KR20010083041A - 파수 도메인 반사측정과 배경 진폭 감소 및 보상을 사용한공초점 간섭 마이크로스코피용 방법 및 장치 - Google Patents

파수 도메인 반사측정과 배경 진폭 감소 및 보상을 사용한공초점 간섭 마이크로스코피용 방법 및 장치 Download PDF

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Publication number
KR20010083041A
KR20010083041A KR1020007013645A KR20007013645A KR20010083041A KR 20010083041 A KR20010083041 A KR 20010083041A KR 1020007013645 A KR1020007013645 A KR 1020007013645A KR 20007013645 A KR20007013645 A KR 20007013645A KR 20010083041 A KR20010083041 A KR 20010083041A
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KR
South Korea
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KR1020007013645A
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English (en)
Korean (ko)
Inventor
힐헨리에이.
Original Assignee
추후
제테틱 인스티튜트
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Priority claimed from US09/089,105 external-priority patent/US6091496A/en
Application filed by 추후, 제테틱 인스티튜트 filed Critical 추후
Priority claimed from PCT/US1999/011601 external-priority patent/WO1999063300A1/en
Publication of KR20010083041A publication Critical patent/KR20010083041A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/14—Heads, e.g. forming of the optical beam spot or modulation of the optical beam specially adapted to record on, or to reproduce from, more than one track simultaneously
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/005—Reproducing
KR1020007013645A 1998-06-02 1999-05-26 파수 도메인 반사측정과 배경 진폭 감소 및 보상을 사용한공초점 간섭 마이크로스코피용 방법 및 장치 KR20010083041A (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/089,105 1998-06-02
US09/089,105 US6091496A (en) 1997-01-28 1998-06-02 Multiple layer, multiple track optical disk access by confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation
US12505799P 1999-03-18 1999-03-18
US60/125,057 1999-03-18
PCT/US1999/011601 WO1999063300A1 (en) 1998-06-02 1999-05-26 Methods and apparatus for confocal interference microscopy using wavenumber domain reflectometry and background amplitude reduction and compensation

Publications (1)

Publication Number Publication Date
KR20010083041A true KR20010083041A (ko) 2001-08-31

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020007013645A KR20010083041A (ko) 1998-06-02 1999-05-26 파수 도메인 반사측정과 배경 진폭 감소 및 보상을 사용한공초점 간섭 마이크로스코피용 방법 및 장치
KR1020017011704A KR20020034988A (ko) 1999-03-18 2000-03-16 파수 도메인 반사측정과 배경 진폭 감소 및 보상을 사용한다층 레이어 공초점 간섭 마이크로스코피

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020017011704A KR20020034988A (ko) 1999-03-18 2000-03-16 파수 도메인 반사측정과 배경 진폭 감소 및 보상을 사용한다층 레이어 공초점 간섭 마이크로스코피

Country Status (5)

Country Link
EP (1) EP1161654A4 (ja)
JP (1) JP2002539494A (ja)
KR (2) KR20010083041A (ja)
CN (1) CN1351705A (ja)
WO (1) WO2000055572A1 (ja)

