KR20010057673A - Hole drilling apparatus using Elctron beam - Google Patents

Abstract

PURPOSE: A perforating machine using an electron beam is provided to control the size of holes by controlling the size of the electron beam and improve the quality of the perforation by improving spatial equality of the electron beam. CONSTITUTION: A perforating machine using an electron beam includes an electron gun(10) generating the electron beam, a machining chamber(20) making the electron beam partially melting an object to be perforated for performing perforating work, and a gate valve(30) isolating vacuum between the electron gun and the machining chamber, wherein the electron gun includes a negative electrode(11) heated according to the apply of power supply for generating thermal electron, a positive electrode(12) drawing out the thermal electron in the shape of beam if high voltage is applied to a gap with the negative electrode and the positive electrode, and a control electrode(13) arranged between the negative electrode and the positive electrode and controlling the size of the electron beam by changing electric field distribution between the negative electrode and the positive electrode according to the applied voltage.

Description

Hole drilling apparatus using Elctron beam

The present invention relates to a perforation apparatus using an electron beam that forms a hole by irradiating an accelerated electron beam onto a material such as metal, ceramic, semiconductor, glass, or the like, and more specifically, adjusts the size of the electron beam using only an electron gun without an external device. The present invention relates to a perforation apparatus using an electron beam to adjust the size of a hole and to increase the spatial uniformity of the electron beam to improve the quality of the perforation.

As is well known, conventional devices for drilling holes in materials such as metals, ceramics, semiconductors, or glass include drilling machines, ultrasonic boring machines, laser boring machines, etc. In recent years, fabric mills using electron beams are mainly used.

As shown in Korean Patent Application No. 89-16403, US Patent No. 4,484,058, and the like, the fabricator using the electron beam to which the prior art is applied has several magnetic focusing lenses and deflection magnets between the electron beam generator and the processing chamber to control the size of the electron beam. It is made by installing the back. However, in this case, a problem arises in that the size of the entire system is increased, and a power supply and an adjusting device for driving external devices are required.

In addition, in the above-mentioned prior art, in order to prevent the electrons generated by melting the object to be punched during drilling, the generated material flows back into the electron gun and the vacuum is deteriorated, and the electron beam current is reduced. A problem arises in that it is necessary to attach a pump (Domestic Patent No. 89-16403) or a device (US Pat. No. 4,484,058, US Pat. No. 4,317,022) to suppress the introduction of these materials into the electron gun.

In addition, in the above-described prior art, since most of those developed by an electron beam welding machine can be used for electron beam drilling rather than only for the purpose of electron beam drilling, the requirement for the size of the electron beam is not strict, so that electron beam generation occurs in most devices. Is using filament. When the electron beam is generated from the filament, there is a portion in which the electron beam is generated and a portion in which the electron beam is not generated, so that the spatial distribution of the electron beam is not uniform with respect to the entire area. As a result, the space distribution of the electron beam is not good, and the damage degree (see A) around the hole is severe as shown in FIGS. 1A and 1B during the drilling operation, thus making it impossible to perform the precise drilling operation. A part (see B) is stuck around the hole, causing a problem of deterioration of the hole quality. Accordingly, a problem arises in that a separate post-treatment operation is required after the drilling operation in order to prevent degradation of the hole.

The present invention has been made to solve the problems of the prior art as described above, the object of which is to use the triode tube electron gun composed of the cathode, anode, and control electrode of the electron beam generator, the voltage of the control electrode without an external device such as a magnetic focusing lens By adjusting the bay, the size of the hole to be drilled can be adjusted by changing the size of the electron beam, which simplifies the system and reduces the distance from the electron gun to the processing chamber, thereby providing a fabric factory using an electron beam that can realize a compact and light weight. .

It is another object of the present invention to provide a fabrication factory using an electron beam that enables precise drilling operation by improving the spatial uniformity of the electron beam by using a cylindrical cathode instead of using a filament in the portion generating the electron beam.

Another object of the present invention is to provide an inhaler that can suck the gas and the puncture material generated during the puncture operation at the same time as the puncture operation to remove the material that may be stuck around the hole to improve the quality of the hole (quality) To provide a fabric factory using an electron beam.

Figures 1a and 1b is an illustration showing the state of the perforated holes that may occur during the drilling operation according to the prior art

2 is a view showing a schematic configuration of a drilling device using an electron beam according to a preferred embodiment of the present invention

3 is a view showing a schematic configuration of a cathode part in an embodiment of the present invention;

4 is a view schematically showing a drilling operation according to the present invention

5 is a schematic view of an electron beam drilling apparatus according to another embodiment of the present invention.

