KR20010096560A - unmanned transferring apparatus for workpiece container and method of transferring it with the same - Google Patents

Abstract

PURPOSE: An unmanned conveying system is provided, in which guide rails are arranged below the container load port, to thereby allow a worker to approach equipment in an easy and safe manner, while simplifying configuration of the system by eliminating the necessity of using multi-axis robot. CONSTITUTION: An unmanned conveying system comprises a container loading port(106) attached to the front surface of an entrance/exit chamber of an equipment(100) and protruded toward a bay, and which supports a workpiece container(120) or release such supporting; a lifter(114) having a support board(114a) formed integrally with the lifter, and which moves the support board in a vertical direction underneath the container loading port, loads the container being supported by the container loading port or unloads onto the container loading port the container unloaded onto the support board; a shuttle(110) having the lifter integrally mounted onto the shuttle, and which moves underneath the container loading port in accordance with the operation control signal; and a guide rail(108) installed along the bottom area directly underneath the container loading port, and which guides the shutter to move.

Description

Unmanned transfer apparatus for workpiece container and method for transferring workpiece container using same {unmanned transferring apparatus for workpiece container and method of transferring it with the same}

The present invention relates to an apparatus and method for the automation of logistics in a factory, and more particularly, to an unmanned transfer apparatus and a method for transferring the container containing a workpiece, such as a wafer, from one work facility to another work facility. It is about.

In the process of manufacturing a semiconductor device, for example, a photo process, a deposition process, an etching process, a thin film forming process, and the like, a number of processes are performed. For this process, a plurality of wafers are embedded in a container and delivered. In the delivery method of the container containing the wafer, there is a manual delivery by an operator and an unmanned automatic delivery by an unmanned transportation system. The wafer size is now 8 inches, and as the process capacity improves, 12 inches is also recently used. The 12-inch wafer has a cross section of 2.25 times that of the 8-inch wafer and a box of 25 sheets weighs about 8.5 kg. Therefore, in mass production lines using 12-inch wafers, the need for unmanned transportation systems and the degree of their adoption are expected to increase.

In the case of a wafer container having a wafer size of 8 inches, an open wafer cassette is frequently used. However, in order to prevent contamination that may occur during a wafer transfer process, a container, such as a representative example, is loosened. Front open unified pod (FOUP) (hereafter referred to as FOUP 'is synonymous with workpiece container or wafer container). In particular, FOUP is widely used as it is known as a transport container that harmonizes well with an unmanned transportation system.

Representative examples of the unmanned transport apparatuses are overhead transfer (OHT) or overhead conveyor (OHC) systems and automatic guided vehicles (AGV or RGV) systems.

The OHT (or OHC) system installs linear rails 18a, 18b on the ceiling and hangers 22a, 22b on the ceiling as shown in FIG. And hang the FOUP 20a beneath the hanger 22a and move along the linear rail and FOUP index of the designated process equipment (hereafter FOUP cradle is used synonymously with the load port) (16a). FOUP (20b) in the FOUP cradle (16b) or by lifting the linear rail to the other designated process equipment and lowered in the FOUP cradle to deliver the FOUP. For reference, there is an invention proposed through US Patent No. 5,927,472 entitled “conveyor transfer unit“ as an example of such an OHT system. Since the OHT system utilizes the upper space of the FOUP indexes 16a and 16b, it is possible to reduce the interval W1 between the FOUP indexes or the distance B1 of the bays (bays), which is advantageous in terms of space integration and space utilization of the equipment.

However, since the OHT system is installed on the ceiling of the clean room bay (bay), it has the following disadvantages. First, in order to deliver the FOUP for 12-inch wafers, it is necessary to install a strong structural material due to its weight. Second, considering that the height of the clean room is generally about 4m, the installation height of the OHT system is high, so a work tool such as a ladder and a separate free space for the ladder are required for maintenance work. Third, when a power failure such as a power failure occurs, it is almost impossible for a worker to manually move the FOUP in consideration of the weight of the FOUP in which the wafer is contained. Fourth, if the information or the identification tag for the run (hang) hanging with the FOUP is large and unclear, the operator is difficult to check the run unless the computer screen. Fifth, considering the weight and height of the FOUP in the OHT system, it is necessary to install a stabilizer such as a guard rail for safe movement. Sixth, since the distance between the FOUP index of the facility, that is, the load port and the OHT is far, it takes a long time to load and unload the FOUP. Finally, the loading and unloading paths of the FOUPs intersect the parts of the installation where the user interface (operation panel) is primarily installed, which limits the installation of the user interface. These problems are more than enough to offset the advantages of high integration of the OHT system.

Next, as shown in FIG. 2, the AGV system suspends and moves the FOUPs 20a and 20b using the auto guided vehicles 22a and 22b having the multi-axis joints and FOUPs to the FOUP indexes 16a and 16b of the designated process equipment. Load or unload (20a, 20b). For reference, there is an invention proposed through US Patent No. 5,332,013 entitled “unmanned conveying device in clean room” as one example according to this AGV system.

However, the AGV system has the following disadvantages. First, since the width of the embryo is needed, the density of equipment in the clean room is low. As illustrated in FIG. 2, the maximum width B2 of the row to be secured is the load ports 16a and 16b of the two installations in the bay, a space for two AGVs positioned side by side, and a load / unloading operation and two AGVs. It is necessary to move the worker space between. Second, there is always a risk of safety accidents when working in a ship at the same time as a mobile robot, that is, an AGV and an operator. Third, since the AGV uses a multi-axis robot, its size (or weight) is quite large, limited by the moving speed, and it is difficult to install a large number in the belly space. Fourth, in case of 12-inch wafers, the number of FOUPs that can be transported per AGV is limited and the price per unit is expensive.

In order to make up for the shortcomings of the prior art as described above, the first object of the present invention is to move the lower space of the FOUP index (load port or vessel holder) of the process equipment according to the guidance of the guide rail, It provides an unmanned transfer device that can automatically deliver workpiece containers such as wafers that can be loaded / unloaded to the FOUP index through motion.

Furthermore, a second object of the present invention is to provide a method of controlling the unmanned transportation apparatus for achieving the first object so that the container can be properly loaded / unloaded.

The third object of the present invention is a horizontal feeder for delivering a wafer carrier is installed in a space below the FOUP index (load port or vessel holder) of the wafer processing apparatus, i. The present invention provides a wafer carrier unmanned automatic transfer device that can efficiently utilize the installation space of a device by loading / unloading a wafer carrier at a wafer entrance.

It is a fourth object of the present invention to provide a method for controlling the unmanned automatic transfer apparatus for achieving the third object so as to properly load / unload the wafer carrier.

Detailed description of the embodiments of the present invention will be made with reference to the accompanying drawings, in which numerals designating corresponding parts in the drawings are the same.

1 is a transfer conceptual view of a wafer container according to a conventional OHT or OHC system.

2 is a conceptual diagram of a transfer of a wafer container according to a conventional AGV system.

3 exemplarily shows an overall configuration of an unmanned transportation system installed in a bay according to a preferred embodiment of the present invention.

