JPH11220001A - Load port in semiconductor wafer processing system and load port carrying truck - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a load-port carrying truck for facilitating movement of a load port of a semiconductor wafer processing system and a load port having a structure suitable to be conveyed by this truck. SOLUTION: A load port for opening and closing the lid of a wafer carrier, is mounted on the load port and can contain a wafer in a semiconductor wafer processing system, is provided with an engaging section that engages with arms 23 of a load-port carrying truck carrying this load port. The load-port carrying truck has a main body whose front side is open for loading the load port 11 and a pair of arms 23 which is provided on the upper portion of the main body slidably toward the front of the main body and engage with the engaging section of the load port.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a load port and a load port carrier in a semiconductor substrate processing apparatus. It relates to a suitable load port and a load port carrier.

[0002]

2. Description of the Related Art In general, a semiconductor substrate processing apparatus includes an etching apparatus, an ashing apparatus, and the like as main constituent devices. A transfer machine to be taken out and a load port for opening the wafer carrier storing the wafer, transferring the wafer in the wafer carrier, and receiving the wafer in the processed wafer wafer carrier from the transfer machine. It is provided with. When the wafer carrier in which the wafer is stored is held, the load port opens the wafer carrier and sequentially supplies a large amount of the wafer stored therein to a processing apparatus such as an etching apparatus and an ashing apparatus via a transfer machine. In general, a plurality of transfer apparatuses are provided for each transfer apparatus.

[0003]

The load port of the above-described semiconductor substrate processing apparatus is used for failure, maintenance and inspection.
It is necessary to remove the transfer port and move it to a place for maintenance. Conventionally, the load port is generally moved by a plurality of workers. In addition, this movement may be performed by providing wheels below the load port and moving the wheels on the floor, but the semiconductor substrate processing apparatus is installed in a clean room, and the floor of the clean room is Since a large number of intake holes are provided for circulating and cleaning air, and a rail or the like on which an automatic carriage for transporting a wafer carrier storing wafers is provided is moved by wheels. All this required considerable effort.

However, a 12-inch wafer (conventionally,
8 inches).
It is anticipated that the load port itself will be large and heavy, making it difficult for the load port to be manually moved as described above.

It is an object of the present invention to provide a load port transport trolley for easily moving the load port of the above-described semiconductor substrate processing apparatus and a load port having a structure suitable for transport by the trolley. It is in.

[0006]

SUMMARY OF THE INVENTION According to the present invention, there is provided a semiconductor substrate processing apparatus, wherein a wafer carrier capable of storing a wafer is mounted, and a load port for opening and closing a lid of the wafer carrier is provided. This is achieved by providing an engaging means that engages with a pair of arms provided on the load port carrier cart.

In addition, the object is to provide a wafer carrier mounting plate on an upper surface of a mounting table on which the wafer carrier is mounted, and to provide an adjusting mechanism below the plate for horizontally adjusting the upper surface of the plate. This is achieved by providing a cutout as an engaging groove for engaging with the arm of the load port carrier on the side surface between the mounting table and the main body.

[0008] Further, the object is to provide a fixing device for attaching the load port to the transfer machine, which is operably provided from the front side of the load port, and further comprising a coupling for attaching the load port to the transfer machine on a rear surface thereof. Having a plate, attached to the transfer machine by the hook and the fixture provided on the upper part of the coupling plate, and by mounting the lower part of the coupling plate on a base plate protruding below the transferer, In addition, the front side bottom has a height-adjustable fixing foot, and the fixing foot allows the load port bottom to have the same height as the height of the base plate upper surface from the installation surface on which the transfer machine is installed. This is achieved by providing support so that

Further, the object is to provide a load port carrier for transporting a load port for opening and closing a lid of a wafer carrier capable of storing a wafer in a semiconductor substrate processing apparatus. By having a pair of arms provided on the upper side of the main body, the main body having an open side, slidable to the front of the main body, and engaging with the engagement groove of the load port. Achieved.

