KR20000047422A - Inkjet printhead actuator and manufacturing method thereof - Google Patents

Abstract

PURPOSE: An ink jet print head actuator and a producing method are provided to improve the spray efficiency of ink and the performance of a head by forming the opposite side section area wider than the section area integrally connected to a vibration plate and increasing the connection intensity of a chamber tube. CONSTITUTION: A vibration plate(200) is formed into a certain thickness on an upper part of a board, and a photoresistor is sprayed on the upper part of the vibration plate into a certain thickness. The photoresistor is exposed and developed with a mask and then is washed. Then, the photoresistor is left at a regular interval in a shape that a lower horizontal section area is formed wider than an upper horizontal section area while the remaining is removed. A chamber plate(100) is formed by electro-forming around the photoresistor remaining on the vibration plate and is deposited not to excess the height of the photoresistor. After removing the remaining photoresistor, the integrally combined vibration plate and the chamber plate are separated from the board. A driving device(300) combined with a piezo-electric body and an electrode is deposited around a part corresponding to the chamber(110) so that the actuator is produced.

Description

Inkjet printhead actuator and manufacturing method

The present invention allows the thickness of the chamber wall to have a wider cross-sectional area on the opposite side than the cross-sectional area integrally connected with the diaphragm, thereby increasing the bonding strength of the chamber plate, thereby improving the performance of the head and the ink ejection efficiency of the inkjet printhead actuator. And to a method for producing the same.

In general, a part of ejecting ink in an inkjet printer is called a printhead.

As a method of ejecting ink by a print head, in the past, a high voltage was required by using a method of electrification or deflection of a recording liquid. However, DOD (Drop On), which allows the recording liquid to be sprayed in the atmosphere, is now required. The demand method is mainly used, making it easier to record.

The DOD method is typically a heating injection method using a resistance and a vibration injection method using a piezoelectric element (piezo electric).

The heating spray method is also particularly called a thermal bubble jet type, which is a chamber (a1) in which recording liquid is embedded, as shown in FIG. For example, it is typical that the injection port a2 is opened toward the printing paper and the resistance a3 is provided at the bottom of the chamber a1 on the opposite side of the injection port a2.

Therefore, when a predetermined voltage is input to the resistor a3, the recording liquid in the chamber a1 is heated to generate bubbles together with the steam, and a certain amount of the recording liquid in the chamber a1 is caused by the expansion of the foam. As it is discharged through the injection port a2, it is sprayed onto the recording material and printing is performed.

However, in this heating spray method, the recording liquid is heated by the resistance (a3), causing a change in the chemical composition of the recording liquid itself, and the air supply is blocked, causing the printing hole to be improperly printed. The life of the resistor a3 is shortened by the input of the voltage.

In addition, the vibrating injection method is also referred to as a piezo transducer type, and as shown in FIG. 2, a chamber b1 in which the recording liquid is embedded, and from the chamber b1 toward the recording material (for example, printing paper) It is typical to be provided as a piezoelectric element b3 provided at the bottom of the chamber b1 on the opposite side of the injection port b2 and the injection port b2.

In other words, in the vibratory jetting method, the recording liquid can be flowed by using a small piezoelectric element b3 instead of the resistance a3 in the heating jetting method.

When a predetermined voltage is applied to the piezoelectric element b3 in this manner, the piezoelectric element b3 is deformed. At this time, the volume in the chamber b1 is changed instantaneously, and the recording liquid is discharged through the injection port b2. The discharged recording liquid is jetted onto the recording material to print.

The vibratory spraying method has been applied to most print heads in recent years because of the advantage of preventing the change of the chemical property of the recording liquid compared to the heated spraying method, thereby realizing more stable spraying.

On the other hand, Fig. 3 shows an example of an inkjet print head employing a vibrating jetting method, wherein 1 is a nozzle plate on which a nozzle for discharging ink is formed, and 2 is a flow path plate laminated on the nozzle plate 1.

On top of the nozzle plate 1 and the flow path plate 2 stacked on each other, a chamber plate 3 having a chamber 3a, which is a hole vertically penetrating, is laminated, and a diaphragm 4 is provided on the chamber plate 3. The piezoelectric body 5 is attached to the upper surface of the diaphragm 4 in which the chamber 3a of the diaphragm 4 is provided.

