KR20020085553A - A vacuum chamber and thereof method for manufacturing - Google Patents

Abstract

PURPOSE: A vacuum chamber and a fabricating method thereof are provided to fabricate efficiently the vacuum chamber by forming separately a flange, a tube, and a closed wall and performing a welding process. CONSTITUTION: A flange(100) is formed by a quartz material. A lower end portion of a tube(110) is combined with an upper face of the flange(100). The tube(110) is formed by the quartz material. A plurality of piece members(121) is welded on an upper portion(111) of the tube(110). The piece members(121) are formed by the quartz material. The piece members(121) are connected to each other. A closed wall(120) is formed on the upper portion of the tube(110). The closed wall(120) has a hemispheric shape. The tube(110) has a crossing section of an oval shape. The thickness of the piece member(121) is smaller than the thickness of the tube(110). The piece member(121) has a triangular shape. A welding portion(101) is formed on an upper face of the flange(100). A welding portion is formed on a lower portion of the tube(110).

Description

Vacuum chamber and its manufacturing method {A VACUUM CHAMBER AND THEREOF METHOD FOR MANUFACTURING}

The present invention relates to a vacuum chamber and a method for manufacturing the same. More specifically, the flange, the tube and the closing wall are separated from each other by fabricating a crown in one end of the quartz tube to form a closing wall, and these are separated from each other. By adopting a welding joining method, the present invention relates to a vacuum chamber and a method for manufacturing the same so as to proceed more efficiently.

In general, the semiconductor process is a process requiring ultra-precision, and the conditions of the equipment for this may include a degree of vacuum.

That is, in order to satisfy such a degree of vacuum, in a semiconductor process, a semiconductor etching vacuum facility using plasma, a semiconductor diffusion vacuum facility for diffusing impurities into a wafer, an ion implantation vacuum facility for injecting ion particles into a wafer, and a thin film on a wafer Vacuum facilities for semiconductor production, such as vapor deposition equipment for vapor deposition, are widely used.

In particular, such a semiconductor vacuum equipment is equipped with various types of vacuum pumps, vacuum chambers and clamps for forming low vacuum, high vacuum, ultrahigh vacuum, etc. according to the degree of vacuum required, and the vacuum chamber is mounted using a clamp and a wafer. Is equipped with a loading means to be loaded into the interior of the vacuum chamber by a separate transport means and consists of a chamber mounting means is installed with a connection pipe connected to the vacuum pump.

Here, the vacuum pump is to suck the internal air of the vacuum chamber in which the process is performed, and to force it to the outside, by installing a low vacuum pump and a high vacuum pump in one chamber according to the limitation of the capacity of the vacuum pump to vacuum It is common to form states in stages.

In the configuration of the semiconductor vacuum equipment as described above, the vacuum chamber uses a lot of quartz that does not generate any contaminants such as particles from itself in order to prevent particles or the like from penetrating the wafer during the process to be manufactured as a defective product.

Such a vacuum chamber made of quartz is manufactured in a dome shape to withstand vacuum pressure well, and there is a vacuum chamber manufacturing method of Korean Laid-Open Publication No. 1999-80393 as an example of a conventional method of manufacturing a vacuum chamber.

The above-described prior art is a method of manufacturing a vacuum chamber, comprising: cutting a quartz tube having a predetermined diameter to a predetermined length, and cutting one end thereof in a crown shape; Forming a hemisphere while spraying and melting a flame of a burner on a crown portion of a quartz tube whose one end is cut in a crown shape in the above step; Bonding the joints of one end of the quartz tube shaped into a hemisphere with molten quartz; After joining the joints, characterized in that it comprises the step of smoothly processing the joined portion.

However, according to the prior art, there were the following problems.

First, one end of the quartz tube having a predetermined diameter is cut in the form of a crown using a separate cutting means, and then the crown portion is melted with a flame of a burner and bent into a hemispherical shape. Since the shape was cut in the shape, the thickness of the quartz tube and the crown portion is the same, it takes a lot of time for the bending forming process and there is a problem that the amount of fuel used to generate the flame of the burner also increases.

Second, the process of machining one end of the quartz tube in the form of a crown by using a separate cutting means also can not be easily done in reality as well as the single cutting means elastically crown the crown when the diameter of the quartz tube is different. It could not be processed smoothly, there was also a problem that a number of cutting means must be provided separately for each quartz tube having a different diameter.