<Description of Symbols for Main Parts of Drawings>

10 electron gun 11: cylindrical cathode

12: anode 13: control electrode

14: filament 15: feedthrough

16 cathode support 17 tantalum foil

18: focusing electrode 19: support flange

20: processing chamber 21: drilling object

22: exercise device 23: inhaler

24: Lead shield wall 25: Lead glass

26: vacuum holding pipe 30: gate valve

40: measuring device 41: fluorescent plate

42: fluorescent plate regulator

According to a first aspect of the present invention for achieving the above object, an electron gun for generating an electron beam, a processing chamber for dissolving the object to be punched locally by the electron beam generated in the electron gun, and the electron gun and A gate valve to isolate vacuum between the processing chambers;

The electron gun is heated between application of a cathode to generate hot electrons, and when a high voltage is applied between the cathode, an anode to draw hot electrons generated in the cathode in the form of a beam, and disposed between the cathode and the anode. The present invention provides a fabrication factor using an electron beam made of a triode tube including a control electrode for adjusting the size of the electron beam by changing the electric field distribution between the cathode and the anode according to the applied voltage.

At this time, according to an additional feature of the present invention, the cathode for emitting the electron beam is preferably made of a cylindrical in order to improve the spatial uniformity of the electron beam to improve the quality of the drilling operation.

In addition, it is preferable to make the focusing electrode provided to focus the electron beam around the cathode into a getter having the property of adsorbing the gas contained in the vacuum at a high temperature.

On the other hand, according to a second aspect of the present invention for achieving the above object, an electron gun for generating an electron beam, the processing chamber for melting the punching object locally by the electron beam generated in the electron gun to perform the drilling operation, and A gate valve for isolating the vacuum between the electron gun and the processing chamber;

The processing chamber is equipped with a motion device that operates in a two-dimensional straight or circular to adjust the position of the object to be drilled, and an electron beam comprising an inhaler for removing the gas and the puncture material generated during the drilling operation by the electron beam to the outside To provide.

At this time, according to an additional feature of the present invention, the processing chamber is preferably provided with a fluorescent plate for measuring the size of the electron beam to determine the size of the hole to be drilled.

In addition, the work space for performing the drilling work in the processing chamber is preferably surrounded by a lead shielding wall to shield the X-rays generated during the drilling work.

Hereinafter, an embodiment of the present invention will be described in more detail based on the accompanying drawings.

2 is a cross-sectional view showing a schematic configuration of a drilling device using an electron beam according to the present invention.

Referring to FIG. 2, the present invention provides an electron gun 10 for generating an electron beam, a processing chamber 20 for dissolving the object to be punched by the electron beam generated by the electron gun 10, and performing the drilling operation. The gate valve 30 to isolate the vacuum between the electron gun 10 and the processing chamber 20, and the measuring device 40 is installed in the processing chamber 20 to measure the size of the electron beam to penetrate.

In the above, the electron gun 10 is a cylindrical cathode 11 that is heated in accordance with the application of power to generate hot electrons, and is arranged at a predetermined interval with the cylindrical cathode 11 when the high voltage is applied between the cylindrical cathode An anode 12 for drawing hot electrons generated in the form of a beam in the form of a beam, and the cylindrical cathode 11 and the anode 12 according to the voltage applied and disposed between the cylindrical cathode 11 and the anode 12. It is composed of a tripolar tube electron gun including a control electrode 13 for adjusting the size of the electron beam by changing the electric field distribution between.

At this time, the detailed configuration of the cathode portion constituting the cylindrical cathode 11 is shown in FIG.

Referring to FIG. 3, reference numeral 14 denotes a conical columnar filament supporting the negative electrode 11, 15 denotes a feedthrough, 16 denotes a negative electrode support, and 17 denotes a tantalum foil. At this time, the end of the cathode 11 is fitted to one side of the filament 14, the other side of the filament 14 is bolted to the feedthrough 15 through the cathode support (16).

Reference numeral 18 of the configuration of the electron gun 10 of FIG. 1 is installed to surround the cathode part to perform a function of focusing the electron beam around the cylindrical cathode 11, and to adsorb the gas contained in the vacuum at a high temperature. Represents a focused electrode consisting of a getter with Reference numeral 19 denotes a support flange for supporting the cathode portion and the focusing electrode 18.

