KR20020050768A - Fixed Part Controlling Gig of Mechanical Chuck using Cleaning Device - Google Patents

Abstract

PURPOSE: A jig for adjusting a fixing part of a cleaning chuck is provided to stably easily control the gap between a guide pin of the cleaning chuck and a substrate to improve operation efficiency and prevent the substrate from being damaged. CONSTITUTION: A cleaning chuck(100) includes a plurality of lift pins(104) for moving a substrate to be cleaned up and down, and a fixing part(F) at each corner of the chuck. A jig fixes the position of the fixing part of the cleaning chuck in order to fix the substrate. The jig is composed of a plate(110), a combination part, and a ruler(112). The are of the plate corresponds to the cleaning chuck. Lines connecting the center points of opposite sides are indicated on the plate. The combination part is placed on the plate and has holes(106) combined with the lift pins. The ruler is located at the center of each edge and vertically extended downward. The ruler corresponds to the center of the cleaning chuck.

Description

Fixed Part Controlling Gig of Mechanical Chuck using Cleaning Device}

The present invention relates to a method for adjusting a fixing part of a cleaning chuck, and more particularly, to a fixing part adjusting jig of a cleaning chuck and a method thereof.

The cleaning device is widely used in the manufacturing process of a liquid crystal display device which is one of flat display devices.

The liquid crystal display device is a technology-intensive product with low power consumption and good portability, and has been spotlighted as a next-generation advanced display device having high added value.

In general, the liquid crystal display device injects a liquid crystal between an array substrate including a thin film transistor (TFT) and a color filter substrate, and thus emits non-luminescence using the characteristics to obtain an image effect. The device refers to a thin film transistor liquid crystal display device (hereinafter, referred to as a liquid crystal display device).

Such a liquid crystal display device is largely manufactured through a two-step manufacturing process.

The first step is through the array process and the color filter process.

The array process is a process of manufacturing an array substrate through a deposition process, a photolithography process, an etching process, a cleaning process, a thin film transistor array process, and the like.

The color filter process is a process of manufacturing a color filter substrate including a color filter and a black matrix through a photolithography process, an etching process, a cleaning process, and the like.

The second step is a liquid crystal cell manufacturing process using the array substrate and the color filter substrate. The liquid crystal display device is manufactured through a cleaning process, a cell gap forming process, a cell cutting process, a liquid crystal injection process, and the like. .

That is, during the process of the liquid crystal display device, a cleaning process is necessarily included for the purpose of preventing product defects and improving yield.

In other words, this cleaning process removes foreign substances on the surface of the transparent substrate including glass, and minimizes defects and cleans the substrate before applying a thin film to play an important role in increasing the adhesion of the film.

For example, the photolithography process of the liquid crystal display will be described in more detail. The photolithography process may include cleaning, heat drying, cooling, hydrophilizing a substrate surface, cooling, and photo resist coating. The photoresist pattern is formed on the substrate through coating, edge treatment, prebake, cooling, exposure, and development processes.

The cleaning process in the photolithography process includes pure brush cleaning using a brush roller and D.I water, cleaning using hydraulic pressure and ultrasonic waves, spin drying, and the like.

Such cleaning may vary in order or steps depending on the nature of each process.

The present specification relates to a method of adjusting a fixing part of a cleaning chuck for fixing a substrate to be cleaned in such a cleaning device.

1 is a schematic perspective view of a cleaning chuck with a conventional reference substrate mounted thereon.

As shown, on the cleaning chuck 10, a reference substrate 12, which is a bare glass for setting a substrate to be cleaned, is disposed to face each other at a predetermined interval, and on the cleaning chuck 10. A plurality of lift pins 16 for moving the substrate up and down are formed to support the reference substrate 12, and the edge of the reference substrate 12 is fixed to the fixing portion of the cleaning chuck 10. Guide pins 14 to be formed are formed to correspond to both sides of each corner portion.

In the enlarged view of the original view, the fixing part of the cleaning chuck 10 is enlarged, and the guide pin 14 and the reference substrate 12 are arranged at a predetermined interval g.

