GB2376938B - A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same - Google Patents

A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same

Info

Publication number
GB2376938B
GB2376938B GB0220466A GB0220466A GB2376938B GB 2376938 B GB2376938 B GB 2376938B GB 0220466 A GB0220466 A GB 0220466A GB 0220466 A GB0220466 A GB 0220466A GB 2376938 B GB2376938 B GB 2376938B
Authority
GB
United Kingdom
Prior art keywords
workpiece containers
transfe
rring
same
transfer system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0220466A
Other versions
GB0220466D0 (en
GB2376938A (en
Inventor
Ki-Sang Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020010004086A external-priority patent/KR100364316B1/en
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Priority claimed from GB0108760A external-priority patent/GB2362373B/en
Publication of GB0220466D0 publication Critical patent/GB0220466D0/en
Publication of GB2376938A publication Critical patent/GB2376938A/en
Application granted granted Critical
Publication of GB2376938B publication Critical patent/GB2376938B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
GB0220466A 2000-04-12 2001-04-06 A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same Expired - Fee Related GB2376938B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR20000019374 2000-04-12
KR1020010004086A KR100364316B1 (en) 2000-04-12 2001-01-29 unmanned transferring apparatus for workpiece container and method of transferring it with the same
GB0108760A GB2362373B (en) 2000-04-12 2001-04-06 A transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same

Publications (3)

Publication Number Publication Date
GB0220466D0 GB0220466D0 (en) 2002-10-09
GB2376938A GB2376938A (en) 2002-12-31
GB2376938B true GB2376938B (en) 2003-07-09

Family

ID=27256142

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0220466A Expired - Fee Related GB2376938B (en) 2000-04-12 2001-04-06 A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same

Country Status (1)

Country Link
GB (1) GB2376938B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000051921A1 (en) * 1999-03-05 2000-09-08 Pri Automation, Inc. Material handling and transport system and process
US6748282B2 (en) * 2002-08-22 2004-06-08 Taiwan Semiconductor Manufacturing Co., Ltd Flexible dispatching system and method for coordinating between a manual automated dispatching mode

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5772386A (en) * 1995-03-28 1998-06-30 Jenoptik Ag Loading and unloading station for semiconductor processing installations
US5931631A (en) * 1995-07-10 1999-08-03 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5772386A (en) * 1995-03-28 1998-06-30 Jenoptik Ag Loading and unloading station for semiconductor processing installations
US5931631A (en) * 1995-07-10 1999-08-03 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette

Also Published As

Publication number Publication date
GB0220466D0 (en) 2002-10-09
GB2376938A (en) 2002-12-31

Similar Documents

Publication Publication Date Title
EP1196944B8 (en) Apparatus and method for transferring a workpiece
GB2362373B (en) A transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same
SG101419A1 (en) Method and system for transferring job between computers
AU3143700A (en) Method and device for transferring containers
HK1042865A1 (en) Production method for bottle type can and form-working tool
AU7816001A (en) Method and apparatus for locating cargo containers
SG90780A1 (en) Method and apparatus for dechucking a substrate
AU4747197A (en) Tool for the transport of liquid drops and method for the transfer of drops using such a tool
GB2351821B (en) Method and system for secure computer system transfer
GB2373766B (en) Apparatus and method for transferring vehicle bodies
AU2001245313A1 (en) Method and apparatus for the storage and transfer of a lyophilisate
GB2368835B (en) Fitment and apparatus and method for transporting
SG91268A1 (en) Method and apparatus for grinding a workpiece
HUP0102047A3 (en) Device and method for transporting a flat article
AU3914700A (en) Method and apparatus for transporting articles
FI971240A0 (en) Apparatus and method for transferring a container between processing stations
SG47006A1 (en) Method and device for transferring containers
GB9812850D0 (en) A method and apparatus for dechucking
AU2001286781A1 (en) Method and apparatus for gripping containers
GB0215883D0 (en) Electrostatic chuck susceptor and method for fasbrication
EP1255285A4 (en) Method and apparatus for handling arranged part
GB2376938B (en) A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same
AU4281100A (en) Method and apparatus for moving workpieces
GB9925141D0 (en) Article aligning apparatus and method therefor
SG104276A1 (en) Method and apparatus for magnetic transfer

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20100406