KR20010012038A - Manufacturing method of multilayered piezoelectric/electrostrictive ceramic actuator by sintering process at low temperature and the actuator manufactured by the method - Google Patents

Abstract

PURPOSE: A method for manufacturing a multilayer piezoelectricity/electric distortion ceramic actuator and the multilayer piezoelectricity/electric distortion ceramic actuator manufactured by the method are to fabricate a multilayer piezoelectricity/electric distortion ceramic actuator by using a ceramic paste capable of forming a piezoelectricity/electric distortion film at a low temperature. CONSTITUTION: A method for manufacturing a multilayer piezoelectricity/electric distortion ceramic actuator comprises the steps of: providing a metal vibration plate(22); forming a single piezoelectricity/electric distortion film(26a) by using a ceramic paste fabricated by mixing an ultra fine ceramic oxide powder manufactured by a non-explosive oxidation-reduction combustion reaction, having a particle size of less than 5 micrometer, and using a Pb and a Ti as a primary element with a ceramic sol solution identical or similar to the ultra fine ceramic oxide powder manufactured using a water or an organic solvent as a base, on the vibration plate; thermal processing the single piezoelectricity/electric distortion ceramic film at the temperature of 100 to 800 deg.C; forming an upper electrode(28a) on the upper part of the single piezoelectricity/electric distortion ceramic film; and repeating the step of forming and thermal processing a single piezoelectricity/electric distortion ceramic film(26b) on the upper part of the upper electrode and the steps of forming an upper electrode(28b) on the upper part of the single piezoelectricity/electric distortion ceramic film.

Description

Manufacturing method of multilayered piezoelectric / electrostrictive ceramic actuator by sintering process at low temperature and the actuator manufactured by the method }

The present invention relates to a method of manufacturing a piezoelectric / electric warp ceramic actuator and a piezoelectric / electric warp ceramic actuator manufactured by the method, and more particularly, to a piezoelectric / electric warp ceramic actuator in which a piezoelectric / electric warp film and a superstructure are laminated in multiple layers. The present invention relates to a piezoelectric / electric distortion ceramic actuator manufactured by the method.

In order to discharge the ink droplets to a specific size and specific speed from the inkjet printer head, the actuator needs to be moved at high speed with sufficient displacement.

The actuator in the inkjet printer head is generally composed of a diaphragm coupled to a lower structure, a lower electrode formed on the upper part of the diaphragm, a piezoelectric / distortion film formed on the upper part of the lower electrode, and an upper electrode formed on the upper part of the piezoelectric / distortion film. to be.

In the actuator having the above configuration, when power is applied to the upper electrode and the lower electrode, the piezoelectric / electric distortion film placed between the electrodes is vibrated while repeating deformation and restoration.

The structure of a commonly used piezoelectric / distortion ceramic actuator is shown in FIG. 1.

In the actuator as shown in FIG. 1, the lower electrode 14 is formed on the upper side of the chamber plate 10 and the diaphragm 12 formed of zirconia or the like, and the upper surface of the lower electrode 14 is generally formed. The piezoelectric / distortion film 16 is formed of a ceramic oxide powder which is manufactured by a solid phase method, which requires heat treatment at a high temperature, and the upper electrode 18 is formed on the upper part of the piezoelectric / distortion film 16 with silver or the like. Is common.

In such actuators, piezoelectric / electrodistor films are formed of ceramic oxide powder requiring heat treatment of 1000 ° C. or higher, and therefore, only a few materials such as zirconia, which can withstand heat treatment of 1000 ° C. or higher, can be used as the vibration plate or chamber plate material. Therefore, there is a disadvantage that the type of material that can be used as the diaphragm or chamber plate is limited.

In addition, since it is formed as a single layer, in order to express an appropriate displacement, a certain voltage or more must be applied, and the piezoelectric / electric distortion film formed by the solid phase method has a relatively large particle size of 0.2-2 μm. Since it is a thin film having a thickness of −30 μm, the voltage that must be supplied for the actuator to express the displacement is high.

The driving voltage of the piezoelectric / electric distortion ceramic actuator for an inkjet head is determined in a range where sufficient displacement and speed can be obtained, and depends on the characteristics of the structure constituting the actuator, such as the thickness of the actuator, the characteristics of the piezoelectric / electric distortion material, and the characteristics of the diaphragm. The driving voltage of such piezoelectric / electric distortion ceramic actuators for inkjet heads is usually determined around 20-30V.

