KR20020075486A - Multi chip package for semiconductor - Google Patents
Multi chip package for semiconductor Download PDFInfo
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- KR20020075486A KR20020075486A KR1020010015416A KR20010015416A KR20020075486A KR 20020075486 A KR20020075486 A KR 20020075486A KR 1020010015416 A KR1020010015416 A KR 1020010015416A KR 20010015416 A KR20010015416 A KR 20010015416A KR 20020075486 A KR20020075486 A KR 20020075486A
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- H—ELECTRICITY
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- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/495—Lead-frames or other flat leads
- H01L23/49503—Lead-frames or other flat leads characterised by the die pad
- H01L23/4951—Chip-on-leads or leads-on-chip techniques, i.e. inner lead fingers being used as die pad
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
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- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Abstract
Description
본 발명은 반도체용 멀티 칩 패키지에 관한 것으로, 더욱 상세하게는 서로 다른 크기를 가지는 칩 위에 칩이 적층되는 구조(Chip On Chip 구조)로 복수의 반도체 칩이 실장되어 하나의 패키지화된 반도체용 멀티 칩 패키지에 관한 것이다.The present invention relates to a multi-chip package for a semiconductor, and more particularly, to a semiconductor chip in which a plurality of semiconductor chips are mounted in a structure in which chips are stacked on a chip having a different size (chip on chip structure). It's about packages.
이미 알려진 바와 같이, 복수의 반도체 칩을 하나의 패키지로 제조하는 기술은 크게 칩 투 칩(Chip To Chip) 구조와 칩 온 칩(Chip On Chip) 구조로 구분할 수 있다.As is already known, a technology of manufacturing a plurality of semiconductor chips into one package may be largely classified into a chip to chip structure and a chip on chip structure.
도 1a와 도 1b는 종래 제 1 실시예에 따른 반도체용 멀티 칩 패키지의 종단면도 및 횡단면도로서, 칩 투 칩 구조에 해당한다.1A and 1B are longitudinal cross-sectional views and cross-sectional views of a semiconductor multi-chip package according to a first embodiment of the present invention, and correspond to a chip-to-chip structure.
본 실시예에 따른 멀티 칩 패키지(10)는, 리드 프레임(11)과 기판(Substrate)을 포함하는 패들(18) 위의 동일면상에 제 1 반도체 칩(12)과 제 2 반도체 칩(13)이 접착제(Adhesive; 14)에 의하여 부착되어 있다. 외부와의 전기적 연결을 위한 복수의 금속 패드(15)는 제 1 및 제 2 반도체 칩(12,13)의 가장자리에 배열되며, 금속 패드(15)들은 각각의 금속선(16)으로 리드 프레임(11)의 내부 리드(11a)와 각각 와이어 본딩되고, 내부 리드(11a)는 그와 일체형으로 형성된 외부 리드(11b)에 의해 외부와의 전기적 연결을 한다. 그리고, 상기 각각의 소자들은 EMC(Epoxy Molding Compound; 17)에 의해 봉지되어 보호된다.In the multi-chip package 10 according to the present exemplary embodiment, the first semiconductor chip 12 and the second semiconductor chip 13 are disposed on the same surface on the paddle 18 including the lead frame 11 and the substrate. It is attached by this adhesive (Adhesive) 14. A plurality of metal pads 15 for electrical connection to the outside are arranged at the edges of the first and second semiconductor chips 12 and 13, and the metal pads 15 are lead frames 11 with respective metal wires 16. Wire bonds with the inner leads 11a of the < RTI ID = 0.0 >), < / RTI > the inner leads 11a are electrically connected to the outside by the outer leads 11b formed integrally therewith. Each of the devices is encapsulated and protected by an EMC (Epoxy Molding Compound) 17.
그런데, 전술한 칩 투 칩 구조의 멀티 칩 패키지는 복수의 반도체 칩을 패들 위에 탑재하기 위하여 패들 크기가 싱글 칩 패드(Pad)들의 크기보다 커야 하며, 다른 반도체 칩과 마주하는 가장자리에는 새깅(Sagging)과 스위핑(Sweeping) 등의 문제점으로 인하여 금속 패드를 배열할 수 없다.However, in the chip-to-chip multi chip package described above, in order to mount a plurality of semiconductor chips on a paddle, the paddle size must be larger than the size of single chip pads, and sagging at the edge facing another semiconductor chip. Metal pads cannot be arranged due to problems such as sweeping and sweeping.
