KR200149914Y1 - Automatic press controller - Google Patents
Automatic press controller Download PDFInfo
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- KR200149914Y1 KR200149914Y1 KR2019950038593U KR19950038593U KR200149914Y1 KR 200149914 Y1 KR200149914 Y1 KR 200149914Y1 KR 2019950038593 U KR2019950038593 U KR 2019950038593U KR 19950038593 U KR19950038593 U KR 19950038593U KR 200149914 Y1 KR200149914 Y1 KR 200149914Y1
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- exhaust pipe
- main exhaust
- pressure regulator
- valve
- storage tank
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Control Of Fluid Pressure (AREA)
Abstract
본 고안은 주배기관 내에 설치된 버터플라이밸브를 자동으로 제어하여 배기관 내의 압력을 자동적으로 조절하는 자동압력조절기에 있어서, 버터플라이밸브를 자동적으로 세척하기 위하여 주배기관의 일측에 세정수단이 부가되는 것을 특징으로 하는 자동압력조절기에 관한 것이다.The present invention is an automatic pressure regulator for automatically controlling the pressure in the exhaust pipe by automatically controlling the butterfly valve installed in the main exhaust pipe, characterized in that the cleaning means is added to one side of the main exhaust pipe for automatically cleaning the butterfly valve It relates to an automatic pressure regulator.
Description
제1도는 종래의 자동압력조절기를 설명하기 위해 도시한 도면.1 is a view illustrating a conventional automatic pressure regulator.
제2도는 본 고안의 자동압력조절기를 설명하기 위해 도시한 도면.2 is a view for explaining the automatic pressure regulator of the present invention.
* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings
10, 20 : 주배기관 11, 21 : 버터플라이밸브10, 20: main exhaust pipe 11, 21: butterfly valve
22 : 주입탱크 23 : 저장탱크22: injection tank 23: storage tank
24-1, 24-2 : 가열부 25 : 제1밸브24-1, 24-2: heating section 25: first valve
26 : 제2밸브 27 : 밸브제어부26: second valve 27: valve control unit
A : 세정수단A: cleaning means
본 고안은 자동압력조절기에 관한 것으로, 특히 배기관 내의 압력을 조절하는 버터플라이밸브(buttrfly valve)에 증착된 고형분의 반응부산물을 제거하기에 적당한 자동압력조절기에 관한 것이다.The present invention relates to an automatic pressure regulator, and more particularly, to an automatic pressure regulator suitable for removing reaction by-products of solids deposited on a butterfly valve controlling a pressure in an exhaust pipe.
공정이 종료된 반응챔버(chamber) 내에서 반응부산물을 배기관을 통하여 배기되며, 이때 배기관에 형성된 자동압력조절기로써 배기관의 압력을 조절한다.The reaction by-product is exhausted through the exhaust pipe in the reaction chamber where the process is completed, and the pressure of the exhaust pipe is controlled by the automatic pressure controller formed in the exhaust pipe.
제1도는 종래의 자동압력조절기를 설명하기 위해 도시한 도면으로, 이하 첨부된 도면을 참고로 하여 종래의 자동압력조절기를 설명하면 다음과 같다.FIG. 1 is a view illustrating a conventional automatic pressure regulator. Hereinafter, a conventional automatic pressure regulator will be described with reference to the accompanying drawings.
종래의 자동압력조절기는 제1도와 같이, 주배기관(10) 내에 형성된 버터플라이밸브(11)와, 주배기관(10) 내의 압력값을 측정하는 압력게이지(gauge)와, 압력게이지에서 측정되어 입력된 압력값을 전기적인 신호로 출력하는 압력제어부와, 압력제어부에서 출력된 전기적인 신호에 따라 주배기관(10)에 설치된 버터플라이밸브(11)를 동작시키는 밸브구동부로 이루어진다.Conventional automatic pressure regulator, as shown in Figure 1, the butterfly valve 11 formed in the main exhaust pipe 10, the pressure gauge (gauge) for measuring the pressure value in the main exhaust pipe (10), is measured and input from the pressure gauge The pressure control unit for outputting the pressure value as an electrical signal, and the valve driving unit for operating the butterfly valve 11 installed in the main exhaust pipe 10 in accordance with the electrical signal output from the pressure control unit.
종래의 자동압력조절기의 버터플라이밸브(11)에 고형분 등의 반응부산물이 증착될 시, 4 내지 6일마다 본체 내에서 자동압력조절기를 분리하고 버터플라이밸브(11)에 세정액을 분사하여 세정을 실시한 후 재정착을 하며, 자동압력조절기의 세정 종료 후, 재장착시 그 기능의 정상유무를 체크(check)하는 데 보통 3시간 정도의 별도의 시간이 소요되는 불편함이 생긴다.When reaction by-products such as solids are deposited on the butterfly valve 11 of the conventional automatic pressure regulator, the automatic pressure regulator is removed from the main body every four to six days, and the cleaning solution is sprayed on the butterfly valve 11 to perform cleaning. After re-installation, and after completion of cleaning of the automatic pressure regulator, it is inconvenient to take a separate time of about 3 hours to check the normality of the function when remounting.