At this time, if the interval g is 0.5 ± 0.2mm and it is out of this value, there is a risk that the substrate to be cleaned may be damaged due to the position of the substrate in the process of rotating the substrate to be cleaned at high speed such as spin drying during the cleaning process. It is very important to adjust the distance between the guide pin 14 and the reference substrate 12 as described above.

Conventionally, in order to adjust the gap between the guide pin of the cleaning chuck and the substrate, the reference substrate is placed on the cleaning chuck without the guide pin, and then the centerline and center of the lower cleaning chuck shown on the reference substrate are placed. After setting the guide pins, guide pins were mounted at regular intervals for each corner portion of the reference substrate.

However, the following problems arise with this method.

First, when the reference substrate is shaken during setting, there is a hassle to center again.

Second, since the method of centering the reference substrate and the cleaning chuck depends on the naked eye, it may be different for each worker, so that exact centering is difficult.

Third, in the process of mounting the guide pin while turning, it is easy to touch the reference substrate in the centered state, and the fixing part adjustment operation is repeated again.

In order to solve the above problems, in the present invention, the gap between the guide pin of the cleaning chuck and the substrate can be adjusted, and provided with a separate centering device to align the center line on the same line as the cleaning chuck, By providing a jig that includes a device for fixing the cleaning chuck, it is much more stable and easier to adjust the gap between the guide pin and the substrate, thereby improving work efficiency. The purpose is to prevent damage caused by misalignment.

1 is a schematic perspective view of a cleaning chuck with a conventional reference substrate mounted thereon.

Figure 2 is a schematic perspective view of the cleaning chuck in a raised state jig for substrate setting according to the present invention.

3 is a cross-sectional view schematically showing a cross section of one side of FIG.

4 is an enlarged view of region I of FIG. 3;

FIG. 5 is an enlarged view of region II of FIG. 3. FIG.

Figure 6 is a flow chart illustrating a step-by-step method of adjusting the fixing part of the cleaning chuck using a substrate setting jig according to the present invention.

<Explanation of symbols for the main parts of the drawings>

100: cleaning chuck 102: guide pin

104: lift pin 106: corresponding hole

110 jig plate 112 ruler

150: Jig for setting board

In order to achieve the above object, in the present invention for fixing the substrate to be cleaned, a plurality of lift pins for moving the substrate up and down, and the fixing portion of the cleaning chuck having a fixing portion at each corner A jig for holding a position of the jig, the jig plate having an area corresponding to the cleaning chuck and having a center line connecting the centers of opposite sides thereof; A coupling part located in the jig plate and having a corresponding hole for bolting the lift pin together; Located at the center of each outer portion of the jig plate, and vertically extended in the downward direction, and provides a jig for adjusting the fixing portion of the cleaning chuck including a ruler corresponding to the center of the cleaning chuck.

The jig plate is characterized in that the length of the horizontal and vertical sides of the substrate to be cleaned are 1.4 ~ 0.6mm longer, respectively.

The jig panel is made of steel (SUS), and the coupling part is formed to be coupled to a lift pin positioned at the center of the lift pins. The ruler is made of a transparent acrylic material, and the fixing part of the cleaning chuck further includes a guide pin, wherein the guide pin is triangular with respect to the end of the edge of the jig plate. Located at two points, it is characterized in that the side contact with the jig plate.

The coupling portion is formed of a cylindrical corresponding hole vertically extended in the direction of the cleaning chuck, the inner circumference of the corresponding hole is characterized in that 10.0 ~ 15.0mm wider than the circumference of the lift pin.