따라서, 패키지의 크기가 상대적으로 커져야 하며, 핀 수(Count)가 많은 패키지에 적용시에는 금속 패드 피치가 작아져서 패키지 제조상의 어려움이 따른다.Therefore, the size of the package must be relatively large, and when applied to a package having a large number of pins, the metal pad pitch becomes small, which causes difficulty in manufacturing the package.
현재 반도체 제품이 경박단소화되는 추세에 있어서 패키지 실장 면적을 감소시킬 수 있는 새로운 구조의 멀티 칩 패키지가 요구되고 있으며, 이러한 점에 있어서 칩 온 칩 구조의 멀티 칩 패키지는 패키지를 소형화할 수 있는 장점을 갖는다.In the current trend of thin and short semiconductor products, a new structure of multi-chip package that can reduce the package mounting area is required. In this regard, the chip-on-chip multi-chip package has the advantage of miniaturizing the package. Has
도 2a와 도 2b는 종래 제 2 실시예에 따른 반도체용 멀티 칩 패키지의 종단면도 및 횡단면도로서, 칩 온 칩 구조에 해당한다. 아울러 설명의 이해를 돕기 위하여 도 1의 멀티 칩 패키지와 동일한 구성 요소에 대하여 동일한 참조 부호를 명기하였다.2A and 2B are longitudinal cross-sectional views and cross-sectional views of a multi-chip package for a semiconductor according to a second exemplary embodiment, and correspond to a chip-on-chip structure. In addition, the same reference numerals are designated for the same components as the multi-chip package of FIG. 1 for better understanding of the description.
본 실시예에 따른 멀티 칩 패키지(10)는, 리드 프레임(11)과 기판을 포함하는 패들(18) 상면에 제 1 반도체 칩(12)이 접착제(14)로 부착되고, 제 1 반도체 칩(12) 보다 작은 크기의 제 2 반도체 칩(13)이 제 1 반도체 칩(12)의 상면에 접착제(14)로 부착되어 있다. 외부와의 전기적 연결을 위한 복수의 금속 패드(15)는 제 1 및 제 2 반도체 칩(12,13)의 가장자리에 배열되며, 금속 패드(15)들은 각각의 금속선(16)으로 리드 프레임(11)의 내부 리드(11a)와 각각 와이어 본딩되고, 내부 리드(11a)는 그와 일체형으로 형성된 외부 리드(11b)에 의해 외부와의 전기적 연결을 한다. 그리고, 상기 각각의 소자들은 EMC(17)에 의해 봉지되어 보호된다.In the multi-chip package 10 according to the present exemplary embodiment, the first semiconductor chip 12 is attached to the upper surface of the paddle 18 including the lead frame 11 and the substrate by the adhesive 14, and the first semiconductor chip ( 12) The second semiconductor chip 13 of smaller size is attached to the upper surface of the first semiconductor chip 12 with an adhesive 14. A plurality of metal pads 15 for electrical connection to the outside are arranged at the edges of the first and second semiconductor chips 12 and 13, and the metal pads 15 are lead frames 11 with respective metal wires 16. Wire bonds with the inner leads 11a of the < RTI ID = 0.0 >), < / RTI > the inner leads 11a are electrically connected to the outside by the outer leads 11b formed integrally therewith. Each of the elements is encapsulated and protected by the EMC 17.
그러나, 전술한 종래 기술에 따른 칩 온 칩 구조의 멀티 칩 패키지는 제 2반도체 칩의 와이어 본딩시에 매우 낮은 루프 컨트롤(Loop control)과 보다 더 높은 와이어 루프 및 보다 긴 와이어 길이를 만들어야 함으로써 EMC 몰딩시 와이어 새깅(sagging) 현상 및 스위핑(sweeping) 현상 등의 문제점이 나타난다. 또한 제 1 및 제 2 반도체 칩의 금속 패드가 각각 내부 리드에 연결되므로 외부 핀 수가 많아짐으로써 외부 핀의 제조상의 어려움 및 높은 제조비가 뒤따르는 문제점이 있다.However, the above-described multi-chip package of chip-on-chip structure according to the prior art has to make very low loop control, higher wire loop and longer wire length during wire bonding of the second semiconductor chip, thereby creating EMC molding. Problems such as sagging of wires and sweeping phenomenon appear. In addition, since the metal pads of the first and second semiconductor chips are connected to the internal leads, respectively, the number of the external pins increases, which leads to difficulties in manufacturing the external pins and high manufacturing costs.
