KR20000058361A - The method of forming circuit on circuit board by laser and laser mask - Google Patents

The method of forming circuit on circuit board by laser and laser mask Download PDF

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KR20000058361A
KR20000058361A KR1020000023215A KR20000023215A KR20000058361A KR 20000058361 A KR20000058361 A KR 20000058361A KR 1020000023215 A KR1020000023215 A KR 1020000023215A KR 20000023215 A KR20000023215 A KR 20000023215A KR 20000058361 A KR20000058361 A KR 20000058361A
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South Korea
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laser
circuit
copper foil
base plate
forming
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KR1020000023215A
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Korean (ko)
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KR100355417B1 (en
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안지양
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안지양
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0011Working of insulating substrates or insulating layers
    • H05K3/0017Etching of the substrate by chemical or physical means
    • H05K3/0026Etching of the substrate by chemical or physical means by laser ablation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

PURPOSE: A method for forming a circuit of a circuit board is provided to reduce inferior articles and production process by using laser and laser mask. CONSTITUTION: A bottom panel(25) is made of laser transparent material such as fused silica. A copper plate(14) is placed on the bottom panel(25). A laser mask having circuit pattern coat(26) formed of laser reflecting material is placed on the copper plate(14) in one side of the bottom panel(25). The laser reflecting material is at least one selected from group including dielectrics, oxides, fluorides, sulfides, Au, Ag, Al, Ni-Cr, Si, Ge, etc. The laser mask is arranged in parallel with the surface of the copper plate(14) with a predetermined distance, and laser is irradiated onto the copper plate. The melted copper is removed by compressed air from a blower, thereby forming a circuit on the surface of the copper plate(14).

Description

레이저와 레이저마스크에 의한 회로기판의 회로 형성방법{The method of forming circuit on circuit board by laser and laser mask}The method of forming circuit on circuit board by laser and laser mask}

본 발명은 회로기판의 회로 형성방법에 관한 것으로 기존의 인쇄회로기판(PCB)제조방법의 회로 형성방법과 달리 회로기판의 회로를 형성하는 데 있어서 레이저와 레이저마스크를 이용함으로써 불량제품 발생을 줄이고 화학약품 사용에 따른 환경적 문제를 해소함은 물론 제조공정 단축으로 원가절감과 생산량 증대를 도모할 수 있는 레이저와 레이저마스크에 의한 회로기판의 회로 형성방법에 관한 것이다.The present invention relates to a circuit forming method of a circuit board. Unlike the conventional circuit forming method of a printed circuit board (PCB) manufacturing method, the use of a laser and a laser mask in forming a circuit of a circuit board reduces the occurrence of defective products and chemicals. The present invention relates to a method for forming a circuit board of a circuit board by using a laser and a laser mask, which can solve environmental problems caused by the use of chemicals, as well as reduce costs and increase production by shortening a manufacturing process.

제1도는 현재 널리 쓰이고 있는 PCB 제조방법의 회로 형성공정을 나타낸 것이다. 도면을 참조하여 종래의 기술을 설명하면 다음과 같다.1 shows a circuit forming process of a PCB manufacturing method which is widely used at present. Referring to the drawings, a conventional technique is as follows.

제1도 A와 같이 라미네이팅 공정에서 동박과 감광성 드라이 필름과의 접착력을 향상시키기 위해 기판에 부착된 동박 표면의 산화막, 유지분 등을 제거하고 일정한 조도를 부여한다.(정면공정)As shown in FIG. 1A, in order to improve adhesion between the copper foil and the photosensitive dry film in the laminating process, an oxide film, an oily fat, and the like on the surface of the copper foil attached to the substrate are removed and a constant roughness is given.

제1도 B와 같이 드라이 필름을 가열된 로울러로 압착하여 기판에 접착된 동박 표면에 밀착시킨다.(라미네이팅 공정)As shown in FIG. 1B, the dry film is pressed with a heated roller to closely adhere to the surface of the copper foil adhered to the substrate. (Laminating step)

제1도 C와 같이 노광용 필름을 드라이 필름 위에 놓고 UV를 조사하여 회로패턴을 형성할 드라이 필름부분을 선택적으로 광경화시킨다.(노광공정)As shown in FIG. 1C, the exposure film is placed on the dry film to selectively photocure the dry film portion to form a circuit pattern by irradiating UV.

