KR200223641Y1 - Cleanroom wiper - Google Patents
Cleanroom wiper Download PDFInfo
- Publication number
- KR200223641Y1 KR200223641Y1 KR2020000031069U KR20000031069U KR200223641Y1 KR 200223641 Y1 KR200223641 Y1 KR 200223641Y1 KR 2020000031069 U KR2020000031069 U KR 2020000031069U KR 20000031069 U KR20000031069 U KR 20000031069U KR 200223641 Y1 KR200223641 Y1 KR 200223641Y1
- Authority
- KR
- South Korea
- Prior art keywords
- wiper
- sealing portion
- clean room
- flexible sealing
- present
- Prior art date
Links
- 238000007789 sealing Methods 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 description 5
- 239000000835 fiber Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000009940 knitting Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/14—Wipes; Absorbent members, e.g. swabs or sponges
- B08B1/143—Wipes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Professional, Industrial, Or Sporting Protective Garments (AREA)
Abstract
본 고안은 크린룸 와이퍼에 관한 것으로, 그 목적은 청정실에서 사용하는 크린룸 와이퍼의 씰링부를 유연하게 씰링 처리하여 사용감을 좋게 하는 크린룸 와이퍼를 제공함에 있다. 이는 와이퍼 시트의 사면중 신축성이 작은 가로방향은 절단함과 동시에 절단면을 씰링하고, 신축성이 큰 세로방향의 두면은 초음파 씰링으로 연성 씰링부를 형성하는 것이다. 상기 연성 씰링부의 폭이 2∼4㎜이고, 상기 연성 실링부의 두께는 약3/5∼4/5인 것이다.The present invention relates to a clean room wiper, an object of the present invention is to provide a clean room wiper to improve the feel by flexibly sealing the sealing portion of the clean room wiper used in the clean room. This means that the transverse direction of the wiper sheet, which has a small elasticity, cuts and seals the cut surface at the same time, and the two longitudinal sides that have a large elasticity form a flexible sealing portion by ultrasonic sealing. The width of the flexible sealing portion is 2 to 4 mm, and the thickness of the flexible sealing portion is about 3/5 to 4/5.
Description
본 고안은 크린룸 와이퍼에 관한 것으로, 더욱 상세하게는 청정실에서 사용하는 크린룸 와이퍼의 사면중 신축성이 큰 세로방향의 두면에 유연한 씰링부를 형성함으로서, 파티클 발생을 방지함과 아울러 제작공정을 단순화하여 제조원가를 절감할 수 있는 크린룸 와이퍼에 관한 것이다.The present invention relates to a clean room wiper, and more particularly, by forming a flexible sealing part on two sides of a large stretchable longitudinal side of a clean room wiper used in a clean room, preventing the occurrence of particles and simplifying the manufacturing process, It is about clean room wiper which can save.
일반적으로 청정상태와 무균상태를 유지해야 하는 청정실은 산업에서 여러 분야에서 이용되고 있으며, 특히 반도체 제조 공정을 실시하는 청정실 내에서 웨이퍼(wafer)나 장치 및 기구 등을 청소할 때에 이용되는 크린룸 와이퍼는 먼지(particle)나 수분 등의 흡착성이 우수하고, 사용 중에 먼지나 정전기 발생 등이 억제되는 섬유 재질로 제조된다.In general, clean rooms that need to be kept clean and sterile have been used in various fields in the industry. In particular, clean room wipers used to clean wafers, devices, and devices in clean rooms that perform semiconductor manufacturing processes are dusty. It is made of a fiber material which is excellent in adsorption properties such as particles and moisture, and in which dust and static electricity are suppressed during use.
도 1은 종래의 크린룸 와이퍼에 대한 일예를 나타낸 도면으로서, 사각 형태의 시트(1)로 제조되고, 그 가장자리는 섬유 등의 실풀어짐으로 인한 먼지 발생을 방지하기 위하여 가장자리에서 일정한 폭만큼 씰링부(2)를 형성한 것이다.1 is a view showing an example of a conventional clean room wiper, which is made of a square sheet 1, the edge of which is sealed by a certain width at the edge in order to prevent dust generation due to loosening of fibers and the like ( 2) is formed.