4 is a cross-sectional view taken from the line A-A in FIG. 3 to explain the installation position of the container holder, the guide rail and the transport shuttle.

5A and 5B are respectively a perspective view showing the structure of the container holder and the transport shuttle according to the first embodiment and a cross sectional view taken on line B-B, and FIG. 5C is a cross sectional view taken on line C-C in FIG. 5B.

6A and 6B are respectively a perspective view and a cross-sectional view taken along line B-B showing the structure of the container holder and the transport shuttle according to the second embodiment.

7A and 7B are side cross-sectional views and plan views showing the structure of a transport shuttle provided with a vertical two-stage structure, respectively.

8A to 8E are operation state diagrams for explaining the loading process of transferring the wafer container from the transport shuttle to the container holder.

9 is a flowchart illustrating a work processing procedure of a loading process.

10A to 10E are operation state diagrams for explaining an unloading process of lowering a wafer container from a container holder to a transport shuttle.

11 is a flowchart for explaining a job processing procedure of an unloading process.

12A to 12C show various examples of guide rails forming an open loop or a closed loop.

Figure 13 shows an exemplary semiconductor manufacturing line employing the wafer carrier unmanned automatic transfer device according to the present invention.

14 is a side view of the wafer carrier unmanned automatic transfer device of FIG. 13.

15 is a front view of the wafer carrier unmanned automatic transfer device of FIG.

FIG. 16 is a perspective view for explaining a preferred embodiment of the vertical conveyor of FIG.

FIG. 17 is a block diagram illustrating the control configuration of FIG. 13.

18 is an exemplary perspective view of a modified embodiment of the semiconductor manufacturing line employing the wafer carrier unmanned automatic transfer device according to the present invention.

19 is a side view of another embodiment of the wafer carrier unmanned automatic transfer device according to the present invention.

20 is a front view of the wafer carrier unmanned automatic transfer device of FIG.

<Description of the symbols for the main parts of the drawings>

100: process equipment 102: stocker

104: transfer robot

106, 106a, 106b: vessel holder (or FOUP INDEX)

108, 108a, 108b: guide rails 110, 110a-110g: transport shuttle

114: lifter 114a: pedestal

116, 116a-116h: support pins 130, 130a, 130b, 140a, 140b: motor

132, 132a, 132b: control part 136a-136h: spring

138a to 138h: solenoid 150, 150a, 150b: transceiver

160: hydraulic cylinder 120: container (or FOUP)

200: central control system 201: wafer processing process equipment

202: entrance chamber 204: wafer entrance

206: transfer robot 208: processing chamber

210: load lock 300: conveyor or horizontal conveyor

302: transfer surface 400: wafer carrier

402: side projection 500: vertical feeder

502: grip arm 504: support piece

506, 540: housing 508: transfer space

510, 518: feed screw 512; Guide member

514: mobile body 516: motor and gearbox

520: y conveying member 522: control unit

542: holding rod 544: vacuum adsorption head

To achieve the first object, to transfer a container containing a workpiece from one facility to another in a process environment having one or more installations located along the edge of the bay. Disclosed is an unmanned transportation device for the same.

Each of the facilities is provided with a container holder for fixing to the front surface of the entrance chamber and projecting horizontally toward the belly to support the container or to release the support for the container.

The unmanned transfer shuttle is integrally coupled with a pedestal for placing the container, and the pedestal is moved vertically under the container holding means to download the container supported by the container holding means or to unload the container. Lifting means for loading a loaded vessel onto the vessel placement means; And the lifting means is integrally mounted and has a shuttle means for moving directly under the container holding means designated by the operation control signal by utilizing a space directly under the container holding means.

The unmanned transportation device preferably further comprises a guide rail installed along the bottom of the vessel holding means of the vessel to guide the driving means to run through the space directly below the container placing means.

In addition, the unmanned transfer device preferably further includes a transmission and reception means for wireless communication with an external central control device. The unmanned transfer shuttle transmits its position information and state information to the central control unit through the transmission and reception means, and performs driving and loading / unloading operations in response to the control signal received from the central control unit.

In the unmanned transportation apparatus according to the first embodiment of the present invention,

In an unmanned transfer device for transferring a container containing a wafer from one facility to another in a clean room for semiconductor manufacturing having one or more facilities arranged along the edge of the bay,

A square or U-shaped support member which is fixed to the front surface of the entrance chamber and protrudes horizontally toward the belly and the center portion is drilled to allow the container to pass therethrough, and protrudes toward the drilled center portion of the support member; One or more support pins for retracting the container when passing through the support member for loading or unloading the container to the support member, and protruding of the support pin in response to a predetermined control signal for supporting the container. Container holding means for supporting or releasing support for the container, including pin control means for controlling the retraction and retraction;

A stand for integrally placing the container is integrally provided, and the stand is vertically moved directly under the container holding means to download a sealed container supported by the container holding means or an airtight container which is unloaded in the pedestal. Lifting means for laying down on the container holding means;

A driving means which is integrally mounted with the lifting means and moves directly under the container holding means designated by the operation control signal by utilizing a space directly under the container holding means; And

And a guide rail installed along the bottom of the vessel holding means of the vessel to guide the driving means to travel through the space directly below the container holding means.

Furthermore, the unmanned transportation apparatus according to the second preferred embodiment of the present invention,

In an unmanned transfer device for transferring a container containing a wafer from one facility to another in a clean room for semiconductor manufacturing having one or more facilities arranged along the edge of the bay,

The center portion is a U-shaped opening that allows the container to pass through, and the support member and the support member are rotated by 90 degrees to the support member and the support member is coupled to the front surface of the entrance chamber is rotatable 90 degrees to the container Driving means for controlling the support member to retreat in parallel to the side wall surface of the access chamber during the ascending or descending, and to control the support member to protrude horizontally toward the belly by rotating the support member 90 degrees. Container holding means for supporting or releasing support for the container;

And a pedestal for placing the container integrally, the pedestal is moved vertically under the container holding means to download the container supported by the container holding means, or the container loaded on the pedestal Lifting means for laying down on the means;

Shuttle means which is integrally mounted with the lifting means, and moves directly below the container holding means designated by the operation control signal by utilizing the space directly below the container holding means; And

And a guide rail installed along the bottom of the vessel holding means of the vessel to guide the driving means to travel through the space directly below the container holding means.

On the other hand, in order to achieve the second object of the present invention, there is provided a method for controlling the transfer of the vessel from one facility to another using one or more unmanned transfer devices running along the guide rail. This method is characterized in that each of the one or more installations arranged along the edge of the bay has a vessel holder for supporting or releasing the vessel containing the workpiece, protruding horizontally from the front side of the entrance chamber to the vessel. It can be realized in the workplace where guide rails are installed along the floor below the container base of the container.

This method moves one unmanned conveying device directly under the vessel holder of the facility that has requested the delivery, lifts the lifting means coupled with the vessel holder vertically, slightly lifts the vessel placed on the vessel holder, and lifts the vessel. Retracting the supporting member and then lowering the lifting means to lower the container onto the unmanned transportation device; And moving the unmanned transportation device carrying the container directly under the container holder of the destination facility, retracting the supporting member and simultaneously lifting the lifting means vertically so that the height of the container support is higher than the horizontal level of the supporting member. Positioning slightly higher, restoring the support member to its original position and then lowering the lifting means to unload the vessel onto the vessel holder.