제1도 D와 같이 노광공정에서 UV에 노출되지 않은 드라이 필름(광경화되지 않은 드라이필름 부분)을 현상액으로 용해시켜 제거한다.(현상공정)As shown in FIG. 1D, the dry film (the photocured dry film portion) not exposed to UV in the exposure process is dissolved in a developer and removed.

제1도 E와 같이 노출된 동박을 부식액으로 에칭하여 회로패턴을 형성시킨다. 이 때 광경화되어 남아있는 드라이 필름부분이 에칭레지스트의 역할을 하여 회로가 형성된다.(부식공정)As shown in FIG. 1E, the exposed copper foil is etched with a corrosion solution to form a circuit pattern. At this time, the dry film portion remaining after photocuring acts as an etching resist to form a circuit (corrosion process).

제1도 F와 같이 부식공정을 거쳐 동박 표면에 형성된 회로에 광경화되어 남아있는 드라이필름을 박리액으로 박리시킨다.(박리공정)As shown in FIG. 1F, the dry film remaining after photocuring on the circuit formed on the surface of the copper foil through the corrosion process is peeled off using a peeling solution.

이러한 기존의 PCB 제조방법의 회로 형성방법은 여러 공정을 거치게 되어 제작에 다소의 시간이 소요되고 각 공정마다 가공상의 문제점으로 인해 불량품이 발생하고 있으며 또한 여러 종류의 화학물질을 사용하고 있어 환경적 문제를 유발하고 있다. 가공상의 문제점을 각 공정별로 살펴보면 다음과 같다. 라미네이팅 공정은 회로 형성을 위한 준비공정으로서 감광성 드라이 필름을 정면된 기판에 접착된 동박 표면에 밀착시키는 공정인데 이 과정에서 드라이 필름이 동박에 완전히 밀착되지 않을 경우 부식과정에서 회로를 구성할 동박부분이 부식되어 불량품이 발생한다. 노광공정은 노광용 필름을 드라이필름 위에 놓고 UV를 조사하여 회로부분을 광경화시키는 공정으로 노광용 필름이나 드라이 필름에 먼지 등의 이물질이 묻어 있을 경우 회로패턴이외의 불필요한 부분이 광경화되어 불량품이 발생한다. 또한 부식공정에서는 부식속도의 불균일로 인해 과부식이나 미부식이 발생하여 불량품이 발생한다. 다음으로 여러 종류의 화학물질을 사용함으로써 발생하는 환경적 문제점을 살펴보면 현상공정, 부식공정, 박리공정에는 다종의 화학물질이 사용되므로 환경적 위험이 있다.The circuit formation method of the conventional PCB manufacturing method takes a number of processes and takes some time to manufacture, and defective products are generated due to processing problems in each process, and also various kinds of chemicals are used. Is causing. The processing problems are as follows for each process. The laminating process is a preparation process for forming a circuit. The photosensitive dry film is closely attached to the surface of the copper foil adhered to the front substrate. In this process, if the dry film is not completely adhered to the copper foil, the copper foil portion that forms the circuit in the corrosion process is formed. Corrosion generates defective products. The exposure process is a process of placing an exposure film on a dry film and irradiating UV to photocuring a circuit part. When foreign materials such as dust are on the exposure film or dry film, unnecessary parts other than a circuit pattern are photocured to generate defective products. In addition, in the corrosion process, over-corrosion or non-corrosion occurs due to non-uniformity of corrosion rate, resulting in defective products. Next, when looking at the environmental problems caused by the use of various kinds of chemicals, there are environmental risks because a variety of chemicals are used in the developing process, the corrosion process, and the peeling process.