[0010] In addition, the object is that the pair of arms includes:
Along with the member supporting the arm, the arm can be vertically moved, and a handle for manually sliding the arm, and a mechanism for manually moving the arm vertically can be provided, or This is achieved by providing a mechanism for moving the arm in the up and down direction using electric power or air from a transfer machine.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of a load port and a load port carrier in a semiconductor substrate processing apparatus according to the present invention will be described in detail with reference to the drawings.

FIG. 1 is a view showing a configuration of a load port and a transfer machine of a semiconductor substrate processing apparatus to which the present invention is applied, and FIG. 2 is a view showing a load port carrier truck taking out a load port according to an embodiment of the present invention. FIG. 3 is a view for explaining a state in which a load port carrier according to an embodiment of the present invention conveys a load port. 1 to 3, 11 is a load port, 12 is a wafer carrier lid opening / closing plate, 13 is a wafer carrier, 14 is a transfer machine, 15 is a control unit, 16 is a display, 17 is a console, 1
8 is a monitoring lamp, 19 is a monitoring window, 20 is a fitting hole, 21
Is a load port transport trolley, 22 is a rail, 23 is an arm, 24 is an arm slide handle, 25 is an arm vertical drive crank, 26 is a slide mechanism, 27 is a lock / unlock button, and 28 is a trolley moving handle. .

As shown in FIG. 1, a semiconductor substrate processing apparatus to which the present invention is applied includes a load port 11 and a transfer machine 1.
4, a control unit 15, and a processing apparatus such as an etching apparatus and an ashing apparatus, which are processing apparatuses for a semiconductor substrate (not shown). A plurality of load ports 11 can be attached to one transfer device 14, and four load ports 11 are attached to the transfer device 14 in the illustrated example. The load port 11 has a plurality of (normally 13 or 25) loaded inside which are conveyed by a known self-propelled truck or the like traveling on a rail provided on the floor surface.
When a wafer carrier 13 capable of accommodating wafers is placed, the wafer carrier lid opening / closing plate 12 opens the lid of the wafer carrier 13 to the transfer machine 14 side, and the robot is housed inside the transfer machine 14. Can be taken out of the wafer stored in the wafer carrier 13 or stored in the processed wafer wafer carrier 13.

A processing device (not shown) such as an etching device and an ashing device is provided on the side of the transfer machine 14 opposite to the side where the load port 11 is arranged, and is accommodated inside the transfer machine 14. The robot removes the wafer from the wafer carrier 13, carries it into a processing apparatus such as a wafer etching apparatus or an ashing apparatus, and stores the wafer in the processed wafer wafer carrier 13.
Further, the transfer machine 14 is provided with a monitoring window 19 so that an operator can monitor the internal operation status.

The control unit 15 arranged side by side with the load port 11 includes a display 16 and a console 17, and is used for monitoring and controlling the operation of the illustrated transfer machine 14. It is used for monitoring and controlling a semiconductor substrate processing apparatus provided corresponding to the above. A plurality of monitoring lamps 18 are provided on the entire upper surface of the transfer machine 14 for each of the plurality of load ports 11.
The monitoring lamp 18 displays the status of the load ports 11 provided on the transfer device 14. That is, when the load port 11 is operating normally, the monitor lamp 18 displays green or yellow, for example, and when any abnormality occurs in the load port 11, the monitor lamp 18 displays red or red. Is controlled to blink. At this time, an alarm may be emitted at the same time to notify the abnormality. Further, a similar monitoring lamp can be provided in a maintenance room or the like.

A semiconductor substrate processing apparatus as shown in FIG.
In general, a plurality of devices are arranged and arranged in a longitudinal direction, and a plurality of semiconductor substrate processing apparatuses in which a plurality of devices are arranged and arranged are generally arranged in parallel. Therefore, the load port 11 of the semiconductor substrate processing apparatus shown in FIG.
A relatively narrow passage is formed on the front side. On the floor of this passage, a large number of intake holes are provided for air circulation cleaning, and rails for running a self-propelled carriage for transporting wafer carriers 13 containing wafers are provided. Is provided.

Incidentally, the semiconductor substrate processing apparatus, the transfer machine, etc.
It is installed horizontally on the floor in the clean room. Also, not all the floor surfaces in the clean room are necessarily set to be horizontal.

