KR200223642Y1 - Esd cleanroom wiper - Google Patents
Esd cleanroom wiper Download PDFInfo
- Publication number
- KR200223642Y1 KR200223642Y1 KR2020000031070U KR20000031070U KR200223642Y1 KR 200223642 Y1 KR200223642 Y1 KR 200223642Y1 KR 2020000031070 U KR2020000031070 U KR 2020000031070U KR 20000031070 U KR20000031070 U KR 20000031070U KR 200223642 Y1 KR200223642 Y1 KR 200223642Y1
- Authority
- KR
- South Korea
- Prior art keywords
- wiper
- clean room
- conductive yarn
- sheet
- antistatic
- Prior art date
Links
- 238000007789 sealing Methods 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims description 5
- 238000005520 cutting process Methods 0.000 abstract description 6
- 230000005611 electricity Effects 0.000 abstract description 6
- 230000003068 static effect Effects 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 238000009940 knitting Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/14—Wipes; Absorbent members, e.g. swabs or sponges
- B08B1/143—Wipes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Professional, Industrial, Or Sporting Protective Garments (AREA)
Abstract
본 고안은 제전 크린룸 와이퍼에 관한 것으로, 청정실에서 사용하는 크린룸 와이퍼에 도전사를 형성시켜 정전기 발생을 방지함과 아울러 와이퍼의 사면을 초음파로 순간 절단함과 동시에 씰링하는 것이다. 본 고안은 사각 형상의 와이퍼 시트 상에 일정간격으로 도전사를 삽입시키고, 상기 와이퍼 시트의 사면을 절단함과 동시에 절단면을 초음파 씰링한 것이다. 또한, 상기 사면 중에서 신축성이 큰 세로방향에 연성 씰링부를 형성한 것이다. 또한, 상기 연성 씰링부의 폭이 2∼4㎜인 것이다. 또한, 상기 도전사의 폭은 약 1㎜이고, 상기 도전사의 간격은 약 3∼5㎜인 것이다.The present invention relates to an antistatic clean room wiper, and to form a conductive yarn in the clean room wiper used in the clean room to prevent the generation of static electricity, and at the same time sealing the slope of the wiper with ultrasonic cutting at the same time. The present invention is to insert the conductive yarn at a predetermined interval on the wiper sheet of the rectangular shape, and to cut the slope of the wiper sheet and at the same time ultrasonic sealing the cut surface. Moreover, the flexible sealing part is formed in the longitudinal direction with great elasticity among the said slopes. Moreover, the width of the said flexible sealing part is 2-4 mm. The width of the conductive yarn is about 1 mm, and the interval of the conductive yarn is about 3 to 5 mm.
Description
본 고안은 제전 크린룸 와이퍼에 관한 것으로, 더욱 상세하게는 청정실에서 사용하는 크린룸 와이퍼에 도전사를 형성시켜 정전기를 방지함과 아울러 파티클 발생을 방지하는 제전 크린룸 와이퍼에 관한 것이다.The present invention relates to an antistatic clean room wiper, and more particularly, to an antistatic clean room wiper for forming a conductive yarn in a clean room wiper used in a clean room to prevent static electricity and to prevent particle generation.
일반적으로 청정상태와 무균상태를 유지해야 하는 청정실은 전자산업에서 여러 분야에 이용되고 있으며, 특히 반도체 및 TFT LCD 제조 공정을 실시하는 청정실 내에서 웨이퍼(wafer)나 장치 및 기구 등을 청소할 때에 이용되는 크린룸 와이퍼는 먼지(particle)나 수분 등의 흡착성이 우수하고, 사용 중에 먼지 등이 억제되는 섬유 재질로 제조된다.In general, clean rooms that need to be kept clean and sterile are used in various fields in the electronics industry, and are particularly used for cleaning wafers, devices, and devices in clean rooms that perform semiconductor and TFT LCD manufacturing processes. The cleanroom wiper is made of a fiber material which is excellent in adsorption of particles and moisture and in which dust and the like are suppressed during use.
도 1은 종래의 크린룸 와이퍼에 대한 일예를 나타낸 도면으로서, 사각 형태의 시트(1)로 제조되고, 그 가장자리는 섬유 등의 실풀어짐으로 인한 먼지 발생을 방지하기 위하여 가장자리에서 일정한 폭만큼 씰링부(2)를 형성한다.1 is a view showing an example of a conventional clean room wiper, which is made of a square sheet 1, the edge of which is sealed by a certain width at the edge in order to prevent dust generation due to loosening of fibers and the like ( 2) form.
그러나, 이와 같은 크린룸 와이퍼는 청소하는 과정에서 반도체 장비 등과의 마찰에 의해서 정전기가 발생되어 고정밀도를 요구하는 반도체의 성능을 저하시키는 문제점도 있었다.However, such a clean room wiper has a problem in that static electricity is generated by friction with semiconductor equipment in the process of cleaning, thereby degrading the performance of a semiconductor requiring high precision.
