fixed by anchoring the first lower plate 134 with anchor bolts (not shown) at points where they intersect with the three lateral beams 111.

On the other hand, at the point where the first lower plate 134 is anchored, the first dustproof plate 132 is inserted between the bottom surface of the first lower plate 134 and the upper surface of the lateral beam 111 in order to further strengthen vibration insulation. Can lose.

The first dustproof plate 132 is a plate of elastic material filled with an epoxy resin.

The plate member 120 is installed on an upper surface of the first upper plate 136 of the first support member 130.

The plate member 120 is a pad including a bottom plate, an outer plate, rebar and concrete.

The bottom plate is an iron plate that is fixed to the first top plate 136 of the plurality of first support members 130, the outer plate is fixed to the band-shaped steel or flat iron in the upward direction along the outer periphery of the bottom plate Is formed.

4 and 5, in a preferred embodiment, the bottom plate of the plate member 120 overlaps both ends of the bottom surface of the first upper plate 136 of the neighboring first support member 130 to be welded. The plurality of joint iron plate 121 and the upper surface of the first upper plate 136 is made of an exposed portion that is not overlapped with the joint iron plate 121.

In addition, the bottom plate includes an extension iron plate 122 in which one side end is overlapped and welded to an upper surface of the first upper plate of the first support member arranged at the outermost side of the plurality of first support members 130. can do.

The outer plate includes two side plates welded to both sides of the bottom plate, and a front plate and a back plate welded to both ends of the bottom plate in the longitudinal direction, and each cross section is vertically slightly inward of the outer periphery at the top. An inner vertical wall 123 extending upwardly, a horizontal wall 124 extending horizontally from an upper end of the inner vertical wall 123 to an outer side, and an outer vertically extending upward from the end of the horizontal wall 124 again It consists of a vertical wall 125.

Referring to the drawing in detail with respect to the outer plate according to the embodiment, the outer plate has a cross-section on the outer circumference of the bottom plate c. The shape of the beam is fixed by fixing the beam in the shape of a cross-section and the c-shaped beam in the upper portion thereof.

Accordingly, the c The vertical plate of the beam of the shape of the inner vertical wall 123, the c The horizontal plate of the beam in the shape of a The horizontal plate 124 overlaps the horizontal plate of the magnetic beam, and the b The vertical plate of the beam having the shape of the outside forms the outer vertical wall 125.

The bottom plate and the outer plate form a wide container shape as a whole, and concrete 128 is poured into the container.

On the other hand, before the concrete 128 is poured a plurality of reinforcing bars (126, 127) are installed in the container.

At this time, the upper surface of the horizontal wall 124 is a locking jaw that both ends of the reinforcing bars (126, 127) is caught, the supporting portion 129 is protruded and fixed to the bottom plate to support the reinforcing bars (126, 127) not to sag.

The plurality of second support members 140 are fixedly arranged side by side with the first support member 130 on the upper surfaces of the grid beams 111 and 113 in portions other than the vibration blocking region in which the first support members 130 are installed.

As the second supporting member 140, an H-shaped beam having a cross section formed by connecting the center of each of the second lower plate 144 and the second upper plate 146 with the second connecting plate 145 is used.

In addition, the second support member 140 may be used by connecting a plurality of short ends of a plurality of H beams. Referring to FIG. 5, the connection may connect both ends of the second support member 140 to each other. Abutting the second connecting plate 148 on both sides of the second connecting plate 145 on the butt portion, and then the second connecting plate 145 and the second connecting plate 148 is fixed by bolts.

3 and 5 to 7, the second support member 140 is fixed by a stud bolt 142 protrudingly fixed to the upper surface of the transverse beam 111.

The stud bolt 142 is anchored to the upper surface of the transverse beam 111 by anchoring a predetermined bracket (not shown) attached to the lower end with an anchor bolt (not shown) on the upper surface of the transverse beam 111. Protruding to is fixed.

The stud bolt 142 is formed in a hole (not shown) previously formed in the second lower plate 144 of the second support member 140 in a state where two nuts are fastened to the upper end of the stud bolt 142. The second support member 140 is fixed by inserting the upper end of the) and tightening another nut.

Accordingly, the second support member 140 is not in direct contact with the upper surface of the lateral beam 111, and in some cases, the installation height of the second support member 140 is moved by moving the nut up and down. It can be adjusted.

The third support member 150 is arranged in parallel with the first support member 130 on the lateral beam 111 of the equipment installation area 100 between the first support member 130 or on the outside thereof. do.

The third support member 150 has the second support member 140 and the third such that the second support member 140 and the third support member 150 extend from the boundary of the equipment installation area 100. The support members 150 are arranged in a row.

