KR20010087108A - Apparatus for driving a measuring probe - Google Patents

Abstract

PURPOSE: To provide a driving device of a measuring probe capable of suppressing abrasion of a driving mechanism of the measuring probe, and driving the measuring probe at high speed. CONSTITUTION: This measuring probe driving device 10 is equipped with a frame 11 and a rocking arm 12 installed rockably on the frame 11, for holding the measuring probe 20. A probe guide 18 for guiding the head of the measuring probe 20 is installed on the frame 11. The measuring probe 20 is projected from the outer surface of the probe guide 18 or retreated thereto by rocking movement of the rocking arm 12.

Description

Measuring probe drive {APPARATUS FOR DRIVING A MEASURING PROBE}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measurement probe drive device for driving a measurement probe for measuring chip-shaped electronic components, and more particularly to a measurement probe drive device capable of driving a measurement probe with high accuracy and speed.

In order to measure the electrical characteristics of a chip-shaped electronic component, the measuring method is made by making a measuring probe contact a electronic component.

This measuring probe is driven by a measuring probe drive device. The measuring probe driving device is composed of a driving unit such as a cam mechanism or an air cylinder, a measuring probe, and a long measuring probe guide using a slide bush or a linear bush that are subjected to a large driving force. I'm making it.

As described above, since the drive unit drives the measurement probe by reciprocating motion, wear of the drive unit or guide increases. In addition, the weight of the reciprocating part and the weight of the guide supporting the measuring probe and the frictional force of the driving part are large, and therefore, there is a problem that the high speed driving of the measuring probe is difficult.

1 shows an embodiment of a measurement probe drive device according to the present invention.

2 is a plan view showing a workpiece to be conveyed by a turntable;

3 is an enlarged view showing the probe guide;

4 shows the action of a measurement probe drive.

* Description of the symbols for the main parts of the drawings *

10: measuring probe drive 11: frame

12: swing arm 14: sensor

15: stopper 16: adjustment screw

17: adsorption plate 18: probe guide

19: electronic coil 20: measuring probe

21: spring W: workpiece

This invention is made | formed in view of this point, Comprising: It aims at providing the measuring probe drive apparatus which can realize the high speed drive of a measuring probe, and has little wear.

The present invention provides a frame, a swing arm freely mounted on the frame, a swing arm for supporting a long and thin measuring probe, a probe guide installed at the tip of the measuring probe, and a guide for guiding the tip of the measuring probe, and a swing. A measuring probe drive device comprising a drive mechanism for swinging an arm between a protruding position protruding from the outer surface of the probe guide and a retracting position from which the measuring probe is retracted from the outer surface of the probe guide. .

According to the invention, when the swing arm is swinged by the drive mechanism, the measuring probe is guided by the probe guide. The swing of the swing arm causes the measuring probe to protrude or retract from the outer surface of the probe guide. Here, since the guide of the conventional measuring probe can be a thinner probe guide than the conventional bush provided on the tip side of the measuring probe, the weight of the measuring probe can be reduced. Since the weight can be made very light, the measurement can be made faster and the wear can be considerably reduced.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described with reference to drawings. 1 to 4 are diagrams showing one embodiment of the measurement probe drive device according to the present invention.

As shown in FIG. 2, the chip-shaped electronic component (working material) W is conveyed by the turntable 22 sequentially. When the workpiece W reaches the measuring probe driving device 10 according to the present invention disposed below the turntable 22, the two measuring probes 20 driven by the measuring probe driving device 10 move upwards. It protrudes, the tip of the measuring probe 20 contacts the workpiece W, and the electrical characteristics of the workpiece W are measured by the measuring probe 20.

Next, the measurement probe drive device 10 according to the present invention will be described in detail. As shown in FIGS. 1 to 3, the measurement probe drive device 10 includes a frame 11 and a frame 11. The swing arm 12 is freely attached to the swing through the support point 13, and the two measuring probes 20 are supported by the tip of the swing arm 12.

In this case, the measuring probe 20 is flexible at least partly between the swing arm 12 and the probe guide 18, so that the measuring probe 20 is a probe for the measuring probe 20 generated by the rotational movement of the swing arm 12. The position shift in the surface direction of the guide 18 can be absorbed by the bending of the measurement probe 20. Moreover, the probe guide 18 which is thinner than the conventional bush which guides the tip side of the measurement probe 20 in the tip side of the measurement probe 20 of the frame 11 is provided, and such a probe guide 18 is provided. The guide hole 18a which penetrates the front end side of the measurement probe 20 is formed in the inside.

The swing arm 12 has a protruding position in which the measuring probe 20 protrudes upward from the outer surface of the probe guide 18 and a retracted position in which the measuring probe 20 retracts downward from the outer surface of the probe guide 18. I can swing between them.

