KR100289604B1 - Piezoelectric/electrostrictive actuator and method for fabricating the same - Google Patents

Abstract

A diaphragm; (Bottom electrode coupled to the upper part of the vibrating plate;) Manufactured by non-explosive redox combustion reaction at a low temperature of 100-500 ℃, the particle size is 1㎛ or less, lead (Pb), titanium (Ti) as a basic element A piezoelectric / electric distortion film formed on the metal vibrating plate by using a ceramic paste obtained by mixing an ultrafine ceramic oxide powder and a ceramic sol solution having the same or similar components as the ultrafine ceramic powder prepared based on water or an organic solvent. and; The present invention relates to a piezoelectric / electrical distortion actuator including an upper electrode coupled to an upper portion of the piezoelectric / electrical distortion film, and simplifies the manufacturing process by forming a piezoelectric thin film or a thick film directly on a vibration plate without an adhesion process and a slicing process. The quality and productivity are greatly improved compared to the method of bonding, and the piezoelectric material is molded at a much lower temperature, so the diaphragm material can be selected more widely and the deformation and alteration of the diaphragm are minimized to increase the production yield. In addition, by providing patterning during piezoelectric molding, there is an effect that the piezoelectric / electric warp actuator can be configured as many times as necessary.

Description

Piezoelectric / electrostrictive actuator and its manufacturing method {Piezoelectric / electrostrictive actuator and method for fabricating the same}

The present invention relates to a piezoelectric / electric distortion actuator and a method of manufacturing the same, and more particularly, in a piezoelectric / electric distortion actuator, a ceramic powder, which is specially manufactured without adhering a diaphragm and a piezoelectric material to a third material, is manufactured using a special process, Piezoelectric / distortion film in the form of thin film or thick film is formed on the vibrating plate made of organic compound or ceramic, and it is integrated by heat treatment at a relatively low temperature to minimize the deterioration of the diaphragm and to provide patterning during piezoelectric molding. The present invention relates to a piezoelectric / electric distortion actuator and a method for manufacturing the same, which can be configured simultaneously without post-processing.

In general, the actuator includes a diaphragm, a lower electrode formed on the upper portion of the diaphragm, a piezoelectric / distortion film formed on the lower electrode, and an upper electrode formed on the piezoelectric / distortion film.

The actuator having such a configuration causes the piezoelectric / electric distortion film placed between the electrodes to vibrate while the power is applied to the upper electrode and the lower electrode.

Background Art Conventionally, ceramic powders prepared by the solid-phase method have been used to produce piezoelectric / electrical distortion films used as piezoelectric elements in piezoelectric / electrical distortion actuators.

The solid phase method, also called an oxide method, is a method of preparing a ceramic powder by mixing an oxide or a molten salt which is a raw material in powder form, followed by heat treatment at 1000-1200 ° C, followed by grinding and sintering.

The particle size of the ceramic powder produced by the solid phase method depends on the size of the raw material powder, and the particle size of the powder produced is relatively large (0.2-2 μm), which is inappropriate to obtain particles of 0.1 μm or less. There is a disadvantage in that heat treatment at a high temperature of 1000 ℃ or more is necessary.

In manufacturing various film-type devices using ceramics, a method of manufacturing ceramic paste using ceramic powder and printing or molding the paste on a diaphragm has been mainly used.

In order to prepare a ceramic paste, conventionally, a method in which a binder, a vehicle, a plasticizer, a dispersant, or the like is added to a solution in which a ceramic particle having an average particle diameter of 1 μm prepared by a solid phase method is added, followed by mixing and stirring.

In order to manufacture the piezoelectric / electric warp film using the ceramic paste prepared by the above method, the ceramic paste is printed on a diaphragm, dried at 130 ° C. and heat treated at 1000 ° C. or higher. There is a problem that a separate additional heat treatment must be performed at 500 ° C. or higher for the removal binder work for removal.

In addition, the ceramic paste prepared by this method has a problem in that the range of the selectable diaphragm is limited because the ceramic paste has a large size of the ceramic particles and thus cannot be molded at a low temperature, and thus must be heat treated at 1000 ° C. or more.

Conventional piezoelectric / electric warp actuator manufacturing methods can be divided into two types according to the material of the diaphragm used in the case of using a high molecular organic compound of metal or resin as the diaphragm and using a ceramic as the diaphragm.

First, the case of using a high molecular organic compound of metal or resin as a diaphragm.

An example of using a resin which is an insulating organic compound as a diaphragm is disclosed in Japanese Patent Laid-Open No. 9-300609.

In case of using high molecular organic compounds of metals and resins as the diaphragm, the deterioration of the diaphragm due to high temperature is inevitable. Therefore, the piezoelectric plate is formed or manufactured separately to bond the diaphragm and the piezoelectric material to a third material, and then the piezoelectric plate is fixed. Machining to size constitutes the desired quantity of piezoelectric / electric warp actuators, which is illustrated in FIG.

