KR20000069268A - 가스패널용 조립블록 - Google Patents
가스패널용 조립블록 Download PDFInfo
- Publication number
- KR20000069268A KR20000069268A KR1019997004883A KR19997004883A KR20000069268A KR 20000069268 A KR20000069268 A KR 20000069268A KR 1019997004883 A KR1019997004883 A KR 1019997004883A KR 19997004883 A KR19997004883 A KR 19997004883A KR 20000069268 A KR20000069268 A KR 20000069268A
- Authority
- KR
- South Korea
- Prior art keywords
- port
- block
- face
- gas
- branch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000002955 isolation Methods 0.000 claims description 63
- 239000012530 fluid Substances 0.000 claims description 61
- 230000008878 coupling Effects 0.000 claims description 39
- 238000010168 coupling process Methods 0.000 claims description 39
- 238000005859 coupling reaction Methods 0.000 claims description 39
- 238000012546 transfer Methods 0.000 claims description 39
- 238000000034 method Methods 0.000 claims description 26
- 238000011144 upstream manufacturing Methods 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 230000006835 compression Effects 0.000 claims description 7
- 238000007906 compression Methods 0.000 claims description 7
- 238000005304 joining Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 5
- 239000000843 powder Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 213
- 238000010926 purge Methods 0.000 description 29
- 238000002156 mixing Methods 0.000 description 19
- 238000007789 sealing Methods 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000008186 active pharmaceutical agent Substances 0.000 description 11
- 230000007704 transition Effects 0.000 description 10
- 238000013461 design Methods 0.000 description 9
- 230000013011 mating Effects 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 239000011261 inert gas Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000000356 contaminant Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 230000008439 repair process Effects 0.000 description 3
- 231100000331 toxic Toxicity 0.000 description 3
- 230000002588 toxic effect Effects 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000007726 management method Methods 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/5109—Convertible
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/5109—Convertible
- Y10T137/5283—Units interchangeable between alternate locations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Valve Housings (AREA)
- Multiple-Way Valves (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US8/760,150 | 1996-12-03 | ||
| US08/760,150 US5836355A (en) | 1996-12-03 | 1996-12-03 | Building blocks for integrated gas panel |
| US08/931,060 US6302141B1 (en) | 1996-12-03 | 1997-09-15 | Building blocks for integrated gas panel |
| US8/931,060 | 1997-09-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20000069268A true KR20000069268A (ko) | 2000-11-25 |
Family
ID=27116778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019997004883A Withdrawn KR20000069268A (ko) | 1996-12-03 | 1997-11-19 | 가스패널용 조립블록 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6302141B1 (https=) |
| EP (1) | EP0941432A4 (https=) |
| JP (1) | JP2002515107A (https=) |
| KR (1) | KR20000069268A (https=) |
| AU (1) | AU5265498A (https=) |
| WO (1) | WO1998025058A1 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100773756B1 (ko) * | 2006-09-13 | 2007-11-09 | 주식회사 아이피에스 | 가스유동블록 |
| KR20140148434A (ko) * | 2012-03-27 | 2014-12-31 | 램 리써치 코포레이션 | 플라즈마 프로세싱 시스템들에서의 공유형 가스 패널들 |