Some or all of the third support member 150 passes under the plate member 120 to be exposed out of the plate member 120, wherein the third support member 150 is located between the plate member 120 and the plate member 120. The third support member 150 should be installed so as not to contact the bottom surface of the plate member 120 so that vibration is not directly transmitted to the plate member 120.

To this end, in the present embodiment, the height of the third support member 150 is lower than that of the first support member 130.

As the third supporting member 150, an H-shaped beam having a cross section formed by connecting the center of each of the third lower plate 154 and the third upper plate 156 with the third connecting plate 155 is mainly used.

In addition, the third support member 150 may be used by connecting a plurality of short ends of a plurality of H beams. Referring to FIGS. 5 and 6, the connection of the third support member 150 is performed. Both ends face each other, and a third connecting plate 158 is placed on each of the third connecting plate 155 at the butted portion, and the second connecting plate 155 and the second connecting plate 148 are fixed with bolts. It is done by

In the present embodiment, there are four third support members 150 passing below the plate member 120. Referring to FIGS. 3 and 4, one of them is described below with the plate member 120 in the width direction. The third support member is half covered by the plate member 120 in the width direction because it passes just below the boundary of the grating 160.

The third support member 150 is fixed in substantially the same manner as the first support member 130 is fixed to the transverse beam 111 at the point crossing the transverse beam 111.

In this case, a second vibration damping plate 152 of elastic material may be installed between the bottom surface of the third lower plate 154 and the upper surface of the lateral beam 111.

The fourth supporting members 170 and 180 are installed to have the same height as the second supporting member 140 on the portion of the third supporting member 150 exposed outside the plate member 120.

As the fourth supporting members 170 and 180, an H-shaped cross section or a C-shaped cross section is used.

As shown in FIG. 7, the fourth supporting member 170 having the H-shaped cross section connects the center of each of the fourth lower plate 174 and the fourth upper plate 176 to the fourth connecting plate 175. As an H-beam formed of steel, referring to FIG. 6, an upper surface of the third upper plate 156 of the third support member 150 at the portion where the third support member 150 passes through the plate member 120 is exposed. The fourth lower plate 174 is installed on the third supporting member 150 by fastening with a bolt (not shown).

As shown in FIG. 4, the fourth supporting member 180 having a c-shaped cross section has a fifth lower extension having a width about half of the third upper plate 156 of the third supporting member 150. A steel beam comprising a plate 182, a fifth upper extension plate 184, and a fifth connecting plate 183 connecting one end of the fifth lower extension plate 182 and one end of the fifth upper extension plate. .

3 to 4, the fourth supporting member 180 having a c-shaped cross section is disposed directly below a boundary formed by the plate member 120 and the grating 160 described below in a width direction. 3, which is fixed on the third upper plate 156 of the support member 150, and passes halfway below the lengthwise one side boundary of the plate member 120 is exposed about half from the plate member 120 in the width direction 3 is fixed by fastening the fifth lower extension plate 182 to the upper surface of the upper plate 156 with a bolt (not shown).

The plurality of gratings 160 are installed to surround one or all of the plate members 120 to have a predetermined gap with the outside of the plate member 120 in an area other than the equipment installation area 100.

The grating 160 includes an upper surface of the second upper plate 146 of the second support member 140, an upper surface of the fourth upper plate 176 of the fourth support member 170, and the fourth support member 180. ) Is mounted on each or all of the top surfaces of the fifth upper extension plates 184.

At this time, the height of the grating 160 is equal to the height of the plate member 120.

In addition, each of the bottom surface of the grating 160 and the upper surface of the second upper plate 146, the upper surface of the fourth upper plate 176, and the fifth upper extension plate 184 may have a rubber or the like to increase the dustproof effect. The third dustproof plate 162 made of aluminum pads is inserted.

The vibration floor access floor assembly according to the present invention having the above configuration acts as follows to insulate vibration.

Since the plurality of gratings 160 and the plate member 120 are separated from the grating 160 to the plate member 120 or from the plate member 120 to the grating 160 Direct vibration is not transmitted.

Therefore, the vibration transmission from the grating 160 to the plate member 120 is performed by the grating 160 → the third dustproof plate 162 → the fourth support members 170 and 180 → the third support member 150 → the first 2 vibration plate 152 → lattice beams (111, 113) → the first vibration plate 132 → the first supporting member 130 → plate member 120 or in the order of grating 160 → third vibration plate (162) → the second support member 140 → stud bolt 142) → grating beams (111, 113) → the first dustproof plate 132 → the first support member 130 → plate member 120 in order to deliver Since the vibration is attenuated during the transmission, the vibration is hardly transmitted to the precision equipment installed on the plate member 120.

