KR20010038852A - Method of Producing a Gold Colored Hard Coating Film for Decoration - Google Patents
Method of Producing a Gold Colored Hard Coating Film for Decoration Download PDFInfo
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- KR20010038852A KR20010038852A KR1019990046986A KR19990046986A KR20010038852A KR 20010038852 A KR20010038852 A KR 20010038852A KR 1019990046986 A KR1019990046986 A KR 1019990046986A KR 19990046986 A KR19990046986 A KR 19990046986A KR 20010038852 A KR20010038852 A KR 20010038852A
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
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Abstract
Description
본 발명은 질화티타늄(TiN) 또는 탄질화티타늄(TiCN) 등의 장식용 경질 피막을 진공 스퍼터링에 의해 형성하는 방법에 관한 것이며, 보다 상세하게는 티타늄(Ti)과, TiN 또는 TiCN을 교대로 도금하여 다층 구조의 금색 경질 피막을 제조하는 방법에 관한 것이다.The present invention relates to a method of forming a decorative hard film such as titanium nitride (TiN) or titanium carbonitride (TiCN) by vacuum sputtering, and more particularly, by alternately plating titanium (Ti) and TiN or TiCN. The present invention relates to a method for producing a gold hard film having a multilayer structure.
주기율표상 Ⅳ족 원소인 Ti는 내식성이 뛰어나며, 또한 Ti의 질화물인 TiN 및 탄질화물인 TiCN은 금색과 색상이 유사하며 경도가 매우 높아 내마모성이 우수하여 진공상태에서 Ti과, TiN 또는 TiCN을 도금하는 스퍼터링, 아크이온플레이팅 기술이 최근에 시계부품, 악세사리, 수전용품, 욕실용품, 주방용품, 경첩 등의 장식용 제품에 금색경질도금으로 적용되고 있다.Ti, a Group IV element of the periodic table, has excellent corrosion resistance, and TiN, Ti nitride and carbonitride, TiCN, are similar in color to gold and have high hardness and are excellent in abrasion resistance. Therefore, Ti, TiN or TiCN is plated under vacuum. Sputtering and arc ion plating technology has recently been applied to gold hard plating for decorative products such as watch parts, accessories, water-receiving products, bathroom items, kitchen utensils and hinges.
이러한 금색경질도금 방법 중 아크이온플레이팅은 진공 분위기내에서 티타늄 판재의 아크 소스에 50∼150 암페어의 비교적 큰 전류를 가해 방전을 일으켜 아크 소스로부터 튀어 나오는 입자를 제품 표면에 도금하는 방법으로 도금 속도가 빠르며 도금층의 밀도가 높은 장점이 있으나, 아크 소스가 이상 방전을 일으킬 경우 직경 수미크론 정도의 큰 입자들이 제품 표면에 부착되어 우윳빛 도금으로 미관 품질이 저하되기도 하는 단점이 있다.Among these gold hard plating methods, arc ion plating applies a relatively large current of 50 to 150 amperes to an arc source of a titanium plate in a vacuum atmosphere to generate a discharge, thereby plating particles on the surface of the product that protrude from the arc source. Although there is an advantage in that the plating layer is high and the density of the plating layer is high, when the arc source causes an abnormal discharge, large particles of a few microns in diameter are attached to the surface of the product, and the aesthetic quality may be degraded by milky plating.
반면, 스퍼터링 방법은 진공 하에서 티타늄 판재의 금속 타겟(음극)에 아르곤등의 기체 입자를 충돌시켜 튀어나오는 입자를 제품의 표면에 도금하는 방법으로 도금되는 입자 크기가 옹스트롬(Å) 단위로 미세하고, 특히 합금도금할 경우 도금층의 성분 조절이 용이하여, 금색경질도금층 위에 최상층을 금합금으로 도금하는 장식용 제품의 경우에 적합한 도금 공법으로 알려져 있다.On the other hand, the sputtering method is a method of plating the particles to the surface of the product by colliding gas particles such as argon to the metal target (cathode) of the titanium plate under vacuum, the particle size to be plated is fine in angstrom unit, In particular, when the alloy plating is easy to control the components of the plating layer, it is known as a plating method suitable for decorative products in which the uppermost layer is plated with a gold alloy on the gold hard plated layer.