Families Citing this family (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6293310B1 (en) | 1996-10-30 | 2001-09-25 | Unit Instruments, Inc. | Gas panel |
| US5992463A (en) | 1996-10-30 | 1999-11-30 | Unit Instruments, Inc. | Gas panel |
| US6394138B1 (en) | 1996-10-30 | 2002-05-28 | Unit Instruments, Inc. | Manifold system of removable components for distribution of fluids |
| WO1999064772A1 (en) * | 1998-06-12 | 1999-12-16 | Hollingshead J Gregory | Modular chemical delivery blocks |
| US6260581B1 (en) | 1998-06-12 | 2001-07-17 | J. Gregory Hollingshead | Apparatus for assembling modular chemical distribution substrate blocks |
| JP2001269567A (ja) * | 2000-03-24 | 2001-10-02 | Bioneer Corp | 多チャネル定量制御バルブ装置 |
| JP2001317646A (ja) * | 2000-05-08 | 2001-11-16 | Smc Corp | 圧電式流体制御弁 |
| DE20009234U1 (de) * | 2000-05-23 | 2000-08-24 | Bürkert Werke GmbH & Co., 74653 Ingelfingen | Fluidisches Anschlusssystem |
| US7150475B2 (en) | 2001-07-13 | 2006-12-19 | Talon Innovations, Inc. | Shear-resistant modular fluidic blocks |
| US6634385B2 (en) * | 2001-12-21 | 2003-10-21 | Motorola, Inc. | Apparatus for conveying fluids and base plate |
| JP2005539375A (ja) * | 2002-08-27 | 2005-12-22 | セレリティ・インコーポレイテッド | 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル |
| US6936086B2 (en) * | 2002-09-11 | 2005-08-30 | Planar Systems, Inc. | High conductivity particle filter |
| US6874538B2 (en) * | 2003-03-26 | 2005-04-05 | Kevin S. Bennett | Fluid delivery system |
| US7178556B2 (en) * | 2003-08-07 | 2007-02-20 | Parker-Hannifin Corporation | Modular component connector substrate assembly system |
| KR100881897B1 (ko) * | 2003-11-07 | 2009-02-06 | 셀레리티 인크. | 표면 장착 히터 |
| EP1744131A1 (en) * | 2005-07-15 | 2007-01-17 | Indufil B.V. | Module for a gas system |
| US7410519B1 (en) | 2005-08-16 | 2008-08-12 | Ewald Dieter H | Sandwich filter block |
| JP2007275753A (ja) * | 2006-04-06 | 2007-10-25 | Toyota Motor Corp | ２液混合装置 |
| KR101423586B1 (ko) * | 2006-08-25 | 2014-07-25 | 폴 코포레이션 | 정화 요소를 포함하는 유체 조립체 |
| WO2008024682A2 (en) * | 2006-08-25 | 2008-02-28 | Pall Corporation | Purification assemblies, purification units, and methods of assembling purification assemblies |
| US20080302426A1 (en) * | 2007-06-06 | 2008-12-11 | Greg Patrick Mulligan | System and method of securing removable components for distribution of fluids |
| US7806143B2 (en) * | 2007-06-11 | 2010-10-05 | Lam Research Corporation | Flexible manifold for integrated gas system gas panels |
| US8307854B1 (en) | 2009-05-14 | 2012-11-13 | Vistadeltek, Inc. | Fluid delivery substrates for building removable standard fluid delivery sticks |
| CN102804335B (zh) | 2009-06-10 | 2015-10-21 | 威斯塔德尔特有限责任公司 | 极限流速和/或高温流体递送基体 |
| US8950433B2 (en) | 2011-05-02 | 2015-02-10 | Advantage Group International Inc. | Manifold system for gas and fluid delivery |
| JP5868219B2 (ja) * | 2012-02-29 | 2016-02-24 | 株式会社フジキン | 流体制御装置 |
| US9091397B2 (en) | 2012-03-27 | 2015-07-28 | Lam Research Corporation | Shared gas panels in plasma processing chambers employing multi-zone gas feeds |
| US10128087B2 (en) | 2014-04-07 | 2018-11-13 | Lam Research Corporation | Configuration independent gas delivery system |
| US9968765B2 (en) | 2014-07-21 | 2018-05-15 | The Cleveland Clinic Foundation | Convection enhanced delivery device and system |
| WO2016014464A1 (en) | 2014-07-21 | 2016-01-28 | The Cleveland Clinic Foundation | Convection enhanced delivery device and system |