In addition, the method is preferably one unmanned transfer apparatus capable of responding to the transfer request most quickly by analyzing the information about the transfer request, including the location information sent by a plurality of unmanned transfer devices and information about the origin and destination Further comprising the step of selecting.

The wafer carrier unmanned automatic transfer device according to the present invention for achieving the above-mentioned third object is to transfer the wafer carrier to a plurality of wafer processing apparatuses arranged in the x-axis direction in a clean room and formed with a wafer entrance in the front center thereof. A wafer carrier transporter for a device comprising a horizontal feeder, a vertical feeder, and a controller.

The horizontal conveyer is disposed adjacent to the front of the wafer processing apparatus, has a conveying surface at a lower position than the wafer entrance, extends in the x-axis direction, and conveys the wafer carrier in the x-axis direction.

Vertical conveyors are respectively installed in front of the wafer processing apparatuses and vertically move the wafer carrier by moving vertically in the z axis direction between the wafer entrance and the transfer surface of the horizontal conveyor.

The control unit horizontally transfers the wafer carrier to each wafer processing apparatus by position control of the horizontal feeder, and controls the wafer carrier to vertically feed the wafer carrier through the position control of the vertical feeder.

The horizontal conveyor is preferably composed of a rolling roller conveyor or a linear unmanned shuttle in an unused space at the bottom of the existing pull index.

In the present invention, an efficient configuration of the vertical conveyor is required to move the wafer carrier up and down from the existing pull index to the wafer entrance.

According to one preferred embodiment of the vertical conveyor, a housing is disposed in front of each wafer processing apparatus, is opened and moved forward and backward, and has a center having a space including the wafer entrance and the transfer surface of the horizontal conveyor, and the left and right inner surfaces of the housing. A pair of z-axis transporting means installed in the z-axis direction, a pair of z-axis moving bodies moved up and down by the respective vertical transporting means, and fixed to each of the z-axis moving bodies, and a wafer processing apparatus And a pair of grip arms for protruding forward to have a length that includes a side grip end of the wafer carrier which is transferred through the horizontal transfer means from the front surface of the wafer carrier.

Here, the holding arm has a y-axis transfer means for transferring the wafer carrier in the y-axis direction, and a support piece for being transferred in the y-axis direction by the y-axis transfer means and supporting the side grip portion of the wafer carrier. It is preferable to have a y-axis moving body.

One example of the z-axis feed means of the vertical feeder is composed of a rotary motor capable of reverse rotation and a feed screw rotated by the rotary motor, wherein each z-axis moving body is screwed to the feed screw to rotate the feed screw. It is conveyed up and down along the vertical guide plane.

Another example of the z-axis conveying means consists of a fluid cylinder for conveying the piston up and down by hydraulic pressure, and each of the z-axis moving bodies is attached to the rod end of the piston and is conveyed up and down along the vertical guide plane.

Another example of the z-axis feed means consists of a stator of a linear motor with a guide rail, and the mover of the linear motor consists of a z-axis moving body.

The wafer carrier unmanned automatic transfer method according to the present invention for achieving the above-described fourth object is directly below the wafer entrance to each of a plurality of wafer processing apparatuses arranged in the x-axis direction in the clean room and having a wafer entrance in the front center thereof. A wafer carrier transfer method for transferring a wafer carrier in a room in an up-down manner, the method comprising: transferring a wafer carrier using a conveyor directly below a front surface of a wafer entrance of each wafer processing apparatus, and a wafer carrier directly below a front surface of a wafer entrance Transferring the gripping arm from an upper limit position to a lower limit position upon reaching, gripping a wafer carrier from the lower limit position to a gripping arm, and vertically transferring the gripping arm to an upper limit position, which is a wafer entrance and exit position.

Here, the step of holding the wafer carrier with the gripping arm comprises the step of supporting the side projection of the wafer carrier by moving the support piece installed on the gripping arm from the rear position to the front position, wherein the gripping arm reaches the upper limit position. It is preferable to include the step of moving the support piece from the front position to the rear position.

In the present invention, it is preferable to have a pair of wafer entrances and a pair of vertical conveyors for the efficiency of work in each wafer processing apparatus.

According to another embodiment of the present invention, the vertical conveyor is installed directly above the front surface of the wafer entrance, and the top surface of the wafer carrier is gripped by a vacuum suction head.

According to the unmanned transfer device and the transfer method using the same of the present invention as described above, since the guide rail is located under the vessel holder to improve the accessibility and stability of the worker's process equipment. The multi-axis robots required by the AGV system are no longer needed and simply require a simple lift that can move up and down vertically, simplifying the device. Since the transfer shuttle operates by utilizing the lower space of the vessel holder, it is possible to reduce the width of the vessel to increase the equipment integration or space utilization in the clean room and lower the maintenance cost. In addition, since it is possible to prepare a work space for working with the worker at the same time, emergency or irregular manual run flows such as a power failure are possible.

DETAILED DESCRIPTION Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, and other features and advantages of the present invention will be described with reference to the following detailed description and accompanying drawings that illustrate features of various embodiments of the present invention. This will make it clearer.

3 exemplarily shows an overall configuration of an unmanned transportation system installed in a bay according to a preferred embodiment of the present invention. Baits 122a and 122b are provided in the clean room for an unmanned transportation device or a worker's work space, and both edges 109a and 109b of the bait are containers containing a work such as a wafer, for example, a FOUP ( A plurality of stockers 102 and 102a for storing 120 and 120a to 120c or process equipment 100 and 100a to 100f (hereinafter referred to as 'equipment') are installed side by side.

At the bottom of the vessel there are long guide rails 108, 108a-108c along the front of these installations, in particular the guide rails located just below the vessel holder 106 of the installation. Preferred examples of the guide rail include a track such as a magnetic tape or a railroad track. In the case where the magnetic tape is used as the guide rail, the magnetic tape may be attached to the bottom surface of the vessel along the running route. As another option, in the case of employing the iron track as a guide rail, as shown in FIG. 4, a trench is formed by digging a bottom of the bow a little along the driving path and installing the iron track 108 along the trench. do. The bottom of the clean room of the semiconductor factory is grating, which cuts the grating down slightly to secure the path through which the iron orbit 108 is laid.

The installation form of the guide rail 108 can be variously taken. For example, as illustrated in FIG. 12A, each embryo may be installed to form a separate open loop along both edges of the embryo. Alternatively, as illustrated in FIGS. 12B and 12C, respectively, it may be installed to form a closed loop along both edges of the embryo, or may be installed to form a closed loop following the edges of the plurality of embryos.

A plurality of transfer shuttles (110, 110a ~ 110g) is located on the rail 108, each transfer shuttle is the central control system 200 to communicate their location information and status information while performing wireless communication with the central control system (200) And the FOUP are loaded and unloaded in response to the control signal received from the central control system. If the guide rail is installed as an open loop, the transfer shuttle performs a straight reciprocating operation between both ends of the guide rail. When the guide rail is configured as a closed loop, that is, a circulation loop, the transfer shuttle travels the closed loop while changing the direction along with the linear motion.