상기 씰링부(2)는 도 2에서 나타낸 바와 같이 상ㆍ하측에서 열 압착함으로서, 섬유가 용융되면서 합성수지화 되어 씰링부(2)가 딱딱하게 경화되는 것이다.As shown in FIG. 2, the sealing part 2 is thermally compressed from the upper side and the lower side, and the sealing unit 2 is hardened by the synthetic resin as the fibers are melted.
즉, 합성수지화 된 씰링부(2)에 의해 사용 도중에 균열이 생기거나 파손되어 반도체 장비 등의 표면에 상처를 입히거나, 와이퍼 자체에서 파티클이 발생되는 문제점이 있다.That is, there is a problem that a crack occurs or breaks during use by the synthetic resin-sealed portion 2 to injure the surface of the semiconductor equipment or the like, or particles are generated in the wiper itself.
또한, 씰링부가 딱딱하게 경화되어 사용감이 좋지 않은 문제점도 있다.In addition, there is a problem in that the sealing portion is hardened hard to feel good.
본 고안은 이러한 종래의 문제점을 해결하기 위하여 이루어진 것으로, 그 목적은 청정실에서 사용하는 크린룸 와이퍼의 씰링부를 유연하게 씰링 처리하여 사용감을 좋게 하는 크린룸 와이퍼를 제공함에 있다.The present invention has been made to solve such a conventional problem, an object of the present invention is to provide a clean room wiper to improve the feel by flexibly sealing the sealing portion of the clean room wiper used in the clean room.
도 1은 종래의 크린룸 와이퍼를 나타낸 평면도.1 is a plan view showing a conventional clean room wiper.
도 2는 도 1의 A - A선 단면도.2 is a cross-sectional view taken along the line AA of FIG.
도 3은 본 고안의 크린룸 와이퍼를 나타낸 평면도.3 is a plan view showing a clean room wiper of the present invention.
도 4는 도 3의 B - B선 단면도.4 is a cross-sectional view taken along the line B-B in FIG.
도 5는 도 3의 C - C선 단면도.5 is a cross-sectional view taken along the line C-C in FIG.
도 6은 본 고안의 다른 실시예를 나타낸 평면도.Figure 6 is a plan view showing another embodiment of the present invention.
(도면중 주요 부분에 대한 부호의 설명)(Explanation of symbols for the main parts of the drawing)
10: 와이퍼 시트 11: 연성 씰링부10: Wiper Sheet 11: Flexible Sealing Section
12: 절단면12: cutting surface
이러한 목적을 해결하기 위한 본 고안은 와이퍼 시트의 사면중 신축성이 작은 가로방향은 절단함과 동시에 절단면을 씰링하고, 신축성이 큰 세로방향의 두면은 초음파 씰링으로 연성 씰링부를 형성하는 것이다.The present invention for solving the above object is to cut the transverse direction of the four sides of the wiper sheet with the elasticity at the same time cutting the sealing surface, and the two sides of the longitudinal direction with a high elasticity to form a flexible sealing portion by ultrasonic sealing.
상기 연성 씰링부의 폭이 2∼4㎜이고, 상기 연성 실링부의 두께는 약3/5∼4/5인 것이다.The width of the flexible sealing portion is 2 to 4 mm, and the thickness of the flexible sealing portion is about 3/5 to 4/5.
이하 본 고안의 바람직한 실시예를 첨부된 도면에 의거하여 상세하게 설명하면 다음과 같다.Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.
도 3은 본 고안의 크린룸 와이퍼를 나타낸 평면도이다.3 is a plan view showing a clean room wiper of the present invention.
도시한 바와 같이 크린룸 와이퍼는 미세한 섬유을 편직하여 사각형상의 시트(10)로 제직하는 것이다.As shown, the cleanroom wiper is to knit fine fibers into a rectangular sheet 10.
상기 와이퍼 시트(10)는 편직으로 직조되어 가로방향과 세로방향의 신축력이 차이가 있으며, 사면중 신축성이 작은 가로방향은 슬리팅함과 동시에 씰링하고, 신축성이 큰 세로방향의 두면은 초음파로 경화되지 않게 하기 위하여 원단의 상ㆍ하표면 및 절단면을 씰링하여 연성 씰링부(11)를 형성하는 것이다.The wiper sheet 10 is woven by knitting, there is a difference in the transverse direction and the longitudinal direction of the elasticity, the transverse direction of the small stretch of the four sides of the slope and sealing at the same time, the elasticity of both sides of the longitudinal stretch is not hardened by ultrasonic The upper and lower surfaces of the fabric and the cut surfaces are sealed to form the flexible sealing portion 11 so as not to prevent them.