In still another aspect of the present invention, there is provided a fixing pin for fixing a substrate to be cleaned, comprising: a lift pin for moving the substrate up and down, and a cleaning chuck having fixing portions at each corner; A jig plate having an area corresponding to the cleaning chuck and having a center line connecting the centers of opposite sides thereof, and a corresponding hole formed in the jig plate and corresponding to the lift pin; Comprising a jig for holding the position of the fixing portion of the cleaning chuck including a coupling portion, the center of the outer portion of the jig plate, the vertical extension in the downward direction, the ruler corresponding to the center of the cleaning chuck Wow; Inserting the corresponding hole into a lift pin of the cleaning chuck; Matching the center of the jig and the cleaning chuck through the ruler; Fixing the jig to the chuck by aligning the center of the jig and the cleaning chuck and bolting the lift pin inserted into the corresponding hole; Fixing part of the cleaning chuck comprising the step of mounting the guide pin to the side contact with the jig plate on the two points of the triangular triangle with respect to the end of the edge portion of the jig plate of the cleaning chuck fixing portion Provides a way to adjust.

The jig plate is characterized in that the length of the horizontal and vertical sides of the substrate to be cleaned is 1.4 ~ 0.6mm longer, respectively, the coupling portion is made of a cylindrical corresponding hole vertically extended in the direction of the cleaning chuck, the inside of the corresponding hole Perimeter is characterized in that 10.0 ~ 15.0mm wider than the perimeter of the lift pin.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.

Figure 2 is a schematic perspective view of the cleaning chuck in a state where the jig for substrate setting according to the present invention is raised.

As shown in the drawings, the substrate includes a plurality of lift pins 104 formed at regular intervals, and has a fixing portion F mounted with guide pins 102 at each corner. It is formed on the jig plate 110 and the jig plate 110 having a chuck 100, an area corresponding to the cleaning chuck 100, and a center line connecting the centers of the sides thereof. And a plurality of corresponding holes 106 that can be bolted by inserting the lift pins 104 and located on a center line of each outer portion of the jig plate 110, and vertically extended in the downward direction. A ruler 112 corresponding to the center of the chuck 100 is shown.

At this time, the guide pin 102 is located at each of the two corners of the jig plate 110 in a triangular shape with respect to the end of the edge of the jig plate 110, and is in side contact with the jig plate 110. Is mounted.

At this time, the jig plate 110 including the jig plate 110, the corresponding hole 106 and the ruler 112 is called.

The jig plate 110 is preferably made of steel (SUS) having a thickness of 0.7-10.0 mm excellent in precision workability.

In addition, the corresponding holes 106 are fitted with four lift pins 104 respectively positioned at the center of the cleaning chuck 100 in order to effectively fit the central portion of the cleaning chuck 100.

In the enlarged view of the fixing part F, the state where the guide pin 102 is in direct contact with and fixed to the jig plate 110 without being separated from each other is shown as a G area.

At this time, in order to maintain a distance between the substrate to be cleaned and the guide pin 102 at 0.5 ± 0.2 mm, the jig plate 110 is 1.4 to 0.6 mm longer than the substrate to be cleaned. It is characterized by.

For example, if the size of the substrate to be cleaned is 590 x 670 mm, the setting jig for the substrate to be cleaned is 591 x 671 mm, so that each corner has a margin of 0.5 mm for each of the substrates. The pin 102 is mounted to be in contact with the jig plate 110, so as to eliminate the hassle of adjusting a predetermined distance between the four corner portions between the guide pin and the substrate as in the prior art.

3 is a cross-sectional view schematically illustrating a cross section of one side of FIG. 2.

In FIG. 2, the substrate setting jig 150 of FIG. 2 is fixed to the cleaning chuck 100. As illustrated, the substrate setting jig 150 includes the cleaning chuck 100. A counter hole 106 extending downward to sandwich the upper lift pin 104 and a ruler 112 vertically extended downward from the jig plate 110 at a position coinciding with the center of the cleaning chuck 100. ) And guide pins 102 are mounted to both ends of the jig plate 110 in a lateral contact manner.

FIG. 4 is an enlarged view of region I of FIG. 3.

In this figure, as shown in the coupling relationship between the substrate setting jig and the cleaning chuck, the inner circumference of the corresponding hole 106 of the jig plate 110 is a lift pin ( It is made of a cylindrical shape having a circumference which can be spaced about 10 mm from the circumference of 104, and when centering, the first pinning is performed by inserting the lift pin 104 into the corresponding hole 106 first.