본 발명은 위와 같은 종래의 문제점을 해결하고자 하는 목적으로 안출되었으며 이러한 목적달성을 위해 레이저와 레이저마스크를 이용하여 회로기판의 회로를 형성한다.The present invention has been made for the purpose of solving the conventional problems as described above to form a circuit of a circuit board using a laser and a laser mask to achieve this object.

제1도A, 제1도B ,제1도C, 제1도D, 제1도E, 제1도F는 종래 방법의 주요공정도1A, 1B, 1C, 1D, 1E, and 1F are the main process diagrams of the conventional method.

제2도A, 제2도B는 본 발명의 주요 공정도2A and 2B are main process diagrams of the present invention.

※ 도면의 주요부분에 대한 부호의 설명※ Explanation of code for main part of drawing

1 조도를 가진 동박의 단면Cross section of copper foil with 1 roughness

2 동박 단면2 copper foil cross section

3 기판 단면3 Board Cross Section

4 로울러 단면4 roller cross section

5 로울러 회전방향5 roller rotation direction

6 드라이 필름 단면6 dry film single sided

7 기판 진행 방향7 Board Progress Direction

8 UV8 UV

9 노광용 필름의 회로패턴이외의 부분9 Parts other than circuit pattern of film for exposure

10 노광용 필름의 회로패턴부분10 Circuit pattern part of film for exposure

11 광경화되지 않은 드라이 필름 단면11 Uncured dry film cross section

12 광경화된 드라이 필름 단면12 Photo-cured dry film cross section

13 에칭레지스트로서 동박에 접착되어 있는 드라이 필름 단면13 Dry film cross section adhered to copper foil as etching resist

14 회로를 형성하는 동박 단면14 copper foil cross section forming circuit

21 레이저 조사 진행방향21 Direction of laser irradiation

22 조사된 레이저22 irradiated laser

23 반사된 레이저23 Reflected Laser

24 레이저 마스크의 기저판을 통과한 레이저24 Laser through base plate of laser mask

25 레이저 마스크의 기저판25 base plate of laser mask

26 레이저 마스크의 코팅부26 Coating of laser mask

27 레이저에 의해 제거된 동박27 Copper foil removed by laser

28 블로워 단면28 blower cross section

29 압축공기29 compressed air

본 발명의 레이저와 레이저마스크에 의한 회로기판의 회로 형성방법은 레이저 증폭과정에서 사용되는 전반사 거울의 기저판이나 레이저용 렌즈에 사용되는 재질(Fused Silica, BK7 등)로 얇고 두께가 일정한 양면의 기저판을 만들고 기저판의 한면에 레이저 증폭과정에서 사용되는 전반사 거울에 코팅된 레이저 반사용 재질(dieletrics; Oxides, Fluorides, Sulfides 등, metal; Au, Ag, Al, Ni-Cr 등, semiconductors; Si, Ge)을 코팅한 후 코팅부분을 회로패턴의 코팅부만 남도록 에칭하여 회로패턴 코팅부를 형성하는 레이저마스크 제작 단계, 회로패턴 코팅부를 갖는 레이저마스크를 기판에 접착된 동박 표면위에 일정간격을 유지하여 동박 표면과 평행하게 놓고 레이저마스크에서 기판에 접착된 동박 방향으로 레이저를 조사하여 동박을 제거하면서 제거된 동박을 블로워의 압축공기로 불어내는 회로기판의 회로 형성단계로 이루어진다.The circuit formation method of the circuit board by the laser and the laser mask of the present invention is a base plate of the total reflection mirror used in the laser amplification process or a material used for the laser lens (Fused Silica, BK7, etc.) And reflecting materials (dieletrics; Oxides, Fluorides, Sulfides, etc., metals; Au, Ag, Al, Ni-Cr, etc., semiconductors; Si, Ge) coated on the total reflection mirror used in the laser amplification process on one side of the base plate After coating, the coating part is etched so that only the coating part of the circuit pattern remains, forming a laser pattern coating part, and the laser mask having the circuit pattern coating part is kept parallel to the copper foil surface by maintaining a predetermined interval on the copper foil surface bonded to the substrate. The blower compresses the removed copper foil while removing the copper foil by irradiating a laser in the direction of the copper foil adhered to the substrate from the laser mask. A group composed of a circuit forming step in the circuit board blowing.