In such a print head, the chamber plate 3 is generally coated with a green sheet of ceramic material by screen printing, and then formed into a chamber 3a by punching, and then sintered in such a state.

The side walls of the chamber 3a thus produced are usually vertical in shape, and a plurality of chambers 3a in the chamber plate 3 are formed in a mattress shape while keeping the width between the chambers 3a constant.

On the other hand, the diaphragm 4 is stacked on the upper side of the chamber plate 3, and the piezoelectric body 5 is attached to the diaphragm 4, and the piezoelectric body 5 is provided on a surface corresponding to the chamber 3a. have.

However, in the above structure, since the upper and lower surface areas of the chamber 3a are the same as shown in the drawing, the amount of bending deformation of the diaphragm 4 by the piezoelectric body 5 is not so large, and the jetting force of the ink is weak. There is a disadvantage that does not realize the best printing efficiency.

FIG. 4 shows another embodiment of the inkjet printhead as described above. In this embodiment, the chamber is formed by electroforming the upper portion of the nozzle plate 10 and the flow path plate 20 which are stacked on top of each other as shown in FIG. The plate 30 is formed, and at this time, the diaphragm 40 is stacked on the chamber plate 30, and the piezoelectric body 40 is attached to the upper surface corresponding to the chamber 31 of the diaphragm 40. .

However, the upper surface area of the chamber 31 to be formed in the chamber plate 30 is formed to be smaller than the lower surface area, so that the thickness of the chamber wall is relatively wide and the bottom is narrow.

In this structure, since the cross-sectional area of the diaphragm 40 side of the chamber 31 is formed smaller than in FIG. 3, the bending deformation of the diaphragm 40 by the piezoelectric body 50 is smaller, resulting in a reduction in the ejection force for ejecting ink. do.

As a result, the printing state is not only worsened, but also the bonding area of the chamber wall to be joined to the flow path plate 20 is very small, and thus the flow path plate 20 during the bending deformation of the diaphragm 40 by the piezoelectric body 50. It has a serious problem of shortening the service life while reducing the durability of the head by weakening the bond strength with.

The present invention is to compensate for the above problems, the main object of the present invention is to make the cross-sectional area of the chamber formed in the chamber plate gradually narrowed from the upper end to the lower end so that the bending moment of the diaphragm at the upper end to maximize the ink The spraying power of the to increase the printing efficiency will be improved.

Another object of the present invention is to correspond to the chamber so that the cross-sectional area of the chamber wall is gradually widened from the upper end to the lower end to enhance the bonding force at the lower end of the chamber wall so that the stable operability and durability can be improved. .

1 is a schematic sectional view showing the principal parts of a structure in which ink is sprayed by a conventional thermal / bubble jet method;

2 is a schematic sectional view showing the principal parts of a structure in which ink is sprayed by a conventional piezoelectric method;

3 is a cross-sectional view showing an embodiment of an inkjet print head employing a general vibrating jet method;

4 is a cross-sectional view showing another embodiment of an inkjet printhead employing a general vibrating jetting method;

5 is a cross-sectional view of an inkjet print head according to the present invention;

6 is an enlarged view of a part of FIG. 5;

7 is an enlarged view of a part of a print head showing a bending deformation relationship according to the present invention;

8 to 13 is a process chart showing the manufacturing process of the first embodiment of the inkjet printhead according to the present invention;

8 is a process chart showing a process of forming a diaphragm on a substrate in the process of the first embodiment;

9 is a process chart showing a state where a photoresist is applied to the diaphragm of FIG. 8;

10 is a process chart showing a state in which the photoresist of FIG. 9 is patterned;

FIG. 11 is a process diagram illustrating a process of forming a chamber plate on top of a diaphragm patterned with the photoresist of FIG. 10;

12 is a flowchart illustrating a state in which a photo resistor is removed in FIG. 11;

FIG. 13 is a process chart with the substrate removed from FIG. 12; FIG.