그러나, 스퍼터링 된 TiN 또는 TiCN 박막은 표면 조도(粗度)가 높은, 즉 표면 밀도가 낮은 단점이 있어 CIE(국제조명위원회) 색상 표기 방법인 L * a * b * 중 밝기값인 L * 이 약 72∼78 정도로 장식용 제품에 적용하기에는 낮은 특성을 가지고 있다. 한편, 스퍼터링 된 TiN 또는 TiCN의 도금 과정은, 도 1에 도시한 바와 같이 도금 초기에 표면에 핵이 생성되고 생성된 핵 위에 미세한 결정이 성장하다가 최종적으로 주상정(柱狀晶)으로 성장하게 되는데 주상정으로 성장하는 원인은, 결정 방향에 따라 성장 속도가 다르며 산(∧)부위가 선택적으로 성장 속도가 빠르고 골(∨)부위는 음영 효과에 의해 성장 속도가 느리기 때문인 것으로 알려지고 있다.However, the sputtered TiN or TiCN thin film has a disadvantage of high surface roughness, that is, low surface density, so that L * a * b *, which is the brightness value among the CIE color coding methods, is weak. It has a low characteristic to be applied to decorative products in the range of 72 to 78. Meanwhile, in the plating process of sputtered TiN or TiCN, as shown in FIG. 1, nuclei are formed on the surface at the initial stage of the plating, and fine crystals grow on the nuclei, and finally grow to columnar crystals. It is known that the growth rate of the columnar column is because the growth rate varies depending on the crystal direction, the acid region selectively grows faster, and the valley region grows slowly due to the shading effect.
이같은 주상정 도금 피막은 현미경 조직상 표면적이 크고 표면 밀도가 낮은 특성을 나타내며 따라서 표면 조도가 높아지게 된다. 상기 원인으로 스퍼터링 된 TiN 또는 TiCN은 색상이 어둡고 지문(指紋)이 묻을 경우 더욱 어두워지므로 도금의 CIE L * 값을 높이는 것이 최대 관건이다.This columnar coating film exhibits a characteristic of high surface area and low surface density in the microscopic structure, and thus high surface roughness. Since the sputtered TiN or TiCN is darker in color and becomes darker when fingerprints are deposited, it is important to increase the CIE L * value of the plating.
장식용 금색경질도금에 요구되는 CIE L * 값은 약 82∼87 범위로서 이 범위 미만의 도금은 색상이 어두워 고품질의 미관 제품에 적용하기 곤란하다.The CIE L * value required for decorative gold hard plating is in the range of about 82 to 87, and plating below this range is dark and difficult to apply to high quality aesthetic products.
최근에는 L * 값을 높이는 방법으로 스퍼터링 할 때 도금 하고자 하는 물체에 가해지는 바이어스(bias) 전압을 높인다거나 티타늄 대신 지르코늄 또는 티타늄-알루미늄 합금의 질화물 또는 탄질화물을 사용하는 방법이 제시되고 있다.Recently, a method of increasing the L * value has been proposed to increase the bias voltage applied to an object to be plated when sputtering or to use nitride or carbonitride of zirconium or titanium-aluminum alloy instead of titanium.