Faster drive speeds and more displacement are required for the inkjet print head to function as a high performance printer head. However, the conventional method used to obtain a faster driving speed and more displacement is to increase the driving voltage. In this case, the manufacturing cost of the driving circuit must be increased and the process must withstand high voltages in the process. There is a problem that can be.

The present invention for solving the above problems is to produce a piezoelectric / electrodistortion ceramic actuator capable of high-speed, high displacement vibration by manufacturing a multilayer piezoelectric / electrodistortion ceramic actuator using a ceramic paste capable of forming a piezoelectric / electrodistortion film at low temperature It is an object of the present invention to provide a piezoelectric / electric distortion ceramic actuator manufactured by the method.

1 is a cross-sectional view schematically showing the configuration of a conventional piezoelectric / electric distortion ceramic actuator;

2 is a cross-sectional view schematically showing the configuration of one embodiment of the multilayer piezoelectric / electric distortion ceramic actuator of the present invention.

<Explanation of symbols for main parts of drawing>

10, 20: chamber plate 12, 22: vibration plate

14, 24: lower electrode 16: piezoelectric / electric distortion film

18: upper electrode

26a, 26b, 26c, 26d, 26e: piezoelectric / electric distortion film

28a, 28b, 28c, 28d, 28e: upper electrode

The present invention for achieving the above object comprises the steps of providing a diaphragm; Forming a lower electrode on the diaphragm (the lower electrode; on the lower electrode) by a non-explosive redox combustion reaction at a low temperature of 100-500 ℃, the particle size is 5㎛ or less, lead (Pb ), Ceramic paste prepared by mixing an ultrafine ceramic oxide powder containing titanium (Ti) as a basic element and a ceramic sol solution of the same or similar component as the ultrafine ceramic oxide powder prepared based on water or an organic solvent. Forming a single piezoelectric / distortion film using; Heat-treating the single piezoelectric / distortion film at 100-800 ° C .; Forming an upper electrode on the single piezoelectric / distortion film; Forming a plurality of piezoelectric / distortion layers and upper electrodes by repeating the steps of forming a single piezoelectric / distortion layer on the upper electrode and performing heat treatment and forming an upper electrode on the single piezoelectric / distortion layer. The manufacturing method of the multilayer / piezoelectric / electric distortion ceramic actuator by the method has its characteristics.

In addition, the present invention is a metal vibration plate; Ultrafine ceramic oxide powder prepared by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. on the upper part of the diaphragm and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements. And a piezoelectric / electric warp film formed using a ceramic paste prepared by mixing a ceramic sol solution of the same or similar component with the ultrafine ceramic oxide powder prepared on the basis of water or an organic solvent; And an upper electrode formed on the piezoelectric / distortion film, wherein the piezoelectric / electric distortion film and the upper electrode are alternately repeatedly stacked to form a multilayer structure. The whole distortion is characterized by ceramic actuators.

In addition, the present invention and the diaphragm; A lower electrode formed on the diaphragm; An ultrafine ceramic oxide prepared by non-explosive redox combustion reaction at a low temperature of 100-500 ° C. on the lower electrode and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements. A piezoelectric / electric distortion film formed by using a powder and a ceramic paste prepared by mixing a ceramic sol solution of the same or similar component with the ultrafine ceramic oxide powder prepared on the basis of water or an organic solvent; And an upper electrode formed on the piezoelectric / distortion film, wherein the piezoelectric / electric distortion film and the upper electrode are alternately repeatedly stacked to form a multilayer structure. The whole distortion is characterized by ceramic actuators.

Hereinafter, the present invention will be described in detail.

As the diaphragm of the actuator, a polymer organic compound of metal, ceramic or resin can be used.

As the metal, various conventional alloys may be used, and among them, stainless steel (SUS) or nickel (Ni) is particularly preferable.

As the ceramic plate, aluminum oxide (Al ₂ O ₃ ), zirconium oxide (ZrO ₂ ), silicon (Si), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), silicon dioxide (SiO ₂ ) or glass-based It is desirable to.