또한, 종래의 크린룸 와이퍼는 열 압착에 의해 씰링됨으로서, 씰링부(2)가 딱딱하게 경화되고, 상기 경화된 씰링부(2)가 사용 도중에 균열이 생기거나 파손되어 반도체 장비의 표면에 상처를 입히거나, 와이퍼 자체에서 파티클이 발생되는 문제점이 있었다.In addition, the conventional clean room wiper is sealed by thermal compression, so that the sealing portion 2 is hardened, and the hardened sealing portion 2 is cracked or broken during use to injure the surface of the semiconductor equipment. However, there was a problem that particles are generated in the wiper itself.
본 고안은 이러한 종래의 문제점을 해결하기 위하여 이루어진 것으로, 그 목적은 청정실에서 사용하는 크린룸 와이퍼에 도전사를 형성시켜 정전기 발생을 방지함과 아울러 와이퍼의 사면을 초음파로 순간 절단함과 동시에 씰링하는 제전 크린룸 와이퍼를 제공함에 있다.The present invention was made to solve such a conventional problem, and its purpose is to form a conductive yarn in a clean room wiper for use in a clean room, to prevent static electricity, and to simultaneously cut and cut the slope of the wiper with ultrasonic cleaner at the same time. In providing a wiper.
도 1은 종래의 크린룸 와이퍼를 나타낸 평면도.1 is a plan view showing a conventional clean room wiper.
도 2는 본 고안의 제전 크린룸 와이퍼를 나타낸 평면도.Figure 2 is a plan view showing an antistatic clean room wiper of the present invention.
도 3은 도 2의 A - A선 단면도.3 is a cross-sectional view taken along the line AA of FIG.
도 4는 본 고안 제전 크린룸 와이퍼의 다른 실시예를 나타낸 평면도.Figure 4 is a plan view showing another embodiment of the antistatic clean room wiper of the present invention.
도 5는 도 4의 B - B선 단면도.5 is a cross-sectional view taken along the line BB of FIG. 4.
(도면중 주요 부분에 대한 부호의 설명)(Explanation of symbols for the main parts of the drawing)
10: 와이퍼 시트 11: 도전사10: Wiper Sheet 11: Challenger
12: 절단면 13: 연성 씰링부12: Cutting surface 13: Flexible sealing part
이러한 목적을 해결하기 위한 본 고안은 사각 형상의 와이퍼 시트 상에 일정간격으로 도전사를 삽입시키고, 상기 와이퍼 시트의 사면을 절단함과 동시에 절단면을 초음파 씰링한 것이다.The present invention for solving this purpose is to insert a conductive yarn at regular intervals on the wiper sheet of the rectangular shape, and to cut the slope of the wiper sheet and at the same time ultrasonic sealing the cut surface.
또한, 상기 사면 중에서 신축성이 큰 세로방향에 연성 씰링부를 형성한 것이다.Moreover, the flexible sealing part is formed in the longitudinal direction with great elasticity among the said slopes.
또한, 상기 연성 씰링부의 폭이 2∼4㎜인 것을 특징으로 하는 제전 크린룸 와이퍼.The antistatic clean room wiper, wherein the flexible sealing portion has a width of 2 to 4 mm.
또한, 상기 도전사의 폭은 약 1㎜이고, 상기 도전사의 간격은 약 3∼5㎜인 것이다.The width of the conductive yarn is about 1 mm, and the interval of the conductive yarn is about 3 to 5 mm.
이하 본 고안의 바람직한 실시예를 첨부된 도면에 의거하여 상세하게 설명하면 다음과 같다.Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.
도 2 및 도 3은 본 고안의 제전 크린룸 와이퍼를 나타낸 도면이다.2 and 3 is a view showing the antistatic clean room wiper of the present invention.
도시한 바와 같이 제전 크린룸 와이퍼는 사각형상의 시트(10)로 이루어져 있고, 일정간격으로 도전사(11)가 형성되어 있다.As illustrated, the antistatic clean room wiper is formed of a rectangular sheet 10 and a conductive yarn 11 is formed at a predetermined interval.
상기 도전사(11)는 전기가 통하는 탄소사 또는 동도사로 이루어진 것이 바람직하고, 도전사의 폭은 약 1㎜이며, 도전사 사이의 간격은 약 3∼5㎜인 것이 가장 바람직하다.It is preferable that the said conductive yarn 11 consists of the electrically conductive carbon yarn or the copper conductive yarn, The width | variety of a conductive yarn is about 1 mm, It is most preferable that the space | interval between conductive yarns is about 3-5 mm.
또한, 상기 와이퍼 시트(10)는 미세한 섬유가 편직되어 가로방향과 세로방향의 신축력이 차이가 있다.In addition, the wiper sheet 10 is fine fibers are knitted, there is a difference in the stretching force in the horizontal direction and vertical direction.
즉, 상기 제전 크린룸 와이퍼는 편직으로 직조하고, 일정크기로 슬리팅한 후 초음파 씰링기에 의해 사면을 절단함과 동시에 절단면(12)을 씰링하는 것이다.That is, the antistatic clean room wiper is woven by knitting, slitting to a certain size, and then cutting the slope with an ultrasonic sealer to seal the cut surface 12.