On the other hand, in the processing chamber 20 to remove the gas and the perforated material generated during the drilling operation by the exercise machine 22, which operates in a two-dimensional straight or circular in order to adjust the position of the object to be punched (21) Inhaler 23 is provided. At this time, the reference numeral 24 of the configuration of the processing chamber 20 represents a lead shielding wall surrounding the work space to shield the X-rays generated during the drilling operation, 25 is lead glass, 26 is a vacuum holding pipe Indicates.

In addition, the measuring device 40 is provided with a fluorescent plate 41 for measuring the size of the electron beam, and a fluorescent plate controller 42 for determining the position of the fluorescent plate 41.

Referring to the operation of the present invention having the configuration as described above are as follows.

First, when the current flows through the filament 14, the filament 14 is heated to generate heat. The generated heat generates electrons on the surface of the cylindrical cathode 11 heated by the cylindrical cathode 11. Done. A heat shield made of tantalum oil 17 is installed around the cylindrical cathode 11 to increase the heating efficiency of the cathode. In this way, the cylindrical cathode 11 can be supported using only the filament 14 essential for heating the cylindrical cathode 11 without any other structure, and the filament 14 is installed closely around the cylindrical cathode 11 so that the cylindrical The cathode 11 can be heated efficiently. In addition, since the cylindrical cathode 11 is used as described above, since the electron beam is uniformly drawn from the surface, the electron beam has excellent spatial distribution characteristics, which makes it much smaller than when the electron beam is generated from the filament. Much less.

On the other hand, hot electrons generated in the cylindrical cathode 11 are drawn out in the form of a beam when a high voltage is applied between the cylindrical cathode 11 and the anode 12. The size of the extracted electron beam is determined by an electric field formed between the cylindrical cathode 11 and the anode 12, which is applied to the control electrode 13 disposed between the cylindrical cathode 11 and the anode 12. By adjusting the voltage, the electric field distribution between the cylindrical cathode 11 and the anode 12 is changed to adjust the size of the electron beam.

As described above, the electron gun of the type in which the control electrode 13 is installed in addition to the cylindrical cathode 11 and the anode 12 is referred to as a tripolar tube electron gun. In the present invention, the electron gun 10 and the processing chamber 20 are used by using a tripolar tube electron gun. It is possible to freely adjust the size of the electron beam without installing additional devices such as a magnetic focusing lens in between, and as a result, the size of the hole to be drilled can be arbitrarily adjusted.

By the above operation, the electron beam generated by the electron gun 10 is punched locally by punching the punched object 21 placed in the processing chamber 20, the fluorescent plate 41 installed in the processing chamber 20 The size of the hole to be drilled can be determined by measuring the size of the electron beam. At this time, the position of the fluorescent plate 41 is determined by the fluorescent plate controller 42.

In addition, as shown in FIG. 4, during the punching operation by the electron beam, a molten material, that is, a gas or a punching material 21b is generated while the hole 21a is made in the punching object 21 and is formed at the periphery of the hole 21a. Will remain. At this time, the generated gas lowers the vacuum degree of the electron gun, thereby degrading the generation of the electron beam, and in particular, the puncture material remaining in the periphery of the hole degrades the quality of the perforation.

In order to solve this problem, the inhaler 23 is installed near the object to be punctured 21, and the gas and the material are inhaled by the vacuum pressure and discharged to the outside to remove it. During the drilling operation, the temperature around the hole 21a is high, so that the perforated material 21b dissolved in the periphery can be easily removed.

In this way, the perforated material 21b dissolved in the periphery of the hole 21a with only the inhaler 23 is removed through the inhaler 23 at the same time as the perforation operation without a separate device, so that the quality of the perforation is eliminated without any separate treatment after the perforation. Can be improved.

At this time, the inhaler 23 is removable so that it can be removed when unnecessary other than drilling.

In addition, in the case where a plurality of holes having a desired shape are drilled in the object to be drilled through the above operation, a plurality of holes are formed by irradiating an electron beam while moving the object to be drilled two-dimensional linearly or circularly with the exercise machine 22. Let's do it. At this time, the periphery of the processing chamber 20 is surrounded by a lead shielding wall 23 to shield X-rays generated during drilling.

On the other hand, high vacuum is required to extract the electron beam from the electron gun 10. When the drilling operation is performed in the processing chamber 20, the vacuum of the electron gun 10 is deteriorated due to the melted material during the drilling, so that the cylindrical cathode 11 The electron beam drawing ability may be degraded or the electrical insulation between the cylindrical cathode 11 and the anode 12 may be broken. Therefore, there is a need for a system in which contaminants generated during drilling operations do not affect the operation of the electron gun 5. In addition, when the perforated object 21 is to be replaced after the end of the perforation, the vacuum of the processing chamber 20 should be broken to make the atmospheric pressure. In this case, the gate valve 30 is closed to close the processing chamber 20 and the electron gun 10. The vacuum of the liver may be blocked, but the electron gun 10 should be kept ready for operation, so the electron gun 10 should be maintained in a high vacuum state. To this end, in the present invention, a focusing electrode 18 is installed to focus the electron beam around the cylindrical cathode 11, and the electron beam is generated by making the focusing electrode 18 with a getter having a property of adsorbing the gas contained in the vacuum at a high temperature. The gun was allowed to continue to operate the electron gun 10 without a separate vacuum pump.