When a failure or the like occurs in the load port 11,
As described above, the occurrence of the trouble is notified to the maintenance person, the worker, etc. (hereinafter, referred to as the worker, etc.) by the transfer machine 14 or the monitoring lamp 18 provided in the maintenance room.
Thus, the worker or the like transports the load port carrier trolley 21 according to the present invention to the location of the load port 11 where the failure has occurred, places the load port 11 on the load port carrier trolley 21, and moves to the maintenance area. I will carry it out,
Hereinafter, the outline of the operation of carrying out the load port is shown in FIG.
This will be described with reference to FIG.

As described above, the load port 13
A rail 2 for running a self-propelled carriage for carrying a wafer carrier 13 containing wafers is provided on the front floor of
2 is provided, and an operator or the like transports a load port transport trolley 21 whose structure will be described later on a rail 22. The transport of the load port transport trolley 21 is as follows.
The worker or the like may manually push the carriage with the carriage moving handle 28, and the vehicle or the like may be self-propelled by the power from the power supply provided for the self-propelled carriage. It may be.

When the worker arrives at the location of the load port 11 where the failure has occurred, the operator first loads the load port 11.
The bolts (details will be described later) serving as a plurality of load port fixing members connecting the transfer machine 14 and the transfer machine 14 are manually removed. Here, the worker, etc.
Is positioned in front of the load port 11 using a positioning mark of a self-propelled trolley for transferring the wafer carrier 13, and the arm 23 of the load port transfer trolley 21 is
By operating the arm slide handle 24, the chuck is engaged with an engagement groove described later of the load port 11 and chucked. Thereafter, the worker or the like moves the arm vertical drive crank 25.
To lift up the arm 23 together with the arm slide mechanism 26 by about 10 mm, thereby lifting up the load port 11 while holding the load port 11 on the arm 23, and operating the lock button 27 to lift the arm 23. Lock state. As a result, the hook of the coupling plate of the load port 11 to the transfer device 14 comes off from the transfer device 14 as described later.

In this state, the worker or the like operates the arm slide handle 24 to pull out the load port 11 together with the arm 23 by about 100 mm, and further operates the arm vertical drive crank 25 to move the arm 23. It is lifted up together with the arm slide mechanism 26. The lift-up amount in this case is the
It is about 150 mm, though it depends on the floor height of the bogie determined by the wheel diameter. This state is the state shown in FIG.

Then, the operator or the like operates the arm slide handle 24 to retract the arm 23 toward the main body of the load port transport vehicle 21 so that the load port 11 is positioned on the load port transport vehicle 21. The lock is released by the lock / unlock button 27, the arm vertical drive crank 25 is operated, and the arm 24 is lowered together with the arm slide mechanism 26, and the load port 11 is released.
Is mounted on the mounting surface 29 of the load port carrier 21.
Thereafter, the worker or the like transports the load port transport trolley 21 to the maintenance area on the rail 22 in a state in which the load port 11 is mounted thereon in the same manner as described above, and performs maintenance and repair work of the load port 11 there. I do. FIG. 3 shows a state in which the load port transport cart 21 is transported on the rails 22 with the load port 11 placed thereon.

As described above, the load port carrier 2
By using No. 1, only the load port in which an abnormality has occurred can be quickly removed from the transfer machine without removing other load ports, so that it is not necessary to stop the entire apparatus, and the semiconductor substrate processing can be performed. It is possible to prevent the operation rate of the device from deteriorating.

FIG. 4 is a view for explaining the structure of the load port carrier, and FIG. 5 is a diagram for explaining the structure of the vertical moving mechanism. Next, FIG. This will be described with reference to FIG. 4 and 5, 30 is a main body, 31 is a weight, 32 is a U-shaped frame,
33 is an arm guide rail, 34 is a hook, 35 is a wheel,
36 is an elevator shaft, 37 and 38 are gears, 39 is a chain, 40 is a toothed portion, and the other reference numerals are the same as those in FIGS.