하지만, 스퍼터링 할 때 바이어스 전압을 올리면, 성장되는 도금 결정이 미세해지고 순도가 높아지는 장점이 있으나 L * 값을 82∼85로 올리려면 1000 내지 2000 볼트의 높은 바이어스 전압을 걸어야 한다. 이같이 높은 바이어스 전압 하에서 스퍼터링 하게되면 도금층의 응력이 매우 크고 도금 속도도 아주 작아지며 제품 표면에 아크가 발생되는 빈도가 높은 단점이 있어 장식용 제품에 적용하기는 곤란하다.However, when the bias voltage is increased during sputtering, there is an advantage that the grown plating crystal becomes fine and the purity is high, but to increase the L * value to 82 to 85, a high bias voltage of 1000 to 2000 volts must be applied. Sputtering under such a high bias voltage is very difficult to apply to decorative products because the stress of the plating layer is very large, the plating speed is also very small and the frequency of arcing on the surface of the product is high.
또한, 티타늄 대신 지르코늄이나 티타늄-알루미늄 합금의 질화물 또는 탄질화물을 도금하는 것은 금과 유사한 색상을 발현하기 어려우며 티타늄보다 5배 이상의 고가의 재료이므로 도금 비용이 높아지는 단점이 있다.In addition, the plating of nitrides or carbonitrides of zirconium or titanium-aluminum alloys instead of titanium is difficult to express a color similar to gold and has a disadvantage in that the plating cost is increased because the material is five times more expensive than titanium.
이와같이 종래의 장식용 금색경질도금은 그 제조 방법에 따라 각각의 문제를 가지고 있으며 더욱이 최근 제품의 수명 향상을 위해 도금두께를 약 1미크론 또는 그 이상으로 증가시켜야 하는 등의 요구가 증가되고 있는 실정이다.As described above, the conventional decorative gold hard plating has a problem according to its manufacturing method, and more recently, there is an increasing demand for increasing the plating thickness to about 1 micron or more in order to improve the service life of the product.
이에 본 발명자들은 상기한 문제점을 해결하여 색상이 밝은 금색경질도금을 얻기 위해 연구와 실험을 거듭하고 그 결과에 근거하여 본 발명을 제안하게 된 것으로, 본 발명은 기존 스퍼터링 방법을 적용하여 적절한 두께의 Ti층과 TiN층을 교대로 형성시키거나, Ti층과 TiCN층을 교대로 형성시킴으로서, 도금두께를 증가시켜도 색상이 밝은 고내마모성의 금색경질도금을 제조할 수 있는 방법을 제공하고자 하는데, 그 목적이 있다.Accordingly, the present inventors have repeatedly studied and experimented to solve the above problems and obtain a light-hard gold hard plating, and the present invention has been proposed based on the results. By alternately forming a Ti layer and a TiN layer, or by alternately forming a Ti layer and a TiCN layer, to provide a method of producing a high wear resistance gold hard plating with bright colors even when the plating thickness is increased. There is this.
도 1은 스퍼터링 방법에 의한 도금층의 성장 과정을 보이는 모식도1 is a schematic diagram showing the growth process of the plating layer by the sputtering method
도 2는 본 발명에 따른 스퍼터링 도금층을 보이는 구조도2 is a structural diagram showing a sputtering plating layer according to the present invention
도 3은 통상의 금색경질도금층을 보이는 구조도3 is a structural diagram showing a conventional gold hard plating layer
상기 목적 달성을 위한 본 발명은 장식용 금색경질도금에 있어서, 소재위에 제1층은 Ti밀착층으로 형성한 후, 제2층이상의 짝수층은 TiN경질층 또는 TiCN경질층으로 형성하고, 제3층이상의 홀수층은 Ti중간층으로 형성하여, 경질층과 중간층의 교대가 1회이상 행해지도록 하고, 상기 경질층과 중간층의 교대를 경질층을 마지막으로하여 종료시킴을 특징으로 하는 장식용 금색 경질 피막의 제조방법에 관한 것이다.In the present invention for achieving the above object in the decorative gold hard plating, the first layer on the material is formed of a Ti adhesion layer, the second or more even layers are formed of a TiN hard layer or TiCN hard layer, the third layer The above odd-numbered layer is formed of a Ti intermediate layer so that the hard layer and the intermediate layer are alternately performed one or more times, and the hard layer and the intermediate layer are finished at the last with the hard layer. It is about.