This method uses a resin or a metal as a diaphragm, and thus has an advantage of avoiding a high level of difficulty such as fine machining of ceramics.

However, since the diaphragm and the piezoelectric body are adhered with a third material, problems such as uneven thickness of the adhesive and mixing of bubbles occur in the bonding process, making it difficult to secure reliability with the adhesive layer.

In addition, in order to obtain the desired quantity of piezoelectric / distortion actuators, the piezoelectric plate is sliced by mechanical machining, and there is a limitation in increasing the degree of integration of the piezoelectric / electric distortion actuators due to the limitation of machining.

In addition, since the distance between the upper electrode and the lower electrode and the diaphragm is very short, about 30 μm, when the metal is used as the diaphragm, discharge may occur.

Next, a case of using ceramic as a diaphragm will be described.

An example of a case where a piezoelectric / electric distortion actuator is manufactured using ceramic as a diaphragm is disclosed in US Patent No. 5430344.

If the thin film or thick film of the piezoelectric body is directly formed on the vibrating plate, the sintering temperature of the piezoelectric body is high, and thus the diaphragm is easily deteriorated. Thus, a ceramic that can withstand the sintering temperature of the piezoelectric body is used as the vibrating plate.

In the case of using a ceramic vibrating plate as the diaphragm, the lower electrode is formed by heat treatment at 1200 ° C. or higher on the ceramic vibrating plate, followed by heat treatment at 1000 ° C. or higher on the lower electrode to form a piezoelectric body, and the upper electrode is formed at about 800 ° C. on the piezoelectric body. This process is illustrated in FIG. 2.

Among the ceramics used as the diaphragm is a stabilized zirconia (ZrO ₂ ), and zirconia in the pure state without additives can be used as a diaphragm because magnetic destruction occurs around 1000 ° C.

Zirconia has the best mechanical properties because it does not oxidize or deform even at a high temperature of about 1200 ℃, there is a problem that the molding of zirconia is difficult.

Zirconia plates are manufactured by a tape casting process. In other words, after installing the blade with the gap as much as the desired thickness of zirconia on the film, move the film so that the zirconia in the slurry state is applied on the film with a certain thickness, and then cured at room temperature, and when cured, the film is removed by constant thickness. To manufacture a plate.

This method has an advantage that ultra-thin ceramic piezoelectric / electric distortion actuators can be manufactured using high temperature integral molding such as ceramic micromachining.

However, since the ceramic vibrating plate and the piezoelectric body are integrally formed at a high temperature, structural molding considering the shrinkage ratio of the ceramic and the piezoelectric body is necessary. In particular, since the thickness of the ceramic vibrating plate is very thin, less than 10 μm, the quality of green sheet molding is not only maintained. There is a problem in that deformation control at high temperature molding is very difficult.

In addition, there are disadvantages in that the yield is not high as a production technology of high difficulty to overcome problems such as alteration of chemical reactions between materials including the lower electrode material of the piezoelectric body during several high temperature molding.

The present invention for solving the above problems can be formed at a low temperature by using the ultra-fine ceramic powder prepared by a new method can be used for the diaphragm of various materials, piezoelectric / electric distortion of the piezoelectric material directly on the vibrating plate without the bonding process It is an object of the present invention to provide a method for manufacturing a piezoelectric / electric warp actuator with a high yield and high yield of a film which can be molded, and a piezoelectric / electric warp actuator manufactured by such a method.

1 is a process diagram showing a manufacturing process of a conventional piezoelectric / electric distortion actuator using a polymer or organic polymer of metal or resin as a diaphragm;

2 is a process chart showing a manufacturing process of a conventional piezoelectric / electric distortion actuator using ceramic as a diaphragm;

3 is a process chart showing a manufacturing process of the piezoelectric / electric distortion actuator of the present invention using a metal as a diaphragm;

4 is a process chart showing a manufacturing process of the piezoelectric / electric distortion actuator of the present invention using ceramic as a diaphragm;

5 is a process chart showing a manufacturing process of the piezoelectric / electric warp actuator of the present invention using a polymer organic compound of resins as a diaphragm.

The present invention for achieving the above object comprises the steps of providing a diaphragm made of a metal; It is manufactured by non-explosive redox combustion reaction at low temperature of 100-500 ℃ and its particle size is 1㎛ or less, ultrafine ceramic oxide powder based on lead (Pb) and titanium (Ti), water or organic Preparing a ceramic paste by mixing a ceramic sol solution of the same or similar component with the ultrafine ceramic powder prepared based on a solvent; Forming a piezoelectric / electric distortion film on the diaphragm using the ceramic paste; Firing the piezoelectric / electric distortion film formed on the diaphragm by heat treatment at 100-600 ° C .; And a step of forming an upper electrode on the piezoelectric / distortion film.