14 to 20 are process drawings showing the manufacturing process of the second embodiment of the inkjet printhead according to the present invention;

14 is a process chart in which a photoresist is applied to both sides of a chamber plate;

15 is a process chart showing a state in which the photoresist of one side of FIG. 14 is patterned;

16 is a process chart showing a state of etching the chamber plate in FIG. 15;

17 is a process chart showing a state in which the photoresist is removed from the chamber plate in FIG. 16;

18 is a process chart showing a state in which the diaphragm is coupled to the chamber plate of FIG. 17;

19 is a process chart showing a state in which a diaphragm is deposited on a substrate;

20 is a process chart showing a state in which the diaphragm in FIG. 19 is coupled to a chamber plate;

21 to 25 are process drawings showing the manufacturing process of the third embodiment of the inkjet print head according to the present invention;

21 is a process chart before press working a chamber plate according to the present embodiment,

22 is a process chart showing a state of processing a chamber plate by punching a press;

23 is a cross-sectional structural view of the chamber plate deformed by punching;

24 is a cross-sectional structural view showing a state in which a chamber plate is polished;

25 is a cross-sectional structural view showing a state in which a diaphragm is coupled to the chamber plate of FIG. 24;

<Description of the symbols for the main parts of the drawings>

100: chamber plate 110: chamber

120: chamber wall 200: diaphragm

300: driving means

In order to achieve the above object, the present invention provides a diaphragm plate,

It is integrally coupled to the diaphragm, and a plurality of chambers are formed at regular intervals on the plate surface, so that the length of the chamber between chamber walls is gradually shortened from the upper side to the lower side of the diaphragm, and the thickness of the chamber wall is bonded to the diaphragm integrally coupled with the diaphragm. The chamber plate, which is made larger at the end,

Characterized in that the drive means are sequentially stacked on top of the diaphragm.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 5 shows a preferred embodiment structure according to the present invention, where 100 is a chamber plate, 200 is a diaphragm, and 300 is driving means in which a piezoelectric body and an electrode are combined.

The chamber plate 100 is formed such that the chamber 110, which is a hole penetrating up and down on the flat plate, is formed at a predetermined interval. The chamber 110 is characterized in that the upper portion is wider and has a narrower cross-sectional area toward the lower portion.

Therefore, the chamber wall 120 provided between the chambers 110 in the chamber plate 100 has a cross-sectional area that is narrower at an upper portion corresponding to the chamber 110 and widens toward the lower side.

In addition, the diaphragm 200 of the plate is integrally coupled to the upper portion of the chamber 110 having a large cross-sectional area of the chamber plate 100, and thus, the upper portion of the chamber 110 is covered by the diaphragm 200. The upper surface corresponding to the chamber 110 of the 200 is configured to form an actuator by depositing the driving means 300 which combines the piezoelectric body and the electrode.

On the other hand, in the constitution of FIG. 5, the nozzle plate is finally joined while properly joining the flow path plate to the bottom of the chamber plate 100 or guiding flow path plate for guiding the inflow and outflow of ink such as the restrictor plate or the reservoir plate. The head of the inkjet printer is made.

As such, in the structure in which the chamber plate 100, the vibration plate 200, and the driving means 300 are coupled to each other, the chamber 110 and the chamber wall 120 formed on the chamber plate 100 correspond to each other. It is characterized in that it has a shape as in FIG. 6 having a cross-sectional area.

More specifically, in the chamber plate 100, the cross-sectional area of the chamber 110 and the cross-sectional area of the chamber wall 120 correspond to each other, for example, the cross-sectional area of the chamber 110 and the cross-sectional area of the chamber wall 120. Since the summation forms the chamber plate 100, the cross-sectional area of the chamber wall 120 is reduced by the rate at which the cross-sectional area of the chamber 110 is increased, and the cross-sectional area of the chamber wall 120 is expanded by the rate at which the cross-sectional area of the chamber 110 is reduced. Will be.

In the present invention, when the chamber plate 100 is formed, the chamber 110 has the largest horizontal cross-sectional area (C _U ) at the upper side and narrows down as it goes downward, while the corresponding chamber wall 120 is at the lower side. The horizontal cross-sectional area CW _L is to be formed as a shape that is largest and narrows toward the upper side.

At this time, the upper and lower horizontal cross-sectional area (C _U ) (C _L ) of the chamber 110 and the horizontal cross-sectional area (CW _U ) (CW _L ) of the chamber wall 120 have the same center on the vertical line.

