KR20030058209A - Cart for transport carrier for liquid crystal display - Google Patents

Abstract

PURPOSE: A trolley is provided to safely and easily carry many carriers for a sputtering process and to easily load the carriers by forming a support of a storing space by a roller and a belt. CONSTITUTION: A trolley comprises a main body(47), handles(41), a storing space(46a) and a support(48). The main body forms a frame of the trolley. The handles are formed in both sides of the main body. The storing space stores carriers by dividing to plural spaces. The support loads the carriers by forming in the lower part of the storing space. Thereby, the heavy carriers are carried by using the trolley easily and safely.

Description

Carrier carrying cart {CART FOR TRANSPORT CARRIER FOR LIQUID CRYSTAL DISPLAY}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrier transport trolley, and more particularly, to a carrier transport trolley which makes it possible to safely and easily carry a carrier used in in-line sputtering equipment for manufacturing a liquid crystal display device (LCD).

The development of the TFT-LCD industry and its widespread application have been accelerated by the increase in size and resolution of liquid crystal display devices. Nowadays, the increase in productivity and low price are the key issues, and the attempt for this is to simplify the manufacturing process and improve the yield. The joint efforts of manufacturers, as well as the materials industry and manufacturing equipment manufacturers, are required.

In general, as shown in FIG. 1, the liquid crystal display is configured such that a liquid crystal is injected between an upper substrate, a lower substrate, and the substrates.

The upper substrate is formed of a color filter 11 of a resin film containing a dye or pigment of three basic colors of red, green, and blue on the glass substrate 10, and a light blocking film formed between the pixels of the color filter 11. It is composed of a black matrix 12 and an over coat film (not shown) for flattening the color filter 11 or for improving adhesion to ITO, and for applying a voltage to the liquid crystal cell. A common electrode 13 made of the formed transparent ITO and an alignment layer 14 formed for alignment of liquid crystal molecules are formed.

In addition, the lower substrate is formed on the glass substrate 10 and the gate electrode 15 to which the scan signal is applied, the active layer 16 provided to transmit the data signal in response to the scan signal, the active layer 16 and A gate insulating film 17 that electrically isolates the gate electrode 15 is formed, and a source electrode 18 and a drain electrode 19 for applying a data signal are stacked on the active layer 16. The passivation layer 20 is formed on the source electrode 18 and the drain electrode 19. In addition, the drain electrode 19 is connected to the pixel electrode 21 through a contact hole, and the pixel electrode 21 is formed of a transparent electrode such as ITO such that a light beam is transmitted thereon, and on which an alignment layer for alignment of liquid crystal molecules is formed. 14) is formed.

The active layer 16 is composed of a semiconductor layer 16a formed by depositing amorphous silicon and an ohmic contact layer 16b doped with n + on both sides of the semiconductor layer 16a.

The upper substrate including the color filter formed as described above and the lower substrate including the thin film transistor are sealed to each other with a predetermined space, and the liquid crystal material is filled in the space to form the liquid crystal display device.

In order to fabricate the liquid crystal display of FIG. 1, a plurality of thin film deposition processes, photolithography processes, and etching processes may be performed. When forming a metal film, a transparent electrode, etc., vapor deposition of the thin film using the sputtering method is mainly performed.

Sputtering equipment used for thin film deposition is classified into a cluster method and an in line method according to an arrangement method of a chamber constituting the equipment.

The cluster method transfers the substrate to each chamber in a polygonal transfer chamber, and since each chamber is operated independently, there is no movement of the substrate during deposition, while the in-line method separates the chambers in a line. The carrier is used as a means to move the substrate as the substrate moves between the chamber and the chamber.

As shown in FIG. 2, the sputtering apparatus in which the chamber is configured in an inline manner includes a carrier magazine 24 on which a carrier 23 capable of holding a substrate is loaded, and one carrier from the carrier magazine 24. The loader part 22b, the robot 22a which moves the said carrier one by one to the loader part, and the main body part 25 which carries out actual vapor deposition on a board | substrate are respectively comprised by the loader part 22b.