In addition, the present invention and the diaphragm made of a metal; It is manufactured by non-explosive redox combustion reaction at low temperature of 100-500 ℃ and its particle size is 1㎛ or less, ultrafine ceramic oxide powder based on lead (Pb) and titanium (Ti), water or organic A piezoelectric / electric distortion film formed on the metal vibrating plate by using a ceramic paste in which a ceramic sol solution of the same or similar ingredient is mixed with the ultrafine ceramic powder prepared based on a solvent; The piezoelectric / distortion actuator is characterized by including an upper electrode coupled to the upper portion of the piezoelectric / distortion film.

The present invention also provides a diaphragm; Forming a lower electrode on the diaphragm; It is manufactured by non-explosive redox combustion reaction at low temperature of 100-500 ℃ and its particle size is 1㎛ or less, ultrafine ceramic oxide powder based on lead (Pb) and titanium (Ti), water or organic Preparing a ceramic paste by mixing a ceramic sol solution of the same or similar component with the ultrafine ceramic powder prepared based on a solvent; Forming a piezoelectric / electric distortion film on the diaphragm using the ceramic paste; Firing the piezoelectric / electric distortion film formed on the diaphragm by heat treatment at 100-600 ° C .; And a step of forming an upper electrode on the piezoelectric / distortion film.

In addition, the present invention and the diaphragm; A lower electrode coupled to the upper portion of the diaphragm; It is manufactured by non-explosive redox combustion reaction at low temperature of 100-500 ℃ and its particle size is 1㎛ or less, ultrafine ceramic oxide powder based on lead (Pb) and titanium (Ti), water or organic A piezoelectric / electric distortion film formed on the metal vibrating plate by using a ceramic paste in which a ceramic sol solution of the same or similar ingredient is mixed with the ultrafine ceramic powder prepared based on a solvent; The piezoelectric / distortion actuator is characterized by including an upper electrode coupled to the upper portion of the piezoelectric / distortion film.

Hereinafter, the present invention will be described in detail.

The ultrafine ceramic oxide powder used in the present invention is prepared by dissolving or uniformly dispersing a ceramic component material in a solvent or a dispersion medium to prepare a solution or dispersion mixture containing ceramic components, wherein the ceramic component is dissolved or dispersed. Preparing a mixed solution by adding citric acid or the amount required to cause an oxidation-reduction combustion reaction with the anion of the ceramic element to the prepared solution or dispersion mixture, and heat-treating the mixed solution at 100-500 ° C. It may further include the step of further heat treatment at 700-900 ℃ to increase the crystallinity.

The raw material containing the ceramic component is selected from a ceramic component such as an oxide, carbonate or nitrate of the ceramic component, a salt of an organic or inorganic substance, or a complex of ceramic components.

As the ceramic component, it is preferable to use a piezoelectric / electrically distorted ceramic element having lead (Pb) and titanium (Ti) as a basic component.

In particular, it is preferable to use a ceramic element as a component containing lead (Pb), zirconium (Zr), titanium (Ti) or lead (Pb), magnesium (Mg), niobium (Nb).

As a solvent or dispersion medium for dissolving or dispersing the ceramic component raw material, one or more selected from among those capable of dissolving or dispersing the raw material containing the ceramic component in water or an organic solvent is used. Among the organic solvents, dimethyl formamide, methoxyethanol, acetic acid, glycols and alcohols are mainly used.

As a combustion aid, citric acid, an organic compound that can cause a combustion reaction, is used. In the conventional method, citric acid has been used to impart homogeneity of the reaction as a complexing agent, not as a combustion aid, and has been applied in processes such as the Pechini process. By using can cause a controlled combustion reaction rate.

The mixed solution is prepared by adding citric acid to a solvent or dispersed solution or dispersion mixture of ceramic components. The amount of citric acid to be added is added to the amount or more necessary to cause an oxidation-reduction combustion reaction with the anion of the ceramic element. The rate of progress of the reaction can be controlled depending on the amount of citric acid added.

The mixed solution mixed with citric acid is heat-treated at 100-500 ° C. As the temperature of the heat treatment increases, the crystallinity of the ceramic phase increases, but when the heat treatment temperature is 100 ° C. or higher, the combustion reaction of citric acid can be sufficiently initiated. The reaction may occur even when the heat treatment is performed above 500 ° C., but the heat treatment is performed at a higher temperature. Is meaningless compared to conventional methods.

More preferably, the heat treatment is carried out at 150-300 ° C., and the temperature range can adequately secure the crystallinity of the ceramic phase even at a very low temperature.

Citric acid is removed during the combustion reaction, and ceramic oxide is formed without scattering by the heat of reaction of citric acid generated at this time.

In this reaction, components other than the ceramic component are removed by a combustion reaction for a sufficient time, thereby forming a pure ceramic oxide powder in a pure form in which impurities do not remain.

The ultrafine ceramic oxide powder prepared by the above method is an extremely fine and uniform particle size distribution having a particle size of 1 μm or less, especially 0.01-0.1 μm. The primary particles are independent or weak aggregates. It is in the form of an aggregate and is a fully burned ceramic phase so that the weight is not reduced by further heat treatment.

In addition, since the surface is excellent in reactivity and can be formed only by heat treatment at low temperature, the degree of freedom of the diaphragm is high, and various methods of printing or coating the diaphragm can be applied.