It is preferable to use a polyester-based, polyimide-based, polyethyleneimide-based, or Teflon-based resin vibrating plate as the polymeric organic compound of the resins.

If the metal is used as a diaphragm, the metal itself is conductive, so it is not necessary to form a separate lower electrode. However, when using a ceramic or resin-based high molecular organic compound as the diaphragm, a separate lower electrode should be formed. .

At this time, the lower electrode is formed by a method such as evaporation, sputtering or screen printing using gold, silver, aluminum, nickel, platinum, or the like as a material.

The lower electrode may be formed on the diaphragm as a whole or may be formed only on a necessary portion using a mask.

A piezoelectric / electric distortion film is formed on the ceramic or resin vibration plate on which the upper or lower electrode of the metal vibration plate is formed.

At this time, a piezoelectric / electric distortion distortion ceramic paste capable of low temperature heat treatment capable of heat treatment at low temperature is used as the material of the piezoelectric / electric distortion film.

Piezoelectric / electric distortion ceramic pastes are prepared by mixing ceramic oxide powders and ceramic sol solutions of the same or similar components having affinity with ceramic oxide powders.

In order to consider the reactivity of the ceramic oxide powder itself and to secure a system capable of low-temperature molding, it is effective to use a fine powder for the ceramic oxide powder. Therefore, the ceramic component material is sufficiently dissolved or uniformly dispersed in a solvent or a dispersion medium to disperse the ceramic component. Preparing a solution or dispersion mixture comprising a mixture, adding an amount or more citric acid necessary to cause an oxidation-reduction combustion reaction with an anion of the ceramic component to a solution or dispersion mixture in which the ceramic component is dissolved or dispersed; To prepare a ceramic oxide powder comprising the step and the step of heat-treating the mixture at 100-500 ℃.

As a raw material containing a ceramic component, a ceramic component such as an oxide, a carbonate or a nitrate of a ceramic component, a salt of an organic or inorganic substance, or a complex of ceramic components is used.

As the ceramic component, it is preferable to use a piezoelectric / electrically distorted ceramic element having lead (Pb) and titanium (Ti) as a basic component, and in particular, the ceramic component may include lead (Pb), zirconium (Zr), or titanium (Ti). ) Or a component composed of lead (Pb), magnesium (Mg) and niobium (Nb).

As a solvent or dispersion medium for dissolving or dispersing the ceramic component material, one or more of water or organic solvents capable of dissolving or dispersing the raw material containing the ceramic component may be used. Among the organic solvents, dimethyl formamide, methoxyethanol, acetic acid, alcohols and glycols are mainly used.

As a combustion aid, citric acid, an organic compound that can cause a combustion reaction, is used. In the conventional method, citric acid has been used to impart homogeneity of the reaction as a complexing agent, not as a combustion aid, and has been applied in processes such as the Pechini process. By using can cause a controlled combustion reaction rate.

Citric acid is added to a solution or dispersion mixture in which ceramic components are dissolved or dispersed to prepare a mixed solution. The amount of citric acid to be added is added to the amount or more necessary to cause an oxidation-reduction combustion reaction with the anion of the ceramic element. The rate of progress of the reaction can be controlled depending on the amount of citric acid added.

The mixed solution mixed with citric acid is heat-treated at 100-500 ° C. As the temperature of the heat treatment increases, the crystallinity of the ceramic phase increases, but when the heat treatment temperature is 100 ° C. or higher, the combustion reaction of citric acid can be sufficiently initiated. The reaction may occur even when the heat treatment is performed above 500 ° C., but the heat treatment is performed at a higher temperature. Is meaningless compared to conventional methods.

More preferably, the heat treatment is carried out at 150-300 ° C., and the temperature range can adequately secure the crystallinity of the ceramic phase even at a very low temperature.

Citric acid is removed during the combustion reaction, and ceramic oxide is formed without scattering by the heat of reaction of citric acid generated at this time.

In this reaction, components other than the ceramic component are removed by a combustion reaction for a sufficient time, thereby forming a ceramic oxide powder in a pure form in which impurities do not remain.

The ceramic oxide powder prepared by the above method is an extremely fine and uniform particle size distribution having a particle size of 5 μm or less, especially 0.5 μm or less, and the primary particles are in the form of an individual or a soft aggregate. It is a fully burned ceramic phase, so the weight is not reduced by further heat treatment.