본 발명은 이와 같은 종래의 문제점을 해결하기 위하여 제안한 것으로, 서로 다른 크기를 가지는 복수의 반도체 칩이 칩 온 칩 구조로 실장되며 위쪽에 실장된 반도체 칩의 금속 패드는 아래쪽에 실장된 반도체 칩의 금속 패드를 거쳐 리드 프레임의 내부 리드에 와이어 본딩된 반도체용 멀티 칩 패키지를 제공함으로써, 패키지의 경박단소화 및 공정의 단순화를 실현하며 종래 기술에 따른 반도체 패키지 제조시의 불량 요인을 제거하는 데 그 목적이 있다.The present invention has been proposed to solve such a conventional problem, and a plurality of semiconductor chips having different sizes are mounted in a chip-on-chip structure, and a metal pad of a semiconductor chip mounted on the upper side is a metal of the semiconductor chip mounted on the lower side. By providing a multi-chip package for semiconductors wire-bonded to the inner lead of the lead frame via pads, the package can be made thin and short, and the process can be simplified, and the defects in manufacturing a semiconductor package according to the prior art are eliminated. There is this.
이와 같은 목적을 실현하기 위한 본 발명에 따른 반도체용 멀티 칩 패키지는, 외부와의 전기적 연결을 위한 복수의 금속 패드가 가장자리에 배열된 복수의 반도체 칩을 리드 프레임과 기판을 포함하는 하나의 패들에 실장하는 멀티 칩 패키지에 있어서: 상기 패들의 상면에 제 1 반도체 칩이 접착제로 부착되고, 상기 제 1 반도체 칩 보다 작은 크기의 제 2 반도체 칩이 상기 제 1 반도체 칩의 상면에 접착제로 부착되며; 상기 제 2 반도체 칩의 금속 패드가 상기 제 1 반도체 칩의 금속 패드에 금속선으로 와이어 본딩되어 전기적 연결을 이루고, 상기 제 1 반도체 칩의 금속 패드가 상기 패들의 내부 리드에 와이어 본딩되어 외부와의 전기적 연결을 이룬다.In the multi-chip package for a semiconductor according to the present invention for realizing the above object, a plurality of semiconductor chips in which a plurality of metal pads for the electrical connection to the outside is arranged on the edge of a paddle including a lead frame and a substrate A multi-chip package, comprising: a first semiconductor chip attached to an upper surface of the paddle with an adhesive, and a second semiconductor chip having a smaller size than the first semiconductor chip attached to the upper surface of the first semiconductor chip; The metal pad of the second semiconductor chip is wire-bonded to the metal pad of the first semiconductor chip with a metal wire to make an electrical connection, and the metal pad of the first semiconductor chip is wire-bonded to the inner lead of the paddle to be electrically connected to the outside. Make a connection.
도 1은 종래 제 1 실시예에 따른 반도체용 멀티 칩 패키지의 종단면도 및 횡단면도,1 is a longitudinal cross-sectional view and a cross-sectional view of a multi-chip package for a semiconductor according to a first embodiment of the present invention;
도 2는 종래 제 2 실시예에 따른 반도체용 멀티 칩 패키지의 종단면도 및 횡단면도,2 is a longitudinal cross-sectional view and a cross-sectional view of a multi-chip package for a semiconductor according to a second embodiment of the present invention;
도 3은 본 발명의 제 1 실시예에 따른 반도체용 멀티 칩 패키지의 종단면도 및 횡단면도,3 is a longitudinal sectional view and a cross sectional view of a multi-chip package for a semiconductor according to a first embodiment of the present invention;
도 4는 본 발명의 제 2 실시에에 따른 반도체용 멀티 칩 패키지의 종단면도 및 횡단면도.4 is a longitudinal cross-sectional view and a cross-sectional view of a multi-chip package for a semiconductor according to a second embodiment of the present invention.