Third, there is a problem that the manufacturing cost is increased because the aforementioned cutting means is expensive equipment.

The present invention was created in order to solve the above problems, and separated from the method of forming a closed wall by processing in the form of a crown on one end of the quartz tube to produce a flange and tube and the closed wall separated from each other by welding them together It is an object of the present invention to provide a vacuum chamber and a method of manufacturing the same, by which the production can be carried out more efficiently.

1 is a flow chart showing a method of manufacturing a vacuum chamber according to a first embodiment of the present invention.

2 is an exploded perspective view of a flange and a tube according to the first embodiment of the present invention.

3 is a longitudinal cross-sectional view of FIG. 2;

4 to 7 are views showing a state in which a vacuum chamber is manufactured by the method according to the first embodiment of the present invention.

8 to 10 are perspective views showing another shape of the flange and the tube of the present invention.

11 is a flowchart illustrating a method of manufacturing a vacuum chamber according to a second embodiment of the present invention.

12 is a cross-sectional view showing the coupling state of the tube and the flange of the configuration of the vacuum chamber according to the second embodiment of the present invention.

Figure 13 is a cross-sectional view showing a coupling state of the tube and the flange of the configuration of the vacuum chamber according to a second embodiment of the present invention.

14 is a flowchart illustrating a method of manufacturing a vacuum chamber according to a third embodiment of the present invention.

15 is an exploded perspective view of a vacuum chamber manufactured according to the third embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

100: flange

110: tube

121: engraving member

120: closed wall

Vacuum chamber according to the present invention for achieving the above object, and the upper and lower through the flange; Upper and lower perforated quartz tubes having a lower end welded to the upper surface of the flange; A plurality of pieces of quartz material are welded and coupled to the upper end of the tube, and the pieces are interconnected to each other, and the closed wall is formed to close the top of the tube in a predetermined shape.

Vacuum chamber according to the present invention for achieving the above object, and the upper and lower through the tube of quartz material; A flange wound around the lower end surface of the tube by winding the strip member to have a diameter greater than or equal to a predetermined value; A plurality of pieces of quartz material are welded and coupled to the upper end of the tube, and the pieces are interconnected to each other, and the closed wall is formed to close the top of the tube in a predetermined shape.

The vacuum chamber manufacturing method according to the present invention for achieving the above object comprises the steps of: processing the flange of the quartz material to penetrate up and down; Processing a tube of quartz material vertically penetrated to have the same inner diameter as the through hole of the flange; Contacting a lower end of the tube with an upper surface of the flange and then welding it; Processing a engraving member of a predetermined shape made of quartz material; Contacting the engraving member with the upper end of the tube and then welding and attaching the plurality of engraving members along the upper end; Inserting a mold having an end face with a predetermined shape into the tube, and applying heat to bend the engraving member to form a closed wall in the same shape as the end face of the mold; And filling the gap formed between the bent pieces by melting the base material of quartz material.

A vacuum chamber manufacturing method according to the present invention for achieving the above object comprises the steps of: processing the tube of the vertical and perforated quartz material; Winding the strip member to have a diameter equal to or greater than a predetermined value on a lower outer surface of the tube, and then welding to form a flange; Processing a engraving member of a predetermined shape made of quartz material; Contacting the engraving member with the upper end of the tube and then welding and attaching the plurality of engraving members along the upper end; Inserting a mold having an end face with a predetermined shape into the tube, and applying heat to bend the engraving member to form a closed wall in the same shape as the end face of the mold; And filling the gap formed between the bent pieces by melting the base material of quartz material.

A vacuum chamber manufacturing method according to the present invention for achieving the above object comprises the steps of: molding a flange of a quartz material which is penetrated up and down using a mold; Molding a tube made of a quartz material vertically penetrated to have an inner diameter equal to that of the flange using a mold; Forming a closed wall made of quartz material having an opening having the same opening as the inner diameter of the tube by using a mold; Welding the lower ends of the tubes to the upper surfaces of the flanges and then welding these contacts to each other; Contacting the bottom opening of the closure wall with the top opening of the tube and then welding these contacts to each other.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a flowchart illustrating a method of manufacturing a vacuum chamber according to a first embodiment of the present invention, FIG. 2 is an exploded perspective view of a flange and a tube according to the first embodiment of the present invention, and FIG. 3 is a longitudinal cross-sectional view of FIG. 4 to 7 are views illustrating a state in which a vacuum chamber is manufactured by the method according to the first embodiment of the present invention, and FIGS. 8 to 10 are perspective views showing other shapes of the flange and the tube of the present invention. .

