KR20030031197A - Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool - Google Patents
Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool Download PDFInfo
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- KR20030031197A KR20030031197A KR10-2003-7004464A KR20037004464A KR20030031197A KR 20030031197 A KR20030031197 A KR 20030031197A KR 20037004464 A KR20037004464 A KR 20037004464A KR 20030031197 A KR20030031197 A KR 20030031197A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67775—Docking arrangements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
- B62B3/00—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor
- B62B3/10—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor characterised by supports specially adapted to objects of definite shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
- B62B2203/00—Grasping, holding, supporting the objects
- B62B2203/10—Grasping, holding, supporting the objects comprising lifting means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
- B62B2203/00—Grasping, holding, supporting the objects
- B62B2203/20—Grasping, holding, supporting the objects using forks or tines
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Transportation (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Handcart (AREA)
- Forklifts And Lifting Vehicles (AREA)
Abstract
본 발명에 따르면, 포털 호이스트(4)와 같은 디바이스캐리어(5)로 반도체프로세싱툴(1)의 로트포트(2)를 최상부로부터 담당하도록 하는 반도체디바이스를 운반하는 운반장치가 제공된다. 그로 인해, 운반장치는 로드포트(2)로 접근하고 도킹할 때에 로드포트(2)가 운반장치에 의하여 에워싸이도록 빈 내부공간(10) 및 개방 앞면을 포함한다. 로딩시간이 단축되고, 구조의 복잡성 및 공정이 감소되고 클린룸 공간이 절약된다.According to the present invention, there is provided a conveying apparatus for conveying a semiconductor device which takes charge of the lot port 2 of the semiconductor processing tool 1 from the top to a device carrier 5 such as the portal hoist 4. As such, the conveying device comprises an empty interior space 10 and an open front face such that the load port 2 is surrounded by the conveying device when approaching and docking the load port 2. The loading time is shortened, the complexity of the structure and the process are reduced, and the clean room space is saved.
Description
반도체디바이스제조에서, 웨이퍼와 같은 반도체디바이스를 담는 반도체캐리어용 운반수단으로는, 소위 유인운반장치(person guided vehicle; PGV)가 통상적으로 사용된다. 예를 들어, 웨이퍼 펩(fab)의 클린룸 영역에서, 1이상의 웨이퍼캐리어를 하나의 프로세싱툴로부터 웨이퍼 프로세싱 순서에 따라 다음 단계로 운반하기 위해서 조작자는 이들 운반장치를 수동으로 밀어 준다.In the manufacture of semiconductor devices, so-called person guided vehicles (PGVs) are commonly used as carriers for semiconductor carriers containing semiconductor devices such as wafers. For example, in the clean room area of the wafer fab, the operator manually pushes these carriers to transfer one or more wafer carriers from one processing tool to the next in the wafer processing sequence.
유인운반장치의 구조 및 형식은, 클린룸 영역내의 프로세싱툴의 로드포트의 형식, 이송될 웨이퍼캐리어의 수와 크기 또는 및 통로의 크기 및 로드포트를 구비한 프로세싱툴과 같은 이행되어야만 하는 지역적인 요건에 따라 펩으로부터 펩까지 또는 베이(bay)로부터 베이까지 상당히 달라질 수 있다. 웨이퍼크기가 200㎜ 또는 300㎜의 큰 직경을 가짐에 따라, 채워진 웨이퍼캐리어가 더욱 무거워져 수동으로 취급할 수가 없게 되었다. 그 대신에, 프로세싱툴의 로드포트부터 또한 로드포트까지 웨이퍼캐리어를 놓거나 집어 올리는 작업을 운반장치의 최상부에 놓인 기계적 이송수단이 수행한 다음, 수동으로 작동된다.The structure and format of the manned transport device must be local requirements to be fulfilled, such as the type of load port of the processing tool in the clean room area, the number and size of wafer carriers to be transported or the size of the passage and the processing tool with the load port. And can vary considerably from pep to pep or from bay to bay. As the wafer size has a large diameter of 200 mm or 300 mm, the filled wafer carrier becomes heavier and cannot be handled manually. Instead, mechanical transfer means placed on top of the conveying device perform the operation of placing or picking up the wafer carrier from the load port of the processing tool to the load port and then manually operated.
