KR200346575Y1 - A discharge pipe keeping warmth / heat pipe of exhaust pipe part for semiconductor and LCD production installation - Google Patents

Abstract

The present invention relates to the insulation / heating of the discharge pipe of the exhaust pipe of equipment for semiconductor and LCD (LCD) production equipment.

The present invention can cover the exhaust pipe of equipment for semiconductor and LCD production equipment to heat or heat the exhaust gas and heat the nitrogen gas (N ₂ Gas) supplied into the exhaust pipe for purge. To provide exhaust pipe insulation / heating tubes for equipment exhaust pipes for semiconductor and LCD production facilities.

Description

A discharge pipe keeping warmth / heat pipe of exhaust pipe part for semiconductor and LCD production installation}

The present invention relates to a pipe that heats or heats an exhaust pipe of an exhaust pipe of an equipment for semiconductor and LCD production equipment. In particular, the present invention covers an exhaust pipe of an existing semiconductor and LCD production equipment. Regarding the exhaust pipe insulation / heating pipe of the exhaust pipe part of the equipment for semiconductor and LCD production equipment that can heat the gas and heat the nitrogen gas (N ₂ Gas) supplied to the exhaust pipe for purging at the same time will be.

In general, in the semiconductor and LCD production site, fire and explosion prevention and powder are formed from exhaust vapor such as silane (SILANE, SiH ₄ ) in the piping of the production facility, and the powder is adhered to the piping. In order to prevent this from happening, purge with inert gas (nitrogen gas) was carried out in order to explode when ignited if the unburned gas is in the furnace or other places, so to vent it out of the furnace before ignition. The purge using nitrogen gas also prevents the powdering of silane (SILANE, SiH _4: hydride) due to the temperature drop of the exhaust gas. Nitrogen gas is heated using a heater) to be supplied for purging or it is discharged by wrapping the pipe part using an electric heat insulating device (heater jacket: HEATERJACKET). Maintain proper temperature to prevent powder from remaining silane, etc. Scrubber (Scrubber), which overlaps the corrugation, removes moisture in the steam by flowing steam therebetween, or washes gas mixed with air pollutants to absorb the pollutants in the gas into water. Device to separate).

Chemical products emitted during the production process using various gases in facilities used for low temperature deposition, etching and thin film processes, which are chemical vapor deposition methods for semiconductor and LCD wafer fabrication (FAB) fabrication processes In order to prevent powder or liquid substances from recombining into dangerous substances by secondary reaction, to prevent the risk of spontaneous ignition and explosion, and to prevent clogging and malfunction of discharge pipe, valve, pump, etc. The gas is heated with high temperature nitrogen gas using a heater or the heating jacket is used to cover the discharge pipe of the outlet with a heater heater to warm the temperature.

Devices that prevent the powdering of silanes (SILANE, SiH ₄ ) by heating and supplying nitrogen gas with electric heaters (electric heaters), or by heating the pipes with electric heat insulators will not only increase production costs, There is a concern of fire occurrence due to overheating of the electric heater, difficulty in maintenance and management, and use of electricity, which includes electrical risks (short, explosion, etc.).

The present invention has been devised to solve the above problems, the heat / heat pipe in which the high-temperature steam circulated in the exhaust gas discharge pipe of the semiconductor and LCD (LCD) production equipment, the production site is circulated By fastening the pipe to the discharge pipe of the equipment, it has the advantage of preventing the reduction of production that can occur due to the equipment's downtime without stopping the equipment's operation, and reducing the production cost by not using electric energy. Not only can it escape from the dangers (short) caused by using electric energy, but it can also prevent fire from overheating of electric heater (electric heater), and it is easy and simple to install and operate. Rather, the number of management points (places) can reduce semiconductor maintenance costs.

(LCD) The purpose of the discharge pipe insulation / heating pipes in the exhaust pipe of the equipment for production facilities.

1 is a schematic diagram of a semiconductor and LCD (LCD) production facility.

Figure 2 is a front view of the thermal insulation / heating tube according to the present invention.

3 is a cross-sectional view taken along the line A-A of FIG.

