KR200273988Y1 - The operating device for handler of classification machine for semi-conductor device - Google Patents

Abstract

The present invention relates to a classifier that picks up a semiconductor element contained in a package and seats it on a tray according to each classification, and is located on the upper side of a tray stocker 2 in which a tray is stacked. Install the TRAY TRANSFER (1) which operates up, down, up and down to feed the TRAY from the TRAY STOCKER to the TRAY FIXTURE PLATE (3). TRAY FIXTURE PLATE (3) is installed on the upper side, and a TRAY FIXTURE PLATE (3) is installed to fix the supplied TRAY. In the process of transporting the tray, the tray does not leave the home position and the tray stock and the setting plate do not interfere with the tray. The machine can work smoothly by eliminating the phenomenon, and accepts both tray loading and unloading with only one transport and elevator device for the tray pick-up. The productivity improvement of the cost reduction effect can bring about the expected effect, and also the interference caused when the tray is loaded or unloaded on the stocker and the setting plate. It is a useful design that can maximize the utilization rate of the equipment by adding the function of centering at the front, rear, left and right of the tray to cause the malfunction caused by the phenomenon of the package being flipped.

Description

Actuator for handler for semiconductor device classifier {THE OPERATING DEVICE FOR HANDLER OF CLASSIFICATION MACHINE FOR SEMI-CONDUCTOR DEVICE}

The present invention relates to a classifier that picks up a semiconductor element contained in a package and seats it on a tray according to each classification. The transfer and elevator for the TRAY PICK-UP are provided. The goal is to be able to accommodate both loading and unloading with just one device.

In general, the final stage of the semiconductor manufacturing process is to test the performance of the product before shipping it to the consumer.The tested package is sorted with genuine and defective products and placed in the tray correctly. TEST HANDLER is a device that puts a package that has not been tested in a tray on a test board.

In the test handler as described above, the tray has a structure in which several trays are laid out on a plane, and each tray station is laid vertically in several trays. There was a problem that the device and space that can be stored.

In other words, in modern times, semiconductor devices tend to be reduced in size, high integration, and light weight. Therefore, when semiconductor devices are placed in a tray formed of plastic, the semiconductor devices are easily separated from a small external impact. There is a drawback, since the TRAY is also a plastic plate manufactured by injection, which is often severely deformed, which causes errors in the semiconductor device's positional instability during tray loading and unloading, which are the most chronic problems of test handler equipment. Is generated, the error caused by TRAY TRANSFER occupies about 60% of the equipment.

Conventionally, in order to set a tray, each elevator apparatus is installed in each tray stocker zone, two tray pickers are installed, and one tray picker is lifted by an elevator. It picks up the selected tray and loads it on the setting plate.

The other tray picker has the trouble of picking up the tray mounted on the setting plate and unloading it to the tray stocker and installing the tray setting block for each setting. There are complex disadvantages such as down operation, which increases the manufacturing cost of the TEST HANDLER.

In addition, when loading and unloading a tray, a complicated process is required because the tray has to be moved several times, so that a package frequently exits from the tray. There was a problem such as being done.

On the other hand, it removes the functions of the elevators and the up / down blocks for the tray station, which are installed for each tray station, and the two tray transfers, two traffic / ups and two The one comprised by the elevator is used.

In the handler (HANDLER) one tray pick-up assembly (TRAY PICK-UP ASSY ') performs the tray loading (unloading), the other in the tray setting station (TRAY SETTING STATION) TRAY PICK-UP ASSY 'performs tray loading and unloading at the tray STOCKER station.

Such a device could reduce the manufacturing cost of the equipment slightly by removing the elevator function and the setting up / down block that were separately installed in each tray station. There is a disadvantage in that it takes a long time to replace the tray (TRAY), and also did not solve the various problems caused by moving the tray (TRAY) several times.

The operation sequence of the conventional handler (HANDLER) will be described in more detail. The elevator for the loading tray is raised and transferred to the TRAY TRANSFER, and then the first tray is pick-up driving (Tray clamper stacker: TRAY CLAMPER STACKER to transfer to TRAY TRANSFER and TRAY TRANSFER.

