KR20000073651A - Labeling for Certificating wafer position in Wafer Carrier - Google Patents

Abstract

PURPOSE: A labeling of a wafer carrier is provided to enable an operator to find the position of a wafer when the operator wants to look for the wafer positioned in a specific slot, by alternatively writing every slot numbers on its right and left display portions. CONSTITUTION: A wafer carrier includes display portions on both sides of an upper part in which scale and slot numbers corresponding to positions of slots are written. In one side of the display portion, odd slot numbers are written in the order of 1,3,5,7,9-m. In the other side of the display portion, even slot numbers are written in the order of 2,4,6,8-n.

Description

Labeling for Certificating wafer position in Wafer Carrier}

The present invention relates to the labeling of a wafer carrier, and more particularly, to a labeling of a wafer carrier so that it can be easily identified and found when looking for a particular second wafer among a plurality of wafers stored in the wafer carrier.

As the integration of semiconductor devices increases and wafer sizes increase, it is known that the particle problem becomes an important key point during the process, so that the wafers are preferably handled without contact with the operator.

By the way, the semiconductor device includes a wafer fabrication process of growing silicon crystals, cutting and polishing in a crystal direction of a predetermined wafer, and an oxidation process performed by exposure to heat or chemicals; Since it is completed through several steps such as an impurity implantation process in which semiconductor properties are determined, a photo masking process for forming an array on a wafer, and other chemical vapor deposition processes or vacuum deposition processes, the transfer between processes should be simple and convenient. There should be no surface scratching or cracking during the process, and minimal contact with the particles.

The wafer carrier is a tool that satisfies the above problems. The wafer carrier can accommodate, transport and store several wafers at one time. In particular, the wafer carrier can minimize the adsorption of particles by keeping the wafers in contact with the operator at a minimum. do.

The known wafer carrier is made of plastic or quartz, which is formed in a box divided into a plurality of individual slots inside.

Regarding the conventional wafer carrier, the structure thereof is well disclosed in US Pat. No. 4,949,848, US Pat. No. 5,575,394, and the like.

The wafer carriers disclosed herein block contact with the outside as much as possible to reduce the condition that the wafer contacts the particles.

On the other hand, in the process, it is often necessary to find the wafer accommodated in the specific slot among the wafers accommodated in the transferred wafer carrier. For example, when the wafers stored in one wafer carrier are not put into one process but are put into two or more other allocated processes, a split origin must be found according to the work content.

For this purpose, labeling in which slot numbers are written on both sides of the upper part of the wafer carrier is provided so that the desired wafer can be easily found.

Referring to FIGS. 1 and 2, which show a conventional labeling, the wafer carrier 10 is divided into 26 slots 12 for accommodating the wafer 20, and the inner storage space is divided into upper sides of the body. 1,5,10,… with a ruler indicating that slot A display unit 14 in which an intermittent slot number in 25 procedures is written is provided.

The operator can find the desired wafer by reading the position of the slot 12 through the ruler of the display part 14 formed in the upper both sides of the wafer carrier 10.

However, since the thickness of the wafer 20 is only a few mm and the spacing between the slots 12 containing the wafer 20 is very narrow, the numbers of the slots 12 are not written in every scale, and as described above. Likewise, all of the display portions 14 on both sides of the wafer carrier 10 have 1, 5, 10,... It fills in intermittently in 25 procedures.

This provides good visibility, but the wafer 20 in the slot 12 at the position of the slot number, for example 3, 8, 13, 18, etc., located between the written slot numbers. In the case of, it causes visual confusion and makes it difficult to identify the location, which reduces the speed of process operation.

When the conventional wafer carrier 10 having the above labeling is used, as the working time for searching for a particular wafer becomes longer, the time required for the process becomes longer, thereby lowering the productivity per unit time.

MEANS TO SOLVE THE PROBLEM The present inventors completed this invention in order to provide a solution by earnestly examining the above problems.

Accordingly, an object of the present invention is to provide a labeling of a wafer carrier on the upper both sides of the wafer carrier on which the wafer is mounted so as to quickly and easily identify the position of each slot number.

The labeling of the wafer carrier according to the present invention for realizing the above object includes a display unit in which rulers and slot numbers corresponding to the positions of the slots are written on both sides of the upper part of the wafer carrier, and on one side of the display unit, 1,3,5, 7,9... Enter the cardinal slot number in the order of the last cardinal number m, and on the other display part 2, 4, 6, 8... Characterized in that the first slot number in the order of the last even number n is entered.