Figure 4 is a cross-sectional configuration of the pipe line to which the heat / heating tube according to the present invention is applied.

5 is a sectional view taken along the line B-B in FIG.

6 is a cross-sectional view taken along the line C-C in FIG.

※ Explanation of code for main part of drawing ※

10: discharge pipe 20,20a: high temperature steam feed pipe

21,21a: Transfer path 22,22a: Steam inlet

23,23a: Steam outlet 30,30a: Nitrogen gas transfer pipe

31,31a: Transfer path 32,32a: Nitrogen gas inlet

33,33a: Nitrogen gas outlet 40,40a: Connection flange

100: semiconductor and LCD production facility 300: intake and exhaust device using pneumatic

400: heating supply pipe 500: nitrogen gas supply pipe

The construction of the present invention for achieving the above object, the heat source for heating and warming the exhaust gas in the factory so that the exhaust gas generated in the semiconductor and LCD (LCD) production facility 100 is not deposited in the discharge pipe 10 in the factory In heating / heating the discharge pipe 10 by using a heated high temperature steam,

It is divided into equal parts so that it can be installed on the exhaust pipe 10 installed in the production facility, and hot steam is supplied inside the surface in contact with the discharge pipe 10 to heat and heat the exhaust gas in the discharge pipe 10. High temperature steam transfer pipe 20, 20a is formed, the nitrogen gas transfer pipe is supplied to the outside of the high temperature steam transfer pipe 20, 20a is supplied to the discharge pipe 10 and the nitrogen gas blowing the discharge gas (30) (30a) are formed.

The thermal insulation / heating tube according to the present invention, the connection flange 40, 40a is formed on both sides so that the binding to the discharge pipe 10, the high temperature steam transfer pipe 20, 20a is piped in the factory Steam inlets 22 and 22a connected to the high temperature steam pipes for heating to introduce steam into the transport paths 21 and 21a and steam outlets 23 through which the steam circulated along the transport path is discharged.

(23a) is included on both sides, and the nitrogen gas transfer pipes (30) and (30a) provided outside the high temperature steam transfer pipes (20) and (20a) have nitrogen gas (N ₂ Gas) in the transfer paths (31) (31a). It is characterized in that it comprises a nitrogen gas inlet (32) (32a) for supplying a) and nitrogen gas outlet (33, 33a) for supplying nitrogen gas (N ₂ Gas) to the discharge pipe (10).

The exhaust gas stream and the hot steam transfer pipe 20 in the discharge pipe 10 according to the present invention

The stream of hot steam in 20a and the stream of nitrogen gas in the nitrogen gas transfer pipes 30 and 30a are characterized in that they are transferred (flowed) in opposite directions to maximize heat absorption and release (heat exchange).

The hot steam supplied to the high temperature steam transfer pipe 20, 20a of the thermal insulation / heating tube according to the present invention in accordance with the signal sensed by the temperature sensor 700 installed in the nitrogen gas transfer pipe (30) (30a) The supply of hot steam is adjusted by the check valve 600 to be controlled, characterized in that the heating and warming of the nitrogen gas and the exhaust gas are made.

Discharge pipe insulation / heating tube of the exhaust pipe portion of the equipment for the semiconductor and LCD (LCD) production equipment, characterized in that the heat insulating material 50 is covered on the outside of the thermal insulation / heating tube according to the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in more detail with reference to the accompanying drawings.

Figure 2 is a front view of the thermal insulation / heating tube according to the present invention, Figure 3 is a cross-sectional view taken along the line A-A of Figure 2, Figure 4 is a cross-sectional configuration diagram taken from the piping line to which the thermal / heating tube according to the present invention is applied.

FIG. 5 is a cross-sectional view taken along the line B-B of FIG. 4, and FIG. 6 is a cross-sectional view taken along the line C-C of FIG.

The heat insulation / heating tube is installed in the exhaust part discharge pipe 10 of the semiconductor and LCD production facility 100.

When the heat insulation / heating tube is installed, the heat insulation / heating tube formed in the discharge pipe 20 of the production facility 100 is positioned as shown in FIG. 2.