In the above state, Tray 2 is pick-up (TRAY UNLOADING) and then transferred to TRAY TRANSFER, and Tray 1 is pick-up (TRAY LOADING). Then transfer to TRAY TRANSFER.

In this state, the TRAY SETTING BLOCK rises, TRAY 2 pick-up operation (TRAY UNLOADING), and at the same time, the UNLOADING ELEVATOR descends, and the loading tray elevator (LOADING TRAY ELEVATOR) is raised.

That is, in the conventional method, a separate tray setting block moves up and down by an air cylinder in a TRAY FIXTURE STATION, and each TRAY STOCKER is a station. There is a separate elevator device installed in the stocker zone so that the tray in the stocker zone can be moved up and down by a motor, and two tray pickup devices are installed in the tray transfer. In this configuration, the first tray pick-up device serves to pick up the tray in the tray stocker and load the tray into the setting block, and the second tray pick-up device picks up the tray on the setting block. It plays a role of unloading tray to tray holder.

However, the conventional handler has a tray setting block in each tray fixture station, and an elevator device is installed in each tray stocker to increase production costs. There was a problem.

In addition, in the above method, since the tray moves from the first tray pick-up to the setting block, the setting block moves up and down to the TRAY FIXTURE STATION. ) There is a disadvantage in that the package in the package is flipped off, and therefore, there is a disadvantage in that the product is poorly processed by failing to inspect the detached product accurately. There was a problem dropping.

The present invention was devised to solve the above problems, and removes the tray setting up / down block and elevator device installed in each tray station, and transfers one tray up / down and It has an elevator, and the tray consists of a centering device so that the tray does not leave its proper position in the process of transporting the tray. This eliminates the splashing of the package in the tray without any interference with the setting plate.

In other words, it is possible to accommodate both tray loading and unloading with only one transport and elevator device for the TRAY PICK-UP. It is to be imported.

In addition, the tray may cause malfunctions when the tray is loaded or unloaded to the stocker and the setting plate. After, the left and right centering (CENTERING) by adding a function to maximize the operation rate of the equipment, the present invention will be described in detail by the accompanying drawings as follows.

1 is an enlarged perspective view of the main part of the present invention

2 is a schematic overall perspective view of the subject innovation transfer (TRANSFER)

Figure 3 is an enlarged perspective view of the main portion of the left, right operating tool of the present invention

Figure 4 is an enlarged perspective view of the main portion of the present invention tray fixture plate (TRAY FIXTURE PLATE)

5 is an exemplary view showing the operating state of the left and right operating device of the present invention

6 is an exemplary view showing the operating state of the lower operation mechanism in the present invention.

Figure 7 is an enlarged example of the main portion showing the operating state of the tray (TRAY) fixing device in the lower operation sphere in the present invention

8 is an exemplary side view showing an operating state of a fixing device installed on a TRAY FIXTURE PLATE of the present invention;

9 is a side view illustrating an operating state of a horizontal fixing device installed on a TRAY FIXTURE PLATE of the present invention;

※ Explanation of code for main part of drawing ※

1. TRAY TRANSFER 2. TRAY STOCKER

3. TRAY FIXTURE PLATE

4. Support Plate 5. Belt 6. Left and Right Actuator

7. Up and down actuator 8. Up and down actuator 9. 10. Fixture

11.Horizontal fixing device 12. 17. Guard rail 13. Roller

14. 23. Support 15. Motor 16. Rotating shaft

18. 20. 24. Cylinder 19, Crimp 21. 25. Base

22. Support roller 26. Anti-shake roller

Tray Transfer Up (Tray Fixture) Step: Tray Pickup Step: Tray Transfer Down Step: TRAY TRANSFER Transfer Step: Tray Transfer Down Step (Unloading Stocker): Tray Picker Open Step: Tray Transfer Up Step: Tray Transfer (TRAY TRANSFER) Transfer step: TRAY transfer down step (loading stocker): TRAY PICK-UP step: TRAY transfer up step: TRAY TRANSFER Transfer step: TRAY transfer up step: TRAY picker open (Tray Fixture).