이하, 본 발명을 상세히 설명한다.Hereinafter, the present invention will be described in detail.
본 발명에 따른 다층 금색경질도금은 1개의 Ti밀착층, 2개 이상의 TiN경질층 또는 TiCN경질층, 1개 이상의 Ti중간층으로 이루어짐을 특징으로 하며, 부가적으로 1개의 금도금층을 형성할 수도 있다.The multi-layer gold hard plating according to the present invention is characterized by consisting of one Ti adhesion layer, two or more TiN hard layers or TiCN hard layers, and one or more Ti intermediate layers, and may additionally form one gold plating layer. .
상기 Ti밀착층은 첫 번째 도금층으로 소재와 두 번째 도금층인 상기 TiN경질층 또는 TiCN경질층 사이에서 도금의 밀착력을 증가시키고 응력을 완화시키는 역할을 한다. 상기 Ti밀착층의 두께는 약 0.1∼0.3 미크론(μ)이 되도록 도금하는 것이 바람직한데, 이는 Ti밀착층의 두께가 약 0.1μ 미만으로 되면 도금 응력 완화 효과가 저하되는 경향을 보이며, 약 0.3μ을 넘어서면 도금의 표면 조도가 커져 도금 색상이 어두워지는 경향을 보이기 때문이다.The Ti adhesion layer serves to increase adhesion between the material and the TiN hard layer or the TiCN hard layer, which is the first plating layer, and to reduce the stress. The Ti adhesion layer is preferably plated to have a thickness of about 0.1 to 0.3 microns (μ), which tends to reduce the plating stress relaxation effect when the thickness of the Ti adhesion layer is less than about 0.1 μ. This is because the surface roughness of the plating becomes larger when the plating color becomes darker.
그리고, 상기 TiN경질층 또는 TiCN경질층은 두 번째 이상의 짝수층이며, 두께는 약 0.1∼0.3μ이 되도록 도금하는 것이 바람직한데, 이는 TiN경질층 또는 TiCN경질층의 두께가 약 0.1μ 미만으로 되면 내마모성이 저하되는 경향을 보이며, 약 0.3μ을 넘어서면 도금의 표면 조도가 커져 도금 색상이 어두워지는 경향을 보이기 때문이다. 본 발명에서는 필요한 총 도금 두께에 따라 소요되는 상기 TiN경질층 또는 TiCN경질층의 층수를 증가시킬 수 있다.In addition, the TiN hard layer or TiCN hard layer is a second or more even layer, the thickness is preferably plated so that the thickness is about 0.1 ~ 0.3μ, which is when the thickness of the TiN hard layer or TiCN hard layer is less than about 0.1μ This is because the wear resistance tends to be lowered, and when it exceeds about 0.3 mu, the surface roughness of the plating increases and the plating color tends to be dark. In the present invention, the number of layers of the TiN hard layer or the TiCN hard layer required according to the total plating thickness required can be increased.
그리고, 상기 Ti중간층은 세 번째 이상의 홀수층이며, 두께는 약 0.03∼0.1μ이 되도록 도금하는 것이 바람직한데, 이는 Ti중간층의 두께가 약 0.03μ 미만으로 되면 불연속 도금이 되어 부분적으로 하지(下地)의 TiN경질층 또는 TiCN경질층이 연속으로 성장하여 도금 색상이 어두워지게 되며, 약 0.1μ을 넘어서면 금속의 경도가 낮은 속성 때문에 도금이 무른 단점이 있다. 본 발명에서는 필요한 총 도금 두께에 따라 소요되는 Ti중간층의 층수를 증가시킬 수 있다.In addition, the Ti intermediate layer is a third or more odd layer, and the plating is preferably performed so that the thickness is about 0.03 to 0.1 μ, which is discontinuous when the thickness of the Ti intermediate layer is less than about 0.03 μ. The TiN hard layer or the TiCN hard layer grows continuously, and the plating color becomes dark. When the TiN hard layer exceeds about 0.1 μ, the plating is soft because of the low hardness of the metal. In the present invention, it is possible to increase the number of layers of the Ti intermediate layer required according to the required total plating thickness.