본 발명을 적용하여 회로기판의 회로를 형성하기 위해서는 레이저와 레이저마스크가 필요하다. 본 발명에 채용할 수 있는 레이저는 수반되는 고열로 동박을 녹이는 적외선계통의 레이저나 고열을 수반하지 않으면서 동박을 제거(ablation)하는 자외선계통의 레이저중 어느 계통의 레이저라도 가능하다 따라서 동박을 제거하기 위해 필요한 레이저 파장과 펄스에너지의 범위만을 고려하여 레이저를 선택하면 된다.In order to form the circuit of the circuit board by applying the present invention, a laser and a laser mask are required. The laser that can be employed in the present invention can be either a laser of an infrared ray system that melts the copper foil with the accompanying high heat, or a laser of an ultraviolet ray laser that removes the copper foil without high heat. The laser needs to be selected in consideration of only the laser wavelength and the range of pulse energy necessary for the purpose.

레이저마스크는 레이저 증폭과정에서 사용되는 전반사 거울의 기저판이나 레이저용 렌즈의 재질(Fused Silica, BK7 등)로 얇고 두께가 일정한 양면의 기저판을 만들고 기저판의 한면을 레이저 증폭과정에서 사용되는 전반사 거울에 코팅된 레이저 반사용 재질(dieletrics; Oxides, Fluorides, Sulfides 등, metal; Au, Ag, Al, Ni-Cr 등, semiconductors; Si, Ge)로 코팅을 한 후 코팅부를 회로패턴 부분만 남도록 에칭하여 제작한다. 레이저마스크의 코팅부 에칭에는 첫째로 고출력의 레이저를 사용하여 기저판의 코팅부를 에칭하여 회로패턴 코팅부를 형성시키는 방법, 둘째로 기존 PCB 제조방법의 회로 형성방법을 이용하는 방법 즉, 기저판의 코팅부에 드라이 필름을 밀착시키고 그 위에 노광용 필름을 놓고 UV를 조사하여 회로패턴을 형성할 드라이 필름부분을 선택적으로 광경화시킨 다음에 현상액을 이용하여 광경화되지 않은 드라이 필름을 녹여내고 부식액을 이용하여 노출된 코팅부를 부식시켜 회로패턴의 코팅부만 남도록 하고 에칭레지스트로서의 역할을 마친 광경화되어 있는 드라이필름을 박리액으로 박리시켜 회로패턴 코팅부를 형성시키는 방법이 있는데 두 가지 방법중에서 선택적으로 사용한다.The laser mask is made of the base plate of the total reflection mirror used in the laser amplification process or the material of the laser lens (Fused Silica, BK7, etc.) to make a thin and constant double-sided base plate and to coat one side of the base plate on the total reflection mirror used in the laser amplification process. After coating with the laser reflection material (dieletrics; Oxides, Fluorides, Sulfides, metal; Au, Ag, Al, Ni-Cr, semiconductors; Si, Ge), the coating is etched to leave only the circuit pattern part . In etching the coating part of the laser mask, first, a method of forming a circuit pattern coating part by etching the coating part of the base plate using a high-power laser, and secondly, using a circuit forming method of a conventional PCB manufacturing method, that is, drying the coating part of the base plate. The film is adhered closely, the exposure film is placed thereon, and the UV film is irradiated to selectively dry the portion of the dry film to form a circuit pattern, and then the developer is used to melt the uncured dry film and the exposed coating using the corrosion solution. There is a method of forming a circuit pattern coating part by corroding the part so that only the coating part of the circuit pattern remains and peeling the photocured dry film, which has completed the role as an etching resist, with a peeling solution.