통상적으로 사용되는 이송수단은 리프터 붐(lifter boom)을 포함한다. 예를 들어, 대응하는 로딩단계에서, 높은 배치정밀도를 달성시키기 위해서는, 운반장치가 우선 행선지 로드포트를 갖는 프로세싱툴로 도킹(dock)되는 것을 요구한다. 이 도킹위치에서, 상기 운반장치는 로드포트의 앞에서 운반장치의 최상부에 위치된 디바이스캐리어와 로드포트의 앞에서 멈춘다. 그 후, 웨이퍼캐리어를 잡고 리프터 붐이 로드포트로 회전하고 밀어 준다. 이 목적을 위해서, 운반장치는 리프터 붐이 뻗을 때에 웨이퍼캐리어가 한쪽으로 치우치는 무게보다 무겁게 하기 위한 구조를 필요로 하고, 이는 전체 무게 또는 크기가 커지게 된.Commonly used transport means include a lifter boom. For example, in the corresponding loading step, in order to achieve high batch accuracy, the conveying device first needs to be docked with a processing tool having a destination load port. In this docking position, the delivery device stops in front of the load port and the device carrier located at the top of the delivery device in front of the load port. Then, holding the wafer carrier, the lifter boom rotates and pushes into the load port. For this purpose, the conveying device requires a structure to make the wafer carrier heavier than the weight biased to one side when the lifter boom extends, which results in an increase in overall weight or size.
장비의 점유면적(footprint) 및 클린룸 영역내의 통로는 웨이퍼생산의 부가가치가 없는 비용을 가져오게 하는 강한 기여자이다. 그러므로, 넓은 통로를 필요로 하는 로드포트의 앞의 큰 크기 및 주변위치는 웨이퍼제조비용을 증가시킨다. 통로의 2개의 제한측면간의 최소폭은 통로가 운반장치로 혼잡할 때의 비상구로 조작자의 자유통로를 보장하기 위해서 2개의 대향하는 프로세싱툴을 담당하는 2개의 운반장치의 크기가 추가되어야 할 필요가 있다.The footprint of the equipment and the passage in the clean room area are strong contributors to the non-value added costs of wafer production. Therefore, the large size and peripheral position in front of the load port, which requires a wide passage, increases the wafer manufacturing cost. The minimum width between the two restrictive sides of the passageway requires that the size of the two carriages responsible for the two opposing processing tools be added to ensure the operator's free passage to the exit when the passage is congested with the carriage. have.
또한, 로드포트상으로 웨이퍼캐리어의 리프터 붐을 이용한 이송 또는 수동이송은 조작스탭들이 조작할 시간이 필요하고, 진동으로 인하여 입자오염을 유발할 수 있다. 운반장치는 다양하고 상이하게 디자인된 로드포트를 다루어야 하기 때문에, 통상적으로는 유일한 이송취급이 안되므로, 이후에 언급될 표준에따르는(norm-compliant) 로트포트와 같은 특정 로드포트디자인에는 적합하지 않다.In addition, the transfer or manual transfer using the lifter boom of the wafer carrier onto the load port requires time for the operation staff to operate, and may cause particle contamination due to vibration. Since the conveying device must deal with a variety of differently designed load ports, it is usually not the only transport handling, and therefore not suitable for certain load port designs, such as norm-compliant lot ports, which will be discussed later.
본 발명은 반도체디바이스캐리어를 반도체프로세싱툴로 운반하는 운반장치에 관한 것이다.The present invention relates to a conveying device for conveying a semiconductor device carrier to a semiconductor processing tool.
이제, 도면을 참조로 본 발명의 실시예를 설명한다. 도면에서,An embodiment of the present invention will now be described with reference to the drawings. In the drawing,
도 1(a) 내지 도 1(e)는 평면도(a), 정면도(b), 측면도(c), 배면도(d) 및 저면도(e)를 포함하는 본 발명에 따른 운반장치의 바람직한 실시예를 여러 측면에서 도시한 도면,1 (a) to 1 (e) show a preferred embodiment of the conveying device according to the invention, comprising a plan view (a), a front view (b), a side view (c), a back view (d) and a bottom view (e) Drawings show embodiments in various aspects,
도 2(a) 및 도 2(b)는 종래기술 도 2(a) 및 본 발명의 실시예에 따른 베이스내에서 프로세싱툴간의 통로의 최소폭의 결정을 설명하는 평면도.2 (a) and 2 (b) are plan views illustrating the determination of the minimum width of a passage between processing tools in a base according to the prior art FIGS. 2 (a) and an embodiment of the invention.