그리고, 본 발명에서는 상기 경질층과 중간층을 교대로 형성한 다음, 보다 금색에 가까운 도금표면을 얻기위해, 최종적으로 금도금을 행할 수도 있다. 이같은 금도금은 제품에 색상을 부여하는 역할을 하며, 두께는 약 0.05μ 이상이 되도록 도금하는 것이 바람직한데, 장식 부품의 요구에 따라 여러 종류의 금합금도금이 적용될 수도 있으며, 또한 상기 금도금층 위에 전기도금법에 의해 다양한 색상으로 칼라링 도금을 할 수도 있다.In the present invention, the hard layer and the intermediate layer are alternately formed, and then gold plating may be finally performed in order to obtain a plating surface closer to gold. Such gold plating serves to give a color to the product, the thickness is preferably plated so that the thickness is about 0.05μ or more, various kinds of gold alloy plating may be applied according to the requirements of the decorative parts, and also the electroplating method on the gold plating layer Coloring plating can be done in various colors.
다음에서는 이상 설명한 바와같은 도금층을 얻은 방법을 보다 구체적인 예를 들어 설명한다.In the following, a method of obtaining the plating layer as described above will be described with more specific examples.
본 발명에 따른 제조 방법은 통상의 스퍼터링 방법을 변경 할 필요 없이 Ti과, TiN 또는 TiCN을 다층 구조로 도금하여 색상이 밝고 내마모성이 탁월한 장식용 금색경질합금을 얻는데 특징이 있다.The manufacturing method according to the present invention is characterized by obtaining Ti, TiN or TiCN in a multi-layered structure without changing the conventional sputtering method to obtain a decorative gold hard alloy with bright colors and excellent wear resistance.
본 발명에 따른 제조 방법의 일예를 도 2를 통해 설명하면 다음과 같다. 스퍼터링장치에 Ti 판재로 제작 된 타겟과 금(Au)합금으로 제작 된 타겟을 장착 한 후 도금하고자 하는 물체를 장입하고 진공 배기 펌프를 작동하여 장치를 감압한 후 장치에 아르곤(Ar) 가스를 도입하여 우선, 도 2에 도시 된 바와 같이 제1층으로 Ti를 두께가 약 0.1∼0.3μ이 되도록 스퍼터링을 한다. 이어서 장치에 질소(N2)와 아세틸렌(C2H2) 가스를 도입하여 제2층으로 TiCN을 두께가 약 0.1∼0.3μ이 되도록 스퍼터링한다. TiN의 경우에는 장치에 N2를 도입한다.An example of a manufacturing method according to the present invention will be described with reference to FIG. 2. After attaching the target made of Ti plate and the target made of Au alloy to the sputtering device, load the object to be plated, operate the vacuum exhaust pump to depressurize the device, and introduce argon (Ar) gas into the device. First, as shown in FIG. 2, Ti is sputtered to have a thickness of about 0.1 to 0.3 mu as the first layer. Subsequently, nitrogen (N 2 ) and acetylene (C 2 H 2 ) gases are introduced into the apparatus to sputter TiCN to a thickness of about 0.1 to 0.3 mu in the second layer. In the case of TiN, N 2 is introduced into the device.