4 is a cross-sectional view taken from the line A-A in FIG. 3 to explain the installation position of the vessel holder 106, the guide rail 108 and the transport shuttle 110 of the installation (100 or 102). In the case of process equipment, in order to perform a process on a wafer, a transfer robot 104 installed in the entrance chamber draws the FOUP 120 loaded on the container holder 106 into the load lock of the process equipment. It is enclosed in (103). On the contrary, after the process is completed, the transfer robot 104 pulls out the FOUP in the load lock 103 and places it in the container holder 120. Such operations in the process equipment, as well as the operation of the transport shuttle from the outside of the process equipment and the loading and unloading operation of the FOUP 120 are made through wired and wireless communication with the central control system 200.

5A and 5B are perspective views and cross-sectional views in line B-B, which exemplarily illustrate a preferred embodiment of the configuration of the container holder 106 and the transport shuttle 110. 5C is a cross-sectional view of vessel holder 106 for line C-C.

The transport shuttle 110 is basically a plurality of wheels 135 for driving, the transmission and reception unit 150 for wireless communication with the central control system 200, and their location information through the transmission and reception unit 150 The controller 132 provides driving information to the central control system 200 or conversely controls driving or loading / unloading operations according to control information provided by the central control system 200.

In addition, the transport shuttle 110 has a configuration that can operate in a predetermined driving path in response to the guide rail 108. The related configuration depends on the type of guide rail. When the guide rail 108 is an iron track, the transport shuttle 110 engages the engaging member 134 slidably engaged with the iron track 108 at the bottom of the body, as shown in FIG. 4 or FIGS. 5A-5B. Has On the other hand, when the magnetic tape is installed as a guide rail, the transport shuttle 110 should be provided with a sensing means (not shown) capable of sensing a driving route by sensing the magnetic field formed by the magnetic tape. If the transport shuttle 110 is configured to be controlled by a geo-location information system (GPS), a guide rail or a means related thereto may be unnecessary, but the cost burden will be a problem.

The transport shuttle 110 further has lifting means for vertical vertical movement for loading or unloading the FOUP 120 into the vessel holder 106. The lifting means can be configured in various ways. A first embodiment of the lifting means is a folding arm assembly driven by a motor as illustrated in FIGS. 5A and 5B, which engages on both sides of the pedestal 114a, the motor 130, and the motor shaft for placing the FOUP 120. And a pair of gear assemblies 114c and 114d linearly moving in opposite directions, the lower end is slidably coupled to the pair of gear assemblies 114c and 114d, and the upper end is coupled to the pedestal 114a, and the center part is A foldable arm assembly 114b intersected with hinges. According to the rotational direction of the motor 130, the gap between the lower end of the arm assembly 114b coupled to the gear assemblies 114c and 114d opens or contracts, whereby the horizontal level of the pedestal 114a is lowered or raised.

A second embodiment of the lifting means utilizes a hydraulic drive mechanism. 6A and 6B are respectively a perspective view showing the configuration of the lifting means according to the hydraulic drive mechanism and a cross-sectional view seen from the line D-D. The lifting means according to this manner has a pedestal (114a) for placing the FOUP 120, the hydraulic cylinder assembly coupled to the upper end to support the pedestal (114a). The hydraulic cylinder assembly includes a hydraulic cylinder 160, a valve 162 for controlling fluid injection into the hydraulic cylinder 160, a fluid tank 168 for storing the fluid, and a fluid stored in the fluid tank 168. ), Or conversely, has a hydraulic pump 164 for drawing the fluid in the hydraulic cylinder 160 to the fluid tank 168. The lifting means may further comprise a hinged folding arm assembly to help the number average form of the pedestal 114a. For reference, the control unit 132a and the transceiver unit 150a are shown in the drawing. The former is for controlling the opening and closing of the valve 162 or the operation of the hydraulic pump 164, and the latter is the central control as mentioned above. It is in charge of wireless transmission and reception with the system 200. According to such a configuration, the controller 132a controls the operation of the hydraulic pump 164 and the valve 162 based on the loading / unloading information transmitted through the transmission and reception unit 150a to vertically move the hydraulic cylinder 160. You can.

On the other hand, the structure of the vessel holder 106 should be well matched with the fact that the loading / unloading of the FOUP 120 is made by the vertical movement of the lifting means. The structure according to the first embodiment of the container holder is shown in Figs. 5a to 5c. 5B is a cross-sectional view taken along the line B-B in FIG. 5A, and FIG. 5C is a cross-sectional view taken along the line C-C in FIG. 5B. As can be seen in the figure, the container holder 106 is fixed to the front wall of the entrance chamber and protrudes horizontally toward the belly, and the center ring-shaped support member and the center portion are drilled so that the FOUP 120 can pass through the support. It has a plurality of support pins to protrude toward the open central portion of the member to support the FOUP 120. Another selectable form of the support member is a “U” shaped support member in which the opposite side of the opening is coupled to the access chamber. These support pins need to be retracted back to prevent progression when passing the FOUP 120 through the support member for loading or unloading the support member. The horizontal and vertical dimensions of the centered opening of the support member are larger than that of the FOUP 120, allowing the FOUP 120 to pass through the center portion when the support pins are retracted. In addition, even when the support pins protrude, the pedestal (114a) preferably has a size that can pass through the center portion.

The configuration for controlling the protrusion and retraction of the support pins 116a, 116b, 116c, and 116d can be implemented in various ways using mechanical or electromagnetic principles. The figure shows a solenoid driven support pin as one example. The metallic support pins 116a to 116d are retracted into the support member by the magnetic field formed by the solenoids 138a to 138d receiving the excitation power supply, and the metallic support pins are separated by the elastic force of the springs 136a to 136d by blocking the supply of the excitation power supply. The support pins 116a to 116d protrude back to their original positions.

A configuration according to a second embodiment of the vessel holder is illustrated in FIGS. 6A and 6B. In this embodiment, the container holder 106a is a U-shaped opening in the center portion of the support member 106a and the lifting means of which the edge facing the opening is rotatably coupled 90 degrees with the front side wall of the entrance chamber. Corresponding to the vertical movement is provided with a motor (140a, 140b) for retracting the support member parallel to the front side wall of the entrance chamber or horizontally projected toward the belly. The width D2 of the center portion of the perforated support member is narrower than the width D3 of the vessel 120 and wider than the width D1 of the pedestal 114a. By the driving of the motor 140a, the supporting member 106a is provided with the front side wall of the entrance chamber so as not to disturb the movement of the lifting means while the lifting means is raised or lowered while the FOUP 120 is mounted on the pedestal 114a. Retract in parallel, and in other cases, rotate 90 degrees toward the abdomen and protrude horizontally.