The carrier is used to protect the substrate during the process. Generally, as shown in FIG. 3, since the groove 32 having the size of the substrate that can hold the substrate is formed in the center of the carrier 31, the carrier is formed in the groove 32 of the carrier. In this raised state all sputtering processes take place. In addition, since the carrier 31 is contaminated by deposition materials after several sputtering processes, the carrier 31 should be replaced periodically.

On the other hand, the sputtering equipment is a certain distance away from the equipment of the previous process. Therefore, in order to proceed with the sputtering process, after carrying out the previous process, the substrate must be transported to the sputtering equipment, and the carrier is used during transportation of the substrate to prevent the substrate from being damaged.

However, the carrier 31 usually consists of a large area (proportional to the liquid crystal panel). Therefore, the operator suffers a lot of inconvenience due to the volume and size occupied by the carrier during transportation, and the work time is long because the carrier is carried one by one, thereby reducing work efficiency.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a carrier transport cart that can safely and easily carry a plurality of carriers used in the sputtering process to a destination.

Another object of the present invention is to provide a carrier transport cart that can be easily carried by the operator by configuring the support portion of the storage space with the roller and the belt.

Other objects and features of the present invention will be described in detail in the configuration and claims of the following invention.

1 is a cross-sectional view showing the configuration of a liquid crystal display device.

2 is a view showing the overall configuration of the in-line sputtering equipment.

3 is a schematic illustration of a carrier used in in-line sputter equipment.

4 is a cross-sectional view showing a configuration diagram of a carrier transport cart of the present invention.

5 is a cross-sectional view showing a configuration diagram of a carrier transport cart of the present invention.

Figure 6 is a view showing in detail the body portion of the in-line sputtering equipment.

7 is a plan view showing the configuration of a carrier transport cart of the present invention.

*** Explanation of symbols for main parts of drawing ***

DESCRIPTION OF SYMBOLS 10 Glass substrate 14 Alignment film 21 Pixel electrode 24 Carrier magazine

25: main body 31: carrier

32: groove 41: handle

42: wheel 43: safety device

44: pulley 45: belt

46: partition 47: main body

62: heating chamber 64: buffer chamber

65: process chamber 66: cooling chamber

In order to achieve the above object, the carrier transport trolley of the present invention is composed of a main body that forms the frame of the transport trolley, a handle, and a partition that forms the storage space of the wheel and the carrier. In addition, the supporting portion of each storage space is composed of the pulley and the belt to enable the operator to simply and conveniently carry the carrier.

In addition, the wheels are designed to be folded on both sides so that the carrier height can be easily loaded by lowering the storage height of the bogie when the carrier is loaded on the bogie.

Hereinafter, with reference to the accompanying drawings will be described in detail the present invention. The present invention described below may be used in all manufacturing processes, but may be particularly useful for transporting substrates in the sputtering process of the liquid crystal display.

4 illustrates a carrier transport cart for storing a carrier and carrying it to a destination.

As shown in the figure, the carrier carrying trolley according to the present invention is divided into a main body 47 forming a frame of the trolley, a handle 41 formed in front and rear (or both sides) of the main body, and a plurality of spaces. It consists of the storage space 46a accommodated in each space by the carrier, and the support part 48 formed in the lower part of the said storage space 46a on which a carrier is placed.

The size of the main body 47 can be produced in various ways. In general, since the liquid crystal display device is manufactured in various sizes, the main body of the trolley may be manufactured in various ways according to the size of the liquid crystal display device to be manufactured.

The storage space 46a of the carrier is formed by the partition 46. By providing at least one partition 46, a plurality of storage spaces 46a in the main body 47 are formed.

The gap between the partitions 46 may be any gap as long as the carrier to be transported can be accommodated.

All the carriers stand in the storage space 46a to be stored. By standing up and storing the carrier in this way, it is possible to reduce the contamination of the carrier from the fine particles in the air.