다음에 질소 및 아세틸렌 도입을 중단하고 장치내에 아르곤만 존재하는 분위기에서 제3층으로 Ti를 두께가 약 0.03∼0.1μ이 되도록 스퍼터링 한다. 계속해서 소정의 두께가 되도록 TiN경질층 또는 TiCN경질층과 Ti중간층을 교대로 스퍼터링을 실시하여 마지막이 TiN경질층 또는 TiCN경질층이 되도록 한 후, 필요에 따라 금합금을 두께가 약 0.05μ 이상이 되도록 스퍼터링한다.Next, the introduction of nitrogen and acetylene was stopped, and Ti was sputtered to a thickness of about 0.03 to 0.1 mu in the third layer in an atmosphere where only argon was present in the apparatus. Subsequently, the TiN hard layer or the TiCN hard layer and the Ti intermediate layer are sputtered alternately so as to have a predetermined thickness so that the final layer becomes the TiN hard layer or the TiCN hard layer, and if necessary, the thickness of the gold alloy is about 0.05 μm or more. Sputter as much as possible.
이하, 본 발명을 실시예를 통하여 구체적으로 설명한다.Hereinafter, the present invention will be described in detail through examples.
실시예Example
스테인레스제 시계 케이스를 탈지, 세척 한 후 건조하여 독일 라이볼트사의 ZV1200 연속 진공 스퍼터링 장치에 장입하였다. 미리 장치내부의 음극에는 748*88*6mm 크기의 순도 99.5%의 Ti 타겟과 금합금 타겟을 장착하였다. 다음에 진공 펌프를 작동시켜 장치내의 진공도가 5×10-6mbar가 되도록 배기를 시켰다. 그리고, 하기 표1(발명예1) 및 표2(발명예2)와 같은 조건으로 스퍼터링을 실시하였다.The stainless steel watch case was degreased, washed and dried, and loaded into a German Rivault ZV1200 continuous vacuum sputtering apparatus. The cathode inside the apparatus was previously equipped with a Ti target of 99.5% purity and a gold alloy target having a size of 748 * 88 * 6mm. The vacuum pump was then operated to evacuate the vacuum in the apparatus to 5 × 10 −6 mbar. Then, sputtering was performed under the same conditions as in Table 1 (Invention Example 1) and Table 2 (Invention Example 2).
이와 같은 방법에 의해 제조된 도금층에 대한 CIE L*a*b* 를 2회씩 측정하여 그 결과를 하기 표3에 나타내었다. 또한, 스퍼터링 방법에 의해 0.2μ의 Ti층과 0.6μ의 TiCN층 만을 형성시킨 경우(비교예1)와, 스퍼터링 방법에 의해 0.2μ의 Ti층과 1.2μ의 TiCN층 만을 형성시킨 경우(비교예2)와, 아크 이온플레이팅 방법에 의해 0.2μ의 Ti층과 0.6μ의 TiCN층을 형성시킨 경우(비교예3)와, 아크 이온플레이팅 방법에 의해 0.2μ의 Ti층과 1.2μ의 TiCN층을 형성시킨 경우(비교예4)에 대해서도 CIE L*a*b* 를 측정하여 그 결과를 하기 표3에 나타내었다.The CIE L * a * b * of the plating layer prepared by the above method was measured twice, and the results are shown in Table 3 below. In addition, when only 0.2 micrometer Ti layer and 0.6 micrometer TiCN layer were formed by the sputtering method (comparative example 1), and when only 0.2 micrometer Ti layer and 1.2 micrometers TiCN layer were formed by the sputtering method (comparative example) 2) and 0.2 µ Ti layer and 0.6 µ TiCN layer were formed by the arc ion plating method (Comparative Example 3), and 0.2 µ Ti layer and 1.2 µ TiCN by the arc ion plating method. In the case of forming a layer (Comparative Example 4), CIE L * a * b * was also measured and the results are shown in Table 3 below.
