KR20020045553A - 고분자 화합물, 레지스트 재료 및 패턴 형성 방법 - Google Patents
고분자 화합물, 레지스트 재료 및 패턴 형성 방법 Download PDFInfo
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- KR20020045553A KR20020045553A KR1020010076823A KR20010076823A KR20020045553A KR 20020045553 A KR20020045553 A KR 20020045553A KR 1020010076823 A KR1020010076823 A KR 1020010076823A KR 20010076823 A KR20010076823 A KR 20010076823A KR 20020045553 A KR20020045553 A KR 20020045553A
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- MJGQMEJOQAULGB-UHFFFAOYSA-M 4-methylbenzenesulfonate;tris[4-[(2-methylpropan-2-yl)oxy]phenyl]sulfanium Chemical compound CC1=CC=C(S([O-])(=O)=O)C=C1.C1=CC(OC(C)(C)C)=CC=C1[S+](C=1C=CC(OC(C)(C)C)=CC=1)C1=CC=C(OC(C)(C)C)C=C1 MJGQMEJOQAULGB-UHFFFAOYSA-M 0.000 description 2
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- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- ODHXBMXNKOYIBV-UHFFFAOYSA-N triphenylamine Chemical compound C1=CC=CC=C1N(C=1C=CC=CC=1)C1=CC=CC=C1 ODHXBMXNKOYIBV-UHFFFAOYSA-N 0.000 description 1
- WLOQLWBIJZDHET-UHFFFAOYSA-N triphenylsulfonium Chemical compound C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 WLOQLWBIJZDHET-UHFFFAOYSA-N 0.000 description 1
- 239000012953 triphenylsulfonium Substances 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
- LENZDBCJOHFCAS-UHFFFAOYSA-N tris Chemical compound OCC(N)(CO)CO LENZDBCJOHFCAS-UHFFFAOYSA-N 0.000 description 1
- 238000000233 ultraviolet lithography Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
- C08G61/04—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms
- C08G61/06—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds
- C08G61/08—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes only aliphatic carbon atoms prepared by ring-opening of carbocyclic compounds of carbocyclic compounds containing one or more carbon-to-carbon double bonds in the ring
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
- Y10S430/111—Polymer of unsaturated acid or ester
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Materials For Photolithography (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
Description
Claims (6)
- 하기 화학식 1 및(또는) 2로 표시되는 반복 단위를 함유하는 것을 특징으로 하는 중량 평균 분자량 1,000 내지 500,000의 고분자 화합물.<화학식 1><화학식 2>(식 중, R1, R2는 수소 원자 또는 탄소수 1 내지 15의 직쇄상, 분지상 또는 환상의 알킬기, 아실기 또는 알킬술포닐기, 또는 탄소수 2 내지 15의 직쇄상, 분지상 또는 환상의 알콕시카르보닐기 또는 알콕시알킬기를 나타내고, 구성 탄소 원자상의 수소 원자의 일부 또는 전부가 할로겐 원자로 치환될 수 있고, R3과 R4는 수소 원자, 탄소수 1 내지 15의 직쇄상, 분지상 또는 환상의 알킬기 또는 알콕시기, 또는 탄소수 2 내지 15의 직쇄상, 분지상 또는 환상의 알콕시알킬기를 나타내고, 구성 탄소 원자상의 수소 원자의 일부 또는 전부가 할로겐 원자로 치환될 수 있거나, 또한 R3과 R4는 이들이 결합된 탄소 원자와 함께 탄소수 4 내지 8의 지환을 형성할 수 있고 R3과 R4가 합쳐져 하나의 산소 원자일 수도 있고, k는 0 또는 1이다)
- 제1항에 있어서, 상기 화학식 1 및(또는) 2로 표시되는 반복 단위에 추가하여 하기 화학식 3으로 표시되는 반복 단위를 더 함유하는 것을 특징으로 하는 고분자 화합물.<화학식 3>(식 중, R5는 수소 원자, 메틸기 또는 CH2CO2R7을 나타내고, R6은 수소 원자, 메틸기 또는 CO2R7을 나타내고, R7은 탄소수 1 내지 15의 직쇄상, 분지상 또는 환상의 알킬기를 나타내고, R8은 산불안정기를 나타내며, R9는 할로겐 원자, 수산기, 탄소수 1 내지 15의 직쇄상, 분지상 또는 환상의 알콕시기, 아실옥시기 또는 알킬술포닐옥시기, 또는 탄소수 2 내지 15의 직쇄상, 분지상 또는 환상의 알콕시카르보닐옥시기 또는 알콕시알콕시기를 나타내고, 구성 탄소 원자 상의 수소 원자 중 일부 또는 전부가 할로겐 원자로 치환될 수도 있으며, Z는 단일 결합 또는 탄소수 1 내지 5의 직쇄상, 분지상 또는 환상의 (p+2)가의 탄화수소기를 나타내고, 탄화수소기인 경우에는 1개 이상의 메틸렌기가 산소 원자로 치환되어 쇄상 또는 환상의 에테르를 형성할 수도 있으며, 동일 탄소 상의 2개의 수소 원자가 산소 원자로 치환되어 케톤을 형성할 수도 있고, k는 0 또는 1, p는 0, 1 또는 2이다)
- 제1항에 있어서, 상기 화학식 1 및(또는) 2로 표시되는 반복 단위에 추가하여 하기 화학식 3 및 4로 표시되는 반복 단위를 더 함유하는 것을 특징으로 하는 고분자 화합물.<화학식 3><화학식 4>(식 중, k, p, R5내지 R9는 상기와 동일하고, Y는 -O- 또는 -(NR10)-를 나타내며, R10은 수소 원자 또는 탄소수 1 내지 15의 직쇄상, 분지상 또는 환상의 알킬기를 나타낸다)
- 제1항에 있어서, 상기 화학식 1 및(또는) 2로 표시되는 반복 단위에 추가하여, 하기 화학식 5로 표시되는 반복 단위 또는 하기 화학식 3으로 표시되는 반복 단위 및 하기 화학식 5로 표시되는 반복 단위와, 하기 화학식 4로 표시되는 반복 단위를 더 함유하는 것을 특징으로 하는 고분자 화합물.<화학식 3><화학식 4><화학식 5>(식 중, k, p, R5내지 R9, Y는 상기와 동일하다)
- 제1항 내지 제4항 중 어느 한 항에 기재된 고분자 화합물을 포함하는 것을 특징으로 하는 레지스트 재료.