As shown in FIG. 4, the load port transport trolley 21 is used to carry in the load port 11 on the front side.
A main body 30 having a hexahedral shape with three open faces, a weight portion 31 attached to the rear side of the main body 30, and a slide mechanism 26 for an arm 23 provided on the upper surface and movable vertically. And wheels 35. And, the weight portion 31 is such that the arm 24 is
It is provided to balance the load port transport trolley 21 so as not to fall when the heavy load port 11 protruding forward from 0 is lifted up. And since the operation | work which couple | bonds the arm 23 with the engaging groove comprised in the load port 11 is performed manually, it does not give an unnecessary shock to the load port 11 or the transfer machine 14.

The slide mechanism 26 for the arm 23
A U-shaped frame 32, an arm guide rail 33 provided on an arm portion of the U-shaped frame 32, and a hook portion 34 provided on the U-shaped arm portion engaged with the arm guide rail 33 are provided. It is constituted by a member having an arm 23. An arm sliding handle 24 is provided at a portion where the two arms are connected, and the arm 23 can be slid by manually operating the handle 24.

The slide mechanism 26 includes a main body 30
It is supported by four elevator shafts 36 constituting a lift mechanism movably provided in a vertical direction. FIG.
As shown in the figure, the lift mechanism includes an elevator shaft 36,
A toothed portion 40 provided on the elevator shaft 36 and meshing with the gear 38, a gear 38 engaged with the two elevator shafts 36, and a gear 37 combined with the gear and the arm vertical drive crank 25 described above. And these gears 3
It is constituted by a chain 39 connecting the elements 7 and 38 to each other. Although not shown, the shaft of the gear 38 is the elevator shaft 36 with which the gear 38 shown in FIG.
And the gears meshing with the two elevator shafts at the back of the paper surface of FIG. like this,
By providing the lift mechanism, the arm 23 can be driven up and down together with the slide mechanism 26 by manually operating the arm vertical drive crank 25.

Note that the load port transfer carriage 21 is configured to run by power from a power supply provided for a self-propelled carriage for transferring a wafer carrier or by self-propelled with a battery. Weight part 3
1 can be provided with a battery, a motor, and the like, and can be used as a weight. Further, in the above description, the lift mechanism is described as being operated by human power. However, it may be driven by electric power, or may be driven by air used in the transfer machine 14. Is also good.

FIG. 6 is a view for explaining the structure of the load port according to one embodiment of the present invention, FIG. 7 is a view for explaining the storage state of the internal equipment of the load port, and FIG. 8 is a connection between the load port and the transfer machine. FIG. 9 is a perspective view of a state in which the load port carrier has lifted up the load port as viewed from the rear side of the load port, and these will be described below. 6 to 9, 61 is a main body, 62 is a wafer carrier mounting table, 63 is a coupling plate, 65
Is a wafer carrier lid opening / closing hook, 66 is a wafer carrier mounting plate, 67 is a front door, 68 is a side cutout, 69 is a front cutout, 70 is a fixing foot, 71 is a wheel, and 72 is a height adjustment. Mechanism, 73 is a wafer carrier stopper, 74 is a wafer carrier pressing tool, 75 is an operation button, 76 is an emergency stop button, 77 is a load port fixing tool, 78 is an operation section, 79 is a control board, 80 is a connection cable, 8
1 is a cable tray, 82 is a connector, 83 is a load port receiving plate, 84 is a transfer machine side frame, 85 is a lid opening / closing mechanism, and 86 is a hook.

The load port 11 is provided as shown in FIG.
As shown in the perspective view, side sectional view, and front sectional view of (b) and (c), the side cutout 68 and the front cutout 65 are provided.
Main body 61 coupled to wafer carrier mounting table 62
And a coupling plate 63 provided on the back surface for coupling with the transfer machine 14 and having a mechanism for opening and closing the lid of the wafer carrier 13. The coupling plate 63 has a flange formed around its periphery, and the other part is formed with a thickness of about 10 cm. In this, a mechanism for opening and closing the lid of the wafer carrier 13 is provided as described later. Can be

An operation button 75 for turning on / off the power of the load port 11 and attaching / detaching the wafer carrier 13 and an emergency stop button 76 are provided on the upper surface of the wafer carrier mounting table 62, and the wafer carrier 13 is fixed. There is provided a wafer carrier mounting plate 66 provided with a wafer carrier fixing tool 73 to be moved and a wafer carrier pressing tool 74 for moving the wafer carrier 13 in the direction of the coupling plate 63. As shown in FIG. 6C, the wafer carrier mounting plate 66 is provided with a height adjusting mechanism at a lower portion thereof, and is adjusted so that the upper surface of the wafer carrier mounting plate 66 is horizontal.