7A and 7B are side cross-sectional views and plan views showing the structure of a transport shuttle provided with a vertical two-stage structure, respectively. The transport shuttle 110b includes a transceiver 150b, a controller 132b, and an engaging member 134 of the wheel 135 and the rail 108 having the same function as in the previous example. As a characteristic, the lifting means of the transport shuttle (110b) is a pedestal (184, 186) provided in two stages up and down, and the gear train (189) integrally coupled with these two stage pedestals and arranged at regular intervals along one side edge. The subsidiary plate 182, the motor 130b for generating the rotational power under the control of the controller 130b, and the gear train of the subsidiary plate 182 are engaged to transfer the rotational power of the motor 130b to the subsidiary plate 182. Has a chain 188. In general, since the equipment 100 or 102 has a structure having two container bases left and right, in the case of a two-stage structure, two FOUPs can be loaded or unloaded in one visit, thereby further increasing work efficiency. You can.

In addition, it is preferable that the container holder 106b adopt a 'U' shape that is easy to match with the rising of the auxiliary plate 182 as shown in FIG. 7B. And the support pins (116e ~ 116h) has a structure that can protrude and retreat by the interaction of the spring (136e ~ 136h) and the solenoid (138e ~ 138g) as described above.

Next, the loading process of the FOUP 120 will be described with reference to FIGS. 8A to 8E and 9. Loading transfers the FOUP to work from the wafer storage facility, namely the stocker 102 to the process equipment 100, or transfers the finished FOUP from the process equipment 100 to the stocker 102. In order to transfer the FOUP from the container holders 106a and 106b to the transport shuttle 100,

The loading operation is performed as follows. First, a single transport shuttle 110 that is not currently performing a mission is moved directly under the container holder 106b of the facility 102 that made a work request. At this time, the central control system 200 determines which transport shuttle should meet the above work request. The central control system 200 analyzes the delivery request information including individual location information sent by a plurality of transport shuttles and information on the origin and destination sent by the facility that sent the work request, and can respond to the delivery request most quickly. Select one transport shuttle. Thereafter, the central control system 200 provides the selected transport shuttle with location information of the destination and destination equipment, job information to be performed, that is, information about whether it is a loading job or an unloading job. In this way, the transport shuttle 110, which has received the movement and the work instruction, is moved under the container cradle of the facility which made the work request along the guide rail 108 (FIG. 8A, steps S10 to S16).

After the movement, the transport shuttle 110 lifts the lifter 114 and slightly lifts the container 120 placed on the container holder 106 to the pedestal 114a (FIG. 8B, step S18).

Subsequently, the excitation power supply was turned on to the solenoids 138a to 138d to retract the support pins 116a to 116d that supported the container 120 into the support member 106 (the second embodiment shown in FIGS. 6A and 6B). In the case of the container holder according to the example, the motor 140a is driven to rotate the support member 106a by 90 degrees so as to be retracted to be parallel to the front side wall of the entrance chamber. Then, the lifter 114 is lowered to transport the FOUP 120. It is put down on the shuttle 110 (FIGS. 8C and 8D, steps S20 and S22). Thereafter, power supply to the solenoids 138a to 138d or the motor 140a is cut off, and the support pins 116a to 116d or the support member 106a are returned to their original positions (FIG. 8E and step S24).

Next, the unloading process of the FOUP 120 will be described with reference to FIGS. 10A to 10E and 11. Unloading refers to the operation of placing the FOUP on the container at the transport shuttle to transfer the FOUP to the process equipment or to transfer the processed FOUP to the stocker.

First, the transfer shuttle 100 carrying the FOUP 120 loaded by the above loading process moves directly below the container holder 106b 'of the destination facility 100 indicated by the central control system 200. (FIG. 10A, step S26).

When the arrival of the transportation shuttle 110 is confirmed, the excitation power is supplied to the solenoid from the container holder 106b 'to retract the support pins 116a to 116d. In the case of the container holder according to the second embodiment shown in FIGS. 6A and 6B, the motor 140a is driven as described above to rotate the support member 106a by 90 degrees so as to retreat in parallel with the front side wall of the access chamber (FIG. 10B). , Step S28).

Then, the lifter 114 is vertically raised so that the height of the container holder 114a on which the FOUP 120 is loaded is slightly higher than the horizontal level of the container holder 106b '(FIG. 10C, step S30).

Thereafter, the excitation power supply of the solenoid is cut off and the support pins 116a to 116d are returned to their original positions, or the power is supplied to the motor 140a to rotate the support member 106a 90 degrees (Fig. 10D, step S32).

Subsequently, the lifter 114 is lowered so that the FOUP 120 is supported by the support pin and placed on the container holder 106b '(Fig. 10E, step S34).

By following the above-described processing procedure, the loading and unloading of the FOUP 120 is performed, so that FOUP delivery to a desired place is realized. According to the shape of the guide rail in this delivery process, the transport shuttle may move only to the left and right linear motion (in the case of the open loop of FIG. 12A) or to meet the end of the embryo or enter another embryo along with the linear movement. . More precise traffic control is beyond the scope of the present invention and will not be described in detail.

In the embodiment of the present invention described above there is a side to utilize the sealing characteristics of the FOUP. Wafer containers, such as open wafer cassettes, which are not guaranteed to be sealed, are undesirable because they are susceptible to falling contaminants since the transfer operation takes place at the bottom of the container holder.

Another embodiment of the present invention will be described as follows.

Figure 13 shows an exemplary semiconductor manufacturing line employing the wafer carrier unmanned automatic transfer device according to the present invention.

In the clean room, a bin B3 is provided for an unmanned transfer device or a worker's work space, and at both edges of the bin B3, a container for storing a wafer, for example, a stocker for storing a FOUP. The wafer processing plant equipment 201 is installed side by side. The wafer processing equipment 201 includes a processing chamber 208 having an entrance chamber 202 and a load lock 210 formed at the front center of the wafer entrance 204. In the entrance chamber 202, the wafer is received in a sheet from the wafer carrier 400 located at the wafer entrance 204 and provided to the load lock 210, or the wafer of the load lock 210 is provided to the wafer carrier 400. It includes a multi-joint transfer robot 206 to.

At the bottom of the vessel B3 a rolling roller conveyor 300 is arranged along the front of these equipment. In particular, the rolling roller conveyor 300 is disposed in the space directly below the pull index projecting forward in the center of the front of the conventional equipment 201. The conveying surface height of the rolling roller conveyor 300 is relatively lower than the height of the wafer entrance 204, that is, when one wafer carrier 400 waits at the wafer entrance 204, it collides with the waiting wafer carrier. It must be designed to be lower than the height difference that other wafer carriers can pass through.

In the present invention, a vertical conveyor 500 is installed between the entrance chamber 202 and the conveyor 300 to raise the wafer carrier carried through the conveyor to the wafer entrance 204 at a high position.

Since the vertical conveyor 500 is configured as a structure for transferring the grip arm 502 protruding forward, in the vertical direction, the vertical conveyor 500 can significantly reduce the depth of the front and rear relative to the existing pull index, that is, the wafer carrier holder. Therefore, as much as the existing wafer carrier holder is removed, the space of the embryo B3 can be utilized.

FIG. 14 is a side view of the wafer carrier unmanned automatic transfer apparatus of FIG. 13, and FIG. 15 is a front view of the wafer carrier unmanned automatic transfer apparatus of FIG. 13.