The vacuum chamber according to the first embodiment of the present invention is a flange 100 made of a quartz material which penetrates up and down, and a tube 110 made of a vertically penetrated quartz material, the lower end of which is welded to the upper surface of the flange 100; The plurality of engraving members 121 made of quartz are welded to the upper end 111 of the tube 110, and the engraving members 121 are interconnected to close the upper end of the tube 110 in a predetermined shape. It is made of a closed wall (120).

The tube 110 is formed to have a circular cross section as shown in FIG. 2, and the shape of the closing wall 120 has a hemispherical shape.

In addition, the tube 110 is formed to have an elliptical cross section as shown in FIG. 8, and the shape of the closing wall 120 has an elliptic dome shape (not shown).

In addition, the tube 110 is formed to have a polygonal cross section as shown in FIGS. 9 and 10, and the shape of the closing wall 120 is flat, although not shown.

In addition, the tube 110 is formed to have a polygonal cross section, as shown in Figures 9 and 10, the shape of the closed wall 120, but not shown is formed in a polygonal pyramid shape.

On the other hand, the thickness of the engraving member 121 is formed smaller than the thickness of the tube (110).

The reason why the thickness of the engraving member 121 is smaller than the thickness of the tube 110 is to shorten the time required for bending the engraving member 121 and to reduce the amount of fuel used to generate heat. It is in such a way.

The operation member 121 is formed in a triangular shape, more preferably in an isosceles triangle shape.

On the upper surface of the flange 100, as shown in FIG. 3, the outermost edge is formed by welding the protruding welding portion 101, and the lower surface of the tube 110 corresponding to the welding portion 101 is formed. A chamfered welding portion 112 is formed.

The manufacturing method of the vacuum chamber according to the first embodiment of the present invention configured as described above is as follows.

First, the flange 100 having a shape penetrated up and down is processed. (S10)

Thereafter, as shown in FIG. 3, the outermost edge of the flange 100 processed as described above is ground to form a protruding weld 101.

Next, the tube 110 is processed. (S20)

Thereafter, as shown in FIG. 3, the weld 112 is formed by chamfering the bottom surface of the tube 110 processed as described above.

After the above step (S10) (S20) and the tube 110 and the flange 100 by melting the quartz to each other by welding (S30).

More specifically, as shown in FIG. 3, the welded joints are welded in a state in which the welded portions 112 of the tubes 110 are brought into contact with each other by the welded portions 101 of the flange 100.

Next, the engraving member 121 is processed. (S40)

Here, the engraving member 121 is processed into a triangular shape, but preferably to be an isosceles triangle.

Thereafter, as shown in FIG. 4, the engraving member 121 is sequentially quartz on the upper end 111 of the tube 110 welded to the flange 100 at the bottom of the engraving member 121 processed as described above. Melt and attach (S50).

Next, after completing the attachment of the engraving member 121 to the upper end 111 of the tube 110 as described above, as shown in Figure 5 the mold 200 having a hemispherical shape as an example of the predetermined shape as the tube After insertion into the (110), by applying heat to gradually bend the engraving member 121. (S60)

Thereafter, as shown in FIGS. 6 and 7, the engraving member 121 is bent one by one to finally form the exterior of the closing wall 120.

The appearance of the closed wall 120 formed by the step (S70) is to have the same shape as the appearance of the mold (200).

Next, as described above, when the appearance of the closed wall 120 is formed, as shown in FIG. 7, the gap 121a formed between the plurality of engraving members 121 is melted and filled with quartz. (S80)

The description so far has described important processes of the manufacturing method of the vacuum chamber for the first embodiment of the present invention, and may further proceed by adding the above-described processes.

First, washing the flange 100, the tube 110, and the engraving member 121 with a hydrofluoric acid solution for a predetermined time, and the flange 100, the tube 110, and the engraving member 121. Proceeds to polishing with flame (first additional process).

After the first additional process is performed, the step of heat-treating the flange 100 and the tube 110 at the step of completing the welding process is performed.