레이저마스크의 기저판 및 코팅 재질은 각각 레이저 증폭과정에 사용되는 전반사 거울에 채용되고 있는 기저판 및 코팅의 재질 중에서 damage threshold가 우수한 것을 선택하고 기저판과 코팅의 재질 및 두께는 사용될 레이저에 따라 최적의 조건을 갖도록 결정한다The base plate and the coating material of the laser mask are selected from those of the base plate and the coating material employed in the total reflection mirror used in the laser amplification process, each having an excellent damage threshold, and the material and thickness of the base plate and the coating are determined according to the laser to be used. Decide to have

제2도A와 제2도B는 본 발명에 의한 회로기판의 회로 형성방법에 관한 그림이다. 본 발명에 의한 회로기판의 회로 형성원리는 다음과 같다. 회로패턴 코팅부를 갖는 레이저마스크를 기판에 부착된 동박 표면위에 일정간격을 유지하여 동박 표면과 평행하게 놓고 레이저마스크에서 동박 방향으로 레이저를 조사하면 회로패턴 코팅부에서는 레이저가 반사되고 코팅부가 제거된 부분에서는 레이저가 투과됨으로써 레이저가 동박 표면에 도달하게 되고 동박 표면에 도달한 레이저가 동박을 제거하게 되므로 기판에 부착된 동박은 회로부분만이 남게 된다. 이 때 레이저에 의해 제거된 동박으로 인해 레이저마스크가 오염되는 것을 막고 가공을 용이하게 하기 위하여 레이저마스크와 동박 표면사이에 설치한 블로워로 압축공기를 레이저마스크와 동박 양쪽에 동시에 분사한다.2 and 2 illustrate a circuit forming method of a circuit board according to the present invention. The circuit formation principle of the circuit board according to the present invention is as follows. Placing the laser mask with the circuit pattern coating on the surface of the copper foil attached to the substrate in parallel with the surface of the copper foil, and irradiating the laser in the direction of the copper foil from the laser mask, the laser is reflected from the circuit pattern coating and the coating is removed. In the laser transmission, the laser reaches the surface of the copper foil, and since the laser reaching the surface of the copper foil removes the copper foil, only the circuit portion of the copper foil attached to the substrate remains. At this time, in order to prevent the laser mask from being contaminated by the copper foil removed by the laser and to facilitate processing, compressed air is simultaneously sprayed on both the laser mask and the copper foil with a blower installed between the laser mask and the surface of the copper foil.

완전한 회로기판의 회로형성을 위해서는 우선적으로 가공해야 할 방향(가로방향이나 세로 방향)을 선택하고 레이저를 선택한 방향의 직선을 따라 조사하여 회로패턴이외의 동박 부분을 제거시키고 선택한 방향의 가공이 끝나면 직전에 가공한 부분과 레이저가 중첩되게 하여 레이저를 조사하면서 진행시킨다. 레이저의 직경이 회로기판의 규격(가로, 세로)중 작은 쪽의 규격보다 클 경우 레이저를 규격이 큰 쪽 방향으로 1회만 진행시켜 완전한 회로기판의 회로를 형성할 수 있다. 따라서 가능한 한 레이저의 직경이 큰 것을 사용하는 것이 바람직하다.For circuit formation of a complete circuit board, first select the direction (horizontal direction or vertical direction) to be processed, and irradiate the laser along a straight line in the selected direction to remove the copper foil parts other than the circuit pattern, and immediately after finishing the selected direction The processed portion and the laser overlap so that the laser is irradiated to proceed. If the diameter of the laser is larger than the smaller one of the specifications (horizontal and vertical) of the circuit board, the laser can be processed only once in the direction of the larger specification to form a circuit of a complete circuit board. Therefore, it is preferable to use a laser having a large diameter as much as possible.

본 발명은 회로기판의 회로 형성에 레이저와 레이저마스크를 이용함으로써 기존 PCB 제조방법의 회로 형성방법의 채용으로 발생하는 불량제품을 감소시키고 화학약품 사용으로 유발되는 환경적 문제를 해결함은 물론 공정단축에 따른 생산성 향상, 원가절감이 가능한 효과가 있다.The present invention reduces the defective products caused by the adoption of the circuit formation method of the conventional PCB manufacturing method by using a laser and a laser mask in the circuit formation of the circuit board, and solves the environmental problems caused by the use of chemicals as well as process shortening This improves productivity and reduces costs.