The side cutout 68 formed between the wafer carrier mounting table 62 and the main body 61 is provided with the hook 34 of the arm 23 of the load port carrier 21 described above.
It is an engaging groove configured to be capable of engaging with the engaging groove. In addition, the front notch 69 is used to connect the load port 11 to the transfer machine 14.
FIG. 6 (b) shows a shape in which a worker or the like can put his / her hand in the case of trying to move it manually.
As shown in the figure, the key is formed inside the wafer carrier mounting table 62. As described above, the load port 11 is provided with the load port carrier 21 in the side cutout 62.
Since the hook portion 34 of the arm 23 is engaged and lifted, the wafer carrier mounting table 62 and the main body portion 61 are lifted.
Are required to be firmly connected to each other, and it is preferable that the side cutouts 68 are actually formed in a frame portion constituting the main body 61.

As shown in FIGS. 6A and 6B, wheels 71 are provided below the main body 61 of the load port 11, and when the load port 11 is attached to the transfer machine 14, In addition, an extensible fixing foot 70 for stably holding the load port 11 and adjusting the height so that the upper surface of the wafer carrier mounting table 62 is as horizontal as possible is provided on the front side.

As shown in FIG. 7, inside the load port 11, there is provided a control unit 78 to which a front door 67 is opened and which can be operated, and a connection cable 80 for connection to the transfer machine side. The board 79 is housed. Operation unit 78
Is used to check the operation state of the load port 11 when the load port 11 is maintained. The connection cable 80 is connected to a cable tray 81 via a connector 82.
It is guided above and connected to the transfer machine 14 side. Therefore, when attaching / detaching the load port 11 to / from the transfer machine 14, the load port 11 can be easily attached / detached to / from the transfer machine 14 simply by opening the front door 67 and attaching / detaching the connection tool 82. .

A lid opening / closing hook 65 which engages with the lid of the wafer carrier 13 is provided on the wafer carrier lid opening / closing plate 12, and a lid opening / closing motor is provided inside the coupling plate 63 with the transfer machine 14. A lid opening / closing mechanism 85 is provided. The opening and closing of the lid of the wafer carrier 13 is controlled by the lid opening and closing mechanism 85 and the lid opening and closing hook 65 engaged with the lid of the wafer carrier 13.

A load port receiving plate 83 is provided on the transfer machine side frame 84 below the transfer machine 14, and as shown in FIGS. 8 (a) and 8 (b),
When attaching the transfer port 14 to the transfer unit 14, the lower part of the coupling plate 63 for connecting the load port 11 to the transfer unit is placed on the load port receiving plate 83, and a key provided on the upper part of the coupling plate 63 as shown in FIG. The hook 86 of the mold is configured to be engaged with the fitting hole 20 shown in FIG. Further, a load port fixture 77 is provided substantially at the center and lower portion of the coupling plate 63 in the vertical direction.
The load port 11 and the transfer machine 14 are firmly attached. The load port fixing member 77 is formed by a long-axis bolt, and is provided from the front side of the load port 11 to the load port 1.
1 can be fixed to the transfer machine 14.

The load port receiving plate 83 is provided so as to protrude from the bottom of the rear plate of the transfer machine 14, the lower part of the coupling plate 63 of the load port 11 is placed on the load port receiving plate 83, and The lower part of the thick portion of the coupling plate 63 is placed on the edge of the load port coupling window provided on the rear plate of the transfer device 14, and the load port 11 is coupled to the transfer device 14. In this coupled state, the bottom surface of the load port 111 is approximately 38 mm,
The transfer machine 14 is floating from the floor on which the transfer machine 14 is installed.