In addition, since the surface is excellent in reactivity and can be formed only by heat treatment at low temperature, the degree of freedom of the diaphragm is high, and various methods of printing or coating the diaphragm can be applied.

In order to increase the crystallinity of the ceramic oxide powder prepared, the ceramic oxide powder prepared may be further heat treated at 700-900 ° C.

A ceramic paste is prepared by mixing ceramic oxide powder prepared by the above method with a ceramic sol solution having the same or similar affinity with the ceramic oxide powder.

At this time, it is preferable to use PZT, PMN or their solid solution (PZT-PMN) composite oxide as the ceramic oxide.

In addition, the ceramic oxide is nickel (Ni), lanthanum (La), barium (Ba), zinc (Zn), lithium (Li), cobalt (Co), cadmium (Cd), cerium (Ce), chromium (Cr), Antimony (Sb), iron (Fe), yttrium (Y), tantalum (Ta), tungsten (W), strontium (Sr), calcium (Ca), bismuth (Bi), tin (Sn), manganese (Mn) It may further comprise one or more elements.

Ceramic sol solutions are prepared by dissolving ceramic components based on water or organic solvents. Various organic solvents can be used as the base, but it is preferable to use mainly selected from acetic acid, dimethylformamide, methoxyethanol, alcohols, and glycols.

The ceramic component used in the manufacture of the ceramic sol solution is preferably a component containing lead (Pb), zirconium (Zr), titanium (Ti), the concentration of the ceramic sol solution to be used is 0.1-5M It is preferable.

When the ceramic oxide powder and the ceramic sol solution are mixed, the content of the ceramic sol solution is preferably 1-200 parts by weight based on the ceramic oxide powder. This is because when the content of the ceramic sol solution is 200 parts by weight or more, the ceramic oxide powder is diluted too much, so that the viscosity of the mixture is low, and when the content of the ceramic sol solution is less than 1 part by weight, the amount of the ceramic oxide powder is too large and the viscosity becomes too high.

When the ceramic oxide powder and the ceramic sol solution are mixed, the liquid ceramic sol solution uniformly coats the surface of the solid ceramic oxide powder and connects the ceramic oxide powder particles to effectively fill the pores between the powders.

In the powder-sol mixture thus formed, the ceramic oxide powder having the characteristics of ceramics is surrounded by the ceramic sol solution of the same or similar component and has a proper fluidity. The ceramic sol acts as a reaction medium on the surface of the ceramic oxide powder and thus the powder surface. The reactivity of is improved.

In addition, the organic component contained in the sol, in the future when the mixture is in contact with a separate organic material, it is possible to secure the stability of the contact interface to impart dispersibility and homogeneity.

In such a system, since the sol is thermally decomposed at a low temperature and converted into the same or similar composition as the ceramic oxide powder, a ceramic system with improved inter-particle connectivity can be obtained even at low temperatures.

In order to ensure the stability of the mixture of the ceramic oxide powder and the ceramic sol solution and the fluidity required for molding, an organic solvent for controlling properties may be added. Various kinds of organic solvents for controlling physical properties may be used, but it is preferable to use glycols or alcohols such as ethanol, polyvinyl alcohol, glycerol, terpineol, polyethylene glycol or the like as a basis.

When adding an organic solvent for controlling physical properties to the mixture of ceramic oxide powder and ceramic sol solution, the amount of the organic solvent for controlling physical properties is preferably 1-100 parts by weight based on the ceramic oxide powder. This is because if the amount of the organic solvent for controlling physical properties is less than 1 part by weight, the effect of adding the organic solvent for controlling physical properties is not effective, and if the amount is more than 100 parts by weight, the mixture does not maintain viscosity and is too diluted to deteriorate moldability during molding.

The addition amount of the organic solvent for controlling the physical properties is particularly preferably 10 to 40 parts by weight based on the ceramic oxide powder. In this range, the organic solvent for controlling the physical properties can be added while maintaining the viscosity of the mixture as appropriate.

In addition, a small amount of organic matter may be added to the mixture of the ceramic oxide powder and the ceramic sol solution in order to improve the dispersibility and homogeneity of the mixture in which the solvent for controlling physical properties is added. At this time, it is preferable to use long-chain alcohols or polar organic solvents to add.