On the other hand, as the horizontal cross-sectional area C _U (C _L ) of the chamber 110 is gradually narrowed from the upper side to the lower side, the gap between the chamber walls 120 is shorter from the lower side to the upper side in addition to the case where the gap between the chamber walls 120 is necessarily shortened from the upper side to the lower side. In some cases, at least some of the opposing faces may be formed vertically.

That is, when the chamber 110 is provided in the same shape and the horizontal cross-sectional area is enlarged and reduced at a constant rate from the upper side to the lower side or the lower side to the upper side, the chamber 110 must be formed in the chamber wall 120 in the shape as shown in the figure. ) The outer circumferential surface is a shape of a constant inclination angle, but if the cross-sectional shape of the chamber 110 is a different shape, the outer circumferential surface of the chamber wall 120 may be variously formed even if the horizontal cross-sectional area is enlarged and reduced at a constant ratio. have.

However, in any case where the formation of the chamber 110 is carried out mechanically or chemically, the same cross section from the upper side to the lower side or vice versa to favor the uniform formation and reproduction of the chamber 110 in the chamber plate 100. Since it is generally formed to have a shape, in the present invention, it is most preferable to realize the same cross-sectional shape from the upper side to the lower side, so that the cross-sectional area gradually decreases toward the lower side.

Meanwhile, as described above, the chamber wall 120 formed to correspond to the cross-sectional area of the chamber 110 has a horizontal cross-sectional area CW _U (CW _L ) gradually wider from the upper side to the lower side as opposed to the shape of the chamber 110. It becomes the structure that becomes.

Therefore, since the bottom surface of the chamber wall 120 is usually configured to be connected to a flow path plate means such as a separate flow path plate, a restrictor plate, or a reservoir plate, and a nozzle plate, the expansion of the cross-sectional area thus joined is performed with the members to be joined. This is an important factor in determining the bonding force.

For reference, the ink ejection force in the actuator is most determined by the bending deformation moment of the diaphragm 200, and this bending deformation moment is made possible by providing sufficient operating space in the chamber 110.

Therefore, as shown in FIG. 7, when the horizontal cross-sectional area C _U of the chamber 110 on the diaphragm 200 side is larger than the horizontal cross-sectional area C _L on the other side, the deflection amount of the diaphragm 200 increases and a greater injection force. Be able to exert.

In addition, a constant moment is normally transmitted to the chamber wall 120 through the diaphragm 200 when the driving means 300 is deformed. A structural cross-talk is generated in the chamber wall 120 by such a moment. This causes a problem that the adhesive layer with the flow path plate means bonded to the bottom of the chamber wall 120 is broken.

Since this moment is the main cause of determining the structural strength of the print head, it is no exaggeration to say that the structural strength of the entire print head is determined in particular by the strength of the chamber plate bonded at the bottom of the chamber.

On the other hand, the deformation and restoration due to the contraction and expansion of the piezoelectric body are repeated, and the horizontal force (Fh) generated by the driving means and the bending moment (M _B ) during the bending of the diaphragm generally determine the bonding strength of the chamber plate (100). The moment Mh generated by the horizontal force Fh is Mh = Fh · h, where h is the height from the center of thickness of the diaphragm 200 to the adhesive surface.

Therefore, when the total moment generated by the driving means 300 is M _total = M _B + Mh = M _B + Fh · h and the bonding force of the chamber plate 100 is F _A , the resistance moment (M _R) ) Is M _R = F _A · d, where d represents the length between the end portions of the chamber 110 side from the center of the joint surface of the chamber wall 120.

Therefore, in order to prevent the cross jaw and structural deformation due to the deformation force of the driving means 300, the bonding force, that is, the resistance moment must be larger than the total moment, and thus the formula F _A · d >> M _B + Fh · h must be satisfied.

In this way, when the joint force (F _A ) is applied by the same joint method, the joint area must be widened in order to obtain a larger resistance moment (M _R ) with respect to the total moment (M _total ). Is achieved by a method of increasing the length d between chamber-side ends from the chamber. This expansion of the bonding area provides a resistance moment M _R greater than the total moment M _total so that a stable operating structure is always maintained. To make it possible.