In other words, the present invention will be described as follows.

TRAY STOCKER to store several trays, ELEVATOR to transport TRAY up and down, and TRAY TRANSFER to transport TRAY transferred to the left and right, In the TRAY FIXTURE PLATE which fixes the TRAY supplied by the TRAY TRANSFER and the TRAY setting block which fixes the TRAY supplied,

It is operated left, right, up and down on the upper side of the tray STOCKER 2 in which the tray is stacked, and the tray is picked up by the tray stock tray. TRY FIXTURE PLATE is provided with a TRAY TRANSFER (1) to be supplied to (3) and a tray fixing device and a horizontal fixing device for fixing the supplied TRAY on the upper side thereof. (3) was installed.

The TRAY TRANS main body 1 is provided with a support plate 4 perpendicular to the rear of the TRAY TRANSFER main body 1, and left and right flows left and right by the belt 5 on its front surface. Install the actuator (6), the upper and lower actuators (7) for fixing the tray on the front of the left and right actuator (6), the upper and lower actuators (7) in the center of the upper and lower The upper and lower operating devices 8 are installed to operate, and the trays are fixed to seat the trays before and after the upper and lower operation holes 7 and before and after both sides of the upper and lower operating holes 7. Install the device 9 and install several TRAY FIXTUREs 3 on the top of the TRAY TRANSFER 2, but fix the TRAY on each TTRA FIXTURE. The horizontal fixing device 11 fixed by the fixing device 10 and the fixing device to hold the shake of the tray, It was installed.

The transfer body 1 is provided with a guard rail (GUARDRAIL) 12 on the front and bottom of the vertical support plate (4), and the left and right operating holes (6) are installed on the guard rail (12). The rollers 13 are installed on both sides of the central part between the upper and lower guard rails 12, and the belt 5 is fastened. A motor is installed at one roller to drive the belt. Fixing both sides of the right operating tool (6) so that the left and right operating tool (6) is operated left and right by the belt (5), and the support 14 is installed above and below the central part of the left, right operating tool (6) The rotational shaft 16 driven by the motor 15 is installed, and the guard rails 17 are installed vertically on both sides of the support 14 to fasten the upper and lower operating holes 7, respectively. , By fastening the rotating shaft 16 to the center of the lower operating hole (7) by the rotation of the rotating shaft 16 to operate the upper and lower operating holes (7) up and down, Before and after both sides of (7), the pressing holes 19 for fixing the tray (TRAY) by the cylinder 18, respectively, to operate back and forth, on one side of the cylinder 20 is installed on the bottom of each cylinder 20 ) To install the base 21 to be operated as the crimping hole so as to fix the tray (TRAY), and to install the support (23) in the central part before and after the upper and lower operating holes (7) The support rollers 22 are provided on the upper side of the 23 so that the tray TRAY is positioned at the center of the upper and lower operating holes 7.

In the center part before and after the TRAY seating portion formed in the TRAY FIXTURE PLATE (3), a fixing device 10 is installed at the center portion of the tray fixer 10 which is operated by the cylinder 24 before and after. When the tray is supplied, it is fixed, and the anti-shake roller 26, which is operated before and after by the spring, is installed at the center of both sides of the bottom of the tray fixture plate 3 and before and after. Will

Referring to the operation of the present invention made as described above are as follows.

A tray stocker (TRAY) in which the semiconductor to be inspected is stacked is stacked in a multi-stage manner in a tray stocker 2 provided inside the main body of the tray classifier.

When the classifier of the present invention is operated in the above state, the upper and lower operating holes 7 installed in the TRAY TRANS main body 1 are transferred upward by the upper and lower operating devices 8, At the same time, the motor is operated to drive the belt 5 so that the left and right operation openings 6 are positioned above the tray stocker 2.

That is, when the motor is operated, the belt 5 is rotated by the rollers 13 installed on both sides of the middle portion of the vertical support plate 4, and thus the belt 5 is fixed to the left and right operating holes 6 by the rotation of the belt. Left and right operating port (6) is to operate from side to side.