Grinding only the flange 100 in a state where the flange 100 and the tube 110 coupled to each other after the second additional process are fixed to the chucking means (not shown), and the grinding flange ( 100) is washed with hydrofluoric acid solution (third additional process).

After performing the third additional process and then filling the gaps formed between the bent pieces 121, the base metal material is melted on a specific portion of the outer surface of the closing wall 121. To proceed with the welding step (4th additional process)

After proceeding with the fourth additional process and then proceeding with the additional welding, the step of heat-treating the integral flange 100, the tube 110 and the closing wall 120 is performed.

When all of the above processes are completed, the vacuum chamber according to the present invention is in a state of very high transparency.

As can be seen from the above, according to the first embodiment of the present invention, the process of machining one end of the quartz tube in the form of a crown by using a separate cutting means is not practically easy and also the quartz as the single cutting means. When the diameter of the tube is different, the crown portion cannot be elastically smoothly processed, and there is a problem in that a number of cutting means must be separately provided for each quartz tube having a different diameter.

However, in the present invention, even if the diameter of the tube 110 is different, it takes a method of filling the gap by attaching a plurality of separate engraving members 121, so that there is no need to provide an expensive cutting means as conventionally do.

In addition, the present invention may be applied by adopting a tube 110 having various diameters.

The description so far describes a vacuum chamber and a method of manufacturing the same according to the first embodiment of the present invention.

Hereinafter, a vacuum chamber and a manufacturing method thereof according to a second embodiment of the present invention will be described.

11 is a flow chart showing a method of manufacturing a vacuum chamber according to a second embodiment of the present invention, Figure 12 is a cross-sectional view showing a coupling state of the tube and the flange of the vacuum chamber according to a second embodiment of the present invention, 13 is a cross-sectional view showing a coupling state between the tube and the flange of the vacuum chamber according to the second embodiment of the present invention.

According to a second embodiment of the present invention, a vacuum chamber includes a tube 110 made of a quartz material vertically penetrated; A flange (100) welded and wound by winding the band members (102) (103) to have a diameter of a predetermined value or more on the bottom outer surface of the tube (110); A plurality of engraving members 121 made of quartz is welded to the upper end 111 of the tube 110, and the engraving members 121 are interconnected to close the upper end of the tube 110 in a predetermined shape. It is made of a closed wall (120).

Here, the vacuum chamber for the second embodiment of the present invention is the same as the structure of the vacuum chamber of the first embodiment described above, the rest are all the same and the flange 100 is changed.

That is, although the flange in the above-described first embodiment is formed integrally, the flange in the second embodiment is formed by winding a plurality of strip members 102 and 103.

The band member 103 is composed of a single member, but is wound on the bottom outer surface of the tube 110 a plurality of times in succession.

In another embodiment, the band member 102 is composed of first, second, third, ..., N members having different lengths, and the first, second, third and third members of the band member 102 are sequentially arranged on the bottom outer surface of the tube 110. N members are wound up.

Referring to the manufacturing method of the vacuum chamber according to the second embodiment of the present invention configured as described above are as follows.

First, the tube 110 of quartz material having a vertically penetrated shape is processed.

Subsequently, after winding the strip members 102 and 103 to have a diameter of a predetermined value or more on the bottom outer surface of the tube 110, the molten quartz is welded to form a flange 100. (S110)

Next, the engraving member 121 of a predetermined shape made of quartz is processed.

Thereafter, the engraving member 121 is in contact with the upper end 111 of the tube 110, and the quartz is melted and welded to attach a plurality of engraving members 121 along the upper end 111. (S130 )

Next, after inserting the mold 200 having an end surface of a predetermined shape into the tube 110, heat is applied to bend the engraving member 121 (S140) to form an end surface of the mold 200. The closing wall 120 is formed in the same manner as in step S150.

After the step (S150) proceeds to fill the gap formed between the carving member 121 forming the closed wall 120 by melting the quartz (S160).

Here, the manufacturing method of the vacuum chamber according to the second embodiment of the present invention is compared with the manufacturing method of the vacuum chamber of the first embodiment described above, the band members 102 and 103 are formed on the outer peripheral surface of the lower end of the tube 110. Except for the step of winding the flange 100 to form the remaining steps are all the same description of overlapping will be omitted.

