JP4460377B2 - Clean room joists and clean room joists using the same - Google Patents

Description

  The present invention relates to a clean room joist floor such as a semiconductor manufacturing factory or a liquid crystal factory.

  In general, clean room joist floors of semiconductor manufacturing factories, liquid crystal factories, etc. have a large number of joists fixed at predetermined intervals (for example, 600 mm pitch) on the upper surface of the steel beams (large beams, small beams) that make up the building frame. In the area where the grating is arranged through the support legs and the production equipment is installed, a surface plate is arranged on the joist, and a joist having high rigidity is used. In other words, the clean room joist floor is a double floor using the same grating as the free access floor as described above, but the required vibration spec is so severe that it is not comparable to the free access floor. It is necessary to use a highly rigid joist and firmly fix it to the beam steel frame.

  Therefore, conventionally, as described in, for example, Patent Documents 1 and 2, SC (steel-concrete) joists made up of box-shaped joist molds processed from steel plates and concrete filled therein are provided. in use. The SC joist is usually fixed to the steel beam by welding as described in Patent Document 1. Specifically, the steel piece attached to the SC joist is often fixed to the steel beam by field welding. Further, the SC joist may be fastened and fixed to the steel piece previously welded to the steel beam with bolts and nuts.

  Any of the fixing methods has become a bottleneck as a construction method for a large-scale production facility that requires a short work period due to the labor and welding involved with the attachment of the steel piece, and also causes an increase in cost. That is, in large-scale semiconductor manufacturing factories and liquid crystal factories with a side of hundreds of tens of meters, the number of SC joists used is large, and the number of steel pieces for fixing them becomes enormous. The processing and welding of steel pieces require a lot of labor, and as a result, the construction period becomes longer and the cost increases.

  Also, in clean room joist floors that require particularly severe vibration isolation performance such as semiconductor manufacturing factories, construction accuracy is important, and in order to prevent play due to unevenness, the length of the support legs fixed on the joists is adjusted. Although the leveling of the grating and the surface plate is performed, the above fixing method does not have a function to finely adjust the joist level, so if there is unevenness between adjacent steel beams, the upper flange of the steel beam and the SC joist There is a possibility that a gap will be formed between the lower surface of the shaft and the joisting degree will be lowered, resulting in a decrease in vibration isolation performance.

Patent Document 3 discloses a joist having a function of finely adjusting the joist level, but this joist cannot be applied to a clean joist floor because it cannot secure vibration-proof performance. That is, FIG. 8 of Patent Document 3 includes a joist main body and a plurality of support legs that support the joist body, and the support legs are formed on the ground plate and a ground plate that is fixed to the floor surface with an adhesive. A holding cylinder and a bolt body that is inserted into the holding cylinder and fixed to the holding cylinder with a set screw, a receiving member provided at a position corresponding to the support leg of the joist body is screwed into the bolt body, and the bolt A joist material for forming a double floor is described in which the height of the joist body can be adjusted by adjusting the height of the receiving member by rotating the body. 1 to 7 of Patent Document 3, a pair of C-shaped steels and a support body having an expandable / contractible vertical through-hole interposed between them at predetermined intervals and fixed with horizontal screws, and A plurality of support legs comprising a joist body composed of: a ground plate fixed to the floor surface with an adhesive; and a bolt body that is erected on the ground plate and supports the support body slidably up and down; A duplex body that includes a nut body that is screwed to the bolt body to define a lower limit position of the support body, and is capable of adjusting the height of the joist body by sliding the joist body relative to the bolt body of the support leg. A joist for floor formation is described.

  However, both of these are not only low in rigidity because the joist body is made of steel, but also are supported by a bolt body standing on the ground plate via a nut-like member. The joist body has a low degree of fixation with respect to the frame, so it can be used as a joist floor for free access floors where vibration is not a problem. Is not applicable.

Japanese Patent Laid-Open No. 2003-307019 JP 2003-321925 A JP 2002-89022 A

  The present invention has been made in view of the above problems, and its object is to provide a joist for a clean room excellent in vibration-proof performance and workability and a clean room joist floor using the same. .