In order to increase the crystallinity of the prepared ultrafine ceramic oxide powder, the prepared ultrafine ceramic oxide powder may further include heat treatment at 700-900 ° C.

The piezoelectric / electric warp film is formed on the vibrating plate using the ceramic powder, but the present invention is not limited to the material of the diaphragm used because the molding is performed at low temperature. Therefore, any material having the flexibility of bending deformation against vibration can be used as a vibration plate, and typically a high molecular organic compound of metals, ceramics and resins is used.

First, a method of manufacturing a piezoelectric / electric distortion actuator in the case of using a metal plate as the diaphragm will be described. The process of manufacturing the piezoelectric / electric distortion actuator using a metal plate as the diaphragm is shown in FIG. 3.

In the case of using the metal plate as the diaphragm, the metal has conductivity so that it can function as the diaphragm and the lower electrode at the same time, so that a separate lower electrode is not necessary.

As the metal plate, various alloys conventionally used may be used, and among them, stainless steel (SUS) or nickel (Ni) is particularly preferable, and the metal plate is preferably set to 3-200 μm.

When the metal is used as a diaphragm, a separate lower electrode is not required, and thus a piezoelectric / electric distortion film is formed directly on the metal diaphragm.

Various methods may be used as a method of forming the piezoelectric / electric distortion film, but a method of forming a piezoelectric / electric distortion film at a low temperature by manufacturing a ceramic paste, a printing method, a molding method, or a coating method, which is a typical method, will be described.

Ceramic paste is prepared by mixing a ceramic oxide powder and a ceramic sol solution prepared by dissolving a ceramic component of the same or similar component having affinity with the ceramic oxide powder.

Since ceramic oxide powder is effective to use fine powder in consideration of its reactivity and to secure a system capable of low temperature molding, ultrafine ceramic oxide powder prepared by the above method is used.

The ultrafine ceramic oxide is preferably one having lead (Pb) and titanium (Ti) as a basic element, and particularly preferably one having a component containing lead, zirconium (Zr) and titanium.

At room temperature, the surface of the ultrafine ceramic oxide powder is present in combination with more than one layer of water. The water bound to the surface affects the acidity and basicity of the surface of the ultrafine ceramic oxide powder. When the fine ceramic oxide powder is mixed with the ceramic sol solution, it acts as a catalyst.

Ceramic sol solutions are prepared by dissolving ceramic components based on water or organic solvents. Various organic solvents can be used as the base, but it is preferable to use mainly selected from acetic acid, dimethylformamide, methoxyethanol, glycols and alcohols.

The ceramic component used in the preparation of the ceramic sol solution is particularly preferably used a component containing lead (Pb), zirconium (Zr), titanium (Ti), the concentration of the ceramic sol solution used is 0.1-5M It is particularly preferable to.

When the ultra fine ceramic oxide powder and the ceramic sol solution are mixed, the content of the ceramic sol solution is preferably 10 to 200 parts by weight based on the ultra fine ceramic oxide powder. This is because when the content of the ceramic sol solution is 200 parts by weight or more, the ultrafine ceramic oxide powder is diluted too much, and the viscosity of the mixture is low.

By mixing the ultrafine ceramic oxide powder and the ceramic sol solution, the liquid ceramic sol solution uniformly coats the surface of the solid ceramic oxide powder, while connecting the ultra fine ceramic oxide powder particles to effectively fill the voids between the powders. do.

In the powder-sol mixture thus formed, the ultrafine ceramic oxide powder having the characteristics of ceramics is surrounded by the ceramic sol solution of the same or similar component and has appropriate fluidity, and the ceramic sol is reacted with the reaction medium on the surface of the ultrafine ceramic oxide powder. This improves the reactivity of the powder surface.

In addition, the organic component contained in the sol, in the future when the mixture is in contact with a separate organic material, it is possible to secure the stability of the contact interface to impart dispersibility and homogeneity.

Such a system thermally decomposes the sol at low temperatures and converts it into the same or similar composition as the ultrafine ceramic oxide powder, thereby obtaining a ceramic system with improved inter-particle connectivity even at low temperatures.

In order to ensure the stability of the mixture of the ultrafine ceramic oxide powder and the ceramic sol solution and the fluidity required for molding, an organic solvent for controlling properties may be added. Various physical solvents may be used as the organic solvent for controlling physical properties, but it is preferable to use glycols or alcohols having a certain viscosity and low vapor pressure at room temperature.

When adding an organic solvent for controlling physical properties to the mixture of the ultrafine ceramic oxide powder and the ceramic sol solution, the amount of the organic solvent for controlling physical properties is preferably 1-100 parts by weight based on the ultrafine ceramic oxide powder. This is because if the amount of the organic solvent for controlling physical properties is less than 1 part by weight, the effect of adding the organic solvent for controlling physical properties is not effective, and if the amount is more than 100 parts by weight, the mixture does not maintain viscosity and is too diluted to deteriorate moldability during molding.