Among the long chain alcohols, it is preferable to use pentanol or hexanol, and it is preferable to use acetylacetone or methoxyethanol as the polar organic solvent.

It is preferable that the addition amount of an organic substance shall be 1-100 weight part with respect to a ceramic oxide powder. This is because if the added amount of the organic substance is less than 1 part by weight, there is no effect of adding the organic substance. If the added amount is more than 100 parts by weight, the mixture does not maintain the viscosity and is too diluted, resulting in poor moldability.

The addition amount of the organic material is particularly preferably 10 to 40 parts by weight based on the ceramic oxide powder. In this range, the addition of the organic material can be effected while maintaining the viscosity of the mixture as appropriate.

A single piezoelectric / electric distortion film is formed by various thick and thin film formation methods such as the sol-gel method, screen printing method, molding method, and coating method using the piezoelectric / electrical distortion ceramic paste prepared by the above method. Heat treatment at 100-800 ℃ depending on the type.

In this case, the thickness of the single piezoelectric / electric distortion film may be adjusted according to heat treatment conditions or needs, but is preferably formed in a thickness of 0.1-10 μm, and particularly preferably in a thickness of 1-6 μm.

In the case of using a conventional ceramic oxide powder, the thickness of the piezoelectric / electric strain film could not be made thin because of the large particle size of the ceramic oxide powder, but the ceramic oxide powder used in the present invention has a thin thickness because of the fine particle size. A single piezoelectric / distortion film can be formed.

An upper electrode is formed on the single piezoelectric / distortion film. As the upper electrode, gold, silver, aluminum, nickel, platinum, and the like are formed by various thick films and thin film formation methods such as evaporation, sputtering, or screen printing, followed by heat treatment.

By repeating the process of forming the piezoelectric / electric strained film and the upper electrode by the above-described method, a multilayer piezoelectric / electric distortion ceramic actuator having a desired number of layers is produced.

Comparing n-layered multilayer piezoelectric / optical warp ceramic actuators to single-layer piezoelectric / optical warp ceramic actuators, n-layer multilayer piezoelectric / optical warp ceramic actuators can achieve n times the operating displacement and speed when the same voltage is applied. The same operating displacement and speed can be achieved by applying only a voltage of about / n.

In addition, by varying the thickness of a single piezoelectric / distortion film in a multilayer, different vibration forms can be obtained, and this type of vibration can be used to control droplet size or stabilize the meniscus. It is useful.

In addition, the polarization of the multilayer piezoelectric / distortion film can improve the characteristics of the actuator. By controlling the polarization direction of the piezoelectric / electric strainer in various ways, a large displacement can be obtained compared to the piezoelectric / electric strainer of a single layer or an unpolarized piezoelectric / electric strainer.

The multilayer piezoelectric / electric warp ceramic actuator manufactured by the above method includes a metal vibrating plate when the metal is used as the diaphragm; Ultrafine ceramic oxide powder prepared by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. on the upper part of the diaphragm and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements. And a piezoelectric / electric warp film formed using a ceramic paste prepared by mixing a ceramic sol solution of the same or similar component with the ultrafine ceramic oxide powder prepared on the basis of water or an organic solvent; And an upper electrode formed on the piezoelectric / distortion layer, wherein the piezoelectric / distortion layer and the upper electrode are alternately repeatedly stacked to form a multilayer structure.

In addition, when using an organic compound of ceramics or resins as the diaphragm and the diaphragm; A lower electrode formed on the diaphragm; An ultrafine ceramic oxide prepared by non-explosive redox combustion reaction at a low temperature of 100-500 ° C. on the lower electrode and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements. A piezoelectric / electric distortion film formed by using a powder and a ceramic paste prepared by mixing a ceramic sol solution of the same or similar component with the ultrafine ceramic oxide powder prepared on the basis of water or an organic solvent; And an upper electrode formed on the piezoelectric / distortion layer, wherein the piezoelectric / distortion layer and the upper electrode are alternately repeatedly stacked to form a multilayer structure.

Fig. 2 shows a piezoelectric / electric distortion ceramic actuator laminated in five layers by the method of the present invention.