| US10557197B2 (en) | 2014-10-17 | 2020-02-11 | Lam Research Corporation | Monolithic gas distribution manifold and various construction techniques and use cases therefor |
| CN107208820B (zh) * | 2014-11-15 | 2019-07-19 | 弗萨姆材料美国有限责任公司 | 具有极小死角的改进阀块 |
| US10022689B2 (en) | 2015-07-24 | 2018-07-17 | Lam Research Corporation | Fluid mixing hub for semiconductor processing tool |
| US10118263B2 (en) | 2015-09-02 | 2018-11-06 | Lam Researech Corporation | Monolithic manifold mask and substrate concepts |
| US9879795B2 (en) | 2016-01-15 | 2018-01-30 | Lam Research Corporation | Additively manufactured gas distribution manifold |
| US10215317B2 (en) | 2016-01-15 | 2019-02-26 | Lam Research Corporation | Additively manufactured gas distribution manifold |
| US10538973B2 (en) | 2017-01-05 | 2020-01-21 | KHOLLE Magnolia 2015, LLC | Offset flange and angled shim flowline fittings |
| US10683708B2 (en) | 2017-01-05 | 2020-06-16 | KHOLLE Magnolia 2015, LLC | Frac manifold and systems |
| US10633934B2 (en) | 2017-01-05 | 2020-04-28 | KHOLLE Magnolia 2015, LLC | Flowline junction fitting with long-sweep bore |
| US10662749B1 (en) | 2017-01-05 | 2020-05-26 | KHOLLE Magnolia 2015, LLC | Flowline junction fittings for frac systems |
| FR3069905B1 (fr) * | 2017-08-03 | 2019-09-06 | Alcrys Fluid Control & Services | Module pour un kit de distribution et de regulation d’un gaz sous pression, kit et systeme de distribution et de regulation associes |
| KR102822934B1 (ko) | 2018-05-07 | 2025-06-18 | 램 리써치 코포레이션 | 설정가능한 (configurable) 분산 인터록킹 시스템 |
| US10982522B1 (en) | 2018-07-18 | 2021-04-20 | KHOLLE Magnolia 2015, LLC | Missile for frac manifold |
| CN113994460B (zh) * | 2019-04-15 | 2025-05-20 | 朗姆研究公司 | 用于气体输送的模块部件系统 |
| US11619326B1 (en) | 2019-06-24 | 2023-04-04 | Cantex International, Inc. | Anti-vibration mount |
| FR3108701B1 (fr) | 2020-03-25 | 2022-02-18 | Air Liquide France Ind | Dispositif de prélèvement d’échantillon de gaz |
| US20240377288A1 (en) | 2021-07-29 | 2024-11-14 | Air Liquide France Industrie | Device for taking a sample of gas |
| US20230097346A1 (en) * | 2021-09-30 | 2023-03-30 | Applied Materials, Inc. | Flow guide apparatuses for flow uniformity control in process chambers |
| JP2025509450A (ja) | 2022-03-10 | 2025-04-11 | アプライド マテリアルズ インコーポレイテッド | モジュール式多方向ガス混合ブロック |
| US20260096371A1 (en) * | 2024-09-27 | 2026-04-02 | Applied Materials, Inc. | Modular multi-directional gas mixing block |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3572368A (en) | 1969-09-02 | 1971-03-23 | Honeywell Inc | Pneumatic control system manifold means |
| US3806088A (en) * | 1972-05-01 | 1974-04-23 | Hydro Syst Inc | Manifold apparatus |
| DK134080B (da) | 1972-08-08 | 1976-09-06 | Teknova As | Apparatsæt til indkobling i en mediumledning, navnlig en trykluftledning. |
| DE2302267B1 (de) | 1973-01-18 | 1974-06-12 | Abex Gmbh Denison, 4010 Hilden | Leitungssäule für hydraulische Ventile |
| FR2257846B1 (https=) | 1973-07-03 | 1976-05-28 | Legris France Sa | |
| US3885389A (en) * | 1973-09-26 | 1975-05-27 | Melvin Corp | Manifold with internal filter |
| FR2250907A1 (en) | 1973-11-09 | 1975-06-06 | Bouteille Daniel | Assembly baseplates for pneumatic or hydraulic distributors - tongue and groove are standard modules which connect with into rigid block |
| DE2547847A1 (de) * | 1975-10-25 | 1977-05-05 | Beukenberg Maschf | Vorrichtung zur verteilung von hydraulischen oder pneumatischen arbeitsmedien |