Referring to FIG. 1, the magnet 11 is fixedly attached to the frame 11, while the swing arm 12 is sucked onto the electromagnetic coil 19 when the electromagnetic coil 19 is energized. ) Is provided, and the drive mechanism for driving the swing arm 12 to the protruding position is configured by energizing these electromagnetic coils 19 and adsorbing the suction plate 17. In this case, the position where the adsorption plate 17 and the electromagnetic coil 19 are in contact with each other becomes a protruding position of the swing arm 12.

In addition, the adjusting screw 16 is attached to the frame 11, and the stopper 15 is supported by the adjusting screw 16. And the spring 21 located between the frame 11 and the swing arm 12 is attached to the outer periphery of the adjustment screw 16 so that compression is possible. This spring 21 constitutes a drive mechanism for driving the swing arm 12 to the retracted position. The retracted position of the swing arm 12 is regulated by the stopper 15, whereby the position of the stopper 15 can be changed by loosening or loosening the adjusting screw 16 with respect to the frame 11.

Moreover, as shown in FIG. 1, the frame 11 is attached with the sensor 14 which detects the protruding position of the swing arm 12. As shown in FIG.

Hereinafter, the effect | action of this embodiment which consists of such a structure is demonstrated.

First, the workpiece W reaches the position of the measurement probe drive device 10 by the turntable 22. In this case, the electromagnetic coil 19 is in an energized state, and the swing arm 12 is pressed against the stopper 15 side by the action of the spring 21, so that the swing arm 12 is in the retracted position. That is, the tip of the measuring probe 20 does not protrude from the outer surface of the probe guide 18, and the sensor 14 is separated from the swing arm 12 (see FIG. 1).

Next, when the electrical property of the workpiece W is measured by the measuring probe 20, the electromagnetic coil 19 is energized, thereby adsorbing the suction plate 17 to the electromagnetic coil 19, thereby swinging the arm 12. ) Swings to the protruding position, ie the protruding position where the tip of the measuring probe 20 protrudes from the outer surface of the probe guide 18 (see FIG. 4).

In this case, the measuring probe 20 moves upward in an arc orbit, and the tip of the measuring probe 20 can be guided by the probe guide hole 18a and ascend immediately above. In addition, the horizontal movement of the measuring probe 20 which draws an arc orbit is absorbed by the bending of the measuring probe 20.

When the swing arm 12 comes to the protruding position, the sensor 14 and the swing arm 12 abut, and the sensor 14 detects the protruding position of the swing arm 12. Then, based on the detection signal from the sensor 14, the measurement work for the workpiece W of the measurement probe 20 is started.

After the electrical measurement on the workpiece W by the measuring probe 20 is finished, the electromagnetic coil 19 is in an energized state, and the swing arm 12 is moved to the retracted position by the action of the spring 21. Come back.

Thereafter, the turntable 22 is rotated so that the next work material W reaches above the measurement probe drive device 10.

As described above, according to the present embodiment, since the measuring probe 20 protrudes or retracts from the outer surface of the probe guide 18 almost linearly by the swinging motion of the swing arm 12, the probe guide hole ( More force than necessary is not applied to 18a), and both the measuring probe 20 and the swing arm 12 can be made light in weight. Therefore, the wear of the drive mechanism can be suppressed, and the measurement probe 20 can be driven at high speed by using light weight and high speed adsorption of the electromagnetic coil.

Further, wear can be further reduced when the material of the probe guide 18 is a sliding material suitable for the slide.

For example, when the probe guide 18 is comprised by a sliding material, the conventional metal solid bearing or the plastic material for electrical insulation can be used as such a sliding material.

As described above, according to the present invention, since the measuring probe can be linearly protruded or retracted from the outer surface of the probe guide by the swinging motion of the swing arm, the measuring probe is lighter than the reciprocating drive mechanism, and wear of the drive mechanism It can be suppressed. In addition, the measuring probe can be driven at high speed by an electromagnetic force.

Claims (7)

Frame, Swing arm is freely installed in the frame, swing arm supporting a long and thin measuring probe, A probe guide installed at the tip of the measuring probe of the frame and guiding the tip of the measuring probe; Measuring probe drive device comprising a drive mechanism for swinging the swing arm between a protruding position in which the measuring probe protrudes from the outer surface of the probe guide and a retracted position in which the measuring probe is retracted from the outer surface of the probe guide. . The method of claim 1, The drive mechanism includes an electromagnetic coil for swinging the swing arm to the protruding position and a spring for swinging the swing arm to the retracted position. The method according to claim 1 or 2, And a stopper for regulating the retracted position of the swing arm. The method of claim 3, wherein The stopper is attached to the frame, the measuring probe driving apparatus, characterized in that the position adjustment is enabled by the adjustment screw. The method according to any one of claims 1 to 4, And a sensor for detecting the protruding position of the swing arm. The method according to any one of claims 1 to 5, And the measuring probe is flexible with at least a portion between the swing arm and the probe guide. The method according to any one of claims 1 to 6, And the probe guide is made of a sliding material.