KR100263038B1 - Manufacturing method of vacuum chamber - Google Patents

Manufacturing method of vacuum chamber Download PDF

Info

Publication number
KR100263038B1
KR100263038B1 KR1019980013633A KR19980013633A KR100263038B1 KR 100263038 B1 KR100263038 B1 KR 100263038B1 KR 1019980013633 A KR1019980013633 A KR 1019980013633A KR 19980013633 A KR19980013633 A KR 19980013633A KR 100263038 B1 KR100263038 B1 KR 100263038B1
Authority
KR
South Korea
Prior art keywords
vacuum chamber
manufacturing
quartz tube
quartz
shape
Prior art date
Application number
KR1019980013633A
Other languages
Korean (ko)
Other versions
KR19990080393A (en
Inventor
김현우
Original Assignee
김현우
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김현우 filed Critical 김현우
Priority to KR1019980013633A priority Critical patent/KR100263038B1/en
Publication of KR19990080393A publication Critical patent/KR19990080393A/en
Application granted granted Critical
Publication of KR100263038B1 publication Critical patent/KR100263038B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Abstract

PURPOSE: A method for manufacturing vacuum chamber is provided to have a great diameter and improve the productivity by using an improved method for manufacturing vacuum chamber. CONSTITUTION: A method for manufacturing vacuum chamber cuts a quartz tube(20) having a given diameter by an adequate length. One end of the quartz tube(20) is cur to be a crown shape. A chamber mold(30) having the shape of the vacuum chamber is prepared. The quartz tube(20) is inserted into the chamber mold(30). Heat is applied to the crown portion of the quartz tube(20) using a burner(40) so that it can be curved to be a shape such as the shape of the chamber mold(30). A coupling unit of the quartz tube(20) curved in a semispherical shape is adhered using melting quartz. The coupling unit is welded using melting quartz.

Description

진공 챔버 제조 방법Vacuum chamber manufacturing method

본 발명은 진공 챔버 제조 방법에 관한 것으로, 보다 상세하게는 반도체 관련 산업에 이용되는 진공 증착기 등의 진공 챔버를 제조하는 방법에 관한 것이다.The present invention relates to a vacuum chamber manufacturing method, and more particularly, to a method for manufacturing a vacuum chamber, such as a vacuum evaporator used in the semiconductor related industry.

일반적으로, 반도체 제조 산업에서 이용되는 진공 챔버는 고온, 고압에 견딜 수 있는 소재인 석영(quartz, SiO2)을 많이 이용하여, 진공 증착기 등의 장비를 구성한다.In general, the vacuum chamber used in the semiconductor manufacturing industry uses a lot of quartz (SiO 2 , SiO 2 ), a material capable of withstanding high temperature and high pressure, to configure equipment such as a vacuum evaporator.

그런데, 진공 챔버는 그 이용 회수가 많아지면 그 내벽에 증착 소재가 증착되어, 내부를 확인할 수 없을 뿐만 아니라, 다른 금속을 증착할 때에는 불순물로 작용하기 때문에 자주 새로운 것으로 교환해 주어야 하고, 또한 그 소재가 석영이기 때문에 취급 부주의로 인하여 쉽게 파손되는 문제점이 있었다.However, when the number of times of use of the vacuum chamber increases, the deposition material is deposited on the inner wall of the vacuum chamber, and the inside of the vacuum chamber is not able to be confirmed. Since quartz is a problem that is easily broken due to careless handling.

따라서, 가격인 고가인 진공 챔버를 자주 교환해야 하는 상황은 생산성을 저하시키는 요인으로 작용하였다.Therefore, the situation in which the expensive vacuum chamber, which is expensive, needs to be frequently exchanged, acted as a factor to lower productivity.

한편, 이러한 진공 챔버를 제조하는 종래의 제조 방법은 도 1에 나타낸 바와 같이, 석영관(2)의 일단 또는 양단을 고정척(1)에 고정시켜 회전시키면서 어느 한 부분에 버너(30)의 화염을 분사하여, 용융시키면서 반구 형태로 모양을 성형하였다.On the other hand, in the conventional manufacturing method for manufacturing such a vacuum chamber, as shown in Figure 1, the flame of the burner 30 in any one portion while rotating one end or both ends of the quartz tube 2 to the fixed chuck (1) Was sprayed to form a shape in a hemispherical shape while melting.