Therefore, in the structure of the actuator of the inkjet head, in particular, the chamber 110 has a shape in which the horizontal cross-sectional area C _U (C _L ) gradually becomes narrower from the upper end to the lower end of the diaphragm 200 side, and thus the diaphragm 200 The ink injection efficiency in the chamber 110 is increased by maximizing the bending moment of the chamber 110, and the horizontal cross-sectional area CW _U (CW _L ) is lower than the upper end of the chamber wall 120 at the diaphragm 200. By increasing the bonding strength of the chamber wall 120 by increasing the width of the diaphragm 200 to increase the resistance moment to the bending moment (M _R ) to have a more durable durability.

Referring to the manufacturing process for the configuration of the present invention as described above are as follows.

8 to 13 illustrate a method of manufacturing an actuator according to the present invention. First, as shown in FIG. 8, a separate substrate 400 is provided, and a diaphragm made of metal is formed on the substrate 400. Mold 200. In this case, the diaphragm 200 may be formed by electroforming, vacuum deposition such as sputtering or evaporation.

In addition, the diaphragm 200 may be rolled into a thin plate by pressing to be formed by bonding to a substrate 400 provided separately.

The diaphragm 200 produced in this way is formed to a thickness of about 10㎛ ~ 20㎛, the main component of the material is to use a metal or ceramics such as nickel (Ni), but most preferably to use stainless steel .

The photoresist 500 is applied to the upper portion of the diaphragm 200 provided on the substrate 400 as shown in FIG. 9, but the thickness of the photoresist 500 to be applied is at least thicker than the thickness of the chamber plate to be made. To be applied as.

The photoresist 500 is patterned to remove unnecessary portions using a cleaning solution after exposure and development as shown in FIG. 10 using the mask 600 thereon.

In this case, it is preferable to use a positive photo register as the photo register 500, but is not limited thereto.

The area of the photoresist 500 that is exposed during patterning of the photoresist 500 has the upper end cross-sectional area larger than the lower side cross-sectional area of the photoresist 500 that is ultimately left due to the intensity effect of the upper end being narrower and narrowing toward the lower end. It remains in the shape as shown in FIG.

Therefore, the photoresist 500 remains on the upper part of the diaphragm 200 by the patterning. The chamber plate is formed by the electroforming as shown in FIG. 10 as a space formed between the photoresist 500. (100) is deposited to a thickness of 100 μm to 150 μm.

After depositing the chamber plate 100 to the required thickness and completely removing the photoresist 500 remaining on the upper portion of the diaphragm 200 using a cleaning liquid as shown in FIG. 12, the chamber plate 100 has a photoresist ( As the 500 is removed, the chamber 110 is formed in a shape such that a horizontal cross-sectional area gradually narrows from one end of the diaphragm 200 to the other end.

When the substrate 400 supporting the diaphragm 200 is removed in this state, as shown in FIG. 13, the horizontal cross-sectional area of the chamber 110 gradually decreases from one end of the diaphragm 200 side to the other end, and at the same time, the chamber at this time. On the contrary, the wall 120 forms a structure in which the horizontal cross-sectional area gradually widens in the direction corresponding to the diaphragm 200 side.

Therefore, when viewed from the front, a chamber plate 100 having a narrow upper cross section and a lower trapezoidal chamber wall 120 and a wide upper and narrow lower trapezoidal chamber 110 is formed.

In this way, the actuator 300 of the piezoelectric body and the electrode is laminated on the surface corresponding to the chamber 110 of the diaphragm 200, so that the actuator of the inkjet print head can be obtained as shown in FIG. .

On the other hand, the flow path plate, the restrictor plate, or the reservoir plate is joined to the lower surface of the chamber plate 100 of the above-described actuator, that is, the horizontal cross section of the chamber wall 120 is wide, and finally the nozzle plate is joined. You will be able to create a finished inkjet printhead.

As illustrated in FIG. 7, the actuator manufactured in this way is a diaphragm of the chamber 110 which is wider when the diaphragm 200 is deflected by the driving means 300 while power is input from the outside to the driving means 300. The (200) side horizontal cross-sectional area (C _U ) can maximize the bending deformation moment.

Meanwhile, FIGS. 14 to 18 show a second embodiment according to the present invention. In this embodiment, the chamber plate 100 is provided with a thickness of about 100 μm to 150 μm as shown in FIG. The plate 100 is made to be formed of a material of metal as in the first embodiment.