- 제5항에 기재된 레지스트 재료를 기판 상에 도포하는 공정, 가열 처리 후 포토 마스크를 통해 고에너지선 또는 전자선으로 노광하는 공정, 및 필요에 따라 가열 처리한 후에 현상액을 사용하여 현상하는 공정을 포함하는 것을 특징으로 하는 패턴 형성 방법.
Applications Claiming Priority (2)
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JPJP-P-2000-00372406 | 2000-12-07 | ||
JP2000372406 | 2000-12-07 |
Publications (2)
Publication Number | Publication Date |
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KR20020045553A true KR20020045553A (ko) | 2002-06-19 |
KR100583341B1 KR100583341B1 (ko) | 2006-05-25 |
Family
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KR1020010076823A KR100583341B1 (ko) | 2000-12-07 | 2001-12-06 | 고분자 화합물, 레지스트 재료 및 패턴 형성 방법 |
Country Status (3)
Country | Link |
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US (1) | US6673517B2 (ko) |
KR (1) | KR100583341B1 (ko) |
TW (1) | TW555785B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100670089B1 (ko) * | 2001-02-14 | 2007-01-17 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 고분자 화합물, 레지스트 재료 및 패턴 형성 방법 |
Families Citing this family (1)
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US6916594B2 (en) * | 2002-12-30 | 2005-07-12 | Hynix Semiconductor Inc. | Overcoating composition for photoresist and method for forming photoresist pattern using the same |
Family Cites Families (12)
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US4614825A (en) * | 1982-05-17 | 1986-09-30 | E. R. Squibb & Sons, Inc. | 7-oxabicycloheptane and 7-oxabicycloheptene compounds |
US6416926B1 (en) * | 1998-05-13 | 2002-07-09 | Hyundai Electronics Industries Co., Ltd. | Thiabicyclo compound, a polymer-containing said compound, and a photoresist micro pattern forming method using the same |
US6372854B1 (en) * | 1998-06-29 | 2002-04-16 | Mitsui Chemicals, Inc. | Hydrogenated ring-opening metathesis polymer and its use and production |
JP3956089B2 (ja) * | 2000-08-08 | 2007-08-08 | 信越化学工業株式会社 | アセタール化合物及びその製造方法 |
TW550435B (en) * | 2000-12-04 | 2003-09-01 | Shinetsu Chemical Co | Polymer, resist composition and patterning process |
TW527523B (en) * | 2000-12-04 | 2003-04-11 | Shinetsu Chemical Co | Polymer, resist composition and patterning process |
TW573222B (en) * | 2001-02-14 | 2004-01-21 | Shinetsu Chemical Co | Polymer, resist composition and patterning process |
US6794111B2 (en) * | 2001-04-23 | 2004-09-21 | Shin-Etsu Chemical Co., Ltd. | Polymers, resist compositions and patterning process, novel tetrahydrofuran compounds and their preparation |
JP4178360B2 (ja) * | 2001-06-14 | 2008-11-12 | 信越化学工業株式会社 | 脂環構造を有する新規エポキシ化合物、高分子化合物、レジスト材料、及びパターン形成方法 |
TW548518B (en) * | 2001-06-15 | 2003-08-21 | Shinetsu Chemical Co | Resist material and patterning process |
TW574607B (en) * | 2001-06-25 | 2004-02-01 | Shinetsu Chemical Co | Polymers, resist compositions and patterning process |
JP2003020313A (ja) * | 2001-07-09 | 2003-01-24 | Shin Etsu Chem Co Ltd | 脂環構造を有する新規エポキシ化合物、高分子化合物、レジスト材料、及びパターン形成方法 |
-
2001
- 2001-12-06 KR KR1020010076823A patent/KR100583341B1/ko active IP Right Grant
- 2001-12-06 US US10/003,117 patent/US6673517B2/en not_active Expired - Lifetime
- 2001-12-06 TW TW090130223A patent/TW555785B/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100670089B1 (ko) * | 2001-02-14 | 2007-01-17 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 고분자 화합물, 레지스트 재료 및 패턴 형성 방법 |
Also Published As
Publication number | Publication date |
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TW555785B (en) | 2003-10-01 |
US6673517B2 (en) | 2004-01-06 |
US20020115821A1 (en) | 2002-08-22 |
KR100583341B1 (ko) | 2006-05-25 |
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