As described above, when the load port 11 is attached to the transfer machine 14, the fixing foot 7
0 supports the weight of the load port 11 by adjusting the height so as to be in close contact with the floor surface. The height at which the load port floats from the floor surface is arbitrary.

As described above, the load port 11 is supported by the load port receiving plate 83 provided on the transfer machine 14 and the fixing foot 70, whereby the load port 11 Fine position adjustment at the time of replacement can be omitted.

In the case of using the power from the power supply provided for the self-propelled trolley for transporting the wafer carrier, the traveling of the load port transport trolley 21 and the drive of the lift are performed.
A mechanism for taking in power is required for the load port carrier, and a power supply mechanism for this purpose will be described below.

FIG. 10 is a diagram for explaining the configuration when power is supplied to the load port carrier, and FIG. 11 is a diagram for explaining the electrode structure in the power supply box. 10 and 11, reference numeral 91 denotes a base plate, 92 denotes a power supply box, 93 denotes a floor base-side electrode, 94 denotes a bogie-side electrode, and 95 denotes an electrode support bar.

As described above, the semiconductor substrate processing apparatus is installed in a clean room, and on the floor of the clean room, as shown in FIG. 10, an automatic trolley for transporting a wafer carrier storing semiconductor wafers is provided. A pair of running rails 22 is provided on the base plate 91, and electrodes between the pair of rails 22 for supplying power to the bogie are provided. In the power supply box 92, a gap having a width enough to penetrate an electrode support bar 95 that supports the bogie-side electrode 94 is provided on the upper surface so that there is no danger when an operator or the like walks on the floor surface, Inside, two floor base-side electrodes 93 on the supply side are laid on the base plate 91 insulated from each other. Two truck-side electrodes 94 provided via electrode support bars 95 attached to the bottom surface of the load port transport truck 21 are in sliding contact with the floor base electrode 93 in the power supply box 92.

As described above, the load port transport trolley 21 is configured to enable use of an external power supply and to have a driving device for traveling and a driving device for lift provided therein.
The load port transport trolley 21 can move on its own,
It becomes possible to lift the load port electrically.

According to the above-described embodiment of the present invention, the load port carrier for easily moving the load port of the semiconductor substrate processing apparatus and the load port having a structure suitable for carrying by the carrier are provided. Could be provided.

Further, by using the load port according to the embodiment of the present invention and the load port carrier in combination, the load port can be quickly attached and detached without interfering with other load ports in the vicinity. .

FIG. 12 is a view for explaining another embodiment relating to the engagement between the load port and the arm of the load port carrier, and FIG. 13 is a structure of the load port according to another embodiment of the present invention to which FIG. 12 is applied. FIG.
This will be described. 12 and 13, 96
Is an engagement portion, 97 is a screw hole, 98 is a bolt, and 99 is an engagement surface.

In the example shown in FIG. 12, an engaging portion 96 provided at the distal end of the arm 23 of the load port carrier 21 and a screw hole provided in the coupling plate 63 of the load port 11 are engaged by a bolt 98. The load port carrier 21 is lifted to take out the load port 11. Therefore, the load port 11 is configured by providing the coupling plate 63 with the screw holes 97 as shown in FIG.

In the example shown in FIGS. 12 and 13, even when the load port transfer cart 21 is at the highest position where the arm 23 operates the arm vertical drive crank 25 to lower the arm 23, the arm 23 can be moved. Wafer loading table 6 of load port 11 attached to loading machine 14
2 is configured to be higher than the upper surface. The engagement portion 96 has an engagement surface 99 extending vertically, and has a screw hole 97.
When the load port 11 is lifted, the load port 11 has a function of preventing the load port 11 from tilting even if the center of gravity of the load port 11 is not directly below the screw hole 97. The engaging portion 96 has a hole (not shown) into which the bolt 98 is inserted.