Claims (2)

단층 또는 다층 회로기판의 회로를 형성함에 있어서 레이저 투과 재질(Fused Silica, BK7 등)을 기저판으로 하고 기저판의 한쪽면에 레이저 반사 재질(dieletrics; Oxides, Fluorides, Sulfides 등, metal; Au, Ag, Al, Ni-Cr 등, semiconductors; Si, Ge)로 회로패턴 코팅부를 형성시킨 레이저마스크를 동박 표면위에 일정간격을 유지하여 동박 표면과 평행하게 놓고 레이저를 조사함과 동시에 레이저에 의해 제거된 동박을 블로워의 압축공기로 불어내어 제거함으로써 기판에 부착된 동박 표면에 회로를 형성시키는 회로기판의 회로 형성방법In forming a circuit of a single layer or multilayer circuit board, a laser transmitting material (Fused Silica, BK7, etc.) is used as a base plate, and a laser reflecting material (dieletrics; Oxides, Fluorides, Sulfides, etc., metal; Au, Ag, Al, etc.) is formed on one side of the base plate. Laser mask formed by forming circuit pattern coating with semiconductors (Si, Ge, etc.), Ni-Cr, etc., at a constant distance on the copper foil surface, parallel to the copper foil surface, and irradiating the laser and blowing the copper foil removed by the laser Circuit formation method for forming a circuit on the surface of copper foil attached to a substrate by blowing off the compressed air 제1항에 있어서 레이저 증폭과정에 사용되는 전반사 거울의 기저판 재질(Fused Silica, BK7 등)로 얇고 두께가 일정한 양면의 기저판을 만들고 그 기저판의 양면중 한면에 레이저 증폭과정에 사용되는 전반사 거울의 코팅재질(dieletrics; Oxides, Fluorides, Sulfides 등, metal; Au, Ag, Al, Ni-Cr 등, semiconductors; Si, Ge)로 회로패턴 코팅부를 형성시킨 레이저마스크The base plate material (Fused Silica, BK7, etc.) of the total reflection mirror used in the laser amplification process is made of a thin and uniform double-sided base plate of the total reflection mirror used in the laser amplification process on one side of the base plate Laser masks that form circuit pattern coatings with materials (dieletrics; Oxides, Fluorides, Sulfides, etc., metals; Au, Ag, Al, Ni-Cr, etc., semiconductors; Si, Ge)
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KR20010000881A (en) * 2000-10-25 2001-01-05 안지양 The method of forming circuit pattern on circuit board
KR100900902B1 (en) * 2002-11-18 2009-06-03 엘지디스플레이 주식회사 Laser Beam Pattern Mask and Method for manufacturing the same
KR101137509B1 (en) * 2011-08-25 2012-04-20 강상태 Fabricating method for riged flexble board

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KR940008361B1 (en) * 1991-09-26 1994-09-12 삼성전자 주식회사 Manufacturing method of lens type mask
JPH05152766A (en) * 1991-11-27 1993-06-18 Teijin Ltd Formation of via hole in organic board
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JPH0866781A (en) * 1994-08-30 1996-03-12 Mitsubishi Electric Corp Excimer laser beam irradiating device
JPH10111562A (en) * 1996-10-04 1998-04-28 Futaba Corp Photomask for fine pattern
DE19709037A1 (en) * 1997-03-06 1998-09-10 Du Pont Deutschland Material and process for edge-covering photopolymerizable printing plates for flexographic printing

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010000881A (en) * 2000-10-25 2001-01-05 안지양 The method of forming circuit pattern on circuit board
KR100900902B1 (en) * 2002-11-18 2009-06-03 엘지디스플레이 주식회사 Laser Beam Pattern Mask and Method for manufacturing the same
KR101137509B1 (en) * 2011-08-25 2012-04-20 강상태 Fabricating method for riged flexble board

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