따라서, 종래의 방법으로 진공 챔버를 제조하면 진공 챔버의 직경 크기를 현실적으로 350mm 정도의 크기까지밖에 제조할 수 없는 문제점이 있었다.Therefore, when the vacuum chamber is manufactured by the conventional method, there is a problem that only a diameter of the vacuum chamber can be manufactured to a size of about 350 mm.

그리고, 석영관(2)의 일단 또는 양단을 고정척(1)에 고정시키고, 제조해야 하기 때문에 석영관이 일부 손실되어 경제적인 낭비가 따르는 문제점이 있었다.Since one or both ends of the quartz tube 2 are fixed to the fixed chuck 1 and manufactured, there is a problem that some of the quartz tube is lost, resulting in economical waste.

본 발명은 상기한 종래의 문제점을 해결하기 위한 것으로, 진공 챔버의 제조 방법을 개선하여, 보다 큰 직경이면서 생산성이 뛰어난 진공 챔버 제조 방법을 제공하는데 그 목적이 있다.SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems, and an object thereof is to improve a manufacturing method of a vacuum chamber, and to provide a vacuum chamber manufacturing method having a larger diameter and excellent productivity.

본 발명은 상기한 목적을 달성하기 위하여, 진공 챔버를 제조하는 방법에 있어서, 소정의 직경을 갖는 석영관을 소정의 길이로 절단하여, 그 일단부를 크라운 형태로 컷팅하는 단계와; 상기한 단계에서 그 일단부가 크라운 형태로 컷팅된 석영관의 크라운 부분에 버너의 화염을 분사하여 용융시키면서 반구 형태로 성형하는 단계와; 반구 형태로 성형된 석영관의 일단부의 결합부를 용융 석영으로 접합하는 단계와; 결합부를 접합한 후에 접합된 부분을 매끄럽게 가공하는 단계를 포함하는 것을 특징으로 하는 진공 챔버 제조 방법을 제공한다.In order to achieve the above object, the present invention provides a method of manufacturing a vacuum chamber, comprising: cutting a quartz tube having a predetermined diameter to a predetermined length, and cutting one end thereof into a crown shape; Forming a hemisphere while spraying and melting a flame of a burner on a crown portion of a quartz tube whose one end is cut in a crown shape in the above step; Bonding the joints of one end of the quartz tube shaped into a hemisphere with molten quartz; It provides a vacuum chamber manufacturing method comprising the step of smoothly processing the bonded portion after the bonding portion.

도 1은 종래의 진공 챔버 제조 방법을 설명하기 위한 간략한 설명도,1 is a brief explanatory diagram for explaining a conventional vacuum chamber manufacturing method,

도 2는 본 발명에 따른 진공 챔버 제조 방법에 제조된 진공 챔버를 나타낸 정면도 및 평면도,2 is a front view and a plan view showing a vacuum chamber manufactured in the vacuum chamber manufacturing method according to the present invention,

도 3∼5는 본 발명에 따른 진공 챔버 제조 방법을 설명하기 위한 설명도이다.3-5 is explanatory drawing for demonstrating the vacuum chamber manufacturing method which concerns on this invention.

* 도면의 주요 부분에 대한 부호 설명 *Explanation of symbols on the main parts of the drawings

10 : 진공 챔버 20 : 석영관10 vacuum chamber 20 quartz tube

21 : 결합부 30 : 챔버 금형21: coupling part 30: chamber mold

40 : 버너40: burner

본 발명에 따른 진공 챔버 제조 방법에 대하여 본 발명의 일 실시예를 통하여 상세하게 설명한다.The vacuum chamber manufacturing method according to the present invention will be described in detail through an embodiment of the present invention.