As shown in FIG. 15, the wafer carrier 400 has a protrusion 402 projecting on the left and right sides thereof, that is, the side handle 402 of the wafer carrier supported and picked up by the support piece 504 of the grip arm 502. do. Here, the side handle 402 of the wafer carrier 400 should be kept horizontal without the bottom surface thereof inclined.

The vertical conveyor 500 has a workspace 508 open back and forth in the center with a rectangular housing 506. Workspace 508 has an area enough to include wafer entrance 204 from transfer surface 302 of conveyor 300. The grip arms 502 are respectively provided on the left and right sides of the workspace 508, and the grip arms 502 and the wafer carrier are transferred in the workspace 508.

FIG. 16 is a perspective view for explaining a preferred embodiment of the vertical conveyor of FIG. 16 shows only the right structure of the vertical conveyor 500 because it is symmetrical. A feed screw 510, which is a z-axis feeder extending in the z-axis direction along the inner surface of the housing 506, is installed. The guide member, that is, the grip arm 502 is installed in parallel with the feed screw 510. The grip arm 502 acts as a guide to slide in the vertical direction when the movable body 514 moves up and down in a rod shape, unlike the transfer screw 510, in which a screw is not formed on a surface thereof. The moving body 514 is screwed with the feed screw 510 and ascends during forward rotation of the feed screw 510, and descends during reverse rotation.

The feed screw 510 rotates forward and backward by receiving power from a rotating motor (not shown). The drive gear and the driven gear can be installed between the rotating shaft and the feed screw of the rotating motor to decelerate.

The holding arm 502 is fixed to the inner side of the movable body 514. Therefore, the holding arm 502 also moves up and down when the movable body 514 moves up and down. The grip arm 502 protrudes forward to have a length that includes the end of the side handle 402 of the wafer carrier 400 that is conveyed through the conveyor 300 from the front of the wafer processing apparatus. The gripping arm 502 is conveyed in the y-axis direction by a y-axis conveying means 518, for example, a feed screw and a y-axis conveying means 518, for conveying the wafer carrier 400 in the y-axis direction. It includes a y-axis moving body 520 having a support piece 504 for supporting the side handle 402 of the. The y-axis feed means 518 is rotated by a motor and gearbox 516 disposed behind the gripping arm. The y-axis moving body 520 is moved in the front-rear direction by the forward and reverse rotation of the y-axis transport means 518. The support piece 504 attached to the y-axis moving body 520 is moved back and forth within the length of the gripping arm 502 to be located under the side handle 402 of the wafer carrier, and the side handle of the wafer carrier is moved vertically. Support 402 from bottom to top.

FIG. 17 is a block diagram illustrating the control configuration of FIG. 13. The control unit 522 of the unmanned automatic transfer device of the present invention of the conveyor 300 through a pulse generator or encoder (PG) for detecting the rotational speed of the rotary motor (CM) and the rotary motor (CM) of the conveyor (300). The transfer of the wafer carrier 400 is controlled. In addition, the control unit 522 is connected to a plurality of vertical conveyors 500 installed in each equipment 201 to control and control the overall transport operation.

The controller 522 is installed at the front of each device to recognize that the desired wafer carrier has reached a predetermined position through the wafer carrier detector WCD, and controls the vertical conveyor 500. The vertical conveyor 500 controls the Z-axis motor ZM and the Y-axis motor YM so that the y moving body is positioned at the rear position and the gripping arm is positioned at the upper limit position without picking up the wafer carrier. The rear position is detected by the rear detector RD, and the upper limit position holds the upper limit detector UD.

When the wafer carrier is detected by the WCD, the movable body is lowered to the lower limit position through the lower limit detector DD, and when the lower limit position is reached, the movable member is moved to the front position through the front detector FD.

The pickup of the wafer carrier located in front is made by the front position movement of the y moving body.

When the wafer carrier is picked up by the grip arm, the Z-axis motor (ZM) is rotated again to reverse the grip arm to the upper limit position. When the upper limit is detected, the y carrier is moved to move the wafer carrier to the rear position. do.

The down operation of the wafer carrier proceeds in the inverse of the up operation described above.

18 is an exemplary perspective view of a modified embodiment of the semiconductor manufacturing line employing the wafer carrier unmanned automatic transfer device according to the present invention. 18 shows a case where two wafer entrances and two vertical conveyors are installed in one equipment. In this case, since the two vertical feeders can be operated alternately or simultaneously, as compared with the above-described embodiment, the up / down operation of the wafer carrier can be made up to twice as fast.

Figure 19 is a side view of another embodiment of the wafer carrier unmanned automatic transfer device according to the present invention, Figure 20 is a front view of the wafer carrier unmanned automatic transfer device of FIG. Unlike the embodiment of FIG. 15 described above, the embodiment of FIG. 19 illustrates a structure in which the upper surface of the wafer carrier is gripped by using a vacuum suction head. Such a structure is more advantageous in terms of space utilization of the bay since the space occupied by the vertical conveyor in the central lower space can be greatly eliminated compared to the embodiment of FIG. 15.

In the embodiment of FIG. 19, the housing of the vertical conveyor 540 is installed directly above the front surface of the wafer entrance, and one grip rod 542 extending downward from the center of the bottom of the housing is lowered to terminate the grip rod 542. The vacuum suction head 544 fixed to the vacuum suction head 544 picks up the upper surface of the wafer carrier 400 by vacuum suction and then transfers the upper surface thereof. The gripping rod 542 may be installed to be transportable in the y-axis direction in the housing.

Although the above has been described with reference to a preferred embodiment of the present invention, those skilled in the art various modifications and changes of the present invention without departing from the spirit and scope of the present invention described in the claims below You can. Accordingly, all changes that come within the meaning or range of equivalency of the claims are to be embraced within their scope.

For example, in the above-described embodiments, the z-axis conveying means may be composed of a stator rail and a mover structure of a linear motor, or a fluid such as a hydraulic pneumatic cylinder and a piston rod structure, as well as a rotating motor, a feed screw, and a moving body.

In the case of a linear motor, the gripping arm or gripping rod is fixed to the mover. In the case of a fluid cylinder, the gripping arm is fixed to the end of the piston rod.

Similarly, the y-axis feeder may be modified in the same manner as the z-axis feeder, and the y-axis and the z-axis feeder may be configured by a combination of various structures described above or a combination of various other reciprocating mechanisms.

According to the present invention, since the guide rail is located under the container holder, the accessibility and stability of the worker's process equipment are improved. The multi-axis robots required by the AGV system are no longer needed and simply require a simple lift that can move up and down vertically, simplifying the device. Since the transfer shuttle operates by utilizing the lower space of the vessel holder, it is possible to reduce the width of the vessel to increase the equipment integration or space utilization in the clean room and lower the maintenance cost. In addition, since it is possible to prepare a work space for working with the worker at the same time, emergency or irregular manual run flows such as a power failure are possible.