상기 연성 씰링부(11)은 초음파 씰링하여 재질 및 원단의 형태를 그대로 유지함으로서, 유연함을 유지하여 사용감이 좋은 것이다.The flexible sealing portion 11 is ultrasonically sealed to maintain the shape of the material and fabric as it is, it is to maintain the flexibility to feel good.
도 4는 도 3의 B - B선 단면도로서, 이는 본 고안의 씰링부(11)를 상세히 나타낸 도면이다.4 is a cross-sectional view taken along the line B-B of Figure 3, which is a view showing in detail the sealing portion 11 of the present invention.
도시한 바와 같이 상기 연성 씰링부의 폭은 약 2∼4㎜정도가 가장 적당하고, 와이퍼 시트의 두께(A)에 대하여 연성 씰링부(11) 두께(B)는 약3/5∼4/5 정도가 적당하다.As shown in the figure, the width of the flexible sealing portion is about 2 to 4 mm is most suitable, and the thickness (B) of the flexible sealing portion 11 is about 3/5 to 4/5 with respect to the thickness A of the wiper sheet. Is suitable.
도 5는 도 3의 C - C선 단면도로서, 이는 본 고안의 와이퍼 시트의 절단면(12)을 나타낸 도면이다.FIG. 5 is a cross-sectional view taken along the line C-C of FIG. 3, which shows a cut surface 12 of the wiper sheet of the present invention.
도시한 바와 같이 상기 절단면(12)은 초음파로 절단함과 동시에 씰링하는 것이다.As shown in the drawing, the cutting surface 12 is cut at the same time as ultrasonic cutting and sealing.
한편, 도 6은 본 고안의 다른 실시예로서 사면에 연성 씰링부(11)를 형성시켜 파티클 발생을 방지함과 아울러 사용감을 향상시킬 수도 있는 것이다.On the other hand, Figure 6 is another embodiment of the present invention to form a flexible sealing portion 11 on the slope to prevent the generation of particles and may also improve the feeling of use.
본 고안에 따른 작용을 상세히 설명하면 다음과 같다.Referring to the operation according to the present invention in detail as follows.
미세한 섬유를 편직하여 슬리팅한 후 일정크기로 절단하게 된다.The fine fibers are knitted and slit and then cut to a certain size.
이때 신축성이 작은 가로방향의 두면은 초음파로 절단함과 동시에 절단면(12)을 씰링하는 것이고, 신축성이 큰 세로방향의 두면에는 별도의 연성 씰링부(11)를 형성하여 청정실 내에서 사용하게 되면 파티클 발생도 방지되고, 사용감이 향상되는 것이다.At this time, the two sides in the horizontal direction having a small elasticity is to cut the ultrasonic surface and at the same time to seal the cutting surface 12, and the two sides in the longitudinal direction having a large elasticity form a separate soft sealing portion 11 to be used in the clean room The occurrence is also prevented, and the usability is improved.
이상 상세히 설명한 바와 같은 본 고안의 크린룸 와이퍼는 사면중 두면을 절단함과 동시에 씰링하고, 나머지 두면에 연성 씰링부를 형성함으로서, 씰링부가 부러지거나 파손되지 않아 파티클 발생을 최소화할 수 있고, 제조원가가 절감되는 것이다.As described above, the cleanroom wiper of the present invention cuts two sides of the slope and seals at the same time, and forms a flexible sealing portion on the remaining two sides, so that the sealing portion is not broken or broken, thereby minimizing particle generation, and reducing manufacturing costs. will be.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2020000031069U KR200223641Y1 (en) | 2000-11-07 | 2000-11-07 | Cleanroom wiper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2020000031069U KR200223641Y1 (en) | 2000-11-07 | 2000-11-07 | Cleanroom wiper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR200223641Y1 true KR200223641Y1 (en) | 2001-05-15 |
Family
ID=73090917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2020000031069U KR200223641Y1 (en) | 2000-11-07 | 2000-11-07 | Cleanroom wiper |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR200223641Y1 (en) |
-
2000
- 2000-11-07 KR KR2020000031069U patent/KR200223641Y1/en not_active IP Right Cessation
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