In this case, the reason why the corresponding hole 106 is spaced apart from the lift pins 104 by a certain distance is to maintain a certain margin because a later work is performed to accurately center the ruler.

That is, after centering through the ruler later, it is fixed to the cleaning chuck 100 through the lift pin 104 in a bolted manner.

At this time, the portion in which the lift pin 106 of the corresponding hole 106 is inserted has a length that does not reach the upper surface of the cleaning chuck 100.

When the substrate setting jig and the cleaning chuck are first fixed through the corresponding holes, the following effects can be obtained.

First, in the process of centering through the ruler later, it is possible to prevent the movement of the jig plate.

Second, this primary fixing can also prevent the shaking of the substrate that may occur in the process of mounting the guide pin later.

FIG. 5 is an enlarged view of region II of FIG. 3.

In the drawing, the ruler of the jig for substrate setting is enlarged, and the ruler 112 is mounted in a bolted manner with the center line of the jig plate (110 in FIG. 3) indicated by III as a symmetry axis. The center of the ruler 112 is characterized in that it coincides with the center of the cleaning chuck (100 in Figure 3) shown by IV.

At this time, it is preferable that the ruler 112 is made of a transparent material so that the operator can adjust the ruler 112 to coincide with the reference point and the central portion IV of the chuck 100 for cleaning.

That is, the center of the board | substrate setting jig (150 of FIG. 3) and the cleaning chuck (100 of FIG. 3) finally matches through this ruler 112. FIG.

Thus, when centering through a ruler extending in the direction of the cleaning chuck has an advantage that can eliminate the error caused by the height difference between the substrate setting jig and the cleaning chuck.

6 is a flowchart illustrating a step-by-step method of adjusting the fixing part of the cleaning chuck using a substrate setting jig according to the present invention.

ST1 includes a cleaning chuck for fixing a substrate to be cleaned, the cleaning chuck including lift pins arranged at regular intervals and fixing parts formed at each corner portion.

ST2 is provided with a substrate setting jig, which has a width of 1.4 to 0.6 mm wider and longer than the size of the substrate to be cleaned, and is for a jig marked with a center line connecting the centers of the sides. A plate, a corresponding hole for fitting the lift pin of the cleaning chuck, positioned on the jig plate, on a center line of the outer portion of the jig plate, vertically extended downward, and a lower portion of the cleaning chuck Include rulers to center on the same line as the face.

ST3 is a step of fitting to the lift pin of the setting jig through the corresponding hole.

At this time, the inner circumference to which the lift pin of the corresponding hole is fitted is formed to be about 10 mm wider than the circumference of the lift pin, so that the substrate setting jig is fixed on the cleaning chuck and has a certain margin before aligning the center accurately.

ST4 coincides with the center of the substrate setting jig and the cleaning chuck through the ruler.

In this step, the center of the substrate setting jig and the cleaning chuck are coincident with each other. After aligning the center with the ruler, bolts are fixed through the corresponding holes to fix the cleaning chuck and the substrate setting jig.

ST5 is a step of fixing the edge of the jig plate with a guide pin.

In this step, a guide pin is attached to each jig plate of the jig plate to fix the jig plate at two opposing points at the end points of the corners and the triangles.

In this case, the guide pin is mounted in a side contact manner without being spaced apart from the jig plate.

When the guide pins are mounted in this way, the size of the jig plate is 1.4 to 0.6 mm larger than the substrate to be cleaned, which is 1.4 to 0.6 mm, respectively, so that the distance between the substrate to be cleaned and the guide pins is 0.5 ± 0.2 mm, respectively. It can be maintained.

Such a chuck fixing part adjusting jig for cleaning according to the present invention can be widely applied to a cleaning device such as a liquid crystal display device and a semiconductor device, but in particular, the cleaning device included in the photolithography process equipment during the manufacturing process of the liquid crystal display device. -SCR (Advanced SCRubber)

Incidentally, the cleaning chuck fixing part adjusting jig and the method thereof according to the present invention may be variously changed and implemented without departing from the spirit of the present invention.