On the contrary, when the vibration device (not shown in the drawing) is installed in the plate member 120, the vibration generated by the vibration device is transmitted to the grating 160 in a reverse order to the order, and in this case, also transmitted. Since the vibration is canceled on the way, the vibration is hardly transmitted from the vibration equipment to the precision equipment installed on the grating 160 and other plate members.

In particular, with reference to Figures 10 to 12, the vibration displacement and the acceleration (●) measured in the plate member 120 of the vibration insulation access floor assembly according to the present invention in the plate member of the conventional vibration insulation access floor assembly Similar to the measured vibration displacement and acceleration (◇), it can be seen that the model name MPA7500 exposure machine manufactured by Canon (CANON) satisfies the vibration tolerance regulation (□) required at high frequencies.

The present invention by the configuration as described above, unlike the conventional vibration insulation access floor assembly as described above do not need to install a separate structure for supporting the equipment installation area of the access floor, the construction is easy, and the construction cost can be reduced Has the effect.

In addition, the present invention by the configuration as described above, while supporting the work area and the equipment installation area by the same beam, by physically separating the work area and the equipment installation area to satisfy the vibration tolerance regulations required for the installation of precision equipment There are advantages to it.

In addition, the present invention by the configuration as described above is caused by the imbalance caused by the deformation of the support portion by using a pad of the concrete less deformation without using a steel plate as a plate member of the area for supporting the equipment. It has the advantage of reducing vibration amplification.

What has been described above is only one embodiment for implementing the vibration insulation access floor according to the present invention, the present invention is not limited to the above embodiment. Therefore, the scope of protection of the present invention is determined by the technical idea claimed in the following claims, and any person having ordinary knowledge in the field to which the present invention pertains may make various changes without departing from the gist of the present invention. It's going to be crazy.

Claims (8)

In order to form the equipment installation area 100 on the plurality of beams 111 installed on the upper ends of the plurality of pillars 110, a plurality of first supporting members 130 having a long shape are installed in parallel with a predetermined interval and a predetermined height. )Wow, Longer than the installation height of the first support member 130 and parallel to the plurality of first support member 130 on the beam 111 other than the equipment installation area 100, the length is installed at a constant height A plurality of second support member 140 of the shape, Plate member 120 is provided on the first support member 130, It characterized in that it comprises a plurality of grating 160 on the second support member 140, the same height as the plate member 120, having a predetermined gap with the outside of the plate member 120. Access floor assembly for vibration isolation. The method of claim 1, When the length of the first support member 130 is longer than the length of the plate member 120, it is installed lower than the installation height of the first support member 130, is extended to the second support member 140 A plurality of third supporting members 150 having a long shape installed in the equipment installation area 100; The plurality of fourth supporting members 170 and 180 having a long shape are installed on the exposed portion of the third supporting member 150 exposed through the plate member 120 at the same height as the second supporting member 140. Wow, Vibration insulation, characterized in that it further comprises a plurality of gratings provided on the fourth support member (170, 180) having a predetermined gap with the outer periphery of the plate member 120, the same height as the plate member 120. Access Floor Assembly. The method of claim 2, A first dustproof plate 132 having elasticity provided between the first support member 130 and the beam 111 and an elastic material provided between the third support member 150 and the beam 111. 2. An access floor assembly for vibration insulation further comprising a vibration damper 152. The method of claim 3, And a third dustproof plate 162 installed between the second support member 140 and the grating 160 and between the fourth support members 170 and 180 and the grating 160. Access floor assembly for vibration isolation. The method according to any one of claims 1 to 4, The plate member 120 includes a bottom plate, an outer plate formed to extend upward along the outer circumference of the bottom plate, and concrete 128 placed inside a container formed by the bottom plate and the outer plate. Access floor assembly for vibration isolation. The method of claim 5, The bottom plate of the plate member 120 includes a plurality of joint steel plates 121 welded to the upper surfaces of the neighboring first support members 130 and the joints of the upper surfaces of the first support members 130. Iron plate 121 is made of a portion exposed by not overlapping, the outer plate is formed of two side plates welded to the upper sides of the bottom plate and the front plate and the back plate welded to both ends of the bottom plate longitudinal direction Access floor assembly for vibration isolation, characterized in that. The method of claim 5, The plate member 120 further comprises a plurality of reinforcing bars (126,127) installed in the interior of the concrete (128). The method of claim 7, wherein The first to third support members are H-shaped cross section, The fourth support member 180 is fixed between the upper portion of the third support member positioned at the boundary between the plate member 120 and the grating 160 in the width direction of the fourth support member and the grating 160. Is a cross-section is a c-shaped beam, the remaining fourth support member 170 is a cross-section H-shaped beam, The second support member (140) is separated from the beam (111) by a stud bolt (142), characterized in that the access floor assembly for vibration insulation, characterized in that fixed on the beam (111).