<도면의 주요 부분에 대한 부호의 설명><Explanation of symbols for the main parts of the drawings>
100, 200 : 멀티 칩 패키지 110 : 리드 프레임100, 200: multi-chip package 110: lead frame
111 : 내부 리드 112 : 외부 리드111: internal lead 112: external lead
120,130,201 : 반도체 칩 140 : 접착제120,130,201: semiconductor chip 140: adhesive
150,155 : 금속 패드 160 : 금속선150,155: metal pad 160: metal wire
161 : 볼 170 : EMC161: ball 170: EMC
180 : 패들180: paddle
본 발명의 실시예로는 다수개가 존재할 수 있으며, 이하에서는 첨부한 도면을 참조하여 바람직한 실시예에 대하여 상세히 설명하기로 한다. 이 실시예를 통해 본 발명의 목적, 특징 및 이점들을 보다 잘 이해할 수 있게 된다.There may be a plurality of embodiments of the present invention. Hereinafter, preferred embodiments will be described in detail with reference to the accompanying drawings. This embodiment allows for a better understanding of the objects, features and advantages of the present invention.
도 3a와 도 3b는 본 발명의 제 1 실시예에 따른 반도체용 멀티 칩 패키지의 종단면도 및 횡단면도이다.3A and 3B are longitudinal cross-sectional and cross-sectional views of a multi-chip package for a semiconductor according to a first embodiment of the present invention.
본 실시예에 따른 멀티 칩 패키지(100)는, 리드 프레임(110)과 기판을 포함하는 패들(180) 상면에 제 1 반도체 칩(120)이 접착제(140)로 부착되고, 제 1 반도체 칩(120) 보다 작은 크기의 제 2 반도체 칩(130)이 제 1 반도체 칩(120)의 상면에 접착제(140)로 부착되어 있다. 여기서, 제 2 반도체 칩(130)은 제 1 반도체 칩(120)의 금속 패드(150) 배열 위치로부터 적어도 50㎛ 이상 이격되어 부착되며, 제 1 및 제 2 반도체 칩(120,130)을 부착할 때에 사용하는 접착제(140)는 전기 및 열적으로 비전도성을 갖는 폴리머 계열이고, 특히 제 2 반도체 칩(130)을 부착하는 접착제(140)는 제 2 반도체 칩(130)의 외주에서 25㎛ 이내로 돌출된다.In the multi-chip package 100 according to the present exemplary embodiment, the first semiconductor chip 120 is attached to the upper surface of the paddle 180 including the lead frame 110 and the substrate by the adhesive 140, and the first semiconductor chip ( A second semiconductor chip 130 having a smaller size than 120 is attached to the top surface of the first semiconductor chip 120 with an adhesive 140. Here, the second semiconductor chip 130 is attached to be spaced apart by at least 50 μm or more from the arrangement position of the metal pad 150 of the first semiconductor chip 120, and used when attaching the first and second semiconductor chips 120 and 130. The adhesive 140 is a polymer series having electrical and thermal non-conductivity, and in particular, the adhesive 140 attaching the second semiconductor chip 130 protrudes within 25 μm from the outer circumference of the second semiconductor chip 130.
여기서, 접착제(140)는 웨이퍼 마운트에서 사용되는 박막을 그대로 이용할 수 있도록 경화시 본딩이 이루어지는 접착력이 있는 마운팅 박막이 이용된다.Here, the adhesive 140 is an adhesive mounting thin film that is bonded during curing so that the thin film used in the wafer mount can be used as it is.
이와 같이 복수의 반도체 칩(120,130)을 작은 크기의 패들에 적층하여 탑재함으로써 패키지 크기가 종래의 칩 투 칩 구조보다 감소되며, 표준의 기판을 제작할 수 있어서 코스트가 절감된다.Thus, by stacking and mounting a plurality of semiconductor chips (120, 130) in a paddle of a small size, the package size is reduced compared to the conventional chip-to-chip structure, it is possible to manufacture a standard substrate to reduce the cost.
외부와의 전기적 연결을 위한 복수의 금속 패드(150,155)는 제 1 및 제 2 반도체 칩(120,130)의 가장자리에 배열되며, 제 1 반도체 칩(120)의 금속 패드(150)는 평면 기준으로 직사각형 형태로서, 즉 단변의 길이가 50㎛ 이상이고, 장변의 길이가 150㎛ 이상인 형태로서, 와이어 본딩의 볼(155)이 나란히 배열된다.The plurality of metal pads 150 and 155 for electrical connection to the outside are arranged at edges of the first and second semiconductor chips 120 and 130, and the metal pads 150 of the first semiconductor chip 120 have a rectangular shape on a plane basis. In other words, the length of the short side is 50 μm or more, and the length of the long side is 150 μm or more, and the balls 155 of the wire bonding are arranged side by side.