The addition amount of the organic solvent for controlling the physical properties is particularly preferably 10 to 40 parts by weight based on the ultrafine ceramic oxide powder. In this range, the organic solvent for controlling the physical properties can be added while maintaining the viscosity of the mixture appropriately. .

In addition, a small amount of organic matter may be added to the mixture of the ceramic oxide powder and the ceramic sol solution in order to improve the homogeneity and homogeneity of the mixture in which the solvent for controlling physical properties is added. At this time, it is preferable to use long-chain alcohols or polar organic solvents to add.

Among the long chain alcohols, it is preferable to use pentanol or hexanol, and it is preferable to use acetylacetone or methoxyethanol as the polar organic solvent.

The amount of organic matter added is preferably 1-50 parts by weight based on the ultrafine ceramic oxide powder. This is because if the added amount of the organic material is less than 1 part by weight, there is no effect of adding the organic material. If the added amount is more than 50 parts by weight, the mixture does not maintain the viscosity and is too diluted, resulting in poor moldability.

The addition amount of the organic material is particularly preferably 10 to 40 parts by weight based on the ultrafine ceramic oxide powder. In this range, the addition of the organic material can be effected while maintaining the viscosity of the mixture as appropriate.

The ceramic paste prepared by the above method is applied to the diaphragm by the printing method, the molding method or the coating method to form a piezoelectric / electric distortion film.

The piezoelectric / electric distortion film formed on the diaphragm is heat treated at 100-600 占 폚. The solvent is removed by the heat treatment, and the ceramic sol acts as a reaction medium on the surface of the oxide particles to induce bonding between the ultrafine ceramic oxide particles.

The heat treatment at a low temperature of 100-600 ° C is sufficient to ensure that the water on the surface of the ultrafine ceramic oxide powder hydrolyzes the ceramic sol solution and that the ceramic raw material of the ceramic sol solution liberated by hydrolysis is the ultrafine ceramic oxide powder. This is because the same reaction as that of firing can be achieved by the reaction between each other to be bonded. In addition, organic matter added during the heat treatment is removed.

More preferably, the heat treatment is performed at 150-300 ° C., and the temperature range can adequately secure the crystallinity and formability of the piezoelectric / electric distortion film even though the heat treatment is performed at a considerably low temperature.

When the ceramic paste is applied to the diaphragm, when the printing method or the molding method is used, the thickness of the formed piezoelectric / distortion film can be adjusted by adjusting the thickness of the screen or the mold, so that the piezoelectric / electric distortion film from the thin film type to the thick film type can be freely controlled. It can be molded.

In addition, in the case of using the coating method, after the film is formed on the diaphragm as a whole, it may be post-processed, or the piezoelectric / electric distortion film may be formed by masking a desired pattern. The thickness of the film to be formed is controlled by repeating the process of forming and heat treating the film on the diaphragm.

The ceramic paste may be added to the diaphragm and then dried at 70-150 ° C. before heat treatment.

Although the piezoelectric / distortion film manufactured in this way is excellent in the characteristics of ceramics and can control the thickness of the formed piezoelectric / distortion film even though it is heat treated at low temperature, the piezoelectric / electric distortion film in the form of thick film in the piezoelectric / distortion film in the form of thin film It can be molded until.

As described above, the piezoelectric / electric distortion film can be formed without limiting the film thickness only by heat treatment at low temperature, and thus the applicability is high.

In addition, since it is not necessary to add an organic material such as a dispersant, it is possible to form the piezoelectric / electric distortion film by one heat treatment at low temperature without going through the process of debinding at 500 ° C. or more before heat treatment.

After the piezoelectric / distortion film is formed, an upper electrode is formed on the piezoelectric / distortion film.

Silver (Ag), aluminum (Al), gold (Au), platinum (Pt) and the like are used as the upper electrode. When silver is used as the upper electrode, it is mainly formed by printing method such as screen printing, stencil printing, etc. on the diaphragm using commercially available low temperature treatment silver paste, and using aluminum, gold, platinum as the upper electrode. In the case of use, molding is performed by sputtering, vacuum deposition or evaporation.

After the upper electrode is formed on the piezoelectric / electric distortion film, the heat treatment is performed at 100-600 ° C., more preferably, 150-300 ° C. to bond the piezoelectric / electric distortion film and the upper electrode. If aluminum or gold is used as the upper electrode, it can be used immediately without further heat treatment.

Next, the case where a piezoelectric / electric distortion actuator is manufactured using high molecular organic compounds, such as a ceramic plate and resins, as a diaphragm is demonstrated. A process of manufacturing a piezoelectric / electric warp actuator using a polymer organic compound such as a ceramic vibrating plate or resins is shown in FIG.

As the ceramic plate, aluminum oxide (Al ₂ O ₃ ), zirconium oxide (ZrO ₂ ), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), silicon dioxide (SiO ₂ ), or a glass system is used. The ceramic plate is prepared by using a conventional method such as sintering the slurry containing the oxide powder in the form of a green sheet and then sintering or sintering after forming the necessary diaphragm in the slurry state.