As shown in FIG. 2, the actuator forms a lower electrode 24 on the upper part of the diaphragm 22 coupled with the chamber plate 20, and piezoelectric / electrodistor layers 26a and 26b on the lower electrode 24. (C) 26c, 26d, 26e and the upper electrodes 28a, 28b, 28c, 28d, and 28e are repeatedly stacked to form a stacked structure of five layers.

In the case of stacking five layers as shown in FIG. 2, when the same driving voltage is applied, an operating displacement and speed of about 5 times can be obtained, and the same operating displacement and speed can be obtained with a driving voltage of about 1/5.

The present invention will be described in more detail with reference to the following Examples. The following examples, however, illustrate the invention and do not limit the scope of the invention.

(Example 1)

PZT-PMN-based piezoelectric / electric distortion micropowder with a particle size of 0.5 μm or less prepared by non-explosive oxidation / reduction combustion reaction and PZT-methoxyethanol sol solution having a concentration of 0.5 M in a weight ratio of 1: 1 were mixed in an ultrasonic cleaner. Disperse for 30 minutes.

The obtained dispersion was spin-coated on a silicon substrate on which platinum was deposited as a lower electrode, and partially dried at room temperature, and the partially dried piezoelectric / electrodistor film was completely dried at 120 ° C.

The fully dried piezoelectric / distortion film was heat-treated at 300 ° C., and an upper electrode was deposited on the heat-treated piezoelectric / distortion film.

The piezoelectric / electric strainer ceramic actuators were laminated in three layers by coating, drying, and heat-treating the piezoelectric / electric strainer layer, and depositing the upper electrode on the piezoelectric / electric strainer layer.

(Example 2)

A PZT-based piezoelectric / electric distortion micropowder having a particle size of 0.1 μm or less and trimethylene glycol prepared by a non-explosive oxidation / reduction combustion reaction was mixed at a weight ratio of 6: 4, and stirred for 6 hours in an automatic induction.

PZT-acetic acid sol solution of 2.0 M concentration was mixed with a mixture of powder and trimethylene glycol in a weight ratio of 5: 1, further stirred for 30 minutes in an auto-induction, and then dispersed in an ultrasonic cleaner for 30 minutes.

The resulting dispersion was dip-coated on a stainless steel substrate, partially dried at room temperature, and the partially dried piezoelectric / distortion film was completely dried at 100 ° C.

The fully dried piezoelectric / distortion film was heat treated at 300 ° C., and an upper electrode was deposited on the heat-treated piezoelectric / distortion film.

Coating, drying and heat-treating the piezoelectric / distortion layer, and depositing the upper electrode on top of the piezoelectric / distortion layer were repeated five times to prepare a piezoelectric / electric distortion ceramic actuator stacked in five layers.

(Example 3)

A PZT-based piezoelectric / electric distortion micropowder having a particle diameter of 0.1 μm or less and 2M PZT acetate sol prepared by non-explosive oxidation / reduction combustion reaction were mixed in a weight ratio of 7: 3. PZT colloidal suspension obtained by hydrolysis by adding a small amount of water to a separate 2M PZT acetate sol was added by 25% of the fine powder weight and mixed by autoinduction. Acetic acid was added in an appropriate amount to ensure proper viscosity for spin coating, and then coated on a silicon substrate on which a platinum lower electrode was formed.

The coated piezoelectric / distortion film was dried and then heat-treated at 300 ° C., and an upper electrode was deposited on the heat-treated piezoelectric / distortion film.

The piezoelectric / distortion ceramic actuators were laminated in ten layers by coating, drying, and heat-treating the piezoelectric / electric distortion film, and depositing the upper electrode on the piezoelectric / electric distortion film.

(Example 4)

A PZT-PMN piezoelectric / electric distortion micropowder having a particle size of 0.5 µm or less and 2M PZT acetate sol prepared by non-explosive oxidation / reduction combustion reaction were mixed in a weight ratio of 7: 3. To this was added polyvinyl alcohol by 10% of the fine powder weight and mixed in an autoinduction. An appropriate amount of methoxyethanol was added to ensure proper viscosity for spin coating, and then coated on a silicon substrate on which a platinum lower electrode was formed.

The coated piezoelectric / distortion film was dried at 300 ° C. and then heat-treated at 700 ° C., and an upper electrode was deposited on the heat-treated piezoelectric / distortion film.