상기 표3에 보이는 CIE L * a * b * 측정 결과에서도 알 수 있는 바와 같이, 도 3과 같은 도금층 구조를 보이는 통상의 스퍼터링 방법인 비교예(1)의 경우 L * 값이 75정도로 낮으며, TiCN 두께가 증가할수록 비교예(2)와 같이 L * 값이 더욱 저하되어 색상이 더욱 어두워지게 된다. 비교예(3,4)는 스퍼터링 방법과 다른 방법인 아크 이온플레이팅법으로 제조된 도금 색상으로서 L * 값은 84∼85로 밝은 색상이나 비정상적으로 큰 입자들이 존재하므로 전체적으로 뿌연 느낌을 준다.As can be seen from the CIE L * a * b * measurement results shown in Table 3, in the case of Comparative Example (1) which is a conventional sputtering method showing a plated layer structure as shown in FIG. As the TiCN thickness increases, the L * value decreases as in Comparative Example (2), and the color becomes darker. Comparative Example (3,4) is a plating color produced by the arc ion plating method, which is different from the sputtering method, and the L * value is 84 to 85, which gives a feeling of overall blur because of bright colors or abnormally large particles.
이에 반하여, 본 발명의 조건에 따라 제조된 발명예(1)의 경우, L * 값이 약 85로 밝은 금색상을 나타내었으며, 발명예(2)의 경우 TiN경질층의 두께가 증가해도 L * 값이 약 85로 변화가 없어 우수한 내마모 특성을 갖는 금색경질도금층이 형성되었다.On the contrary, in the case of Inventive Example (1) prepared according to the conditions of the present invention, the L * value was about 85, and a bright gold color was shown. In the Inventive Example (2), even when the thickness of the TiN hard layer was increased, L * The value was about 85, so that a hard gold plated layer having excellent abrasion resistance was formed.
상술한 바와같이, 본 발명에 의하면 통상의 스퍼터링 방법을 적용하면서도 밝은 금색상의 Ti/TiN 또는 Ti/TiCN 다층 도금을 형성할 수 있고, 층수를 증가시켜도 L*값이 높고 내마모 특성이 저하되지 않는 건전한 도금을 할 수 있는 것이다. 이로 인해, 본 발명에 의해 제조된 장식용 제품은 도금 수명을 연장할 수 있는 등 고신뢰성을 발휘할 수 있는 효과가 있다.As described above, according to the present invention, it is possible to form a bright gold Ti / TiN or Ti / TiCN multilayer plating while applying a conventional sputtering method, and even if the number of layers is increased, the L * value is high and the wear resistance is not deteriorated. You can do a healthy plating. For this reason, the decorative product manufactured by this invention has the effect which can exhibit high reliability, such as extending a plating life.
Claims (3)
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2018097488A1 (en) * | 2016-11-25 | 2018-05-31 | 주식회사 셀코스 | Method for plating to express champagne gold color |
CN109136844A (en) * | 2018-10-12 | 2019-01-04 | 佛山科学技术学院 | A kind of rose gold plate and its preparation process |
CN109234564A (en) * | 2018-10-12 | 2019-01-18 | 佛山科学技术学院 | A kind of wear-resisting rose gold plate and its preparation process |
CN110184566A (en) * | 2019-06-05 | 2019-08-30 | 广东省新材料研究所 | A kind of hard coat of Color tunable and preparation method thereof |
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1999
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018097488A1 (en) * | 2016-11-25 | 2018-05-31 | 주식회사 셀코스 | Method for plating to express champagne gold color |
CN109136844A (en) * | 2018-10-12 | 2019-01-04 | 佛山科学技术学院 | A kind of rose gold plate and its preparation process |
CN109234564A (en) * | 2018-10-12 | 2019-01-18 | 佛山科学技术学院 | A kind of wear-resisting rose gold plate and its preparation process |
CN110184566A (en) * | 2019-06-05 | 2019-08-30 | 广东省新材料研究所 | A kind of hard coat of Color tunable and preparation method thereof |
CN110184566B (en) * | 2019-06-05 | 2021-08-03 | 广东省新材料研究所 | Color-adjustable hard coating and preparation method thereof |
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