Since the ceramic vibrating plate is not conductive and does not function as a lower electrode, a separate lower electrode should be formed.

When the ceramic is used as the diaphragm, the lower electrode uses a conductive paste such as platinum, silver, silver / palladium (Pd), nickel (Ni) or copper (Cu), and the lower electrode such as platinum on the ceramic vibration plate. After the conductive paste is deposited, the ceramic vibrating plate and the lower electrode are bonded by heat treatment at 500-1400 ° C, more preferably 600-1200 ° C.

As the polymer organic compound of resins, polyester, polyimide, or Teflon resin vibrating plates are mainly used. The thickness of the diaphragm is preferably 7-50 μm, and is generally used in the form of a film.

In the case of organic compounds, since they do not function as lower electrodes, a separate lower electrode should be formed.

When the organic compound is used as the diaphragm, lower electrodes include silver, aluminum, gold, platinum, and the like. In case of using silver, it is mainly formed by printing method such as screen printing and stencil printing on the vibrating plate using commercially available low temperature treatment silver paste. In case of using aluminum, gold, and platinum, sputtering, vacuum deposition or deposition Mold by

The lower electrode is placed on top of the organic compound vibrating plate and heat treated at 100-300 ° C. to combine the diaphragm and the lower electrode.

The piezoelectric / electrodistor film is formed on the lower electrode bonded to the ceramic vibrating plate or the polymeric organic compound vibrating plate and heat-treated at 100-300 ° C., more preferably 150-200 ° C. to bond the lower electrode and the piezoelectric / electric distortion film.

The method of forming the piezoelectric / electric distortion film and the method of heat treatment and bonding are the same as the case where the metal described above is used as the diaphragm.

An upper electrode is formed on the piezoelectric / distortion film, and silver, aluminum, gold, and platinum are used as the upper electrode.

The method of forming the upper electrode is the same as using the metal as the diaphragm, and the upper electrodes of silver, aluminum, gold, and platinum are placed on the piezoelectric / electrodistor film, and used directly without additional heat treatment or are bonded by heat treatment at 100-300 ° C. After using it.

During the manufacturing process of the piezoelectric / electric distortion actuator, an oxide film is formed on the surface of the metal used as the diaphragm, or a residue of the mold is left, which acts as an electric insulation film to prevent the conduction between electrodes.

The present invention will be described in detail through the following examples. However, the following examples are illustrative of the invention and do not limit the scope of the invention.

(Example 1)

Ceramic paste prepared using PZT (52/48) fine powder having an average particle diameter of 50 nm was printed on a SUS 316L diaphragm having a thickness of 10 μm through a screen having a fine pattern.

The specimens were heat treated for 2 hours in an air atmosphere at 130 ° C, 300 ° C, or 600 ° C. In the case of heat treatment at 600 ° C, the portion of the SUS plate where the ceramic paste was not printed was oxidized to act as an insulating film.

A conductive paste was printed on the upper electrode and dried at 100 ° C. to prepare a piezoelectric / electric distortion actuator.

(Example 2)

A ceramic paste prepared using PZT (52/48) fine powder having an average particle diameter of 50 nm was printed on a aluminum oxide vibrating plate having a thickness of 8 μm formed by silver as a lower electrode on a screen having a fine pattern.

The specimens were heat-treated at 300 ° C. for 2 hours in air, a silver paste was printed on the upper electrode, and heat-treated at 300 ° C. to prepare a piezoelectric / electric distortion actuator.

(Example 3)

A ceramic paste prepared using PZT / PMN (60/40) fine powder was printed on a nickel vibrating plate having a thickness of 10 μm through a screen having a fine pattern.

The specimen was heat-treated at 300 ° C. for 2 hours in air, and aluminum was vacuum-deposited on the upper electrode to prepare a piezoelectric / electric distortion actuator.

(Example 4)

A mold was formed by a photosensitive film on a nickel vibrating plate having a thickness of 10 μm, and the ceramic paste prepared by using PZT / PMN (60/40) fine powder was filled.

This specimen was heat-treated at 300 ° C. for 2 hours in air. At this time, the photosensitive film used as the mold remained after the heat treatment to act as an insulating film.

After the heat treatment, aluminum was vacuum-deposited as the upper electrode to prepare a piezoelectric / electric distortion actuator.

(Example 5)

An adhesive dry film was attached onto a polyester film having a thickness of 12 μm. The SUS plate was etched on the polyester film to which the adhesive layer was attached, thereby raising the chamber structure in which the microstructure was formed, and then bonded by heat treatment at 180 ° C. for 30 minutes. At this time, a uniform mass was applied during the heat treatment to make the bonding uniform.

In order to remove the adhesive film of the remaining portion except the adhesive surface of the diaphragm and the chamber in the completed structure, the film was etched by supporting the structure in a mixture of sulfuric acid / nitric acid / hydrogen peroxide solution and washed with distilled water.