  In order to achieve the above object, the technical measures taken by the present invention are as follows. In other words, the clean room joist according to the first aspect of the present invention comprises an H-shaped steel and concrete filled between the upper and lower flanges, and the H-shaped steel has bolts on the upper and lower flanges on both sides of the web. The insertion hole is formed concentrically, and a sleeve and a nut are embedded in the concrete between the upper and lower flanges concentrically with the upper and lower bolt insertion holes.

  A clean room joist floor according to the invention described in claim 2 is a clean room joist floor using the joist for clean room according to claim 1, wherein the joist is perpendicular to the steel beam on the upper surface of the steel beam constituting the building. The lower end side of the long bolt inserted through the upper and lower bolt insertion holes of the H-shaped steel in the joist and screwed into the nut is inserted into the through hole formed in the upper flange of the steel beam. The base plate is fastened to the upper flange of the steel beam by a nut that is screwed into the lower end side threaded portion of the long bolt that protrudes downward from the steel plate, while the base plate of the grating support leg is installed on the top surface of the joist. The base plate is fastened and fixed to the joist with a nut that is screwed into an upper thread portion of a long bolt that protrudes upward from the through hole.

  According to the first aspect of the present invention, since the joist is composed of the H-shaped steel and the concrete filled between the upper and lower flanges, the joist has high rigidity, and particularly severe vibration isolation such as in a semiconductor manufacturing factory. It is suitable as a joist that constitutes a clean room joist floor that requires high performance.

  Moreover, when filling the concrete between the upper and lower flanges of the H-shaped steel, both ends of the long bolts inserted through the sleeve and nut are not welded to the flange of the H-shaped steel. , By inserting through the bolt insertion hole formed in the lower flange, the sleeve and nut can be fixed at a predetermined position with respect to the H-shaped steel, and the welding work in the joist manufacturing process is omitted, thereby reducing the cost. be able to.

According to the second aspect of the present invention, the joist is fixed to the steel beam with the lower end side of the long bolt screwed with the nut embedded in the concrete between the upper and lower flanges in the through hole of the upper flange of the steel beam. Since it is done by inserting and tightening and fixing with a nut at the bottom of the flange, welding work such as steel pieces to the joist and steel beam is unnecessary, and long bolts to fix the joist to the upper flange of the steel beam Since it is screwed into a nut embedded in the joist concrete, when the joist is hung on the steel beam, a lifting tool can be attached using the upper end of the long bolt, making it easier to hang the joist As a result, the workability is improved, and the construction period can be shortened and the cost can be reduced.

  In addition, a high rigidity joist composed of H-shaped steel and concrete filled between the upper and lower flanges is placed on the upper flange of the steel beam and fixed with a long bolt and nut. If the steel beam is uneven, the long bolt that fixes the joist to the upper flange of the steel beam is screwed into the nut embedded in the joist concrete. Place a reaction force member that supports the lower end of the long bolt on the lower flange of the steel beam, rotate the upper end of the long bolt, lift the joist by the screw action with the nut, and if necessary, A filler plate can be inserted between the joist and the joist level can be adjusted, enabling high-precision construction. Therefore, a clean room joist floor with high anti-vibration performance can be configured by having high rigidity and fixing degree of joists and enabling high-precision construction.

  The long bolt for fixing the joist to the steel beam is also used as the bolt for fixing the base plate of the grating support leg to the joist, so the number of bolts can be reduced and the clean room joist floor can be reduced by reducing the number of components. Cost can be reduced.

  Since the joists are not welded to the steel beam, the joists can be easily removed, and a clean room joist floor that is flexible enough to accommodate future plan changes in the clean room can be realized.

  In addition, since the upper end of the long bolt penetrates the base plate of the grating support leg and the lower end of the long bolt penetrates the upper flange of the steel beam, there is a possibility that the long bolt can be used for the installation of additional members in the future. In addition, since the long bolt is inserted into the sleeve and the joist concrete is in an unbonded state, it is possible to replace the bolt according to the application.