Connection flange 40 formed on both sides of the thermal insulation / heating pipe positioned as described above

Tighten to 40a using bolts and nuts (not shown).

By tightening the connection flanges 40 and 40a using bolts and nuts, the heat / heating tubes positioned at both sides are brought into close contact with the outer circumferential surface of the discharge pipe 10.

The exhaust pipe 10 is installed in the exhaust pipe 10, the installation of the heat insulation / heating tube is provided with an intake and exhaust device 300 using the pneumatic pressure.

After installing the thermal insulation / heating tube in the discharge pipe 10 as described above, high temperature steam transfer pipe (20)

The steam inlets 22 and 22a of 20a are connected to the heating pipe 400 of the high temperature steam for heating, which is piped in the factory, and the steam outlets 23 and 23a manage other management of the discharge pipe 10. It is connected to the steam inlet of the thermal insulation / heating tube installed in the zone as shown in Figure 1 so that the heating hot steam is circulated to the thermal insulation / heating tube distributed in the discharge pipe (10).

On the other hand, the nitrogen gas is supplied to the inside of the discharge pipe 10 through which the exhaust gas is exhausted through the intake and exhaust device 300. When supplying the nitrogen gas to the discharge pipe 10, the nitrogen gas in the nitrogen gas transfer pipes 30 and 30a. A nitrogen gas supply pipe 500 of a nitrogen gas supply device (not shown) is supplied to the inlets 32 and 32a with pneumatic pressure, and the nitrogen gas outlet 34 is connected to the intake and exhaust device 300. Connected.

Insulating / heating tube to be installed as described above is installed to the appropriate number according to the length of the discharge pipe (10).

As described above, the high temperature steam for heating supplied to the high temperature steam transfer pipe 20 of the thermal insulation / heating pipe installed in the discharge pipe 10 is transferred in a direction opposite to the transfer direction of the discharge gas to the discharge pipe 10. Nitrogen gas to be transferred to the nitrogen gas transfer pipe 30 is transferred in a direction opposite to the high temperature steam transferred to the hot steam transfer pipe 20 to maximize heat absorption and release (heat exchange).

In other words, the hot steam is transported in a direction opposite to the direction in which the exhaust gas generated from the semiconductor and the LCD equipment is discharged to the atmosphere through the exhaust port, the nitrogen gas is transported in the opposite direction to the hot steam.

As described above, the high temperature steam transferred to the transfer path 21 (21a) of the hot steam transfer pipe 20 heats the discharge pipe 10 to heat / heat the discharge gas transferred to the transfer path of the discharge pipe 10. The nitrogen gas transferred to the transfer path 31 (31a) of the nitrogen gas transfer pipes 30 and 30a is heated.

The temperature of the exhaust gas and nitrogen gas heated and warmed by the high temperature steam is made by adjusting the supply amount of the high temperature steam supplied to the high temperature steam transfer pipe 20, 20a, the adjustment of the supply amount of the high temperature steam, nitrogen gas transfer pipe ( The temperature sensing sensor 700 installed at 30) 30a detects the temperature of nitrogen gas, and the check valve installed at the high temperature steam transfer pipe 20, 20a by the signal detected by the temperature sensing sensor 700 ( 600) is adjusted, the hot steam supply amount is adjusted.

Typically, hot steam is supplied in the form of saturated steam (eg, 3kg / cm ² at 143 ℃) and superheated steam (eg 5kg / cm ² at 250 ℃). Since the temperature of ˜130 ° C. is appropriate, the supply amount of the high temperature steam is controlled, and the unnecessary waste of the high temperature steam is prevented.

As the exhaust gas in the discharge pipe 10 is heated by the high temperature steam transferred to the transfer paths 21 and 21a of the high temperature steam transfer pipe 20 and 20a, fire and explosion prevention and powder are formed from the discharge steam. It is adhered to the pipe portion to prevent clogging.