또한, 제 1 반도체 칩(120)의 금속 패드(150)는 장변이 금속 패드 배치열과 수평 또는 수직을 이루도록 배열되는데, 바람직하기로는 제 1 또는 제 2 반도체 칩(120,130)의 핀 수에 따라 수평 또는 수직으로 배열된다.In addition, the metal pads 150 of the first semiconductor chip 120 are arranged such that the long sides thereof are horizontal or vertical to the metal pad arrangement rows. Preferably, the metal pads 150 of the first semiconductor chip 120 are horizontal or vertical depending on the number of pins of the first or second semiconductor chips 120 and 130. Arranged vertically.
상술하면, 적은 핀 수의 패키징 또는 제 2 반도체 칩(130)의 크기가 큰 경우는 제 1 반도체 칩(120)의 금속 패드(150)는 도 4b에 도시된 바와 같이 장변이 금속 패드 배치열과 수평을 이루도록 배열되며, 핀 수가 많은 패키징 또는 제 2 반도체 칩(130)의 크기가 작은 경우에는 제 1 반도체 칩(120)의 금속 패드(150)는 도 3b에 도시된 바와 같이 장변이 금속 패드 배치열과 수직을 이루도록 배열된다.In detail, when the packaging of the small number of pins or the size of the second semiconductor chip 130 is large, the metal pad 150 of the first semiconductor chip 120 is horizontally aligned with the long-sided metal pad arrangement sequence as shown in FIG. 4B. If the size of the packaging or the number of the second semiconductor chip 130 is small, the metal pad 150 of the first semiconductor chip 120 has a long side of the metal pad arrangement sequence as shown in FIG. It is arranged to be vertical.
아울러, 제 2 반도체 칩(130)의 금속 패드(155)는 평면 기준으로 정사각형 형태를 가지며, 크기를 "가로×세로"로 나타낼 때에, 50㎛×50㎛ 내지 100㎛×100㎛ 이며, 제 1 및 제 2 반도체 칩(120,130)의 두께는 5㎜ 내지 15㎜ 이다.In addition, the metal pad 155 of the second semiconductor chip 130 has a square shape on a planar basis and is 50 μm × 50 μm to 100 μm × 100 μm when the size is expressed as “horizontal × vertical”. And the thicknesses of the second semiconductor chips 120 and 130 are 5 mm to 15 mm.
또한, 제 1 및 제 2 반도체 칩(120,130)의 금속 패드(150,155)는 와이어 본딩의 볼(161) 직경이 40㎛ 내지 90㎛ 이며, 스티치 본딩의 볼(도시 생략됨) 직경이 40㎛ 내지 85㎛ 이다. 그리고, 제 2 반도체 칩(130)의 금속 패드(155)들은 제 1 반도체 칩(120)의 금속 패드(150)에 금속선(160)으로 와이어 본딩되어 전기적 연결을 이루고, 제 1 반도체 칩(120)의 금속 패드(150)는 리드 프레임(110)의 내부리드(111)에 와이어 본딩되어 내부 리드(111)와 일체로 된 외부 리드(112)를 통하여 외부와의 전기적 연결을 한다.In addition, the metal pads 150 and 155 of the first and second semiconductor chips 120 and 130 may have a diameter of the ball 161 of the wire bonding of 40 μm to 90 μm, and a diameter of the ball of the stitch bonding (not shown) of 40 μm to 85 μm. Μm. In addition, the metal pads 155 of the second semiconductor chip 130 are wire-bonded to the metal pad 150 of the first semiconductor chip 120 by a metal wire 160 to make an electrical connection, and the first semiconductor chip 120 The metal pad 150 is wire-bonded to the inner lead 111 of the lead frame 110 to be electrically connected to the outside through an external lead 112 integrated with the inner lead 111.
여기서, 바람직하기로 제 1 반도체 칩(120)의 금속 패드(150)에 본딩된 와이어 루프 높이는 6mil 이상이며, 제 2 반도체 칩(130)의 금속 패드(155)에 본딩된 와이어 루프 높이는 4mil 이상이다.Here, preferably, the wire loop height bonded to the metal pad 150 of the first semiconductor chip 120 is 6 mil or more, and the wire loop height bonded to the metal pad 155 of the second semiconductor chip 130 is 4 mil or more. .