The piezoelectric / distortion ceramic actuators were laminated in ten layers by coating, drying, and heat-treating the piezoelectric / electric distortion film, and depositing the upper electrode on the piezoelectric / electric distortion film.

In the present invention as described above, the piezoelectric / electrodistor film and the upper electrode are laminated in a multi-layer, so that a large displacement and a driving speed can be obtained even with a small change in driving voltage, so that high displacement, high speed actuating is possible, and high quality and high speed printing is possible. There is a possible effect.

In addition, the driving voltage required for actuating piezoelectric / electric distortion ceramic actuators can be drastically reduced, thereby reducing the cost of constructing and manufacturing a circuit.

In addition, it is possible to obtain a variety of deformation forms by the electric field difference between the thin film and the thick film by forming a different thickness of the single piezoelectric / electrostrictive film, which can be usefully used to control the droplet size or stabilize the meniscus.

In addition, by polarizing the piezoelectric / distortion film formed in a multi-layer, it is possible to obtain improved characteristics of the actuator as compared with the piezoelectric / distortion film or the unpolarized piezoelectric / distortion film of a single layer.

Claims (28)

Providing a metal vibrating plate; Ultrafine ceramic oxide powder prepared by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. on the upper part of the diaphragm and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements. And forming a single piezoelectric / electric distortion film using a ceramic paste prepared by mixing a ceramic sol solution of the same or similar component with the ultrafine ceramic oxide powder prepared based on water or an organic solvent; Heat-treating the single piezoelectric / distortion film at 100-800 ° C .; Forming an upper electrode on the single piezoelectric / distortion film; Forming a single piezoelectric / distortion film on top of the upper electrode and subjecting the heat treatment to repeating the step and forming the upper electrode on the top of the single piezoelectric / distortion film; Method for manufacturing a multilayer / piezoelectric / electric distortion ceramic actuator by a firing method. 2. The method of manufacturing a multilayer piezoelectric / electric distortion ceramic actuator according to claim 1, wherein a single piezoelectric / electric distortion film is formed to a thickness of 0.1-10 mu m. 3. The method of manufacturing a multilayer piezoelectric / electric distortion ceramic actuator according to claim 2, wherein a single piezoelectric / electric distortion film is formed to a thickness of 1-6 mu m. 2. The method of manufacturing a multilayer piezoelectric / electric distortion ceramic actuator according to claim 1, wherein the thickness of the single piezoelectric / electric distortion film is formed differently. 2. The method of manufacturing a multilayer piezoelectric / electric distortion ceramic actuator according to claim 1, wherein the multilayer piezoelectric / electric distortion film is polarized. Providing a diaphragm; Forming a lower electrode on the diaphragm; An ultrafine ceramic oxide prepared by non-explosive redox combustion reaction at a low temperature of 100-500 ° C. on the lower electrode and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements. Forming a single piezoelectric / electric warp film using a ceramic paste prepared by mixing a powder, a ceramic sol solution of the same or similar component with the ultrafine ceramic oxide powder prepared on the basis of water or an organic solvent; Heat-treating the single piezoelectric / distortion film at 100-800 ° C .; Forming an upper electrode on the single piezoelectric / distortion film; Forming a multi-layered piezoelectric / distortion layer and an upper electrode by repeating the step of forming a single piezoelectric / distortion layer on the upper electrode and performing heat treatment and forming the upper electrode on the single piezoelectric / distortion layer. Method for manufacturing a multilayer / piezoelectric / electric distortion ceramic actuator by a firing method. 7. The method of manufacturing a multilayer piezoelectric / electric distortion ceramic actuator according to claim 6, wherein a ceramic plate is used as the diaphragm. The method of claim 7, wherein the ceramic is aluminum oxide (Al ₂ O ₃ ), zirconium oxide (ZrO ₂ ), silicon (Si), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), silicon dioxide (SiO ₂ ) Or a glass system. A method of manufacturing a multilayer piezoelectric / electric warp ceramic actuator by a low temperature baking method. 7. The method of manufacturing a multilayer piezoelectric / electric distortion ceramic actuator according to claim 6, wherein a high molecular weight organic compound of resins is used as the diaphragm. 