The flange 100 has a first method of winding a strip member made of a single member on the bottom outer surface of the tube 110 in a plurality of times in succession, and first, second, third, ... different strips of different lengths. It is produced by a method of winding the member on the bottom outer surface of the tube 110 in turn.

According to the second embodiment described above, the diameter of the flange 100 is different from each other depending on the number of winding of the strip member (102, 103). By varying the diameter of the flange 100 as described above it can be changed according to the high vacuum and low vacuum.

That is, if the diameter of the flange 100 is less than or equal to a predetermined value, the vacuum chamber can be used for low vacuum applications, and if the diameter of the flange 100 is greater than or equal to the predetermined value, the vacuum chamber can be used for high vacuum applications. It will be.

The description so far describes the vacuum chamber and its manufacturing method for the first and second embodiments of the present invention.

Hereinafter, a method of manufacturing a vacuum chamber according to a third embodiment of the present invention will be described.

14 is a flowchart illustrating a method of manufacturing a vacuum chamber according to a third embodiment of the present invention, and FIG. 15 is an exploded perspective view of a vacuum chamber manufactured according to a third embodiment of the present invention.

First, the flange 100 of quartz material penetrates up and down using a mold. (S200)

Thereafter, a tube 110 made of a quartz material is vertically penetrated to have an inner diameter equal to that of the flange 100 by using a mold.

Next, by using a mold to form a closed wall 120 of quartz material having the same opening as the inner diameter of the tube (110) (S220).

Thereafter, the lower end of the tube 110 is in contact with the upper surface of the flange 100 and then these contact parts are welded to each other.

Finally, after contacting the bottom opening of the closing wall 120 to the top opening of the tube 110, these contact parts are welded to each other (S240).

Here, the vacuum chamber for the third embodiment of the present invention is the same as compared to the manufacturing method of the vacuum chambers of the first and second embodiments described above, but the rest are the same, but the flange 100 and the tube 110 and the closing wall 120 ) Are integrally molded into individual parts and welded to each other.

The remaining steps are the same as those described in the above-described first and second embodiments, and description thereof will be omitted.

As described above, the vacuum chamber according to the present invention and a method for manufacturing the same are separated from the method of forming a closed wall by processing in a crown shape at one end of the quartz tube to separate the flange, tube and the closed wall from each other to produce them By adopting a method of welding, the fabrication can be carried out more efficiently.

Claims (23)