  1 and 2 illustrate a joist A for a clean room according to the present invention, and FIG. 3 illustrates a clean room joist floor B constructed using the joist A. As shown in FIG. 1, the joist A is an SC (steel-concrete) joist composed of an H-shaped steel 1 and concrete 2 filled between the lower flanges 1 a and 1 b. As shown in FIG. 2, bolt insertion holes 3a and 3b are concentrically formed in the upper and lower flanges 1a and 1b at both side positions of the web 1c, and the concrete 2 between the upper and lower flanges 1a and 1b The steel sleeve 4 and the hexagonal nut 5 are embedded concentrically with the upper and lower bolt insertion holes 3a, 3b. Reference numeral 6 denotes a welded wire mesh for preventing cracks in the concrete 2. The sleeve 4 and the nut 5 are set so that the sum of their axial lengths is slightly shorter than the distance between the upper and lower flanges 1a and 1b.

  The clean room joist floor B is mounted on the upper surface of a steel beam (large beam or small beam) 7 constituting the building so that the joist A is orthogonal to the steel beam 7 and the upper and lower bolts of the H-shaped steel 1 in the joist A The length of the long bolt 8 inserted through the insertion holes 3a and 3b and screwed into the nut 5 is inserted into the through hole 9 formed in the upper flange 7a of the steel beam 7 and protrudes downward from the through hole 9 The joist A is fastened and fixed to the upper flange 7a of the steel beam 7 by a nut 10 that is screwed into the lower thread portion of the bolt 8. On the upper surface of the joist A, the base plate 12a of the support leg 12 of the grating 11 is installed. The base plate 12a is fastened and fixed to the joist A by a nut 13 that is screwed into the upper end side screw portion of the long bolt 8 protruding upward from the through hole formed in 12a.As a loosening prevention measure, a dish washer or the like may be used, and as shown in FIGS. 3 and 8, a double nut may be used.

  The joist A is manufactured by the following method. That is, as shown in FIG. 4A, with the sleeve 4 and the nut 5 inserted between the upper and lower flanges 1a and 1b of the H-shaped steel 1, the long bolt is inserted from the bolt insertion hole 3a of the upper flange 1a. 8 is inserted into the sleeve 4 and screwed into the nut 5 to insert the tip of the long bolt 8 into the bolt insertion hole 3b of the lower flange 1b. In this case, it is desirable to prevent the tip of the long bolt 8 from protruding from the outer surface of the lower flange 1b in order to prevent damage to the thread due to contact with other objects.

  Although the sleeve 4 and the nut 5 are not welded to each other and are not welded to the H-shaped steel 1, as described above, both ends of the long bolt 8 inserted through the sleeve 4 and the nut 5 are placed on the H-shaped steel 1. By inserting through the bolt insertion holes 3a and 3b formed in the lower flanges 1a and 1b, the four members of the H-shaped steel 1, the sleeve 4, the nut 5, and the long bolt 8 are mutually restrained and integrated. 4 and nut 5 can be fixed to a predetermined position with respect to the H-shaped steel 1.

  In this state, as shown in FIG. 4B, the welded wire mesh 6 is fixed to the sleeve 4 with a binding wire (not shown) or the like, and as shown in FIG. 4C, the upper and lower flanges 1a. , 1b is filled with concrete 2. Due to the hardening of the concrete 2, the nut 5 is restrained in a non-rotatable state.

  In addition, in filling the concrete 2 between the upper and lower flanges 1a and 1b of the H-shaped steel 1, in the embodiment shown in FIGS. 4A to 4C, the H-shaped steel 1 is placed on its side and the web 1c is the bottom surface. The upper half of the mold is filled, and after the filled concrete is hardened, the H-shaped steel 1 is turned upside down and the remaining half is filled. Concrete 2 may be press-fitted and filled on both sides simultaneously.