이와 같이 본 발명은 칩간 와이어 본딩으로 EMC 몰딩시 와이어 새깅 현상 및 스위핑 현상을 방지하며, 기판 디자인의 신뢰성이 확보된다. 또한 제 2 반도체 칩(130)은 내부 리드(111)와의 직접적인 연결을 회피하여 공정의 단순화 및 불량 요인이 제거되며, 제 2 반도체 칩(130)의 전기적 연결을 짧은 와이어로 연결할 수 있으므로 디바이스의 높은 신호 특성이 확보된다.As such, the present invention prevents wire sagging and sweeping during EMC molding by inter-chip wire bonding, and ensures reliability of substrate design. In addition, since the second semiconductor chip 130 avoids direct connection with the internal lead 111, the process simplification and defects are eliminated, and the electrical connection of the second semiconductor chip 130 can be connected with a short wire so that the high Signal characteristics are secured.
그리고, 상기 각각의 소자들은 EMC(170)에 의해 봉지되어 보호된다.Each of the devices is sealed and protected by the EMC 170.
도 4a와 도 4b는 본 발명의 제 2 실시예에 따른 반도체용 멀티 칩 패키지의 종단면도 및 횡단면도로서, 설명의 이해를 돕기 위하여 도 3a 및 도 3b의 멀티 칩 패키지와 동일한 구성 요소에 대하여 동일한 참조 부호를 명기하였다.4A and 4B are longitudinal cross-sectional views and cross-sectional views of a multi-chip package for a semiconductor according to a second embodiment of the present invention. For the sake of understanding, the same components as those of the multi-chip package of FIGS. 3A and 3B are referred to. The sign is specified.
본 실시예에 따른 멀티 칩 패키지(200)는, 도 3a 및 도 3b와의 비교를 통하여 쉽게 알 수 있는 바와 같이 제 1 내지 제 3 반도체 칩(120,130,201)이 도 3a 및 도 3b를 통하여 상술한 적층 구조로 패들(180)에 부착되며, 금속 패드(150,155) 역시 도 3a 및 도 3b를 통하여 상술한 연결 구조로 내부 리드(111)에 와이어 본딩되어져 있다. 이와 같이 본 발명의 멀티 칩 패키지는 도 3a, 도 3b 및 도 4a, 도 4b를 통하여 설명한 2개 또는 3개의 반도체 칩뿐만 아니라 보다 많은 수의 반도체 칩을 적층할 수 있는 것이다.In the multi-chip package 200 according to the present exemplary embodiment, the first to third semiconductor chips 120, 130, and 201 may be stacked as described above with reference to FIGS. 3A and 3B, as can be easily understood through comparison with FIGS. 3A and 3B. The pads 180 are attached to the furnace paddle 180, and the metal pads 150 and 155 are also wire bonded to the inner lead 111 by the connection structure described above with reference to FIGS. 3A and 3B. As described above, the multi-chip package of the present invention can stack not only two or three semiconductor chips described with reference to FIGS. 3A, 3B, 4A, and 4B but also a larger number of semiconductor chips.
전술한 바와 같은 본 발명은 패키지 크기가 종래의 칩 투 칩 구조보다 감소되며, 표준의 기판을 제작할 수 있어서 코스트가 절감된다.As described above, the present invention reduces the package size compared to the conventional chip-to-chip structure, and can reduce the cost by manufacturing a standard substrate.
또한, EMC 몰딩시 와이어 새깅 현상 및 스위핑 현상을 방지하며, 기판 디자인의 신뢰성이 확보되고, 공정의 단순화 및 불량 요인이 제거되며, 디바이스의 높은 신호 특성이 확보되는 효과가 있다.In addition, it prevents wire sagging and sweeping during EMC molding, ensures reliability of substrate design, eliminates process simplification and defects, and secures high signal characteristics of the device.
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KR19990085110A (en) * | 1998-05-13 | 1999-12-06 | 윤종용 | Bonding pad interconnect multi-chip package |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100603932B1 (en) * | 2005-01-31 | 2006-07-24 | 삼성전자주식회사 | Semiconductor device with chip-on-board structure |
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