A flange 100 penetrated up and down; A tube 110 of a top and bottom perforated quartz material, the lower end of which is welded to the upper surface of the flange 100; A plurality of engraving members 121 made of quartz is welded to the upper end 111 of the tube 110, and the engraving members 121 are interconnected to close the upper end of the tube 110 in a predetermined shape. Vacuum chamber, characterized in that consisting of a closed wall (120). A tube 110 made of a quartz material penetrated up and down; A flange (100) welded and wound by winding the band members (102) (103) to have a diameter of a predetermined value or more on the bottom outer surface of the tube (110); A plurality of engraving members 121 made of quartz is welded to the upper end 111 of the tube 110, and the engraving members 121 are interconnected to close the upper end of the tube 110 in a predetermined shape. Vacuum chamber, characterized in that consisting of a closed wall (120). The method according to claim 1 or 2, The tube 110 is formed to have a circular cross section, the shape of the closed wall 120 is a vacuum chamber, characterized in that hemispherical shape. The method according to claim 1 or 2, The tube 110 is formed to have an elliptical cross section, the shape of the closing wall 120 is a vacuum chamber, characterized in that the elliptical dome shape. The method according to claim 1 or 2, The tube (110) is formed to have a polygonal cross section, the vacuum chamber, characterized in that the shape of the closed wall (120) is formed flat. The method according to claim 1 or 2, The tube 110 is formed to have a polygonal cross section, the shape of the closing wall 120 is a vacuum chamber, characterized in that the polygonal pyramid shape. The method according to claim 1 or 2, The thickness of the engraving member 121 is a vacuum chamber, characterized in that formed smaller than the thickness of the tube (110). The method according to claim 1 or 2, The engraving member 121 is a vacuum chamber, characterized in that formed in a triangular shape. The method of claim 8, The triangle of the engraving member 121 is a vacuum chamber, characterized in that formed in an isosceles triangle. The method of claim 2, The belt member (103) is made of a single member, the vacuum chamber, characterized in that wound in the bottom outer surface of the tube (110) many times in succession. The method of claim 2, The band member 102 is composed of first, second, third, ..., N members having different lengths, but the first, second, third, ... A vacuum chamber, wherein N members are wound. The method of claim 1, On the upper surface of the flange 100, a welded portion 101 is formed by grinding the outermost edge thereof, and a welded portion 112 is chamfered on the bottom surface of the tube 110 in correspondence to the welded portion 101. Vacuum chamber, characterized in that formed. Processing the flange 100 of quartz material to be vertically penetrated; Processing a tube 110 of quartz material vertically penetrated to have the same inner diameter as the through hole of the flange 100; Contacting a lower end of the tube (110) to an upper surface of the flange (120) and then welding the welding; Processing the engraving member 121 having a predetermined shape of quartz material; Attaching a plurality of engraving members 121 along the upper end 111 by contacting the engraving member 121 to the upper end 111 of the tube 110 and then welding and coupling the engraving member 121 to the upper end 111 of the tube 110; After inserting a mold 200 having an end face of a predetermined shape into the tube 110, heat is applied to bend the engraving member 121 to have the same shape as the end face of the mold 200 to close the wall. Forming 120; Melting gaps formed between the bent pieces (121) between the melting of the base material made of quartz material, characterized in that it comprises a vacuum chamber manufacturing method. Processing the tube 110 of the upper and lower quartz material; Winding the belt members (102) (103) to have a diameter greater than or equal to a predetermined value on the bottom outer surface of the tube (110), and then welding to form a flange (100); Processing the engraving member 121 having a predetermined shape of quartz material; Attaching a plurality of engraving members 121 along the upper end 111 by contacting the engraving member 121 to the upper end 111 of the tube 110 and then welding and coupling the engraving member 121 to the upper end 111 of the tube 110; After inserting a mold 200 having an end face of a predetermined shape into the tube 110, heat is applied to bend the engraving member 121 to have the same shape as the end face of the mold 200 to close the wall. Forming 120; Melting gaps formed between the bent pieces (121) between the melting of the base material made of quartz material, characterized in that it comprises a vacuum chamber manufacturing method. Molding a flange 100 of quartz material to be vertically penetrated by using a mold; Molding a tube (110) made of a quartz material vertically penetrated to have an inner diameter equal to that of the flange (100) by using a mold; Molding a closed wall (120) made of quartz material having an opening having the same opening as the inner diameter of the tube (110) by using a mold; Welding the lower ends of the tubes (110) to the upper surfaces of the flanges (100) and then mutually welding these contacts; And contacting the bottom openings of the closing walls (120) with the top openings of the tubes (110) and then welding these contacts to each other. The method of claim 14, The flange (100) is a method of manufacturing a vacuum chamber, characterized in that the belt member (102) as a single member is wound several times in succession to the bottom outer surface of the tube (110). The method of claim 14, The flange 100 is a vacuum chamber characterized in that the winding of the first, second, third, ..., N pieces of the band member 103 of different lengths in turn on the outer surface of the lower end of the tube (110) Way. The method according to claim 13 or 14, Method for producing a vacuum chamber, characterized in that for processing the engraving member 121 in a triangular shape. The method according to any one of claims 13 to 15, Washing the flange 100, the tube 110, the engraving member 121, and the closing wall 120 with a hydrofluoric acid solution for a predetermined time; and the flange 100, the tube 110, and the engraving. And polishing the member (121) and the closing wall (120) with a flame. The method of claim 19, Method for producing a vacuum chamber, characterized in that further comprising the step of heat-treating the flange 100 and the tube 110 in the step of completing the weld joint. The method of claim 20, And grinding only the flange 100 in a state in which the flange 100 and the tube 110 coupled to each other are fixed to the chucking means, and washing the ground flange 100 with hydrofluoric acid solution. Method for producing a vacuum chamber characterized in that. The method of claim 21, After filling the gaps formed between the bent pieces (121), the step of melting the base material of the quartz material on a specific portion of the outer surface of the closed wall 120 to further perform the step of welding welding Method of manufacturing a vacuum chamber comprising a. 23. The method of claim 22, further comprising the step of heat-treating the integral flange 100, the tube 110, and the closing wall 120 after the step of proceeding the addition welding. Manufacturing method.