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KR20040039882A (ko) * 2002-11-05 2004-05-12 주식회사 대우일렉트로닉스 볼륨 홀로그래픽 데이터 저장 및 재생 시스템
KR101321413B1 (ko) 2003-10-27 2013-10-22 더 제너럴 하스피탈 코포레이션 주파수 영역 간섭법을 이용하여 광 영상화를 수행하는 방법및 장치
DE102005006723B3 (de) * 2005-02-03 2006-06-08 Universität Stuttgart Interferometrisches,konfokales Verfahren und interferometrische, konfokale Anordung für optische Datenspeicher, insbesondere Terabyte-Volumenspeicher
CN100451538C (zh) * 2005-07-25 2009-01-14 武汉大学 基于宽带光干涉表面形貌测量方法及其测量仪
JP5149196B2 (ja) * 2005-12-06 2013-02-20 カール ツァイス メディテック アクチエンゲゼルシャフト 干渉測定法による試料測定
JP2008135125A (ja) 2006-11-29 2008-06-12 Ricoh Co Ltd 光学ヘッド、光ディスク装置及び情報処理装置
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JP2010025864A (ja) * 2008-07-23 2010-02-04 Hamamatsu Photonics Kk 干渉測定装置
JP5532792B2 (ja) * 2009-09-28 2014-06-25 富士通株式会社 表面検査装置及び表面検査方法
US9522396B2 (en) 2010-12-29 2016-12-20 S.D. Sight Diagnostics Ltd. Apparatus and method for automatic detection of pathogens
DE102011013614A1 (de) * 2011-03-08 2012-09-13 Carl Zeiss Microimaging Gmbh Laser-Scanning-Mikroskop und Verfahren zu seinem Betrieb
CN106840812B (zh) 2011-12-29 2019-12-17 思迪赛特诊断有限公司 用于检测生物样品中病原体的方法和系统
KR20150023526A (ko) * 2012-06-05 2015-03-05 비-나노 리미티드 전자현미경을 사용하여 비진공 환경에서 재료를 분석하기 위한 시스템 및 방법
CA2886368C (en) * 2012-10-05 2017-08-29 National University Corporation Kagawa University Spectroscopic measurement device
US9696264B2 (en) * 2013-04-03 2017-07-04 Kla-Tencor Corporation Apparatus and methods for determining defect depths in vertical stack memory
EP2999988A4 (en) * 2013-05-23 2017-01-11 S.D. Sight Diagnostics Ltd. Method and system for imaging a cell sample
IL227276A0 (en) 2013-07-01 2014-03-06 Parasight Ltd A method and system for obtaining a monolayer of cells, for use specifically for diagnosis
EP3039477B1 (en) 2013-08-26 2021-10-20 S.D. Sight Diagnostics Ltd. Digital microscopy systems, methods and computer program products
WO2016030897A1 (en) 2014-08-27 2016-03-03 S.D. Sight Diagnostics Ltd System and method for calculating focus variation for a digital microscope
CA2998829A1 (en) 2015-09-17 2017-03-23 S.D. Sight Diagnostics Ltd Methods and apparatus for detecting an entity in a bodily sample
EP3222964B1 (en) * 2016-03-25 2020-01-15 Fogale Nanotech Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer
US11733150B2 (en) 2016-03-30 2023-08-22 S.D. Sight Diagnostics Ltd. Distinguishing between blood sample components
LU93022B1 (de) * 2016-04-08 2017-11-08 Leica Microsystems Verfahren und Mikroskop zum Untersuchen einer Probe
US11307196B2 (en) 2016-05-11 2022-04-19 S.D. Sight Diagnostics Ltd. Sample carrier for optical measurements
CA3022770A1 (en) 2016-05-11 2017-11-16 S.D. Sight Diagnostics Ltd Performing optical measurements on a sample
KR101855816B1 (ko) * 2016-05-13 2018-05-10 주식회사 고영테크놀러지 생체 조직 검사 장치 및 그 방법
CN106289090B (zh) * 2016-08-24 2018-10-09 广东工业大学 一种牙科树脂内应变场的测量装置
US10481111B2 (en) 2016-10-21 2019-11-19 Kla-Tencor Corporation Calibration of a small angle X-ray scatterometry based metrology system
JP7214729B2 (ja) 2017-11-14 2023-01-30 エス．ディー．サイト ダイアグノスティクス リミテッド 光学測定用試料収容器
US11573304B2 (en) * 2018-04-27 2023-02-07 Liturex (Guangzhou) Co. Ltd LiDAR device with a dynamic spatial filter
CN112970233A (zh) * 2018-12-17 2021-06-15 瑞士优北罗股份有限公司 估计通信信道的一个或更多个特征

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US5708504A (en) * 1996-10-25 1998-01-13 The United States Of America As Represented By The Secretary Of The Air Force Interfering imaging spectrometer
US5760901A (en) * 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation

Also Published As

Publication number Publication date
EP1161654A4 (en) 2006-09-27
CN1351705A (zh) 2002-05-29
EP1161654A1 (en) 2001-12-12
KR20020034988A (ko) 2002-05-09
WO2000055572A1 (en) 2000-09-21
JP2002539494A (ja) 2002-11-19

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