그러므로, 본 발명의 주목적은 반도체프로세싱툴로 반도체디바이스를 운반하는 운반장치를 제공하여, 요구되는 점유면적량을 줄여 비용을 절감하는 것이다.Therefore, a main object of the present invention is to provide a conveying apparatus for transporting a semiconductor device to a semiconductor processing tool, thereby reducing the required footprint and reducing costs.
상기 목적은 반도체프로세싱툴로 반도체디바이스캐리어를 운반하는 운반장치에 의하여 달성되며, 상기 툴은 측면길이 및 측면깊이 및 높이를 갖는 상기 반도체프로세싱툴에 부착된 반도체디바이스캐리어용 로드포트를 구비하고, 로드포트 최상면 위에 자유공간을 제공하며, 상기 로드포트는 로드포트면의 최상부에 로딩될 수 있으며 리프팅용 인터페이스가 공급되는 반도체디바이스캐리어를 수용하도록 디자인되고, 상기 운반장치는 골격의 어떠한 지지요소로부터 자유롭게 남겨지는 내부공간을 둘러싸는 지지요소의 골격을 포함하는 상기 섀시를 포함하고, 상기 내부공간은 상기 로드포트의 상기 길이보다 긴 길이를 가지며, 상기 로드포트의 측면깊이보다 깊은 깊이를 가지고, 한 세트의 휠은 운반장치를 움직이기 위하여 섀시상에 장착되고, 리프팅수단은 상기 로드포트의 자유공간의 수직높이범위내에서 운반장치의 섀시에 장착되며 상기 반도체디바이스캐리어를 놓거나 집어 올리기 위해서, 수직으로 배치될 수 있는 리프트커넥터수단이 상기 리프팅용 인터페이스에 연결하는 리프팅수단에 장착되고, 크랭크기구는 리프팅수단을 작동시키기 위하여 상기 섀시에 장착된다.The object is achieved by a conveying device for transporting a semiconductor device carrier to a semiconductor processing tool, the tool having a load port for a semiconductor device carrier attached to the semiconductor processing tool having a side length, a side depth and a height, and a rod Provides free space above the top of the port, the load port is designed to receive a semiconductor device carrier which can be loaded on top of the load port surface and supplied with a lifting interface, and the carrier remains free from any support elements of the skeleton. And a chassis comprising a skeleton of support elements surrounding the interior space, wherein the interior space has a length longer than the length of the load port, and has a depth deeper than the side depth of the load port, Wheels are mounted on the chassis to move the carrier The lifting means is mounted to the chassis of the transport device within the vertical height range of the free space of the load port and for lifting or picking up the semiconductor device carrier, the lifting connector means which can be arranged vertically connects to the lifting interface. Mounted to the means, and a crank mechanism is mounted to the chassis to operate the lifting means.
본 발명에 따르면, 로드포트가 이러한 스타일로 프로세싱툴에 장착되는 경우 프로세싱툴의 로드포트의 로딩 또는 언로딩에 요구되는 점유면적량을 현저하게 감소시키고, 로딩단계동안에 로드포트구조체가 운반장치에 의하여 에워싸여 있을 수 있는 운반장치가 제공된다. 이 목적을 위해서, 운반장치는 운반장치가 프로세싱툴에 접근하고 도킹할 때에 프로세싱툴의 임의의 돌출부, 즉 로드포트 및 그 밑에 있는 관련된 지지체, 또는 서비스 휠에 내부공간으로의 자유통로를 허용하는 어떠한 운반장치 지지구조체도 없는 내부공간 및 개방된 전면을 포함한다.According to the present invention, when the load port is mounted to the processing tool in this style, the area required for loading or unloading the load port of the processing tool is significantly reduced, and the load port structure is moved by the conveying device during the loading step. There is provided a conveying device which can be enclosed. For this purpose, the conveying device is any protrusion that allows free passage to the interior space of any protrusion of the processing tool, ie the load port and its associated support, or the service wheel when the conveying device approaches and docks the processing tool. It includes an interior space and an open front without a carrier support structure.