In the embodiment shown in FIGS. 12 and 13, FIG.
The hook 34 of the arm 23 shown in FIG.
The interval between the two arms 23 is set to be smaller than that shown in FIGS. The screw hole 97 of the arm 23 is
Is provided at a position higher than the upper surface of the wafer carrier mounting table 62. In this embodiment, the side cutout 68 of the load port 11 shown in FIG. 6 is unnecessary.

In the above-described other embodiment, when a failure or the like occurs in the load port 11, the worker or the like positions the load port transport vehicle 21 in front of the load port 11 and moves the arm 23 of the load port transport vehicle 21. By operating the arm slide handle 24, the engaging portion 96 provided at the tip of the arm 23 is made to approach the screw hole 97 provided in the engaging plate 63 of the load port 11, and the bolt 98 is engaged with the screw hole 97 through the hole 100. Combine. After that, operations such as maintenance and repair of the load port 11 are performed by operations similar to those described with reference to FIGS.

According to another embodiment of the present invention described above,
When it is difficult to provide the side cutouts 68 on both the left and right sides of the wafer carrier mounting table 62 with a ready-made load port,
Alternatively, when the entire load of the load port is applied to the side cutout 68, the accuracy of the wafer carrier mounting table 62 may be degraded, the connection between the load port 11 and the arm 23 of the load port transfer carriage 21 can be easily performed. Can be combined.

[0052]

As described above, according to the present invention, when a load port having an abnormality is removed from a plurality of load ports attached to a transfer machine, the holding portion provided on the load port is removed. By simply engaging the load port transport trolley, it is possible to remove the abnormal load port and transport the load port to the maintenance area without affecting the other load ports in operation.
The operation rate of the semiconductor substrate processing apparatus can be improved without stopping the entire apparatus.

Further, according to the present invention, the load port, which is a large and heavy object, can be removed from the transfer machine by the load port transport trolley and transported, so that the work labor of the workers can be reduced. .

Further, according to the present invention, the load port having an abnormality can be carried out from the transfer machine in a short time. Therefore, the load port holding the wafer carrier storing the wafer to be transferred to the semiconductor substrate processing apparatus is provided. This does not hinder the transfer of the semiconductor substrate processing apparatus or the load port holding the wafer carrier that stores the processed wafer, and thus does not lower the operation rate of the semiconductor substrate processing apparatus.

Further, according to the present invention, since the load port is mounted so as to maintain a right angle with the transfer machine, the positioning at the time of replacement is simple and the replacement time can be shortened.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a load port and a transfer machine of a semiconductor substrate processing apparatus to which the present invention is applied.

FIG. 2 is a diagram illustrating a state in which a load port carrier according to an embodiment of the present invention takes out a load port.

FIG. 3 is a diagram illustrating a state in which a load port transport trolley according to one embodiment of the present invention transports a load port.

FIG. 4 is a view for explaining the structure of a load port carrier.

FIG. 5 is a diagram illustrating the structure of a vertical movement mechanism.

FIG. 6 is a diagram illustrating a structure of a load port according to an embodiment of the present invention.

FIG. 7 is a diagram illustrating a storage state of an internal device of the load port.

FIG. 8 is a diagram illustrating a structure of a connecting portion between a load port and a transfer machine.

FIG. 9 is a perspective view of a state in which the load port carrier has lifted up the load port as viewed from the rear side of the load port.

FIG. 10 is a diagram for controlling a configuration in a case where power is supplied to a load port carrier.

FIG. 11 is a diagram illustrating an electrode structure in a power supply box.

FIG. 12 is a diagram illustrating another embodiment relating to the engagement between the load port and the arm of the load port carrier.

