KR20000060215A - Threshold voltage measuring circuit - Google Patents

Threshold voltage measuring circuit Download PDF

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KR20000060215A
KR20000060215A KR1019990008346A KR19990008346A KR20000060215A KR 20000060215 A KR20000060215 A KR 20000060215A KR 1019990008346 A KR1019990008346 A KR 1019990008346A KR 19990008346 A KR19990008346 A KR 19990008346A KR 20000060215 A KR20000060215 A KR 20000060215A
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drain
gate
threshold voltage
port
pmos transistor
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KR1019990008346A
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KR100286345B1 (en
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김사현
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김영환
현대반도체 주식회사
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/175Indicating the instants of passage of current or voltage through a given value, e.g. passage through zero
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2607Circuits therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: A threshold voltage measuring circuit is provided to reduce the fault rate of a semiconductor package by measuring the threshold voltage within each device. CONSTITUTION: A threshold voltage measuring circuit comprises a second PMOS transistor(P2) which receives a power voltage(Vdd) at a source and an enable signal(PE) at a gate. A gate of a first PMOS transistor(P1) is connected to a drain of the second PMOS transistor(P2). The first PMOS transistor(P1) receives the power voltage(Vdd) at a source. A drain of the first PMOS transistor(P1) is connected to a second port of an element. A first transmission gate(TRANS1) is provided to connect the drain of the second PMOS transistor(P2) to a first port of the element. A second NMOS transistor(N2) receives a disable signal(NE) at a gate. A source of the NMOS transistor(N2) is grounded. A gate of a first NMOS transistor(N1) is connected to the drain of the second NMOS transistor(N2). A second transmission gate(TRANS2) is provided to connect the drain of the second NMOS transistor(N2) to the first port of the element.

Description

문턱전압 측정 회로{THRESHOLD VOLTAGE MEASURING CIRCUIT}Threshold Voltage Measuring Circuit {THRESHOLD VOLTAGE MEASURING CIRCUIT}

본 발명은 문턱전압 측정 회로에 관한 것으로, 특히 웨이퍼 또는 패키지 상태의 어떤 경우에서도 해당 소자의 문턱전압을 측정할 수 있도록 하는 문턱전압 측정 회로에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a threshold voltage measuring circuit, and more particularly, to a threshold voltage measuring circuit which enables to measure the threshold voltage of a corresponding device in any case of a wafer or package state.

도1은 종래 웨이퍼 상태에서의 소자의 문턱전압을 측정하기 위한 회로도로서, 이에 도시된 바와 같이 웨이퍼의 각 소자들 사이의 잉여공간(SCRIBE LANE)에 문턱전압(Vt) 체크를 위한 트랜지스터를 웨이퍼 한 장당 5 포인트 정도를 샘플링하여 체크한다.FIG. 1 is a circuit diagram for measuring a threshold voltage of a device in a conventional wafer state. As shown in FIG. 1, a transistor for checking a threshold voltage Vt is checked in a surplus space SCRIBE LANE between elements of a wafer. Sample and check about 5 points per sheet.

이때 사용되는 트랜지스터는 엔모스 트랜지스터의 경우 소오스에 0볼트, 드레인에 5볼트를 인가한 후 게이트에 전압을 인가하여 드레인으로 부터 소오스로 흐르는 전류(IDS)가 1㎂가 될 때의 게이트 전압이 문턱전압(Vtn)이 되고, 피모스 트랜지스터의 경우 소오스에 -5볼트, 드레인에 0볼트를 인가한 후 드레인으로 부터 소오스에 흐르는 전류(IDS)가 1㎂가 되는 게이트 전압이 문턱전압(Vtp)이 된다.In this case, the NMOS transistor has a gate voltage when the current (I DS ) flowing from the drain to the source becomes 1 하여 by applying a voltage to the gate after applying 0 volts to the source and 5 volts to the drain. The gate voltage becomes the threshold voltage Vtn, and in the case of the PMOS transistor, -5 volts is applied to the source and 0 volts is applied to the drain, and the gate voltage at which the current I DS flowing from the drain to the source becomes 1 ㎂ is the threshold voltage Vtp. )