따라서, 로드포트의 앞의 도킹 및 로딩위치를 취하는 대신에, 로드포트는 운반장치에 의하여 덮인다. 그러므로, 운반장치는 프로세싱툴에 보다 근접한 위치를 가져, 베이스내에서 프로세싱툴 사이의 통로에 더 많은 공간을 두게 된다.Thus, instead of taking the docking and loading position in front of the load port, the load port is covered by the conveying device. Therefore, the carrier has a location closer to the processing tool, leaving more space in the passage between the processing tools in the base.
클린룸영역의 내부의 통로의 최소폭을 요구하는 비상구에 관한 공통적인 규정은, 본 발명에 따른 로드포트의 요건이 베이내에서 따라주고, 본 발명에 따른 운반장치만이 사용된다면, 보다 좁은 통로로 인한 베이내부의 프로세싱툴의 보다 조밀한 레이아웃을 허용한다. 따라서, 고가인 클린룸내의 통로 및 운반장치의 점유면적을 줄일 수 있어 상당한 양의 비용이 절감될 수 있다.A common rule for emergency exits that requires a minimum width of the passageway inside the clean room area is that if the requirements of the loadport according to the invention follow in the bay and only the conveying device according to the invention is used, then the narrower passageway This allows for a more compact layout of the processing tools inside the bay. Therefore, the area of the passage and the conveying device in the expensive clean room can be reduced, and a considerable amount of cost can be saved.
또 다른 장점은 최상부로부터 디바이스캐리어를 가지는 로드포트를 로딩하는 구성으로부터 얻어지게 된다. 리프팅수단은 로드포트면보다 높은 위치에 있는 디바이스캐리어의 저부면의 높이로 디바이스캐리어를 나르는 운반장치의 섀시상에 장착된다. 반대의 경우, 즉 로드포트면 아래의 레벨을 갖는 디바이스캐리어가 불가능 하지는 않으나, 로드포트에 도킹시킬 때에 추가적인 리프팅이 필요하지 않기 때문에, 상술된 위치가 바람직하다.Another advantage is gained from the configuration of loading the load port with the device carrier from the top. The lifting means is mounted on the chassis of the carrier carrying the device carrier to the height of the bottom surface of the device carrier at a position above the load port surface. In the opposite case, ie a device carrier having a level below the load port surface is not impossible, but the above-mentioned position is preferred because no additional lifting is required when docking to the load port.
도킹위치에서, 리프팅수단에 의하여 유지된 디바이스캐리어는 로드포트면 위의 자유공간내에 위치되는 한편, 로드로트는 운반장치의 내부공간내에 위치된 운반장치에 의하여 에워싸인다. 로드포트를 로딩하기 위해서, 디바이스캐리어는 리프팅수단에 의하여 로드포트면상으로 들려져 내려가기만 하면 된다. 그러므로, 수평동작이 필요없고 높은 배치정밀도가 용이하게 구현된다. 또한, 디바이스캐리어의 치우침운동이 없기 때문에, 바닥아래로 돌출될 때에 운반장치의 중력의 중심이 현저히 바뀌지 않아, 그 무게 및 크기를 감소시키면서 운반장치의 지지구조체가 단순화된다.In the docking position, the device carrier held by the lifting means is located in a free space on the load port face, while the load lot is surrounded by a transport device located in the interior space of the transport device. To load the load port, the device carrier only needs to be lifted down on the load port surface by the lifting means. Therefore, no horizontal operation is required and high batch precision is easily realized. In addition, since there is no bias movement of the device carrier, the center of gravity of the conveying device does not change significantly when projecting below the floor, thereby simplifying the supporting structure of the conveying device while reducing its weight and size.