The supporting part 48 is composed of a roller 44 and a belt 45. The supporting portion 47 consisting of the roller 44 and the belt 45 is composed of two rollers without the operator exerting excessive force on the carrier, and since the support portion 47 is rotatably supported by the main body, the carrier 47 is removed from the side of the main body 47. In the case of storing, the carrier can be easily pushed and loaded by the rotation of the roller 44. In addition, since the received carrier is accommodated on the elastic belt caught in the roller, the carrier serves to mitigate the shock transmitted to the carrier during carrier transportation.

In addition, a wheel 42 is provided in the lower portion of the transport cart body 47 to facilitate the movement of the transport cart. The wheel 42 is attached with a safety device, and is designed to be able to be bent on both sides of the transport cart body 47 so that the transport body main body 47 can reach the floor.

That is, as shown in FIG. 5, when the carrier is loaded on the transport trolley, the wheels can be folded on both sides of the carrier transport trolley to lower the height of the storage space so that the lower part of the trolley body touches the floor, thereby easily loading the carrier. have. In addition, when moving a conveyance trolley, the wheel 42 is used as the bottom part of the main body 47, and is used.

When the carrier is accommodated in the transport cart configured as described above and then transported to the sputtering equipment, the carrier containing the substrate enters the main body of the sputtering equipment to perform a thin film deposition process.

6 is a schematic view showing the structure of a main body portion in which actual thin film deposition is performed.

The main body portion is an inline sputtering main body portion, a loader portion 61 in which a substrate is first introduced and transported, a heating chamber 62 for heating the substrate to a desired temperature to improve adhesion to metal, A process chamber 63 for actually sputtering, two buffer chambers 64 on either side of the interior of the process chamber, and a cooling chamber 65 for cooling the sputtered substrate. And the unloader 66 are arranged in a line, and the inside of the main body always maintains a certain degree of cleanliness.

The substrate cooled by the cooling chamber 65 is returned to the loader unit 61 when the next process or another metal is to be deposited, and the above process is repeated. The buffer chamber 64 between the process chambers 63 is installed to overcome the pressure difference between the process chamber and the other chambers around it. Such a body part processes the substrate by a continuous process, wherein the substrates are moved between the respective chambers by a conveying roller.

7 shows the top view of the carrier conveyance trolley | bogie.

Carriers for transporting carriers are formed by partitions, so that several storage spaces can be loaded and transported to a destination by carrying several carriers at once.

The transport trolley of the present invention is applicable to a carrier for sputtering equipment as well as a cassette containing a liquid crystal cell from one process line to a subsequent process line.

Excessive force of the operator is required because the liquid crystal cell is made by hand when carrying the cassette housed therein. In particular, the vibration is transmitted to the cassette during transportation, and the accident that the liquid crystal glass in the cassette is broken often occurs. If the transport cart of the present invention is slightly changed and used as the cassette transport cart, the above problems can be solved.

According to the above description, since a heavy weight carrier can be moved easily and safely using a conveyance trolley, work efficiency can be improved. In particular, by providing a pulley and a belt on the carrier support plate of the transport trolley, the carrier can be easily loaded on the trolley.

In addition, by changing the carrier transport cart can also be used as a cassette transport cart can prevent accidents caused by manual work.

Claims (5)

A carrier transport trolley comprising a main body forming a frame of the transport trolley, a handle, a supporting portion consisting of a roller and a belt, a plurality of storage spaces, and wheels provided under the main body. The carrier transport trolley according to claim 1, wherein a pair of rollers and a support portion of the belt are formed in each storage space. The carrier transport trolley according to claim 1, wherein each storage space is formed by at least one partition. 2. The carrier transport trolley according to claim 1, wherein the wheel is designed to bend to the side of the main body as needed. The carrier transport trolley according to claim 1, wherein a safety device is attached to a wheel portion of the carrier transport trolley.