Aluminum was evaporated on the polyester film to form a lower electrode layer.

The ceramic paste prepared by using PZT (52/48) fine powder on the lower electrode was printed by screen printing to form a piezoelectric / electric distortion film and heat-treated at 150 ° C. for 2 hours.

Gold was sputtered on the completed piezoelectric / electric strainer to form an upper electrode, thereby manufacturing a piezoelectric / electric strainer.

(Example 6)

An adhesive dry film was attached onto a polyimide film having a thickness of 10 μm. The SUS plate was etched on the polyimide film to which the adhesive dry film was attached, and the chamber structure having the microstructures was raised and heat-treated at 200 ° C. for 2 hours. At this time, a uniform mass was applied during the heat treatment to make the bonding uniform.

The completed structure was immersed in a mixture of sulfuric acid / nitric acid / hydrogen peroxide solution to etch the exposed adhesive film and then washed with distilled water.

Gold was sputtered on the polyimide film to form a lower electrode layer. A ceramic paste using PZT / PMN (60/40) fine powder was printed on a lower electrode to form a piezoelectric / distortion film and heat-treated at 200 ° C. for 2 hours.

An actuator was manufactured by forming an upper electrode by depositing aluminum on the completed piezoelectric / distortion film.

(Example 7)

An adhesive dry film was attached on a 15-micrometer-thick SUS thin plate. The SUS plate was etched on the SUS thin plate to which the dry film for adhesion was attached, thereby raising the chamber structure in which the microstructure was formed and heat-treated at 200 ° C. for 2 hours. At this time, a uniform mass was applied during the heat treatment to make the bonding uniform.

The completed structure was immersed in a mixture of sulfuric acid / nitric acid / hydrogen peroxide solution to etch the exposed adhesive film and then washed with distilled water.

A fine pattern was formed by molding a photosensitive film on a SUS thin plate, and a piezoelectric / electrodistor film was formed by filling a ceramic paste prepared using PZT (52/48), followed by heat treatment at 300 ° C. for 2 hours.

An actuator was manufactured by filling a silver paste on the completed piezoelectric / electric distortion film to form an upper electrode.

The present invention having the above-described configuration forms piezoelectric thin film or thick film directly on the vibrating plate made of metal or organic compound without bonding process and slicing process to compose piezoelectric / electric distortion actuators, thereby simplifying the manufacturing process, and compared to the method having the bonding process. And the productivity is greatly improved.

In addition, since the piezoelectric body is formed at a much lower temperature than the ceramic sintering method using the diaphragm, the diaphragm material can be selected in a wider range, and the deformation and alteration of the diaphragm can be minimized, thereby increasing the production yield. By providing patterning in piezoelectric molding, there is an effect that the piezoelectric / electric warp actuator can be configured as many as necessary.

By using the metal as a diaphragm, the process of forming the lower electrode can be omitted, and in the case of using the photosensitive film as a mold when forming the oxide film or ceramic pattern formed after the heat treatment of the metal, the photosensitive film remaining after the heat treatment is used as the electrical insulating film It has the effect of preventing the conduction between the electrodes when the upper and lower electrodes withdrawal.

Claims (28)