수직방향으로 디바이스캐리어를 리프팅하기 위하여 리프팅수단은 운반장치의 섀시에 장착된 크랭크기구에 의하여 작동된다. 본 발명에 따르면 하나의 운동축선만이 있기 때문에, 디바이스캐리어내의 디바이스에 작용하는 힘 및 진동이 현저하게 감소되는 것이 장점이다. 짧은 리프팅경로는 디바이스캐리어를 로딩하거나 언로딩하는 시간을 추가로 절약한다.In order to lift the device carrier in the vertical direction, the lifting means is operated by a crank mechanism mounted on the chassis of the conveying device. According to the invention, since there is only one axis of motion, the advantage is that the forces and vibrations acting on the device in the device carrier are significantly reduced. Short lifting paths further save time loading or unloading device carriers.
또 다른 실시형태는 로드포트로 도킹하는 수단을 고려한다. 이러한 수단이 설치되면, 운반장치는 로드포트를 에워싸는 일정한 위치에 있을 것이고, 디바이스캐리어는 로드포트 바로위의 위치에 있을 것이다. 그러므로, 로드포트상으로의 디바이스캐리어의 자동적인 정밀위치가 곧바로 구현된다.Yet another embodiment contemplates means for docking to a load port. If such means are installed, the conveyer will be in a constant position surrounding the load port and the device carrier will be in a position directly above the load port. Therefore, the automatic precise positioning of the device carrier on the load port is realized immediately.
본 발명의 또 다른 장점, 실시형태 및 상세한 설명은 종속항으로부터 명백해진다.Further advantages, embodiments and details of the invention are apparent from the dependent claims.
본 발명에 따른 실시예에서는, 소위 발코니형 로드포트(2)에 적합한 유인운반장치가 제공된다. 이상적으로는, 이러한 로드포트(2)가 프로세싱툴(1)의 정면으로부터 직교하여 돌출된다. 상기 로드포트는 SEMI-표준(norm) E15. 1에 준하는 것이 바람직하다. 상기 표준에 따르는 로드포트를 갖는 프로세싱툴은 300㎜ 생산 및 메트롤로지 툴의 경우에 매우 보편적으로 사용되어 왔다. 로드포트면 위와 프로세싱툴(1) 앞의 자유공간은 본 실시예의 보장에 따라 적어도 운반장치의 높이까지 연장되고, 도 1(c)에 도시된 바와 같이, 운반장치 섀시(3)의 최상부에 놓인 리프팅수단(4)에 의하여 유지되는 상기 공간안으로 디바이스캐리어(5)가 장착될 수 있다. 도 1에는 로드포트(2)를 담당하는 운반장치가 도시되어 있다.In the embodiment according to the invention, a manned conveying device suitable for the so-called balcony load port 2 is provided. Ideally, this load port 2 protrudes perpendicularly from the front of the processing tool 1. The load port was SEMI-norm E15. It is preferable to correspond to 1. Processing tools with loadports according to this standard have been very common in the case of 300 mm production and metrology tools. The free space above the load port surface and in front of the processing tool 1 extends at least to the height of the conveying device in accordance with the guarantee of this embodiment, and is placed on top of the conveying chassis 3 as shown in FIG. 1 (c). The device carrier 5 can be mounted into the space held by the lifting means 4. 1 shows a conveying device in charge of the load port 2.
도 1(a)로부터 확실히 알 수 있듯이, 디바이스캐리어(5)는 로드포트 위에 직접 장착되고, 높은 배치정밀도를 달성하기 위해서는, 디바이스캐리어(5)의 저면판내의 대응하는 홈에 맞춰지는 운동학적 핀(21)상으로 수직으로 움직여 해제될 필요가 있다. 이 평면도에서, 운반장치 점유면적이 로드포트 점유면적을 덮고 있기 때문에 종래기술에서 부가되어야 했던 공간을 절약할 수 있음을 용이하게 알 수 있다.As can be clearly seen from Fig. 1 (a), the device carrier 5 is mounted directly on the load port, and kinematic pins that fit into corresponding grooves in the bottom plate of the device carrier 5 in order to achieve high placement accuracy. It needs to be released by moving vertically on (21). In this plan view, it can be easily seen that the space occupied by the transport apparatus occupies the load port occupied area, thus saving the space that had to be added in the prior art.