또한, 자동압력조절기를 분리하여 세정함에 따라 그 동작이 불완전해서 주배기관 내의 압력조절기능의 불량을 초래하는 문제점이 발생된다.In addition, the separation and cleaning of the automatic pressure regulator causes a problem that the operation is incomplete, resulting in a failure of the pressure regulating function in the main exhaust pipe.
본 고안은 이러한 문제점을 해결하고자 안출된 것으로, 주배기관 내의 자동압력조절기의 버터플라이밸브에 고형분 등의 반응부산물이 증착될 시 자동으로 세정가능한 자동압력조절기를 제공하는 것을 목적으로 한다.The present invention has been made to solve this problem, it is an object of the present invention to provide an automatic pressure regulator that can be automatically cleaned when the reaction by-products such as solids are deposited on the butterfly valve of the automatic pressure regulator in the main exhaust pipe.
상기 목적을 달성하고자, 본 고안은 주배기관 내에 형성된 버터플라이밸브와, 주배기관 내의 압력값을 측정하는 압력게이지와, 압력게이지에서 측정되어 입력된 압력값을 전기적인 신호로 출력하는 압력제어부와, 압력제어부에서 출력된 전기적인 신호에 따라 주배기관에 설치된 버터플라이밸브를 동작시키는 밸브구동부로 이루어지는 자동압력조절기에 있어서, 주배기관의 일측에 세정수단이 부가되며, 세정수단으로는 액상의 세정제가 기화되는 주입탱크와, 기화된 세정제가 임시저장되는 저장탱크와, 주입탱크와 상기 저장탱크에 형성된 각각의 가열부와, 주입탱크와 상기 저장탱크를 연결시키는 통로인 제1배관과, 제1배관에 설치되어 온/오프를 제어하기 위한 제1밸브와, 주배기관과 저장탱크를 연결시키며, 저장탱크 내의 기화된 세정제가 주배기관 내로 이동되는 통로인 제2배관과, 제2배관에 설치되어 온/오프를 제어하기 위한 제2밸브와, 제1, 2밸브를 제어하기 위한 밸브제어부를 구비한 것이 특징이다.In order to achieve the above object, the present invention is a butterfly valve formed in the main exhaust pipe, a pressure gauge for measuring the pressure value in the main exhaust pipe, a pressure control unit for outputting the pressure value measured in the pressure gauge as an electrical signal, In the automatic pressure regulator comprising a valve driving unit for operating the butterfly valve installed in the main exhaust pipe in accordance with the electrical signal output from the pressure control unit, a cleaning means is added to one side of the main exhaust pipe, the liquid cleaning agent is vaporized The injection tank, the storage tank in which the vaporized detergent is temporarily stored, each heating unit formed in the injection tank and the storage tank, a first pipe which is a passage connecting the injection tank and the storage tank, and the first pipe. Installed on the first valve to control the on / off, the main exhaust pipe and the storage tank, the vaporized cleaner in the storage tank is the main Is characterized by a valve control unit for controlling the second valve and the first and second valve for controlling and a second pipe passage is moved into the engine, it is installed in the second pipe on / off.
제2도는 본 고안의 자동압력조절기를 설명하기 위해 도시한 도면으로, 이하 첨부된 도면을 참고로 하여 본 고안의 자동압력조절기를 설명하면 다음과 같다.2 is a view illustrating the automatic pressure regulator of the present invention. Hereinafter, the automatic pressure regulator of the present invention will be described with reference to the accompanying drawings.
본 고안의 자동압력조절기는 제2도와 같이, 주배기관(20) 내에 형성된 버터플라이밸브(21)와, 주배기관(20) 내의 압력값을 측정하는 압력게이지와, 압력게이지에서 측정되어 입력된 압력값을 전기적인 신호로 출력하는 압력제어부와, 압력제어부에서 출력된 전기적인 신호에 따라 주배기관에 설치된 버터플라이밸브(21)를 동작시키는 밸브구동부를 가진 종래와 같은 자동압력조절기에서 주배기관의 일측에 세정수단(A)이 부가된다.Automatic pressure regulator of the present invention, as shown in Figure 2, the butterfly valve 21 formed in the main exhaust pipe 20, the pressure gauge for measuring the pressure value in the main exhaust pipe 20, the pressure measured in the pressure gauge and input One side of the main exhaust pipe in the conventional automatic pressure regulator having a pressure control unit for outputting the value as an electrical signal, and a valve drive unit for operating the butterfly valve 21 installed in the main exhaust pipe in accordance with the electrical signal output from the pressure control unit Cleaning means A is added to the.