As described above, according to the substrate setting jig according to the present invention, it is possible to precisely and easily adjust the constant interval between the guide pin of the cleaning chuck and the substrate to be cleaned, and improve the work efficiency by shortening the time for adjusting the constant interval. It is possible to prevent the breakage of the substrate to be cleaned, which may occur when the spacing is non-uniform, has the advantage of improving the production yield.

Claims (13)

In order to fix the substrate to be cleaned, a plurality of lift pins for moving the substrate up and down, and a jig for positioning the fixing portion of the cleaning chuck having fixing portions at each corner. In A jig plate having an area corresponding to the cleaning chuck and having a center line connecting the centers of opposite sides thereof; A coupling part located in the jig plate and having a corresponding hole for bolting the lift pin together; Located at the center of each outer portion of the jig plate, vertically extended in the downward direction, the ruler corresponding to the center of the cleaning chuck Fixing part adjustment jig of the cleaning chuck comprising a. The method of claim 1, The jig plate is a jig for fixing the fixing part of the cleaning chuck each longer than the substrate to be cleaned, the length of the horizontal side and the vertical side is 1.4 ~ 0.6mm. The method according to any one of claims 1 to 2, The jig panel is a jig for fixing the fixing part of the cleaning chuck made of steel (SUS). The method of claim 1, The coupling part fixing jig for fixing the cleaning chuck formed to be coupled to the lift pin located in the center of the lift pin. The method of claim 1, The ruler is a jig for adjusting the fixing portion of the cleaning chuck that is a transparent acrylic (acryl) material. The method of claim 1, Fixing part adjustment jig of the cleaning chuck includes a guide pin (fixed pin) in the fixing part of the cleaning chuck. The method of claim 6, The guide pins are located at two points that form a triangle with respect to the end of the edge of the jig plate, jig for fixing the fixing part of the cleaning chuck in side contact with the jig plate. The method of claim 1, The coupling part jig for fixing the fixing part of the cleaning chuck made of a cylindrical corresponding hole vertically extended in the cleaning chuck direction. The method according to any one of claims 1 to 8, The inner circumference of the corresponding hole is 10.0 ~ 15.0mm wider than the circumference of the lift pin fixing jig for adjusting the chuck. A method of fixing a substrate to be cleaned, comprising: a lift pin for moving the substrate up and down, and a cleaning chuck having fixing portions at each corner; A jig plate having an area corresponding to the cleaning chuck and having a center line connecting the centers of opposite sides thereof, and a corresponding hole formed in the jig plate and corresponding to the lift pin; Comprising a jig for holding the position of the fixing portion of the cleaning chuck including a coupling portion, the center of the outer portion of the jig plate, the vertical extension in the downward direction, the ruler corresponding to the center of the cleaning chuck Wow; Inserting the corresponding hole into a lift pin of the cleaning chuck; Matching the center of the jig and the cleaning chuck through the ruler; Fixing the jig to the chuck by aligning the center of the jig and the cleaning chuck and bolting the lift pin inserted into the corresponding hole; Mounting guide pins in side contact with the jig plate on two points that are triangular with respect to the end point of the edge of the jig plate among the fixing part regions of the cleaning chuck; Method of adjusting the fixing portion of the cleaning chuck comprising a. The method of claim 10, The jig plate is a method for adjusting the fixing portion of the cleaning chuck, characterized in that the length of the horizontal and vertical sides of the substrate to be cleaned are 1.4 ~ 0.6mm longer respectively. The method of claim 10, And the coupling portion adjusts the fixing portion of the cleaning chuck made of a corresponding cylindrical hole vertically extended in the cleaning chuck direction. The method according to any one of claims 10 to 12, The inner circumference of the corresponding hole is a method for adjusting the fixing portion of the cleaning chuck to be 10.0 ~ 15.0mm wider than the circumference of the lift pin.