도 1(b)는 내부공간(10)이 섀시(3) 안쪽으로 어떻게 임베드되는(embeded) 지를 설명하는 도면이다. 내부공간(10)은 섀시(3)의 좌우측 지지대, 리프팅수단 밑에 유지된 디바이스캐리어(5), 및 바닥에 의하여 제한된다. 따라서, 내부공간(10)의 폭은 로드포트(2)의 측면길이(23)보다 길고, 내부공간(10)의 깊이는 로드포트(2)의 측면깊이(22)보다 깊다. 따라서, 정확한 로드위치에서 로드포트(2)는 섀시(3)에 의하여 가로막히지 않는다.FIG. 1 (b) is a diagram illustrating how the inner space 10 is embedded into the chassis 3. The interior space 10 is limited by the left and right supports of the chassis 3, the device carrier 5 held under the lifting means, and the floor. Accordingly, the width of the inner space 10 is longer than the side length 23 of the load port 2, and the depth of the inner space 10 is deeper than the side depth 22 of the load port 2. Therefore, the load port 2 is not blocked by the chassis 3 in the correct load position.
본 실시예에 따르면 도 1(c)에서 명확히 알 수 있듯이, 디바이스캐리어(5)는 개별적인 디바이스 핸들링이 프로세싱툴(1)에 의하여 수행되고, 리프팅수단의 리프팅경로길이가 대략 1㎝인 것이 장점인 FOUP(front opening unified pod)이다. 리프팅수단(4)의 디바이스캐리어(5)의 리프팅인터페이스(51)는 버섯머리형태이며, 디바이스캐리어(5)를 들어올리거나 내리기 위한 적절한 대응부인 리프트커넥터수단(42)으로서 포크리프트를 갖추고 있으나, 걸거나 유지시키는 여타의 커넥팅수단도 이용될 수 있다.According to this embodiment, as can be clearly seen in Fig. 1 (c), the device carrier 5 has the advantage that the individual device handling is performed by the processing tool 1, and the lifting path length of the lifting means is about 1 cm. FOUP (front opening unified pod). The lifting interface 51 of the device carrier 5 of the lifting means 4 is in the form of a mushroom head and is equipped with a forklift as a lift connector means 42 which is a suitable counterpart for lifting or lowering the device carrier 5. Other connecting means can also be used.
로드포트에 대한 정확한 위치를 발견하거나 운반장치를 도킹한 다음, 조작자(9)는 디바이스캐리어(5)를 위아래로 리프팅하기 위해서 크랭크(41)를 수동으로 조작할 수 있다. 디바이스캐리어가 최상부로부터 로드포트표면까지 들려 내려지고, 리프팅수단이 섀시(3)의 좌우측 지지내에 그 지지체를 구비하고 있기 때문에, 리프팅수단(4)은 기본적으로 포털 호이스트(portal hoist)이어야 한다. 이 실시예에 따르면, 포털 호이스트(4)에 대한 포크리프트(42)의 수평이동이 또한 가능하여 배치특성이 개선된다.After finding the correct position for the load port or docking the carrier, the operator 9 can manually operate the crank 41 to lift the device carrier 5 up and down. Since the device carrier is lifted from the top to the load port surface, and the lifting means has its support in the left and right supports of the chassis 3, the lifting means 4 should basically be a portal hoist. According to this embodiment, the horizontal movement of the forklift 42 relative to the portal hoist 4 is also possible, thereby improving the placement characteristics.
도 1(c)와 도 1(d)를 비교하면, 운반장치(32)를 밀어주는 수단으로서 주대각선지지체가 사용되었음을 알 수 있다. 크랭크(41) 및 운반장치의 뒷면으로부터 운반장치를 밀어주는 수단을 둘 다 조작함으로써, 운반장치를 회전시킬 필요없이, 디바이스캐리어(5)를 상승시키거나 해제시키는 처리가 현저하게 단순화될 수 있다. 또한, 전방 휠(31)로서 고정축 휠을 사용할 수 있는 한편, 수직축선을 중심으로 회전할 수 있는 후방 휠은 조작하는 데 사용된다. 따라서, 로딩공정시간이 최소화될 수 있고, 구조의 복잡성이 더욱 감소된다.Comparing Figure 1 (c) and Figure 1 (d), it can be seen that the main diagonal support is used as a means for pushing the conveying device (32). By manipulating both the crank 41 and the means for pushing the carrier from the back of the carrier, the process of raising or releasing the device carrier 5 can be significantly simplified without the need to rotate the carrier. In addition, a fixed shaft wheel can be used as the front wheel 31, while a rear wheel that can rotate about the vertical axis is used to operate. Therefore, the loading process time can be minimized, and the complexity of the structure is further reduced.