첨부한 도면, 도 2는 본 발명에 따른 진공 챔버 제조 방법에 제조된 진공 챔버를 나타낸 정면도 및 평면도이고, 도 3∼5는 본 발명에 따른 진공 챔버 제조 방법을 설명하기 위한 설명도이다.2 is a front view and a plan view showing a vacuum chamber manufactured in the vacuum chamber manufacturing method according to the present invention, and FIGS. 3 to 5 are explanatory views for explaining the vacuum chamber manufacturing method according to the present invention.

본 발명에 따른 진공 챔버 제조 방법에 따라서 제조된 도 2의 진공 챔버(10)를 제조하는 과정은 도 3∼5에 나타낸 바와 같다.The process of manufacturing the vacuum chamber 10 of FIG. 2 manufactured according to the vacuum chamber manufacturing method according to the present invention is as shown in FIGS. 3 to 5.

진공 챔버 제조 방법은 먼저, 소정의 직경을 갖는 석영관(20)을 적당한 길이로 절단한 후에, 그 일단을 크라운 형태 즉, 다수의 쐐기 형태로 컷팅한다.In the vacuum chamber manufacturing method, first, a quartz tube 20 having a predetermined diameter is cut to an appropriate length, and then one end thereof is cut into a crown shape, that is, a plurality of wedge shapes.

그리고, 진공 챔버(10)의 형태와 같은 챔버 금형(30)을 미리 준비한다.And the chamber metal mold | die 30 like the form of the vacuum chamber 10 is prepared previously.

이 챔버 금형(30)은 고온에서도 그 형태가 변형되지 않는 소재이어야 하는데, 그래파이트(graphite, 흑연)가 적당한 소재이다.The chamber mold 30 should be a material that does not deform even at high temperatures, and graphite (graphite) is a suitable material.

이 석영은 용융 온도가 약 1800℃이며, 이 온도를 유지하기 위하여 버너의 연료로써 열량이 높은 수소(H2)를 많이 이용한다.This quartz has a melting temperature of about 1800 ° C., and a large amount of hydrogen (H 2 ) is used as a fuel of a burner to maintain this temperature.

도 4에 나타낸 바와 같이, 챔버 금형(30)에 석영관(20)을 끼우고, 버너(40)를 이용하여 석영관의 쐐기 부분에 열을 가하여 챔버 금형(30)의 형태와 같게 절곡시킨다.As shown in FIG. 4, the quartz tube 20 is inserted into the chamber mold 30, and heat is applied to the wedge portion of the quartz tube using the burner 40 to be bent in the form of the chamber mold 30.

도 5에 나타낸 바와 같이, 반구 형태로 절곡된 석영관(20)의 결합부(21)를 결합시키기 위하여, 용융 석영을 이용하여 접합시킨다.As shown in FIG. 5, in order to bond the coupling part 21 of the quartz tube 20 bent in the hemispherical shape, it joins using fused quartz.

그리고, 결합부(21)를 접합시키기 위하여 용융 석영을 이용하여 용접하면 돌출 부위가 발생하는데, 이 돌출 부위를 절삭하여 제거한다.Then, when welding using fused quartz to bond the coupling portion 21, a protruding portion is generated, and the protruding portion is cut and removed.

상기한 바와 같은 방법으로 진공 챔버를 제조하면, 보다 경제적으로 제조할 수 있으면서, 챔버의 직경을 크게 할 수 있으며, 동일한 품질의 챔버를 제조할 수 있는 효과를 제공한다.The manufacturing of the vacuum chamber in the manner as described above enables the production of a more economical, large diameter of the chamber, and provides the effect of producing a chamber of the same quality.