In addition, the purge path of the nitrogen gas transfer pipe 30 for purging (if unburned gas is filled in the furnace or elsewhere, it may explode when ignited, so to vent it out of the furnace before ignition). Nitrogen gas, which is an inert gas supplied to the c) 31a, is heated by the hot steam of the hot steam transfer pipe 20, 20a, not by the electric heater.

Nitrogen gas heated as described above is heated and supplied to the discharge pipe 10 through which the exhaust gas is transferred through the intake and exhaust device 300 using pneumatic pressure, and a purge using nitrogen gas may also be used according to the temperature drop of the exhaust gas (SILANE, SiH _{4 :} hydride) of the screen blocks the powder.

As described above, by mounting the heat insulation / heating tube of the present invention to the discharge pipe of the equipment exhaust pipe part for the semiconductor and LCD (LCD) production equipment of the present invention,

First, it does not stop the equipment has the advantage of preventing the decrease in production that can occur due to the equipment downtime;

Second, not only does it reduce the production cost by not using electric energy, but it also saves from the risks (short, explosion) caused by the use of electric energy, as well as the occurrence of fire due to overheating of the heater (electric heater). Can be prevented;

Third, the installation and operation is easy and simple, as well as the management point (place) is a very useful design that can reduce the maintenance cost of maintenance.

Claims (5)

Exhaust pipe using a heating steam that is piped in the factory with a heat source that heats and insulates the exhaust gas so that the exhaust gas generated in the semiconductor and LCD production facility 100 is not deposited inside the discharge pipe 10. In keeping / heating (10), It is divided into equal parts so that it can be installed on the exhaust pipe 10 installed in the production facility, and hot steam is supplied inside the surface in contact with the discharge pipe 10 to heat and heat the exhaust gas in the discharge pipe 10. High temperature steam transfer pipe 20, 20a is formed, the nitrogen gas transfer pipe is supplied to the outside of the high temperature steam transfer pipe 20, 20a is supplied to the discharge pipe 10 and the nitrogen gas blowing the discharge gas (30) (30a) The discharge pipe insulation / heating tube of the exhaust pipe portion of the equipment for semiconductor and LCD (LCD) production equipment, characterized in that formed. The heat insulated / heated tube of claim 1 is provided with connection flanges 40 and 40a formed on both sides of the heat insulated / heated tube so as to be coupled to the discharge tube 10. Steam inlets 22 and 22a, which are connected to the hot steam pipes for pipe heating, introduce steam into the transport paths 21 and 21a, and steam outlets 23 through which the steam circulated along the transport path is discharged. (23a) is included on both sides, and the nitrogen gas transfer pipes (30) and (30a) provided outside the high temperature steam transfer pipes (20) and (20a) have nitrogen gas (N ₂ Gas) in the transfer paths (31) (31a). Semiconductor and LCD (LCD) characterized in that it comprises a nitrogen gas inlet (32) (32a) for supplying) and nitrogen gas outlet (33, 33a) for supplying nitrogen gas (N ₂ Gas) to the discharge pipe (10) Exhaust pipe insulation / heating pipe of exhaust pipe of production equipment. The method according to claim 1 or 2, wherein the exhaust gas stream in the discharge pipe 10, the stream of hot steam in the high temperature steam transfer pipe 20, 20a, and the nitrogen gas in the nitrogen gas transfer pipe 30, 30a. Discharge pipe insulation / heating tube of the exhaust pipe portion of the equipment and exhaust pipe for the semiconductor and LCD (LCD) production equipment, characterized in that the air flow is transferred (flow) in opposite directions to maximize heat absorption and discharge (heat exchange). According to claim 1, wherein the hot steam supplied to the hot steam transfer pipe 20, 20a of the thermal insulation / heating pipe signal detected by the temperature sensor 100 installed in the nitrogen gas transfer pipe (30) (30a) Discharge pipe insulation / heating pipe of the exhaust pipe part of the equipment for the semiconductor and LCD (LCD) production equipment characterized in that the supply and supply of high-temperature steam is adjusted by the check valve 200 is adjusted according to . The heat insulating / heating tube according to claim 1, wherein the heat insulating material (50) is covered on the outside of the heat insulating / heating tube.