본 고안의 자동압력조절기의 세정수단(A)으로는 세정제가 저장되는 주입탱크(tank)(22)와, 주배기관(20)과 주입탱크(22) 사이에 형성된 저장탱크(23)와, 주입탱크(22)와 저장탱크(22)에 각각 형성된 가열부(24-1,24-2)와, 주입탱크(22)와 저장탱크(23)를 연결하는 배관에 형성된 제1밸브(25)와, 주배기관(20)과 저장탱크(23)를 연결하는 배관에 형성된 제2밸브(26)와, 제1, 2밸브(25)(26)를 제어하기 위한 밸브제어부(27)를 포함하여 이루어진다.The cleaning means (A) of the automatic pressure regulator of the present invention includes an injection tank (22) in which a detergent is stored, a storage tank (23) formed between the main exhaust pipe (20) and the injection tank (22), and injection. Heating parts 24-1 and 24-2 formed in the tank 22 and the storage tank 22, and a first valve 25 formed in a pipe connecting the injection tank 22 and the storage tank 23; And a second valve 26 formed in a pipe connecting the main exhaust pipe 20 and the storage tank 23, and a valve control unit 27 for controlling the first and second valves 25 and 26. .
그리고 본 고안의 자동조절기의 동작을 제2도를 참고로 하여 설명하면 다음과 같다.And the operation of the automatic regulator of the present invention with reference to Figure 2 as follows.
우선, 주입탱크(22)에 보관된 액상의 세정제를 가열부(24-1)로 가열하여 기화시키며, 주입탱크(22) 내의 증기압이 일정압 이상이 되면 제1밸브(25)가 자동으로 온(on)된다.First, the liquid detergent stored in the injection tank 22 is vaporized by heating with the heating part 24-1. When the vapor pressure in the injection tank 22 becomes higher than a predetermined pressure, the first valve 25 is automatically turned on. (on)
여기서 제1밸브(25)가 온되면 기상의 세정제는 주입탱크(22)에서 저장탱크(23)로 운반되어 저장된다.Here, when the first valve 25 is turned on, the gaseous detergent is transported from the injection tank 22 to the storage tank 23 and stored.
그리고 반응챔버 내의 막증착공정이 완료되면 제2밸브(26)가 자동으로 온되고, 저장탱크(23)에 저장된 기상의 세정제는 주배기관(20) 내로 운반되며, 주배기관(20) 내로 운반된 기상의 세정제로 버터플라이밸브(21)에 형성된 고형분 등의 반응부산물을 제거한다.When the film deposition process in the reaction chamber is completed, the second valve 26 is automatically turned on, and the gaseous detergent stored in the storage tank 23 is transported into the main exhaust pipe 20, and is transported into the main exhaust pipe 20. Reaction by-products such as solids formed in the butterfly valve 21 are removed with a gas phase cleaning agent.
이때, 주입탱크(22)에 형성된 가열부(24-1)는 액상의 세정제를 가열하여 기화시키고, 또한 저장탱크(23)에 형성된 가열부(24-2)로는 주입탱크(22)에서 운반된 기상의 세정제가 액화되지 않도록 유지시키는 기능을 갖으며, 가열부(24-1,24-2)로는 주로 가열코일을 사용한다.At this time, the heating part 24-1 formed in the injection tank 22 heats and vaporizes the liquid detergent, and the heating part 24-2 formed in the storage tank 23 is carried in the injection tank 22. It has a function to keep the gas phase cleaner from being liquefied, and a heating coil is mainly used as the heating units 24-1 and 24-2.
여기에서 주배기관(20) 내의 버터플라이밸브(21)에 형성된 고형분 등의 반응부산물을 응고하여 제거시키는 액상의 세정제로는 암모니아수(HN4OH)를 사용한다.Here, ammonia water (HN 4 OH) is used as a liquid detergent for solidifying and removing reaction by-products such as solids formed in the butterfly valve 21 in the main exhaust pipe 20.
본 고안의 자동압력조절기는 종래의 자동압력조절기에 세정수단을 부가하여 자동으로 주배기관 내의 버터플라이밸브에 형성된 고형분 등의 반응부산물을 제거할 수 있어, 별도로 분리하여 세정하는 수고로움을 덜 수 있을 뿐 더러 장비의 가동율을 향상시킬 수 있고, 효율적으로 장비를 운영할 수 있다.The automatic pressure regulator of the present invention can remove the reaction by-products such as solids formed in the butterfly valve in the main exhaust pipe by adding a cleaning means to the conventional automatic pressure regulator, thereby reducing the trouble of separately separating and cleaning. In addition, the operation rate of the equipment can be improved, and the equipment can be operated efficiently.
또한, 교체주기에 관계없이 안정적인 압력조절이 가능하므로 균일한 막을 증착할 수 있다.In addition, stable pressure control is possible regardless of the replacement cycle, so that a uniform film can be deposited.
Claims (4)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950038593U KR200149914Y1 (en) | 1995-12-06 | 1995-12-06 | Automatic press controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950038593U KR200149914Y1 (en) | 1995-12-06 | 1995-12-06 | Automatic press controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR970046619U KR970046619U (en) | 1997-07-31 |
| KR200149914Y1 true KR200149914Y1 (en) | 1999-06-15 |
Family
ID=19432203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019950038593U KR200149914Y1 (en) | 1995-12-06 | 1995-12-06 | Automatic press controller |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR200149914Y1 (en) |
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1995
- 1995-12-06 KR KR2019950038593U patent/KR200149914Y1/en not_active IP Right Cessation
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| Publication number | Publication date |
|---|---|
| KR970046619U (en) | 1997-07-31 |
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