| JPS5325775A (en) | 1976-08-24 | 1978-03-09 | Miller Fluid Power Corp | Module type fluid flow control element |
| US4082324A (en) | 1976-10-04 | 1978-04-04 | Obrecht Robert E | Connection arrangement for manifold blocks |
| DE2648751C2 (de) | 1976-10-27 | 1986-04-30 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen | Vorrichtung für die Zuführung flüssiger oder gasförmiger Substanzen zu einem Verarbeitungsgefäß |
| US4524807A (en) | 1982-05-21 | 1985-06-25 | Humphrey Products Company | Snap-together modular manifold construction |
| US4657047A (en) | 1984-12-10 | 1987-04-14 | Nordson Corporation | Modular color changers with improved valves and manifolds |
| US4848393A (en) | 1986-06-27 | 1989-07-18 | West Robert E | Fault tolerant fluid flow apparatus |
| JP2559613B2 (ja) * | 1988-02-29 | 1996-12-04 | 株式会社小松製作所 | 操作弁装置 |
| US5178191A (en) | 1990-09-05 | 1993-01-12 | Newmatic Controls Inc. | Modular pneumatic control systems |
| DE4111893C2 (de) | 1991-04-09 | 1995-04-13 | Mannesmann Ag | Ventil-Grundplatte, insbesondere für gasförmige Medien |
| US5368062A (en) | 1992-01-29 | 1994-11-29 | Kabushiki Kaisha Toshiba | Gas supplying system and gas supplying apparatus |
| US5439026A (en) | 1992-12-11 | 1995-08-08 | Tokyo Electron Limited | Processing apparatus and flow control arrangement therefor |
| JP2616875B2 (ja) * | 1993-05-12 | 1997-06-04 | エスエムシー株式会社 | マニホールドバルブ |
| DE69427645T2 (de) | 1993-10-06 | 2002-05-08 | Unit Instruments, Inc. | Apparat zur handhabung von prozess fluiden |
| US5730181A (en) | 1994-07-15 | 1998-03-24 | Unit Instruments, Inc. | Mass flow controller with vertical purifier |
| US5605179A (en) | 1995-03-17 | 1997-02-25 | Insync Systems, Inc. | Integrated gas panel |
| EP0733810B1 (de) | 1995-03-24 | 2002-09-11 | Rexroth Mecman GmbH | Modulare Ventilanordnung |
| JP3546275B2 (ja) * | 1995-06-30 | 2004-07-21 | 忠弘 大見 | 流体制御装置 |
| US5642756A (en) * | 1996-02-29 | 1997-07-01 | Bio-Chem Valve Inc. | Valve manifold assembly |
| US5662143A (en) | 1996-05-16 | 1997-09-02 | Gasonics International | Modular gas box system |
| US5992463A (en) | 1996-10-30 | 1999-11-30 | Unit Instruments, Inc. | Gas panel |
| US5836355A (en) * | 1996-12-03 | 1998-11-17 | Insync Systems, Inc. | Building blocks for integrated gas panel |
| DE29706400U1 (de) * | 1997-04-11 | 1997-05-28 | Rötelmann GmbH & Co., 58791 Werdohl | Vorrichtung zum Verteilen oder Mischen von fluiden Medien |
-
1997
- 1997-09-15 US US08/931,060 patent/US6302141B1/en not_active Expired - Lifetime
- 1997-11-19 EP EP97947611A patent/EP0941432A4/en not_active Withdrawn
- 1997-11-19 AU AU52654/98A patent/AU5265498A/en not_active Abandoned
- 1997-11-19 KR KR1019997004883A patent/KR20000069268A/ko not_active Withdrawn
- 1997-11-19 JP JP52562298A patent/JP2002515107A/ja not_active Ceased
- 1997-11-19 WO PCT/US1997/021327 patent/WO1998025058A1/en not_active Ceased
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100773756B1 (ko) * | 2006-09-13 | 2007-11-09 | 주식회사 아이피에스 | 가스유동블록 |
| KR20140148434A (ko) * | 2012-03-27 | 2014-12-31 | 램 리써치 코포레이션 | 플라즈마 프로세싱 시스템들에서의 공유형 가스 패널들 |
Also Published As
| Publication number | Publication date |
|---|---|
| AU5265498A (en) | 1998-06-29 |
| JP2002515107A (ja) | 2002-05-21 |
| US6302141B1 (en) | 2001-10-16 |
| EP0941432A1 (en) | 1999-09-15 |
| WO1998025058A1 (en) | 1998-06-11 |
| EP0941432A4 (en) | 2003-01-29 |
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