In the present invention configured as described above, since all slot numbers from the first number to the last number are written alternately on the left and right sides, when the operator wants to find the wafer accommodated in the specific slot, the position can be quickly and easily checked. The labor of the worker can be reduced and the working time can be shortened.

1 is a perspective view showing a conventional wafer carrier.

2 is a plan view of a conventional general wafer carrier.

3 is a plan view of a wafer carrier to which the present invention is applied.

* Description of the symbols for the main parts of the drawings *

10 wafer carrier 12 slot

31, 32: display unit 20: wafer

Hereinafter, the present invention having the above-described configuration will be described in detail with reference to a preferred embodiment based on FIG. 3.

3 is a plan view of a wafer carrier to which labeling of the present invention has been applied.

As shown here, the wafer carrier 10 to which the present invention is applied has a plurality of slots 12 in which a body is made of plastic or quartz and is a space in which a plurality of wafers 20 are mounted in an upper opening space. This is a structure arranged in a row.

The slots 12 are formed at dense intervals in which the wafers 20 face each other without contact between the received wafers 20, so that a large number of wafers are formed in a limited space occupied by the wafer carrier 10. 20) can be stored.

In addition, the slot 12 is formed in a size suitable for the size of the wafer so as to exclude the flow of the stored wafer 20 even when the wafer carrier 10 is moved, the contact between the adjacent wafer 20 at a narrow interval To prevent this.

The wafer carrier 10 having a plurality of slots 12 arranged in such a manner to accommodate the wafers 20 can be transported without damage to the wafer carriers 10. The wafers 20 received and transported are typically transported to the process line by a worker or a transfer robot, and taken out by the handler or robot arm, and then several times. The wafers 20 are mounted on a boat and put into a process tube or placed in an unloaded state. Is introduced into the process chamber.

The wafer carrier 10 of the wafer transport zone has a display unit 31 in which rulers and slot numbers corresponding to the positions of the slots 12 are written so that the positions of the slots 12 in which the wafers 20 are accommodated on both sides of the wafer carrier 10 are written. , 32 is formed.

This is typically used to identify the slot number when splitting the wafers 20 loaded onto one wafer carrier 10.

The rulers and numbers of the display portions 31 and 32 may be formed by printing on separate label papers having an adhesive applied on the back side and then attaching them to the body surfaces of the upper sides of the wafer carrier 10. Of course, it may be formed by injection molding or printing directly on the body of the carrier (10).

Of the display portions 31 and 32 formed on both sides of the upper portion of the wafer carrier 10, one side display portion 31 has 1, 3, 5, 7, 9,... The cardinal slot number in the order of the last cardinal number m is written, and the other display portion 32 has 2, 4, 6, 8,. The even-numbered slot number in the order of the last even-number n is written.

This allows the user to first determine whether the slot number of the wafer 20 to be searched for is an excellent or odd number to determine the left and right display parts 31 and 32, and then read and confirm the number written on the determined display part. Make it easy to find 20).

In this way, when the numbers of slot numbers are alternately written on the left and right sides, all the numbers from the first to the last numbers can be entered, so that the user does not have to count the scales of the rulers one by one.

As described above, in the present invention, all slot numbers from the first to the last number are alternately written to the left and right display units, so that the operator can quickly and easily locate the wafer stored in the specific slot. As a result, it is possible to ultimately reduce the labor of the worker and shorten the working time, thereby improving productivity.

Claims (3)

On the upper side of the wafer carrier 10, the display unit 31, 32 having the ruler and the slot numbers corresponding to the positions of the slots 12 are provided, and on one side of the wafer carrier 10, 1, 3, 5, 7, 9... The odd-numbered slot number in the order of m is entered, and the other display portion 32 has 2, 4, 6, 8... The labeling of the wafer carrier, characterized by writing the even-numbered slot number in the order of n. 2. The labeling of a wafer carrier according to claim 1, wherein the display section (31,32) is made separately on a ruler or label paper and attached to the wafer carrier. The labeling of a wafer carrier according to claim 1, wherein the display portion (31,32) is formed by injection molding or printing directly on the body of the wafer carrier (10) when the wafer carrier (10) is manufactured.