Claims (1)

진공 챔버(10)를 제조하는 방법에 있어서,In the method of manufacturing the vacuum chamber 10, 소정의 직경을 갖는 석영관(20)을 소정의 길이로 절단하여, 그 일단부를 크라운 형태로 컷팅하는 단계와; 상기한 단계에서 그 일단부가 크라운 형태로 컷팅된 석영관(20)의 크라운 부분에 버너의 화염을 분사하여 용융시키면서 반구 형태로 성형하는 단계와; 반구 형태로 성형된 석영관(20)의 일단부의 결합부(21)를 용융 석영으로 접합하는 단계와; 결합부를 접합한 후에 접합된 부분을 매끄럽게 가공하는 단계를 포함하는 것을 특징으로 하는 진공 챔버 제조 방법.Cutting a quartz tube 20 having a predetermined diameter into a predetermined length and cutting one end thereof in a crown shape; Forming a hemisphere while spraying and melting a flame of a burner on a crown portion of the quartz tube 20 whose one end is cut in a crown shape in the above step; Bonding the joining portions 21 of one end of the quartz tube 20 formed into a hemisphere into molten quartz; And seamlessly processing the bonded portion after joining the joint.
KR1019980013633A 1998-04-16 1998-04-16 Manufacturing method of vacuum chamber KR100263038B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019980013633A KR100263038B1 (en) 1998-04-16 1998-04-16 Manufacturing method of vacuum chamber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019980013633A KR100263038B1 (en) 1998-04-16 1998-04-16 Manufacturing method of vacuum chamber

Publications (2)

Publication Number Publication Date
KR19990080393A KR19990080393A (en) 1999-11-05
KR100263038B1 true KR100263038B1 (en) 2000-09-01

Family

ID=19536328

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019980013633A KR100263038B1 (en) 1998-04-16 1998-04-16 Manufacturing method of vacuum chamber

Country Status (1)

Country Link
KR (1) KR100263038B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020050683A (en) * 2000-12-21 2002-06-27 김현우 A process of a vacuum chamber in a vacuum evaporator

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100445299B1 (en) * 2001-05-09 2004-08-21 주식회사 한국쿼츠 A vacuum chamber and thereof method for manufacturing
CN113894627B (en) * 2021-10-15 2023-09-01 湖州东科电子石英股份有限公司 Processing method of conical protection cylinder

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020050683A (en) * 2000-12-21 2002-06-27 김현우 A process of a vacuum chamber in a vacuum evaporator

Also Published As

Publication number Publication date
KR19990080393A (en) 1999-11-05

Similar Documents

Publication Publication Date Title
MY136293A (en) Reducing metals as a brazing flux
KR100263038B1 (en) Manufacturing method of vacuum chamber
US2786882A (en) Lead-in seal for electrical discharge devices
US2504521A (en) Quartz-to-metal seal
CN104588964A (en) Dissimilar metal tube material and preparation method and application thereof
JP2677607B2 (en) Light bulb and manufacturing method thereof
JP2004224691A (en) Method for joining glass preform during manufacturing of optical fiber
JP2001247322A (en) Method for junction of glass pipe and method for producing glass pipe for optical fiber preform
JP2007009986A (en) Glass lining tube
CN214721441U (en) Laser welding structure of local nickel plating
KR20020050683A (en) A process of a vacuum chamber in a vacuum evaporator
SU1090671A1 (en) Method for making rod solder of metal to quartz glass
JP4520373B2 (en) Method for manufacturing glass-lined branch pipe and branch pipe formed thereby
CN106825970A (en) A kind of resistance wire and higher temperature line M type welding procedures
JP2010146752A (en) Manufacturing method of fluorescent lamp
JP3105588B2 (en) Manufacturing method of stem for tube
JPS5836951A (en) Structure body for airtight sealing of metal and glass
JPS586783A (en) Joining method for wire net into thin walled pipe
JPS6136141A (en) Method for bonding glass tube to metal fixture
KR20030032277A (en) Heater fabricated by blazing
JPH0767793A (en) Metallic vacuum bottle, production method of metallic vacuum bottle, metallic vacuum bottle produced by metallic vacuum bottle production method
CN114498282A (en) Welding and sealing method for miniature laser
JPS6122533A (en) Manufacture of stem for cathode-ray tube
JPS63170283A (en) Method of soldering ceramic pipe to metal pipe
JP2737804B2 (en) Manufacturing method of insulated heat pipe

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
LAPS Lapse due to unpaid annual fee