FIG. 13 is a diagram illustrating a structure of a load port according to another embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 11 load port 12 wafer carrier lid opening / closing plate 13 wafer carrier 14 transfer machine 15 control unit 16 display 17 operation console 18 monitoring lamp 19 monitoring window 20 fitting hole 21 load port carrier 22 rail 23 arm 24 arm sliding handle 25 Arm vertical drive crank 26 Slide mechanism 27 Lock button 28 Truck moving handle 29 Mounting surface 30 Main unit 31 Weight 32 U-shaped frame 33 Arm guide rail 34 Hook 35 Wheel 36 Elevator shaft 37, 38 Gear 39 Chain 40 Toothed portion 61 Main body 62 Wafer carrier mounting table 63 Coupling plate 65 Wafer carrier lid opening / closing hook 66 Wafer carrier mounting plate 67 Front door 68 Side cutout 69 Front cutout 70 Fixing foot 71 Wheel 72 Height adjustment mechanism 73 Wafer Carrier Stopper 74 Wafer Carrier Pressing Tool 75 Operation Button 76 Emergency Stop Button 77 Load Port Fixture 78 Operation Unit 79 Control Board 80 Connection Cable 81 Cable Tray 82 Connection Tool 83 Load Port Receiving Plate 84 Transferring Machine Side Frame 85 Lid opening / closing mechanism 86 Hook 91 Base plate 92 Power supply box 93 Floor base side electrode 94 Bogie side electrode 95 Electrode support bar 96 Engagement part 97 Screw hole 98 Bolt 99 Engagement surface

 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Motoya Taniguchi 4-6-6 Kanda Surugadai, Chiyoda-ku, Tokyo Within the Electronic Device Manufacturing System Promotion Division, Hitachi, Ltd. 280-chome, Hitachi, Ltd.Design Research Laboratories, Ltd. (72) Inventor, Hideshi Kobayashi 5--20-1, Kamimizuhoncho, Kodaira-shi, Tokyo In-house Semiconductor Division, Hitachi, Ltd. 3-14-20 Kokusai Electric Co., Ltd.

Claims (11)

[Claims] 1. A transfer device for holding a wafer carrier for storing a wafer transferred to a semiconductor substrate processing apparatus from a transfer device, wherein the load port is attached to the transfer device. A load port comprising a holding portion that engages with a load port transport cart that transports the load port. 2. A wafer carrier that holds a wafer that is transferred to a transfer machine and stores a wafer transferred from the transfer machine to a semiconductor substrate processing apparatus, wherein the load port is attached to the transfer machine. A load port provided with engagement means for engaging with a pair of arms provided on a load port transport cart for transport. 3. A wafer carrier for holding a wafer which is transferred to a transfer machine and stores a wafer transferred from the transfer machine to a semiconductor substrate processing apparatus. It is constituted by a mounting table for mounting the carrier and a main body, and a cutout portion as an engaging groove for engaging with an arm of the load port carrier is provided on a side surface between the mounting table and the main body. Characteristic load port. 4. A wafer carrier mounting plate is provided on an upper surface of a mounting table on which the wafer carrier is mounted,
4. The load port according to claim 3, wherein an adjustment mechanism for adjusting an upper surface of the plate horizontally is provided at a lower portion of the plate. 5. The load port according to claim 2, wherein a fixture for attaching the load port to the transfer machine is operably provided from the front side of the load port. 6. The load port has a coupling plate attached to the transfer machine on a back surface thereof, the load port is attached to the transfer machine by a hook provided on an upper portion of the coupling plate, and the fixture, and 6. The load port according to claim 5, wherein a lower portion of the coupling plate is mounted on a base plate protruding from a lower portion of the transfer machine. 7. The load port has a height-adjustable fixing foot at a bottom portion on the front side thereof, and the transfer foot having the load port bottom at the upper surface of the base plate is installed by the fixing foot. 7. The load port according to claim 6, wherein the load port is supported so as to have the same height from the installation surface. 8. A load port transport trolley for transporting a load port for opening and closing a wafer carrier capable of storing a wafer in a semiconductor substrate processing apparatus, wherein a main body having an open front surface for loading the load port is provided. , Provided on the upper part of the main body, slidable forward of the main body,
A load port transport trolley comprising a pair of arms that engage with engagement means provided on the load port. 9. The load port carrier according to claim 8, wherein the pair of arms are movable in a vertical direction together with a member supporting the arms. 10. The load port carrier according to claim 9, further comprising a handle for manually sliding the arm, and a mechanism for manually moving the arm in a vertical direction. 11. The load port carrier according to claim 9, further comprising a mechanism that moves the arm in the vertical direction by electric power or by air from a transfer machine.