그러나, 상기 종래의 회로에 있어서는 웨이퍼 상태에서만 체크가 가능하며 웨이퍼 상태의 모든 소자가 아닌 샘플링 체크를 하기 때문에 각 소자에 대한 문턱전압(Vt)의 신뢰도가 떨어지고, 불량 분석에서도 디캡(Decap)을 통하여 체크해야 하므로 효율이 낮아지게 되는 문제점이 있었다.However, in the conventional circuit, it is possible to check only in the wafer state, and because the sampling check is performed instead of all the devices in the wafer state, the reliability of the threshold voltage (Vt) for each device is lowered. There was a problem that the efficiency is lowered because it should be checked.

따라서, 본 발명은 상기와 같은 종래의 문제점을 해결하기 위하여 창출한 것으로, 웨이퍼 또는 패키지 상태의 어떤 경우에서도 해당 소자의 문턱전압을 측정할 수 있도록 하는 문턱전압 측정 회로를 제공 하는데 그 목적이 있다.Accordingly, an object of the present invention is to provide a threshold voltage measuring circuit that can measure the threshold voltage of a corresponding device in any case of a wafer or a package state.

도1은 종래 웨이퍼 상태에서의 소자의 문턱전압을 측정하기 위한 회로도.1 is a circuit diagram for measuring a threshold voltage of a device in a conventional wafer state.

도2는 본 발명에 의한 문턱전압 측정 회로도.2 is a circuit diagram illustrating a threshold voltage measurement according to the present invention.

***도면의 주요 부분에 대한 부호의 설명****** Description of the symbols for the main parts of the drawings ***

P1,P2 : 피모스 트랜지스터 N1,N2 : 엔모스 트랜지스터P1, P2: PMOS transistor N1, N2: NMOS transistor

TRNS1 : 제1전송게이트 TRNS2 : 제2전송게이트TRNS1: first transmission gate TRNS2: second transmission gate

이와 같은 목적을 달성하기 위한 본 발명의 구성은, 소오스에 전원전압(Vdd)을 입력받고, 게이트에 인에이블신호(PE)를 입력받는 피모스 트랜지스터(P2)와; 소오스에 전원전압(Vdd)을 입력받고, 드레인은 소자의 제2포트와 접속되며 게이트가 상기 피모스 트랜지스터(P2)의 드레인에 연결된 피모스 트랜지스터(P1)와; 정입력단 및 반전입력단에 각각 인에이블/디세이블 신호(PE,NE)를 인가받아 상기 피모스 트랜지스터(P2)의 드레인과 소자의 제1포트를 연결시켜 주는 제1 전송게이트(TRNS1)와; 소오스가 접지되고, 게이트에 디세이블신호(NE)를 입력받는 엔모스 트랜지스터(N2)와; 소오스가 접지되고, 드레인은 소자의 제1포트와 접속되며 게이트가 상기 엔모스 트랜지스터(N2)의 드레인에 연결된 엔모스 트랜지스터(N1)와; 정입력단 및 반전입력단에 각각 디세이블/인에이블 신호(NE,PE)를 인가받아 상기 엔모스 트랜지스터(N2)의 드레인과 소자의 제1포트를 연결시켜 주는 제2 전송게이트(TRNS2)로 구성함으로써 달성되는 것으로, 도2에 그 실시예의 회로가 잘 나타나 있다.According to an aspect of the present invention, there is provided a PMOS transistor (P2) for receiving a power supply voltage (Vdd) to a source and an enable signal (PE) to a gate; A PMOS transistor (P1) receiving a power supply voltage (Vdd) from the source, the drain of which is connected to a second port of the device, and whose gate is connected to the drain of the PMOS transistor (P2); A first transfer gate TRNS1 connected to the positive input terminal and the inverting input terminal to enable / disable signals PE and NE to connect the drain of the PMOS transistor P2 to the first port of the device; An NMOS transistor N2 having a source grounded and receiving a disable signal NE at a gate thereof; An NMOS transistor N1 having a source grounded, a drain connected to a first port of the device, and a gate connected to a drain of the NMOS transistor N2; The second transmission gate TRNS2 connects the drain of the NMOS transistor N2 and the first port of the device by receiving the disable / enable signals NE and PE at the positive input terminal and the inverting input terminal, respectively. As can be achieved, the circuit of the embodiment is well illustrated in FIG.