Claims (37)

In a process environment having one or more facilities arranged along the edge of a bay, an unmanned transfer device for transferring a container containing a workpiece from one facility to another, Container holding means for securing the container or releasing support for the container by being fixed at the front surface of each of the installation chambers and protruding horizontally toward the belly; A stand for integrally placing the container, wherein the stand is vertically moved directly under the container holding means to download a container supported by the container holding means or to unload a container Lifting means for unloading on the vessel holding means; And The lifting means is integrally mounted, the unmanned transportation apparatus characterized in that it comprises a moving means for moving directly under the container holding means designated by the operation control signal utilizing the space directly below the container holding means. According to claim 1, The lifting means is the pedestal; And a hydraulic drive mechanism coupled to the pedestal to move the pedestal up and down. The unmanned transportation apparatus according to any one of claims 1 to 3, wherein the pedestal is a pedestal having a top and bottom two-tier structure. 2. The apparatus of claim 1, wherein the lifting means comprises: a pedestal for placing the vessel; motor; A pair of gear assemblies engaged with both sides of the shaft of the motor to linearly move in opposite directions; A lower end portion is slidably coupled to each of the pair of gear assemblies, and an upper end portion includes a foldable arm assembly coupled to the pedestal, the center portion of which is hinged crosswise, and the pair of gear assemblies according to the rotational direction of the motor. And an interval between the lower end portions of the arm assembly coupled to the arm assembly is increased or lowered to raise or lower the horizontal level of the pedestal. According to claim 1, wherein the container holding means is fixed to the front surface of the entry chamber and protrudes horizontally toward the belly, the center portion is a rectangular ring or U-shaped support member which is perforated to pass through the container; And one or more support pins protruding toward the perforated central portion of the support member to support the container and retracting when passing through the support member to load or unload the container to the support member. Unmanned conveying device characterized in that. The unmanned transportation apparatus according to claim 5, further comprising pin control means for electromagnetically controlling the protrusion and retraction of the support pin in response to a predetermined control signal. According to claim 1, wherein the container holding means, the U-shaped opening the center portion, the support member is coupled to the corner facing the opening so as to be rotatable 90 degrees with the front surface of the entrance chamber; And driving means for retracting the support member parallel to the front surface of the entrance chamber or protruding horizontally toward the belly in response to the vertical movement of the lifting means. The width of the unmanned transfer device, characterized in that narrower than the width of the container and wider than the width of the pedestal. 8. The support member according to claim 7, wherein the support member is retracted in parallel with the front surface of the access chamber so as not to disturb the movement of the lifting means while the lifting means is raised or lowered while the container is mounted on the container support. And in other general cases, the unmanned conveying apparatus, characterized in that it protrudes horizontally by rotating 90 degrees toward the belly. According to claim 1, Unmanned transfer characterized in that it further comprises a guide rail is installed along the bottom of the vessel holding means of the vessel to guide the driving means to run through the space directly below the container holding means. Device. 10. The method of claim 9, wherein the guide rail is one or more lines of magnetic tape attached to the bottom surface of the bay, and the driving means recognizes the driving route by sensing the magnetic field formed by the magnetic tape. Device. 10. The guide rail of claim 9, wherein the guide rail is one or more tracks buried downwardly on the bottom surface of the tummy, and the driving means is configured such that a portion of the bottom surface is slidably engaged with the track. Unmanned transfer device, characterized in that made. The guide rail according to any one of claims 9 to 11, wherein each guide rail is provided to form a separate open loop along both edges of the bow so that the driving means reciprocates between both ends of the guide rail. Unmanned conveying device. The method according to any one of claims 9 to 11, wherein the guide rail is installed to form a closed loop along both edges of the embryo or a plurality of embryos along the edge of the embryo to form a closed loop. Unmanned transportation device, characterized in that for looping the loop. The unmanned transfer apparatus of claim 1, wherein the container has an airtight structure to contain the semiconductor wafer and to block the inflow of external contaminants. The apparatus of claim 1, further comprising transmitting and receiving means for wireless communication with an external central control apparatus, and transmitting its position information and status information to the central control apparatus through the transmitting and receiving means and received from the central control apparatus. Unmanned transportation apparatus characterized in that the operation and the loading / unloading operation in response to the control signal. In an unmanned transfer device for transferring a container containing a wafer from one facility to another in a clean room for semiconductor manufacturing having one or more facilities arranged along the edge of the bay, A square or U-shaped support member which is fixed to the front surface of the entrance chamber and protrudes horizontally toward the belly and the center portion is drilled to allow the container to pass therethrough, and protrudes toward the drilled center portion of the support member; One or more support pins for retracting the container when passing through the support member for loading or unloading the container to the support member, and protruding of the support pin in response to a predetermined control signal for supporting the container. Container holding means for supporting or releasing support for the container, including pin control means for controlling the retraction and retraction; And a pedestal for mounting the container integrally, and the pedestal is moved vertically under the container holding means to download a sealed container supported by the container holding means or an airtight container unloaded on the pedestal. Lifting means for laying down on the container holding means; A driving means which is integrally mounted with the lifting means and moves directly under the container holding means designated by the operation control signal by utilizing a space directly under the container holding means; And And a guide rail installed along the bottom of the vessel holding means of the bait to guide the driving means to run through the space directly below the container placing means. In an unmanned transfer device for transferring a container containing a wafer from one facility to another in a clean room for semiconductor manufacturing having one or more facilities arranged along the edge of the bay, The center portion is a U-shaped opening that allows the container to pass through, and the support member and the support member are rotated by 90 degrees to the support member and the support member is coupled to the front surface of the entrance chamber is rotatable 90 degrees to the container Driving means for controlling the support member to retreat in parallel to the front surface of the entrance chamber during the ascending or descending, and to control the support member to protrude horizontally toward the belly by rotating the support member 90 degrees. Container holding means for supporting or releasing support for the container; And a pedestal for placing the container integrally, the pedestal is moved vertically under the container holding means to download the container supported by the container holding means, or the container loaded on the pedestal Lifting means for laying down on the means; Shuttle means which is integrally mounted with the lifting means, and moves directly below the container holding means designated by the operation control signal by utilizing the space directly below the container holding means; And And a guide rail installed along the bottom of the vessel holding means of the bait to guide the driving means to run through the space directly below the container placing means. One or more fixtures arranged along the edge of the bay, each of which is secured to the front face of the access chamber and protrudes horizontally towards the bow to support or release the vessel containing the workpiece. In a workplace having a container stand and a guide rail is installed along the floor below the container stand of the facility, the container is transferred from one facility to another using one or more unmanned transfer devices running along the guide rail. In a method of controlling delivery, One unmanned conveying device is moved directly under the vessel holder of the facility that has requested the delivery, and the lifting means combined with