10. The method of claim 9, wherein the polymeric organic compound of the resins is characterized in that a polyester, polyimide, polyethyleneimide or Teflon resin is used. A method for producing a multilayer piezoelectric / electric distortion ceramic actuator by low temperature baking method. 7. The method of manufacturing a multilayer piezoelectric / electric distortion ceramic actuator according to claim 6, wherein a single piezoelectric / electric distortion film is formed to a thickness of 0.1-10 mu m. 12. The method for producing a multilayer piezoelectric / electric distortion ceramic actuator according to claim 11, wherein a single piezoelectric / electric distortion film is formed to a thickness of 1-6 mu m. 7. The method of manufacturing a multilayer piezoelectric / electric distortion ceramic actuator according to claim 6, wherein the thickness of the single piezoelectric / electric distortion film is differently formed. 7. A method for producing a multilayer piezoelectric / electric distortion ceramic actuator according to claim 6, wherein the multilayer piezoelectric / electric distortion film is polarized. A metal vibrating plate; Ultrafine ceramic oxide powder prepared by non-explosive oxidation-reduction combustion reaction at a low temperature of 100-500 ° C. on the upper part of the diaphragm and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements. And a single piezoelectric / electric warp film formed using a ceramic paste prepared by mixing a ceramic sol solution of the same or similar component with the ultrafine ceramic oxide powder prepared on the basis of water or an organic solvent; It is configured to include an upper electrode formed on top of the single piezoelectric / distortion film, And the single piezoelectric / distortion film and the upper electrode are alternately repeatedly stacked to form a multi-layered structure. 16. The multilayer piezoelectric / electric distortion ceramic actuator according to claim 15, wherein the single piezoelectric / electric distortion film has a thickness of 0.1-10 mu m. 17. The multilayer piezoelectric / electric distortion ceramic actuator according to claim 16, wherein the thickness of the single piezoelectric / electric distortion film is 1-6 mu m. 16. The multilayer piezoelectric / electric distortion ceramic actuator according to claim 15, wherein the thickness of the single piezoelectric / electric distortion film is formed differently. 16. The multilayer piezoelectric / electric distortion ceramic actuator according to claim 15, wherein the multilayer piezoelectric / electric distortion film is polarized. A diaphragm; A lower electrode formed on the diaphragm; An ultrafine ceramic oxide prepared by non-explosive redox combustion reaction at a low temperature of 100-500 ° C. on the lower electrode and having a particle size of 5 μm or less and having lead (Pb) and titanium (Ti) as basic elements. A single piezoelectric / electric distortion film formed by using a powder and a ceramic paste prepared by mixing a ceramic sol solution of the same or similar component with the ultrafine ceramic oxide powder prepared on the basis of water or an organic solvent; It is configured to include an upper electrode formed on top of the single piezoelectric / distortion film, And the single piezoelectric / distortion film and the upper electrode are alternately repeatedly stacked to form a multi-layered structure. 21. The multilayer piezoelectric / electric distortion ceramic actuator according to claim 20, wherein the diaphragm is a ceramic plate. The method of claim 21 wherein the ceramic is aluminum oxide (Al ₂ O ₃ ), zirconium oxide (ZrO ₂ ), silicon (Si), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), silicon dioxide (SiO ₂ ) or A multilayer piezoelectric / electric distortion ceramic actuator by a low temperature firing method, characterized in that it is glass-based. 21. The multilayer piezoelectric / electric distortion ceramic actuator according to claim 20, wherein the diaphragm is a high molecular organic compound of resin. 24. The low temperature firing method according to claim 23, wherein the polymeric organic compound of the resin is a polyester, polyimide, polyethyleneimide, or Teflon resin. Multi-layer piezoelectric / electric distortion ceramic actuator 21. The multilayer piezoelectric / electric distortion ceramic actuator according to claim 20, wherein the thickness of the single piezoelectric / electric distortion film is 0.1-10 탆. 27. The multilayer piezoelectric / electric distortion ceramic actuator according to claim 25, wherein the thickness of the single piezoelectric / electric distortion film is 1-6 mu m. 21. The multilayer piezoelectric / electric distortion ceramic actuator according to claim 20, wherein the thickness of the single piezoelectric / electric distortion film is different. 21. The multilayer piezoelectric / electric distortion ceramic actuator according to claim 20, wherein the multilayer piezoelectric / electric distortion film is polarized.