  Accordingly, the joist A shown in FIGS. 1 and 2 is manufactured with the long bolt 8 as shown in FIG. Thus, no welding work is required in the manufacturing process of the joist A, the joist A can be manufactured efficiently, and the cost can be reduced.

  Next, the construction method of the clean room joist floor B will be described. First, as shown in FIG. 5, the joist A is suspended and placed at a predetermined position on the upper surface of the steel beam (large beam or small beam) 7 so as to be orthogonal to the steel beam 7. In this case, since the long bolt 8 for fixing the joist is screwed into the nut 5 embedded in the concrete 2 of the joist A, when the joist A is suspended on the steel beam 7, as shown in FIG. The hanger 14 such as an eyebolt can be attached using the upper end side of the bolt 8, and the joist A can be easily hung.

  When the joist A is placed at a predetermined position on the upper surface of the steel beam 7, as shown in FIG. 6, the upper end side of the long bolt 8 is rotated and screwed downward by the screw action with the nut 5. As shown, the lower end side of the long bolt 8 is inserted into the through hole 9 formed in the upper flange 7a of the steel beam 7.

  When there is unevenness between the steel beams 7, an appropriate reaction force member 15 such as a steel block that supports the lower end of the long bolt 8 is temporarily placed on the lower flange 7 b of the steel beam 7 as shown in FIG. Rotate the upper end of the long bolt 8 and lift the joist A by the screw action with the nut 5, and if necessary, put a filler plate (not shown) in the gap between the upper flange 7a of the steel beam 7 and the joist A. After the long bolt 8 is loosened and the reaction force member 15 is removed, the long bolt 8 can be turned to a predetermined position again to adjust the joist level, and the top end level of the joist A can be adjusted with high accuracy. Is possible.

Thereafter, as shown in FIG. 8, the joist A is fastened and fixed to the upper flange 7 a of the steel beam 7 by the nut 10 that is screwed into the lower thread portion of the long bolt 8 protruding downward from the through hole 9.
The base plate 12a of the support leg 12 is installed on the upper surface of the joist A, and a nut 13 is screwed onto the upper screw portion of the long bolt 8 protruding upward from the through hole of the base plate 12a. Is fixed to the joist A to form the clean room joist floor B shown in FIG.

  In this way, welding work such as a steel piece to the joist A or the steel beam 7 is unnecessary, and when the joist A is hung on the steel beam 7, it is hung using the upper end side of the long bolt 8. Since the tool 14 can be attached, it is easy to suspend the joist A, so that the workability is improved, and it is possible to reduce the construction period and cost of the clean room joist floor B.

  When rotating the long bolt 8, a groove or a hexagon hole may be formed on the top surface of the long bolt 8 and rotated with a screwdriver or a hexagon wrench, and a cap nut is put on the upper end side of the long bolt 8. It may be rotated through a cap nut with an electric drill or the like. In addition, as the long bolt 8, in the example shown in the figure, a screw portion formed on the upper end side and the lower end side is used, but a screw that is continuously threaded over the entire length like a double-cut bolt is used. May be.

  According to the above configuration, the joist A for the clean room is a highly rigid SC joist composed of the H-shaped steel 1 and the concrete 2 filled between the lower flanges 1a and 1b. Is mounted on the upper flange 7a of the steel beam 7 and fastened with the long bolt 8 and the nut 10 so that the joist A is fixed to the steel beam 7 and the steel beam 7 is uneven. Since the reaction force member 14 is placed on the lower flange 7b of the steel beam 7 and the upper end side of the long bolt 8 is rotated, the joist level can be adjusted, so that high-precision construction is possible. The clean room joist floor B with high vibration-proof performance can be configured by the fact that the rigidity and fixing degree of A is high and high-precision construction is possible.

  And in addition to the improvement of workability, shortening the construction period and cost reduction by omitting the welding work in the manufacturing process of the joist A and the joist work for fixing the joist A to the steel beam 7, the joist A is made of steel. Since the long bolt 8 for fixing to the beam 7 is also used as a bolt for fixing the base plate 12a of the grating support leg 12 to the joist A, the number of bolts can be reduced, the number of components can be reduced, and the clean room joist The cost of the floor B can be further reduced.