도1(e)는 섀시(3)의 보호를 도시한 저면도이다. 섀시(3)는 대략 "U"형을 가지는 것을 알 수 있다. 따라서, 서비스 휠과 같은 돌출부가 로드포트(2) 아래에 있더라도, 운반장치가 로드위치에 있으면, 서비스 휠이 내부공간(10)내에 위치될 것이고, 그러므로 운반장치는 방해받지 않을 것이다.Fig. 1E is a bottom view showing the protection of the chassis 3. It can be seen that the chassis 3 has an approximately "U" shape. Thus, even if a projection such as the service wheel is below the load port 2, if the transport device is in the load position, the service wheel will be located in the interior space 10 and therefore the transport device will not be disturbed.
본 발명의 실시예에 따른 클린룸영역내에 절약되는 공간의 양은 도 2(a)와 도 2(b)를 비교하는 것으로부터 명백해진다. 통로(8)를 에워싸는 2개의 로드포트(2)를 각각 가지는 수개의 프로세싱툴(1)이 도시된다. 긴급한 상황에 대한 규정에 충실하기 위해서, 서로 대향하여 멈춰 운반장치, 즉 그것들 중 하나는 로드포트(2) 중 하나를 담당하고, 다른 것들은 단지 대향 로드포트(2')의 정면에 세워진 운반장치 사이를 통과하도록 통로(8)내에는 조작자(9)를 위한 충분한 공간이 있어야 한다. 종래 기술 즉 도 2(a)에서 관찰될 수 있는 통로(8)의 통상적인 폭은 2,200㎜인 반면, 본 발명의 실시예에 따르면 도 2(b)에 도시된 바와 같이, 운반장치의 점유면적이 로드포트으 점유면적위에 놓여질 수 있기 때문에 그 폭이 1,600㎜로 감소된다. 팹내의 전형적인 개수의 로드포트(2) 및 프로세싱툴(1)의 사용함으로써, 550㎡의 공간이 절약되어 대략 5,000,000 Euro에 상당하는 비용이 절감될 수 있다.The amount of space saved in the clean room area according to the embodiment of the present invention becomes apparent from comparing Figs. 2 (a) and 2 (b). Several processing tools 1 are shown, each having two load ports 2 enclosing the passage 8. In order to comply with the provisions for urgent situations, stops facing each other, one of them is responsible for one of the loadports 2, and the other is just between the carriers erected in front of the opposite loadports 2 '. There must be sufficient space in the passage 8 for the operator 9 to pass through. The conventional width of the passage 8, which can be observed in the prior art, i.e., FIG. 2 (a), is 2,200 mm, while the occupied area of the conveying device, as shown in FIG. Since this load port can be placed on the footprint, its width is reduced to 1,600 mm. By using a typical number of load ports 2 and processing tools 1 in the fab, a space of 550 m 2 can be saved, saving a cost equivalent to approximately 5,000,000 Euro.