As described above, when the left and right operating holes 6 are positioned above the tray STOCKER 2, the upper and lower operating holes 7 installed on the left and right operating holes 6, By the lower operating device (8), the upper and lower operating holes (7) are lowered to fix the tray (TRAY).

In more detail, when the sub-motor 15 for operating the rotating shaft 16 installed in the center of the upper and lower operating holes 7 rotates the rotating shaft 16, the upper and lower operating holes ( 7) is lowered by riding the guardrail (GUARDRAIL) 17 installed in the left and right operating port (6) by the rotating shaft 16 to be seated on the tray (TRAY).

As described above, when the upper and lower operating holes 7 are lowered and seated on the tray stacked on the TRAY STOCKER 2, the upper and lower operating holes 7 are crimped and installed at both sides of the upper and lower operating holes 7. The sphere 19 and the pedestal 21 are operated inwardly by the cylinders 18 and 20, respectively, so that the crimping aperture 19 is located above the tray and at the same time Since the base 21 enters the bottom to support the tray TRAY, the upper and lower portions of both sides of the tray TRAY are fixed by the pedestal 21 and the pressing holes 19, respectively.

Meanwhile, as described above, the upper and lower operating holes 7 are lowered to fix the tray TRAY, and at the same time, by the rollers 22 installed at the center part before and after the upper and lower operating holes 7. By fixing the front and rear of the tray (TRAY), the tray (TRAY) is fixed to the upper and lower operating holes (7) without being separated during transportation.

As described above, when the tray (TRAY) is seated in the upper and lower operating holes (7), the upper and lower operating holes (7) are rotated by the rotating shaft (16) by the reverse rotation of the sub-motor (15) At the same time, the upper and lower operating holes 7 move out of the tray stocker 2 and the left and right operating holes 6 are rotated by a motor. It is located at the bottom of the TRAY FIXTURE PLATE (3) into which the TRAY is inserted by operating on one side, and in this state, the rotary shaft 16 of the upper and lower actuators 8 is continuously By operation, the upper and lower operating holes 7 are inserted into the tray seating portion formed in the TRAY FIXTURE PLATE 3.

As described above, when the upper and lower operation holes 7 are inserted into the TRAY FIXTURE PLATE 3, the front and the rear fixed to the TRAY FIXTURE PLATE 3 are fixed. The tray 10 is fixed by the apparatus 10, and at the same time, the pressing hole 19 and the support plate 21, which are fixing the tray TRAY at the upper and lower operating holes 7, are respectively cylinders 18 ( 20), the tray (TRAY) is brought to the tray fixture plate (TRAY FIXTURE PLATE) (3) from the upper and lower operating holes (7).

On the other hand, when the TRAY is positioned on the TRAY FIXTURE PLATE (3), the roller 26 is installed at both centers of the TRAY FIXTURE PLATE (3) and before and after. The tray TRAY is fixed. At this time, since the roller 26 is a spring device, the tray TRAY is accurately positioned at the center part.

That is, when the TRAY is biased to one side, the roller 26 is pushed by the elasticity of the spring of the compressed portion of the roller 26 installed on the bottom of the TRAY FIXTURE PLATE 3. At the same time, the roller 26 provided on the other side remains in its original state because there is no force for pressing the tray.

As described above, the roller 26 pushes the tray by the spring force of the spring, so that the tray is moved to the correct position.

On the other hand, the upper and lower operating holes 7 of the TRAY TRANSFER 1 supplying the trays are lowered again as soon as the trays are supplied, and at the same time, the left and right operating holes 6 As a result, it moves to the tray TRAY which is loaded on the tray stocker 2 again.

That is, the upper and lower operating port (7) is operated while the left, right operating port (6) is operated together so that the working time can be shortened.

