KR20020050683A - A process of a vacuum chamber in a vacuum evaporator - Google Patents

Abstract

PURPOSE: A fabrication method of a quartz vacuum chamber is provided to reduce stability problems due to a non-uniform thickness of a quartz vacuum chamber and to improve an efficiency by removing a connecting portion of a center region of the quartz vacuum chamber. CONSTITUTION: After cutting a quartz pipe(10) having a defined diameter by a defined length, a chamber mold(20) fixed on the quartz pipe(10) for supporting so as to form a semisphere. A number of quartz parts(30,31) are respectively connected by a melted quartz using a burner flame. Then, a sub-mold is formed on the chamber mold(20). A semisphere is formed by connecting collections of the quartz parts(30,31) with the quartz pipe(10) using a melted quartz. At this time, the center region of the quartz vacuum chamber is seamlessly formed, thereby solving many stability problems.

Description

A vacuum process chamber manufacturing method {A PROCESS OF A VACUUM CHAMBER IN A VACUUM EVAPORATOR}

The present invention relates to a method of manufacturing a quartz vacuum chamber, and more particularly, to a method of manufacturing a quartz vacuum chamber such as a vacuum evaporator used in a semiconductor manufacturing process.

In general, a so-called vacuum chamber applied to a semiconductor manufacturing process mainly uses quartz (Quartz, SiO 2), which is a material capable of withstanding high temperature and high pressure, and is an equipment component such as a vacuum evaporator.

Therefore, it is most ideal that the vacuum chamber is manufactured so that the state of the high temperature and high pressure is evenly distributed in the chamber as the thickness thereof is constant. However, although the quartz chambers manufactured by the conventional method are expensive, their thickness is not constant (FIG. 4, the conventional manufacturing method) or the specific parts are relatively weak due to melt bonding (FIG. 5, Korean Patent No. 0263038). ) When high temperature and high pressure are applied, it may be broken, resulting in a decrease in productivity.

In order to remedy this irrationality, the present invention can make the thickness of the quartz vacuum chamber as constant as possible and does not form a melt bond at a specific part (center of the hemisphere), so that the high temperature and high pressure applied to the chamber can be dispersed. To reduce the inconvenience of designing the size of the hemisphere and to adjust the size precisely, and to provide flexibility to the size that was limited in the manufacture of the quartz vacuum chamber so that it can be solved by modifying the chamber mold only if necessary. It is an object of the present invention.

[Problems of Conventional Vacuum Chamber Manufacturing Method]

[Original method]

Both ends or one end of the quartz tube 10 of the required size is fixed to the fixed chuck 50, and while rotating the quartz tube in a constant direction and speed, a burner flame 60 is sprayed in the center to form a hemispherical shape. .

The problem with this method is that the diameter of the quartz tube that can be actually manufactured is limited to a maximum of 350 mm, and the thickness of the hemispheres to be formed varies depending on the rotational speed during melting and the temperature and distance of the burner flame. There is a problem that the high temperature and high pressure applied to the chamber is not formed evenly because hemispheres are not formed, and economic losses occur due to the loss of the quartz tube.

[Korean Patent No. 0263038 Method]

After precisely designing the quartz tube of the required size into a crown type (Fig. 5), cutting it with a laser, positioning the chamber mold and spraying a burner flame to superimpose the crown shape on the chamber mold, and melting and joining the same to manufacture a hemispherical chamber. Way.

The problem with this method is that the crown must be formed exactly according to the diameter of the chamber to form the hemisphere correctly, and if any part of the crown is accidentally broken, the laser must be cut into another shape to form the shape. When the crown is manufactured by precisely forming the molten junction part in the center of the hemisphere, the part is particularly weak.

The present invention is to solve the problems of the conventional methods described above, and an object of the present invention is to improve the manufacturing method of the quartz vacuum chamber to provide an economical and productivity improved manufacturing method.

In the present invention, in manufacturing a quartz vacuum chamber to achieve the above object, the quartz tube 10 of the so-called required diameter is cut, placed in the chamber mold, and the quartz tube 10 previously cut according to the size of the hemisphere. Melting and joining quartz plate pieces (polygons) having the same thickness as the auxiliary mold 40 and the burner flame 60 to form a hemispherical shape; It consists of a manufacturing method comprising the step of smoothing the melt bonding site.

1 is a front view of a model of a vacuum chamber

2 and 3 are a front view and a plan view of a quartz vacuum chamber made in accordance with the present invention.

Figure 4 is a diagram illustrating a conventional vacuum chamber manufacturing method

5 is an explanatory view of a vacuum chamber manufacturing method according to Korean Patent No. 0263038

6 is an explanatory view of a plan view and a chamber mold of Example 2 and Example 3;

Explanation of symbols for the main parts of the drawings

10: quartz tube 20: chamber mold

30: top view made of a polygonal quartz plate piece of Example 2

31: top view made of a polygonal quartz plate piece of Example 3

40: auxiliary mold for hemisphere molding 50: quartz tube fixing chuck

60: burner flame

The method of manufacturing a quartz vacuum chamber according to the present invention will be described in detail through each embodiment.

Example 1

2 and 3 are a front view and a plan view of a first embodiment of the present invention, one piece of rectangular quartz plate having a length corresponding to the hemispherical circumference of the quartz tube 10 and the quartz tube, and the rectangular quartz to be joined to the left and right sides thereof; Two flat plates and eight triangular quartz flat plates to be joined in four directions are melt-bonded to the quartz tube 10.

Example 2

FIG. 6 is a plan view of Embodiment 2 of the present invention, in which a single rectangular quartz plate piece having a length corresponding to the hemispherical circumference of the quartz tube 10 and the quartz tube and a rectangle to be joined to the left and right sides thereof The quartz plate pieces composed of two quartz plates, four pentagonal quartz plates to be joined in four directions, and eight small triangular quartz plates are melt-bonded to the quartz tube 10.

Example 3

Fig. 6 (31) is a plan view of Embodiment 3 of the present invention, in which the quartz tube 10 and 16 isosceles triangle quartz plates are melt-bonded to the quartz tube I0.

Manufacturing the quartz vacuum chamber by the method of the present invention can be economically manufactured by standardizing the polygonal quartz plate, and can solve the problem caused by breakage when forming the crown of the Republic of Korea Patent No. 0263038, the same as the quartz tube It is easy to form a hemisphere with a thickness, dispersing the problems caused by the high temperature and high pressure generated when the melt junction site is concentrated in the center of the hemisphere by dispersion of the melt joint site (except Example 3), and vacuum quartz of the same quality It provides the effect of manufacturing the chamber.

Claims (1)

In the method of manufacturing the quartz vacuum chamber (FIG. 1), the required quartz tube 10 is cut and the same thickness as the quartz tube 10 cut into a standardizable size of polygons such as triangles, squares, pentagons, and the like. Quartz vacuum chamber manufacturing method comprising the step of forming a hemisphere of the quartz vacuum chamber by a melt bonding method using a quartz plate and an auxiliary mold of