Providing a diaphragm made of metal; It is manufactured by non-explosive redox combustion reaction at low temperature of 100-500 ℃ and its particle size is 1㎛ or less, ultrafine ceramic oxide powder based on lead (Pb) and titanium (Ti), water or organic Preparing a ceramic paste by mixing a ceramic sol solution of the same or similar component with the ultrafine ceramic powder prepared based on a solvent; Forming a piezoelectric / electric distortion film on the diaphragm using the ceramic paste; Firing the piezoelectric / electric distortion film formed on the diaphragm by heat treatment at 100-600 ° C .; And A method of manufacturing a piezoelectric / electric distortion actuator, comprising forming an upper electrode on a piezoelectric / electric distortion film. The method of manufacturing a piezoelectric / electric warp actuator according to claim 1, further comprising heat treatment at 100-600 ° C. after forming the upper electrode. The method of manufacturing a piezoelectric / electric distortion actuator according to claim 1, wherein a stainless steel plate or a nickel (Ni) plate is used as the metal vibrating plate. The method for manufacturing a piezoelectric / electric distortion actuator according to claim 1, wherein the heat treatment after forming the piezoelectric / electric distortion film is performed at 150 to 300 占 폚. The method of claim 1, wherein the upper electrode is selected from silver (Ag), aluminum (Al), gold (Au), or platinum (Pt). A diaphragm made of metal; It is manufactured by non-explosive redox combustion reaction at low temperature of 100-500 ℃ and its particle size is 1㎛ or less, ultrafine ceramic oxide powder based on lead (Pb) and titanium (Ti), water or organic A piezoelectric / electric distortion film formed on the metal vibrating plate by using a ceramic paste in which a ceramic sol solution of the same or similar ingredient is mixed with the ultrafine ceramic powder prepared based on a solvent; A piezoelectric / electrical distortion actuator configured to include an upper electrode coupled to an upper portion of the piezoelectric / electrical distortion film. The piezoelectric / electric distortion actuator according to claim 6, wherein the metal vibration plate is a stainless steel plate or a nickel (Ni) plate. The piezoelectric / electric warp actuator according to claim 6, wherein the upper electrode is selected from metals such as silver (Ag), aluminum (Al), gold (Au), and platinum (Pt). Providing a diaphragm; Forming a lower electrode on the diaphragm; It is manufactured by non-explosive redox combustion reaction at low temperature of 100-500 ℃ and its particle size is 1㎛ or less, ultrafine ceramic oxide powder based on lead (Pb) and titanium (Ti), water or organic Preparing a ceramic paste by mixing a ceramic sol solution of the same or similar component with the ultrafine ceramic powder prepared based on a solvent; Forming a piezoelectric / electric distortion film on the diaphragm using the ceramic paste; Firing the piezoelectric / electric distortion film formed on the diaphragm by heat treatment at 100-300 ° C .; And And forming an upper electrode on the piezoelectric / distortion film. 10. The method of claim 9, wherein a ceramic vibrating plate is used as the diaphragm. The method of claim 10, wherein the ceramic vibrating plate is aluminum oxide (Al ₂ O ₃ ), zirconium oxide (ZrO ₂ ), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), silicon dioxide (SiO ₂ ) or glass-based A method of manufacturing a piezoelectric / electric distortion actuator. The conductive material of claim 10, wherein the lower electrode formed on the diaphragm includes an alloy of platinum (Pt), silver (Ag), silver / palladium (Ag / Pd), nickel (Ni), copper (Cu), or the like. A method of manufacturing a piezoelectric / electric distortion actuator, characterized in that it is used for selection. 13. The method of claim 12, further comprising forming the lower electrode on the diaphragm and heat-treating it at 500-1400 ° C. The method of manufacturing a piezoelectric / electric distortion actuator according to claim 9, wherein a high molecular weight organic compound vibration plate is used as the vibration plate. 15. The method of manufacturing a piezoelectric / electric warp actuator according to claim 14, wherein the resin-based polymer organic compound vibration plate is made of polyester, polyimide or Teflon resin vibration plate. 15. The piezoelectric / electric warp actuator of claim 14, wherein the lower electrode formed on the diaphragm is selected from metals such as silver (Ag), aluminum (Al), gold (Au), or platinum (Pt). Manufacturing method. 17. The method of claim 16, further comprising the step of forming the lower electrode on the diaphragm and heat treatment at 100-300 ° C. 10. The method of claim 9, wherein the upper electrode is selected from silver (Ag), aluminum (Al), gold (Au) or platinum (Pt). 10. The method of claim 9, further comprising the step of heat treatment at 100-300 ℃ after forming the upper electrode. The method of manufacturing a piezoelectric / electric distortion actuator according to claim 9, wherein the heat treatment after forming the piezoelectric / electric distortion film is performed at 150 to 200 캜. A diaphragm; A lower electrode coupled to the upper portion of the diaphragm; It is manufactured by non-explosive redox combustion reaction at low temperature of 100-500 ℃ and its particle size is 1㎛ or less, ultrafine ceramic oxide powder based on lead (Pb) and titanium (Ti), water or organic A piezoelectric / electric distortion film formed on the metal vibrating plate by using a ceramic paste in which a ceramic sol solution of the same or similar ingredient is mixed with the ultrafine ceramic powder prepared based on a solvent; A piezoelectric / electrical distortion actuator configured to include an upper electrode coupled to an upper portion of the piezoelectric / electrical distortion film. 22. The piezoelectric / electric distortion actuator according to claim 21, wherein a ceramic vibrating plate is used as the diaphragm. The method of claim 22, wherein the ceramic vibrating plate is aluminum oxide (Al ₂ O ₃ ), zirconium oxide (ZrO ₂ ), silicon carbide (SiC), silicon nitride (Si ₃ N ₄ ), silicon dioxide (SiO ₂ ) or glass-based A piezoelectric / electric distortion actuator characterized by the above-mentioned. 23. The method of claim 22, wherein the lower electrode formed on the diaphragm is selected from conductive pastes such as platinum (Pt), silver (Ag), silver / palladium (Ag / Pd) alloys, nickel (Ni), copper (Cu), and the like. Piezoelectric / electric warp actuator. 22. The piezoelectric / electric warp actuator according to claim 21, wherein a high molecular weight organic organic compound vibration plate is used as the vibration plate. 26. The piezoelectric / electric warp actuator according to claim 25, wherein the resin-based polymer organic compound vibration plate is made of polyester, polyimide or Teflon resin vibration plate. The piezoelectric / electric warp actuator according to claim 25, wherein the lower electrode formed on the diaphragm is selected from metals such as silver (Ag), aluminum (Al), gold (Au), or platinum (Pt). The piezoelectric / electric warp actuator according to claim 21, wherein the upper electrode is selected from silver (Ag), aluminum (Al), gold (Au) or platinum (Pt).