  Further, since the joist A is not welded to the steel beam 7, the joist A can be easily removed, and a clean room joist floor B having a high flexibility that can cope with a future plan change of the clean room can be realized. In particular, since the long bolt 8 is inserted into the sleeve 4 and is in an unbonded state with the concrete 2 of the joist A, the bolt can be replaced depending on the application. For example, as shown in FIG. 10, the surface plate 16 is placed on the upper surface of the joist A, and the platen 16 is directly fastened and fixed to the joist A with the long bolts 8 and the nuts 13 having dimensions passing through the platen 16. Is also possible.

  In addition, since the upper end side of the long bolt 8 passes through the base plate 12a of the grating support leg 12, and the lower end side of the long bolt 8 passes through the upper flange 7a of the steel beam 7, (A), (B ), The long bolt 8 may be used for future installation of additional members by connecting the stay 17 and the suspension bolt 18 or the like.

  FIG. 12 shows another embodiment. This embodiment is characterized in that the openings 19 are formed in places of the web 1c of the H-shaped steel 1 constituting the joist A so that the concrete 2 on both sides of the web 1c is integrated. In this way, it is easy to simultaneously fill the concrete 2 between the upper and lower flanges 1a and 1b on both sides of the web 1c.

FIG. 13 shows another embodiment. In this embodiment, joist A is RC (steel reinforced concrete)
It is characterized by the fact that it is a joist, and the H-shaped steel 1 is embedded for each connecting portion to the steel beam. Since the cross-sectional shape of the portion where the H-shaped steel 1 is embedded is not different from that of FIG.

It is a perspective view of a joist for a clean room according to the present invention. It is a principal part vertical front view of a joist. It is a principal part longitudinal front view of the clean room joist floor which concerns on this invention. It is a figure explaining the manufacturing method of a joist. It is a figure explaining the construction procedure of a clean room joist floor. It is a figure explaining the construction procedure of a clean room joist floor. It is a figure explaining the construction procedure of a clean room joist floor. It is a figure explaining the construction procedure of a clean room joist floor. It is a figure explaining the joist hanging method. It is a figure explaining the state which fixed the surface plate on the joist. It is a figure which shows the state which utilized the long volt | bolt for attachment of another member. It is a principal part vertical front view of the joist which shows other embodiment. It is a perspective view of the joist which shows other embodiment.

Explanation of symbols

A joist B clean room joist floor 1 H type steel 1a, 1b upper, lower flange 1b web 2 concrete 3a, 3b bolt insertion hole 4 sleeve 5 nut 6 welded wire mesh 7 steel beam 7a upper flange 8 long bolt 9 through hole 10 nut 11 grating 12 Support leg 12a Base plate 13 Nut

Claims (2)

  H-shaped steel and concrete filled between the upper and lower flanges. The H-shaped steel has bolt insertion holes concentrically formed on the upper and lower flanges on both sides of the web, and between the upper and lower flanges. A concrete joist with a sleeve and nut embedded in the same core as the upper and lower bolt insertion holes.   A clean room joist floor using the joist for clean room according to claim 1, wherein the joist is arranged on the upper surface of the steel beam constituting the building so as to be orthogonal to the steel beam, and the upper and lower of the H-shaped steel in the joist The lower end side of the long bolt inserted through the bolt insertion hole and screwed into the nut is inserted into the through hole formed in the upper flange of the steel beam, and screwed into the lower end side thread portion of the long bolt protruding downward from the through hole. While the joist is fastened to the upper flange of the steel beam with the nut to be joined, the base plate of the grating support leg is installed on the upper face of the joist, and the upper threaded part of the long bolt that protrudes upward from the through hole formed in the base plate A clean room joist floor, characterized in that the base plate is fastened to the joist with a nut that is screwed onto the joist.

Images