the vessel holder is lifted vertically to slightly lift the vessel placed on the vessel holder and to support the vessel. Retracting the member and then lowering the lifting means to lower the container into the unmanned transportation device; And The unmanned transportation device carrying the container is moved directly under the container holder of the destination facility, and the support member is retracted and the lifting means are vertically raised so that the height of the container support is slightly lower than the horizontal level of the support member. And a unloading step of placing the container on the container holder by lowering the lifting means by restoring the support member to its original position. Way. 19. The method of claim 18, wherein the unmanned transfer apparatus capable of responding to the transfer request most quickly by analyzing information about the transfer request, including location information sent by a plurality of unmanned transfer apparatuses, and information about the origin and destination. Delivery method of the workpiece container using the unmanned transfer device, characterized in that it further comprises the step of selecting. A wafer carrier transfer apparatus for transferring a wafer carrier to a plurality of wafer processing apparatuses arranged in the clean room in the x-axis direction and having a wafer entrance in the front center thereof, A horizontal conveyor disposed adjacent to the front surface of the wafer processing apparatus, having a transport surface at a lower position than the wafer entrance, extending in the x-axis direction, for transporting the wafer carrier in the x-axis direction; Vertical conveyors respectively installed in front of the wafer processing apparatuses and vertically moving the wafer carrier by vertically moving in the z-axis direction between the wafer entrance and the transfer surface of the horizontal conveyor; And And a control unit for horizontally conveying the wafer carrier to each wafer processing apparatus by position control of the horizontal conveyer, and vertically conveying the wafer carrier to the wafer entrance and exit by position control of the vertical conveyer. Auto transport. 21. The wafer carrier unmanned automatic transfer device according to claim 20, wherein the horizontal conveyor is composed of a rolling roller conveyor. 21. The wafer carrier unattended transfer device of claim 20, wherein the wafer carrier is a front opening integrated carrier (FOUP). The method of claim 20, wherein the vertical conveyor, A housing disposed at a front surface of each wafer processing apparatus, the housing having a space at a center thereof, the space including a wafer entrance and a transfer surface of the horizontal conveyor; A pair of z-axis transfer means installed on left and right inner surfaces of the housing and extending in a z-axis direction; A pair of z-axis moving bodies moved up and down by the vertical transfer means; And A pair fixed to each of the z-axis moving bodies and protruding forward to have a length including an end of a side grip portion of the wafer carrier which is transferred from the front surface of the wafer processing apparatus through the horizontal transfer means; Wafer carrier unmanned automatic transfer device comprising a holding arm of the. The method of claim 23, wherein each of the grip arm, Y-axis transport means for transporting the wafer carrier in the y-axis direction; And And an y-axis moving member which is conveyed in the y-axis direction by the y-axis conveying means and has a support piece for supporting the side grip portion of the wafer carrier. The method of claim 23, wherein each of the z-axis feed means, Rotation motor capable of forward and reverse rotation; And Consists of a feed screw rotated by the rotary motor, And each of the z-axis moving bodies is screwed to the transfer screw and is vertically transferred along a vertical guide surface by rotation of the transfer screw. 24. The method of claim 23, wherein each of the z-axis conveying means comprises a fluid cylinder for conveying the piston up and down by hydraulic pressure, And each of the z-axis moving bodies is attached to the rod end of the piston and is vertically conveyed along a vertical guide plane. 24. The wafer carrier unmanned automatic transfer device according to claim 23, wherein each of the z-axis transfer means comprises a stator of a linear motor having a guide rail, and a mover of the linear motor comprises a z-axis moving body. A wafer carrier transfer method for transferring a wafer carrier in an up-down manner directly below the wafer entrance to each of a plurality of wafer processing apparatuses arranged in the clean room in the x-axis direction and having a wafer entrance in the front center thereof, Transferring a wafer carrier using a conveyor directly below a front surface of a wafer entrance of each wafer processing apparatus; Transferring the grip arm from an upper limit position to a lower limit position when the wafer carrier arrives directly below the front surface of the wafer entrance; Holding a wafer carrier with a gripping arm at the lower limit position; And And vertically transferring the gripping arm to an upper limit position which is a wafer entrance and exit position. 29. The method of claim 28, wherein the holding of the wafer carrier with the gripping arm comprises: supporting the side projections of the wafer carrier by moving the support piece installed on the gripping arm from a rear position to a front position; And moving the support piece from the front position to the rear position when the gripping arm reaches the upper limit position. A wafer carrier transfer apparatus for transferring a wafer carrier to a plurality of wafer processing apparatuses arranged in a clean room in an x-axis direction and having a pair of wafer entrances formed in a front center side by side, A horizontal conveyor disposed adjacent to the front surface of the wafer processing apparatus, having a transport surface at a lower position than the wafer entrance, extending in the x-axis direction, for transporting the wafer carrier in the x-axis direction; A pair of vertical transfers are respectively provided on the front of each wafer processing device corresponding to each wafer entrance, and vertically move the wafer carrier vertically in the z-axis direction between the corresponding wafer entrance and the transfer surface of the horizontal conveyor. Groups; And And a control unit for horizontally transporting the wafer carrier to each wafer processing apparatus by position control of the horizontal feeder, and vertically transferring the wafer carrier to each wafer entrance and exit by position control of each vertical feeder. Carrier Unmanned Automatic Transport. A wafer carrier transfer apparatus for transferring a wafer carrier to a plurality of wafer processing apparatuses arranged in the clean room in the x-axis direction and having a wafer entrance in the front center thereof, A horizontal conveyor disposed adjacent to the front surface of the wafer processing apparatus, having a transport surface at a lower position than the wafer entrance, extending in the x-axis direction, for transporting the wafer carrier in the x-axis direction; A vertical feeder disposed above the front surface of the wafer entrance of the wafer processing apparatus and vertically moving the wafer carrier vertically in the z-axis direction between the wafer entrance and the transfer surface of the horizontal feeder; And And a control unit for horizontally conveying the wafer carrier to each wafer processing apparatus by position control of the horizontal conveyer, and vertically conveying the wafer carrier to the wafer entrance and exit by position control of the vertical conveyer. Auto transport. 32. The wafer carrier unmanned automatic transfer device according to claim 31, wherein the horizontal conveyor is composed of a rolling roller conveyor. 32. The wafer carrier unmanned transfer device of claim 31, wherein the wafer carrier is a front opening integrated carrier (FOUP). The method of claim 31, wherein the vertical conveyor, A housing disposed directly above the front surface of the wafer entrance of each wafer processing apparatus; Z-axis feed means installed in the housing to be movable in the y-axis direction; A movable body moved up and down by each of the z-axis transfer means; And And a vacuum suction head which is fixed to an end of each of the z-axis moving bodies and vacuum-adsorbs a central portion of the upper surface of the wafer carrier. The method of claim 34, wherein the z-axis feed means, A y-axis moving body in which a screw hole is formed in the housing; A rotating motor fixed to the y-axis moving body and capable of forward and reverse rotation; And Wafer carrier unmanned automatic transfer device characterized in that it comprises a feed screw which is rotated by the rotary motor and conveyed up and down from the screw hole. The method of claim 34, wherein the z-axis feed means, Wafer carrier unmanned automatic transfer device is installed in the housing movably in the y-axis direction, consisting of a fluid cylinder for transferring the piston up and down by hydraulic pressure, the vacuum suction head is fixed to the rod end of the cylinder . The method of claim 34, wherein the z-axis feed means, It is installed in the housing movably in the y-axis direction, consisting of a stator of the linear motor having a guide rail extending in the vertical direction, and fixing the vacuum suction head to the end of the rod extending downward from the mover of the linear motor Wafer carrier unmanned automatic transfer device.