이하, 본 발명에 따른 실시예를 첨부된 도면을 참조하여 상세히 설명하면 다음과 같다.Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

일단, 상기 제1전송게이트(TRNS1)는 인에이블 신호(PE)가 1(하이)이고, 디세이블 신호(NE)가 1(하이)일 때 포트1 로 부터의 입력전압을 피모스 트랜지스터(P1)의 게이트전압으로 전달하여 주고, 제2전송게이트(TRNS2)는 인에이블 신호(NE)가 0(로우)이고, 디세이블 신호(NE)가 0(로우)일 때 포트2의 입력전압을 엔모스 트랜지스터(N1)의 게이트 전압으로 전달하여 주는 역할을 한다.First, when the enable signal PE is 1 (high) and the disable signal NE is 1 (high), the first transfer gate TRNS1 receives the input voltage from the port 1 as the PMOS transistor P1. The second transfer gate TRNS2 transfers the input voltage of the port 2 when the enable signal NE is 0 (low) and the disable signal NE is 0 (low). It serves to transfer the gate voltage of the MOS transistor N1.

그리고, 문턱전압을 측정하지 않을 때에는 인에이블/디세이블 신호를 각각 0(로우),1(하이)로 하게 된다.When the threshold voltage is not measured, the enable / disable signal is set to 0 (low) and 1 (high), respectively.

이를 구체적으로 대비하여 나타내면 다음 표1과 같다.The concrete contrast is shown in Table 1 below.

PEPE NENE 테스트 모드Test mode Vtp 측정Vtp measurement 1One 1One Vtn 측정Vtn measurement 00 00 유저 모드(Disable)User Mode (Disable) 00 1One

먼저, 문턱전압(Vtp) 측정 과정을 예로 들면 상기에 설명된 바와 같이 인에이블 신호(PE)와 디세이블 신호(NE)가 1인 상태이면 제1전송게이트(TRNS1)는 턴온되고, 제2전송게이트(TRNS2)는 턴오프된다.First, as an example of the threshold voltage Vtp measurement process, when the enable signal PE and the disable signal NE are 1, the first transmission gate TRNS1 is turned on and the second transmission is performed. Gate TRNS2 is turned off.

이때 전원전압(Vdd)이 5볼트인 경우 포트1로 외부(테스터)로 부터 전압을 5볼트 인가하며 점차 전압을 낮추어 인가하면 포트1의 전압을 제1전송게이트(TRNS1)를 거쳐 피모스 트랜지스터(P1)의 게이트 전압으로 인가된다.At this time, if the power supply voltage Vdd is 5 volts, a voltage of 5 volts is applied to the port 1 from the outside (tester), and when the voltage is gradually lowered, the voltage of the port 1 is transferred through the first transfer gate TRNS1 to the PMOS transistor ( It is applied at the gate voltage of P1).

다음, 전원전압(Vdd)으로 부터 피모스 트랜지스터(P1)를 통해 흐르는 드레인,소오스간 전류(IDS)를 포트2에서 측정하고, 포트2에서 측정되는 드레인,소오스간 전류(IDS)가 1㎂일 때의 포트1의 인가 전압으로 문턱전압(Vtp)를 알 수 있다.Next, the drain and source current I DS flowing from the power supply voltage Vdd through the PMOS transistor P1 is measured at the port 2, and the drain and source current I DS measured at the port 2 is 1. The threshold voltage Vtp can be known from the applied voltage of the port 1 at ㎂.