In addition, the cylindrical cathode 11 of the electron gun 10 should always be heated to a high temperature during operation, part of the heat generated from the cylindrical cathode 11 is to heat the focusing electrode 18 by radiation to focus the The electrode 18 maintains the temperature necessary for operation without an external heating device. By doing so, the electron gun 10 can be operated without a separate vacuum device, thereby simplifying the system according to the present invention and reducing the manufacturing cost.

While the invention has been shown and described with respect to specific embodiments thereof, it will be apparent to those skilled in the art that various modifications and variations can be made without departing from the spirit and scope of the invention as indicated by the appended claims. Anyone can easily know. For example, according to another embodiment of the present invention as shown in FIG. 5, a measuring device using an electron beam is further provided with a magnetic focusing lens between the electron gun and the processing chamber, and each vacuum pump is provided at the rear end of the electron gun and the processing chamber. By making the differential vacuum system for varying the degree of vacuum between the electron gun and the processing chamber, the drilling operation can be performed in the air, and the mill can be used for electron beam welding machines and the like.

As described above, the electron beam fabricator of the present invention can adjust the size of the hole using only the electron gun without using a magnetic focusing lens, thereby simplifying the system, thereby reducing the size of the device.

In addition, in the present invention, the use of the cylindrical cathode generates an electron beam having a uniform space distribution, thereby making it possible to reduce the size of the hole to 0.1 mm or less and at the same time improve the quality of the drilling operation.

In addition, in the present invention, by using a getter material as a material of the focusing electrode installed around the cathode, the electron beam can be generated without a separate vacuum pump in the electron beam generating unit, thereby simplifying the apparatus and reducing the manufacturing cost.

In addition, in the present invention, it is possible to adjust the size of the electron beam at will without any installation of an additional device such as a magnetic focusing lens between the electron gun and the processing chamber by using a tripolar tube electron gun, and as a result, the size of the hole to be drilled can be adjusted at will. It works.

In addition, by installing an inhaler near the perforation object, it is possible to remove the perforated material dissolved around the hole and at the same time improve the quality of the perforation.

Claims (7)

Perforation using an electron beam including an electron gun for generating an electron beam, a processing chamber in which the electron beam generated by the electron gun locally melts the object to be drilled, and a gate valve for isolating the vacuum between the electron gun and the processing chamber. In the apparatus, The electron gun is heated between application of a cathode to generate hot electrons, and when a high voltage is applied between the cathode, an anode to draw hot electrons generated in the cathode in the form of a beam, and disposed between the cathode and the anode. And a tripolar tube type including a control electrode for adjusting the size of the electron beam by changing an electric field distribution between the cathode and the anode according to the applied voltage. The method of claim 1, The cathode for emitting the electron beam is a perforated device using an electron beam, characterized in that made of a cylindrical in order to increase the spatial uniformity of the electron beam to improve the quality of the drilling operation. The method of claim 1, And a focusing electrode provided to focus the electron beam around the cathode to a getter having a property of adsorbing a gas contained in a vacuum at a high temperature. Perforation using an electron beam including an electron gun for generating an electron beam, a processing chamber in which the electron beam generated by the electron gun locally melts the object to be drilled, and a gate valve for isolating the vacuum between the electron gun and the processing chamber. In the apparatus, The processing chamber is equipped with a perforated device using an electron beam, characterized in that provided with an inhaler to improve the quality of the perforation by removing the perforated material dissolved in the periphery during the perforation operation. The method of claim 1, The processing chamber is a drilling device using an electron beam, characterized in that the fluorescent plate for measuring the size of the electron beam to determine the size of the hole to be drilled. The method of claim 4, wherein The working space for performing the drilling operation in the processing chamber, the punching device using an electron beam, characterized in that it is surrounded by a lead shielding wall to shield the X-rays generated during the drilling operation. The method of claim 4, wherein Drilling apparatus using an electron beam, characterized in that provided with a motion device operating in a two-dimensional linear or circular to adjust the position of the object to be drilled in the processing chamber.