도 4 및 도 5는 본 고안의 제전 크린룸 와이퍼의 다른 실시예를 나타내고 있다.4 and 5 show another embodiment of the antistatic clean room wiper of the present invention.
도시한 바와 같이 제전 크린룸 와이퍼는 사각형상의 시트(10)로 이루어져 있고, 일정간격으로 도전사(11)가 형성되어 있으며, 양측에 일정폭만큼 연성 씰링부(12)가 형성되어 있다.As shown, the antistatic clean room wiper is formed of a rectangular sheet 10, the conductive yarns 11 are formed at regular intervals, and the flexible sealing portion 12 is formed on both sides by a predetermined width.
즉, 가로 방향의 두면은 초음파로 절단함과 동시에 절단면(12)을 씰링하는 것이고, 편직에 의해 신축성이 큰 세로방향은 일정폭으로 연성 씰링부(13)를 형성하는 것이다.That is, the two surfaces in the transverse direction seal the cut surface 12 at the same time as ultrasonic cutting, and the longitudinal direction in which the elasticity is large by knitting is to form the flexible sealing portion 13 with a predetermined width.
상기 연성 씰링부(13)은 초음파 씰링하여 재질 및 원단의 형태를 그대로 유지함으로서, 유연함을 유지하여 사용감이 좋은 것이다.The flexible sealing part 13 is ultrasonically sealed to maintain the shape of the material and fabric as it is, it is to maintain the flexibility to feel good.
상기에서 연성 씰링부(13)의 폭은 약 2∼4㎜정도가 가장 적당하다.In the above, the width of the flexible sealing portion 13 is about 2 to 4 mm is most suitable.
또한, 와이퍼 시트(10)의 두께(A)에 대하여 연성 씰링부(13)의 두께(B)는 약 3/5∼4/5 정도가 적당하며, 이는 와이퍼 시트(10)에 유연성을 주기 위한 것이다.In addition, the thickness (B) of the flexible sealing portion 13 with respect to the thickness (A) of the wiper sheet 10 is suitable about 3/5 to 4/5, which is to give flexibility to the wiper sheet 10 will be.
본 고안에 따른 작용을 상세히 설명하면 다음과 같다.Referring to the operation according to the present invention in detail as follows.
미세한 섬유와 도전사(11)를 혼합하여 와이퍼 시트(10)를 편직하게 되면, 일정한 간격으로 도전사(11)가 와이퍼 시트(10) 상에 형성된다.When the fine fibers and the conductive yarns 11 are mixed to knit the wiper sheet 10, the conductive yarns 11 are formed on the wiper sheet 10 at regular intervals.
이때 편직된 와이퍼 원단을 슬리팅한 후 초음파 씰링기로 컷팅하게 되고 절단과정에서 씰링이 이루어져 별도의 씰링공정이 필요하지 않게 된다.In this case, the knitted wiper fabric is slitted and then cut by the ultrasonic sealing machine, and the sealing is made in the cutting process so that a separate sealing process is not required.
또한, 편직으로 직조된 와이퍼 시트는 신축성이 큰 세로방향에 별도의 연성 씰링부(12)를 형성시켜 제전 크린룸 와이퍼를 사용하는 중에 신축의 의해 연성 씰링부(12)가 부러지거나 균열이 생기지 않는 것이다.In addition, the wiper sheet woven by knitting is to form a separate flexible sealing portion 12 in the longitudinal direction of the stretchy elasticity so that the flexible sealing portion 12 is not broken or cracked due to expansion and contraction while using the antistatic clean room wiper. .
이렇게 제조된 제전 크린룸 와이퍼는 도전사(11)가 형성되어 정전기 발생을 방지할 수 있는 것이다.The antistatic clean room wiper thus manufactured is a conductive yarn 11 is formed to prevent the generation of static electricity.
이상 상세히 설명한 바와 같은 본 고안의 제전 크린룸 와이퍼는 시트상에 형성된 도전사에 의해 정전기 발생을 방지함과 아울러 와이퍼 시트의 절단과 동시에 씰링이 이루어져 별도의 씰링작업이 필요하지 않아 생산성이 향상되어 생산원가를 절감하고, 또한, 연성씰링이기 때문에 적용되는 장비나 제품의 표면에 상처를 입히지 않는다.As described in detail above, the antistatic clean room wiper of the present invention prevents the occurrence of static electricity by the conductive yarn formed on the sheet and seals at the same time as the cutting of the wiper sheet, thereby eliminating the need for a separate sealing operation, thereby improving productivity. It also saves and does not damage the surface of applied equipment or products because of its flexible sealing.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2020000031070U KR200223642Y1 (en) | 2000-11-07 | 2000-11-07 | Esd cleanroom wiper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2020000031070U KR200223642Y1 (en) | 2000-11-07 | 2000-11-07 | Esd cleanroom wiper |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR200223642Y1 true KR200223642Y1 (en) | 2001-05-15 |
Family
ID=73091365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2020000031070U KR200223642Y1 (en) | 2000-11-07 | 2000-11-07 | Esd cleanroom wiper |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR200223642Y1 (en) |
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2000
- 2000-11-07 KR KR2020000031070U patent/KR200223642Y1/en not_active IP Right Cessation
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