다음, 문턱전압(Vtn) 측정 과정은 상기와는 반대로 인에이블 신호(PE)와 디세이블 신호가 모두 0인 경우로 제2전송게이트(TRNS2)가 턴온되며 포트2로 0볼트로 부터 점차적으로 전압을 증가하여 인가시켜 엔모스 트랜지스터(N1)의 게이트 전압으로 인가하여 포트1에서 엔모스 트랜지스터(N1)의 드레인,소오스간 전류(IDS)를 측정한다. 상기 전류(IDS)가 1㎂일 때의 포트2의 인가전압이 문턱전압(Vtn)이 된다.Next, in contrast to the above, in the process of measuring the threshold voltage Vtn, when the enable signal PE and the disable signal are both 0, the second transmission gate TRNS2 is turned on and the voltage is gradually increased from 0 volts to the port 2. Is applied to increase the gate voltage of the NMOS transistor N1 to measure the drain and source current I DS of the NMOS transistor N1 at the port 1. The voltage applied to the port 2 when the current I DS is 1 2 becomes the threshold voltage Vtn.

이상에서 설명한 바와 같이 본 발명 문턱전압 측정 회로는 샘플링 방식이 아닌 모든 디바이스에 내장하여 문턱전압을 측정할 수 있게 함으로써 패키지 출하 후 발생할 불량률을 낮출 수 있으며 불량 분석의 효율을 높일 수 있는 효과가 있다.As described above, the threshold voltage measuring circuit of the present invention can measure the threshold voltage by being embedded in all devices other than the sampling method, thereby reducing the defect rate after shipment of the package and increasing the efficiency of failure analysis.

Claims (1)

소오스에 전원전압(Vdd)을 입력받고, 게이트에 인에이블신호(PE)를 입력받는 피모스 트랜지스터(P2)와; 소오스에 전원전압(Vdd)을 입력받고, 드레인은 소자의 제2포트와 접속되며 게이트가 상기 피모스 트랜지스터(P2)의 드레인에 연결된 피모스 트랜지스터(P1)와; 정입력단 및 반전입력단에 각각 인에이블/디세이블 신호(PE,NE)를 인가받아 상기 피모스 트랜지스터(P2)의 드레인과 소자의 제1포트를 연결시켜 주는 제1 전송게이트(TRNS1)와; 소오스가 접지되고, 게이트에 디세이블신호(NE)를 입력받는 엔모스 트랜지스터(N2)와; 소오스가 접지되고, 드레인은 소자의 제1포트와 접속되며 게이트가 상기 엔모스 트랜지스터(N2)의 드레인에 연결된 엔모스 트랜지스터(N1)와; 정입력단 및 반전입력단에 각각 디세이블/인에이블 신호(NE,PE)를 인가받아 상기 엔모스 트랜지스터(N2)의 드레인과 소자의 제1포트를 연결시켜 주는 제2 전송게이트(TRNS2)로 구성된 것을 특징으로 하는 문턱전압 측정 회로.A PMOS transistor P2 receiving a power supply voltage Vdd to the source and an enable signal PE to a gate thereof; A PMOS transistor (P1) receiving a power supply voltage (Vdd) from the source, the drain of which is connected to a second port of the device, and whose gate is connected to the drain of the PMOS transistor (P2); A first transfer gate TRNS1 connected to the positive input terminal and the inverting input terminal to enable / disable signals PE and NE to connect the drain of the PMOS transistor P2 to the first port of the device; An NMOS transistor N2 having a source grounded and receiving a disable signal NE at a gate thereof; An NMOS transistor N1 having a source grounded, a drain connected to a first port of the device, and a gate connected to a drain of the NMOS transistor N2; A second transfer gate TRNS2 configured to connect the drain of the NMOS transistor N2 and the first port of the device by receiving the disable / enable signals NE and PE at the positive input terminal and the inverting input terminal, respectively. Threshold voltage measuring circuit.
KR1019990008346A 1999-03-12 1999-03-12 Threshold voltage measuring circuit KR100286345B1 (en)

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Publication number Priority date Publication date Assignee Title
KR100688480B1 (en) * 2000-09-19 2007-03-08 삼성전자주식회사 Electric characteristics measuring means of semiconductor element in packaged semiconductor device and method there-of

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KR20220139685A (en) 2021-04-08 2022-10-17 에스케이하이닉스 주식회사 Semiconductor memory device and operating method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100688480B1 (en) * 2000-09-19 2007-03-08 삼성전자주식회사 Electric characteristics measuring means of semiconductor element in packaged semiconductor device and method there-of

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