Claims (7)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP00121040A EP1193736A1 (en) | 2000-09-27 | 2000-09-27 | Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool |
| EP00121040.0 | 2000-09-27 | ||
| PCT/EP2001/011182 WO2002027766A1 (en) | 2000-09-27 | 2001-09-26 | Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20030031197A true KR20030031197A (en) | 2003-04-18 |
| KR100525179B1 KR100525179B1 (en) | 2005-10-31 |
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| Application Number | Title | Priority Date | Filing Date |
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| KR10-2003-7004464A KR100525179B1 (en) | 2000-09-27 | 2001-09-26 | Vehicle for transporting a semiconductor device carrier to a semiconductor processing tool |
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| Country | Link |
|---|---|
| US (1) | US6857841B2 (en) |
| EP (2) | EP1193736A1 (en) |
| JP (1) | JP2004510347A (en) |
| KR (1) | KR100525179B1 (en) |
| DE (1) | DE60103915T2 (en) |
| TW (1) | TW517328B (en) |
| WO (1) | WO2002027766A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100490175B1 (en) * | 2002-07-04 | 2005-05-17 | 주성엔지니어링(주) | Controller module of apparatus for fabricating semiconductor |
| JP2010132404A (en) * | 2008-12-04 | 2010-06-17 | Muratec Automation Co Ltd | Carrying carriage |
| JP2011006244A (en) * | 2009-06-29 | 2011-01-13 | Muratec Automation Co Ltd | Carrying carriage |
| US9901210B2 (en) | 2012-01-04 | 2018-02-27 | Globalfoundries Singapore Pte. Ltd. | Efficient transfer of materials in manufacturing |
| US9846415B2 (en) | 2012-01-19 | 2017-12-19 | Globalfoundries Singapore Pte. Ltd. | Efficient transfer of materials using automated guided vehicles in semiconductor manufacturing |
| CN103661527B (en) * | 2013-11-29 | 2016-03-02 | 北京七星华创电子股份有限公司 | The handler of crystal reaction tube and handling method thereof in semiconductor diffusion equipment |
| US9502275B1 (en) * | 2015-10-20 | 2016-11-22 | Lam Research Corporation | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5154730A (en) * | 1991-05-17 | 1992-10-13 | Materials Research Corporation | Semiconductor wafer processing module having an inclined rotating wafer handling turret and a method of using the module |
| DE4425208C2 (en) * | 1994-07-16 | 1996-05-09 | Jenoptik Technologie Gmbh | Device for coupling loading and unloading devices with semiconductor processing machines |
| EP0875921A1 (en) * | 1997-05-03 | 1998-11-04 | Stäubli AG Pfäffikon | Wafer transfer apparatus |
| KR100563456B1 (en) * | 1997-04-14 | 2006-05-25 | 아시스트 신꼬, 인코포레이티드 | The self-transfer vehicle and its device |
| JPH11220001A (en) * | 1998-01-30 | 1999-08-10 | Hitachi Ltd | Load port in semiconductor wafer processing system and load port carrying truck |
| US6102647A (en) * | 1998-06-26 | 2000-08-15 | Intel Corporation | Cart for transferring objects |
| US6205881B1 (en) * | 1998-10-13 | 2001-03-27 | Brooks Automation Gmbh | Device for controlling the drive of mechanisms operating separately from one another |
| WO2000055074A1 (en) * | 1999-03-18 | 2000-09-21 | Pri Automation, Inc. | Person-guided vehicle |
| US6364593B1 (en) * | 2000-06-06 | 2002-04-02 | Brooks Automation | Material transport system |
| US6468017B1 (en) * | 2000-11-21 | 2002-10-22 | Motorola, Inc. | Vehicle, system and method for loading and unloading |
| US6592318B2 (en) * | 2001-07-13 | 2003-07-15 | Asm America, Inc. | Docking cart with integrated load port |
-
2000
- 2000-09-27 EP EP00121040A patent/EP1193736A1/en not_active Withdrawn
-
2001
- 2001-09-21 TW TW090123311A patent/TW517328B/en not_active IP Right Cessation
- 2001-09-26 DE DE60103915T patent/DE60103915T2/en not_active Expired - Fee Related
- 2001-09-26 KR KR10-2003-7004464A patent/KR100525179B1/en not_active IP Right Cessation
- 2001-09-26 EP EP01985775A patent/EP1320874B1/en not_active Expired - Lifetime
- 2001-09-26 JP JP2002531466A patent/JP2004510347A/en active Pending
- 2001-09-26 WO PCT/EP2001/011182 patent/WO2002027766A1/en active IP Right Grant
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2003
- 2003-03-27 US US10/401,193 patent/US6857841B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| TW517328B (en) | 2003-01-11 |
| JP2004510347A (en) | 2004-04-02 |
| US6857841B2 (en) | 2005-02-22 |
| EP1320874B1 (en) | 2004-06-16 |
| DE60103915T2 (en) | 2005-06-30 |
| DE60103915D1 (en) | 2004-07-22 |
| EP1320874A1 (en) | 2003-06-25 |
| KR100525179B1 (en) | 2005-10-31 |
| EP1193736A1 (en) | 2002-04-03 |
| WO2002027766A1 (en) | 2002-04-04 |
| US20030180134A1 (en) | 2003-09-25 |
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