In addition, as described above, the driving method of supplying the tray or inspecting the semiconductor embedded in the tray in the tray fixture plate 3, and then separating the tray after the end thereof is also carried out. Is the same as

As described above, the present invention is designed to accommodate both TRAYING and UNLOADING with only one TRANSFER and ELEVATOR device for a TRAY PICK-UP. It is easy to manufacture because it is simple, and in the process of transporting the tray, the tray does not leave the correct position and there is no interference between the tray stocker and the setting plate without any interference in the tray. Smooth operation can be performed by eliminating the splattering of the package.Tray loading and unloading with only one transport and elevator device for the TRAY PICK-UP UNLOADING can be used to increase the productivity of cost savings and to achieve the expected effect. Also, the tray can be loaded and unloaded on the stocker and the setting plate. It is a useful design that can maximize the utilization rate of the equipment by adding the function of centering at the front, rear, left and right of the tray, which causes the malfunction of the package by the interference. .

Although the present invention has been described with reference to the preferred embodiments, those skilled in the art will variously modify and change the present invention without departing from the spirit and scope of the present invention as set forth in the claims below. Can be

Claims (4)

TRAY STOCKER to store several trays, ELEVATOR to transport TRAY up and down, and TRAY TRANSFER to transport TRAY transferred to the left and right, In each tray fixer plate (TRAY FIXTURE PLATE) for fixing the TRAY supplied by the TRAY TRANSFER and a tray setting block for fixing the TRAY supplied, Install the support plate 4 perpendicular to the rear of the TRAY TRANSFER main body 1, and install the left and right operating holes 6 which are moved to the left and right by the belt 5 on the front thereof, On the front of the operating port (6), the upper and lower operating device (7) for fixing and feeding the tray (TRAY) is installed, but the upper and lower operating device (7) to operate the upper and lower operating device (7) in the center 8), and a fixing device 9 for seating and fixing the TRAY before and after the upper and lower operation holes 7 and both sides, and the TRAY TRANSFER (2). Install several tray fixers (3) on the upper side of each tray fixer, which is fixed by the fixing device (10) and the fixing device to fix the tray (TRAY) while holding the shaking of the tray (TRAY) An operating device for a handler for a semiconductor device classifier, characterized in that the device (11) is provided. The transfer main body (1) is provided with a guard rail (GUARDRAIL) 12 above and below the front surface of the vertical support plate (4), and to the guard rail (GUARDRAIL) 12, 6) Install the rollers 13 on both sides of the center between the upper and lower guard rails 12, and fasten the belt 5 to install the motor on one side of the roller to drive the belt. Fixing both sides of the left and right operating port (6) to the belt so that the left and right operating port (6) is operated left and right by the belt (5), and the support on the upper and lower sides of the central part of the left and right operating port (6) (14) to install the rotating shaft (16) driven by the motor (15), and on both sides of the support (14) is installed vertically (GUARDRAIL) 17, the upper and lower operating holes (7) ) Is fastened to the center of the upper and lower operating port by fastening the rotating shaft 16 to the upper and lower operating holes (7) by the rotation of the rotating shaft 16 to operate the upper, lower, Before and after both sides of the lower operating port (7), so that the pressing holes 19 for fixing the tray (TRAY) by the cylinder 18, respectively, to operate back and forth, one side of the cylinder 20 is installed on each side The base 21 is installed on the cylinder 20 so that the tray 21 can be operated in the same manner as the crimping hole so as to fix the tray. The support 23 is provided at the center of the upper and lower operating holes 7 before and after. And a support roller (22) on the upper side of the support (23) so that the tray (TRAY) is located at the center of the upper and lower operating holes (7). The fixing device according to claim 1, wherein the pedestal 25 is operated before and after by the cylinder 24 at the center portion before and after each tray mounting portion formed on the tray fixture plate 3. (10) to be fixed when the tray (TRAY) is supplied, and the anti-shake roller (26) is operated by the spring before and after the center of both sides of the bottom surface of the TRAY FIXTURE PLATE (3) and before and after And an operating device for a handler for a semiconductor device classifier, characterized in that it is provided. 2. The TRAY TRANSFER is installed between a TRAY STOCKER and a TRAY FIXTURE PLATE in which the TRAY is stacked, and one TRAY TRANSFER. ) Is a device for operating the handler for a semiconductor device classifier, characterized in that it is operated up and down and left and right at the same time.