15 is a photoresist 500 is applied to both plate surfaces of the chamber plate 100 formed as described above with a constant thickness, and the photoresist 500 applied to one plate surface is exposed and developed using a mask. Afterwards, use the cleaning solution to remove unnecessary parts.

The photoresist 500 is removed and the etching liquid is supplied to the chamber plate 100 to which a part of the plate surface is exposed, and the etching is performed. The chamber plate 100 thus etched has the same shape as that of FIG. The patterning is made in a shape that the etching range gradually decreases from the upper portion supplied.

The etching may be performed by wet etching, in which the chamber plate 100 to which the photoresist 500 is applied is immersed in an etching solution, and the etching may be performed by spraying the etching solution using a spray method. It is more preferable to spray the removed portion so that the portion to be etched is etched.

After the chamber plate 100 is patterned by etching, the photoresist 500 applied to the chamber plate 100 is completely removed by using a cleaning liquid, and the horizontal cross-sectional area gradually decreases from the top to the bottom as shown in FIG. 17. At the same time, the chamber 110 having the shape is formed, and the chamber wall 120 between the chambers 110 obtains the chamber plate 100 formed in a shape in which the horizontal cross-sectional area gradually increases from the top to the bottom.

In this way, the diaphragm 200 having a thickness of about 10 μm to 20 μm is bonded to one side of the chamber 110 of the chamber plate 100, which is formed relatively large, as shown in FIG. 18. In this case, the bonding is performed when the chamber plate 100 and the diaphragm 200 are made of the same material so as to be integrated by brazing.

On the other hand, since the diaphragm 200 has a very thin structure having a thickness of about 10 μm to 20 μm as described above, handling of the diaphragm 200 by itself is difficult.

Therefore, the diaphragm 200 is formed to have a thickness required by electroforming on the substrate 400 by using a separate substrate 400 as shown in FIG. 19, and together with the substrate 400, the chamber plate 100. It is most preferable to be bonded by a method such that the substrate 400 is separated from the diaphragm 200 and then bonded as shown in FIG.

In this way, the driving means 400 is bonded to the piezoelectric body and the electrode integrally coupled to the surface corresponding to the chamber 110 of the diaphragm 200 in a state in which the chamber plate 100 and the diaphragm 200 are coupled. To make the actuator of the print head.

21 to 24 show a third embodiment according to the present invention, wherein the chamber plate 100 in this embodiment forms the chamber 110 by punching using a press as shown in FIG. There is a characteristic.

That is, a groove is formed in the stationary mold 610 in the same shape as that of the chamber to be made to face the stationary mold 610 and the punch 620 of the press including the stationary mold 610 and the punch 620. The punch 620 is to be formed so that the projections of the shape corresponding to the groove corresponding to each other.

In this case, the grooves and the protrusions formed in the fixing mold 610 and the punch 620 are formed to have a horizontal cross-sectional area gradually increasing upward or downward, respectively, so that the side surfaces are tapered at a predetermined angle.

On the other hand, between the fixed mold 610 and the punch 620 is inserted into the chamber plate 100 made of a metal plate already made of a thickness of about 100㎛ ~ 150㎛ and the punch 620 is lowered as shown in FIG. When punched out, the chamber plate 100 has a shape as shown in FIG. 23, and a groove is formed in a shape in which a horizontal cross-sectional area is gradually increased downward. There is a part.

At this time, if the portion projecting to the bottom surface is polished and removed, a chamber plate 100 is formed in which a trapezoidal chamber 110 as shown in FIG. 24 is formed, and a larger cross-sectional area of the chamber plate 100 thus manufactured is opened. If the upper surface is bonded to the diaphragm 200 in the same manner as in the second embodiment, an actuator having a chamber 110 and a chamber wall 120 having a required shape is manufactured.

In this way, in the coupling structure of the chamber plate 100 and the diaphragm 200 to be produced to the surface corresponding to the chamber 110 of the diaphragm 200, the drive means 300 to couple the piezoelectric and the electrode is attached to make the actuator In addition, a flow path plate, a restrictor plate, a reservoir plate, and the like are bonded to the bottom surface of the chamber plate 100 to the actuator, and finally, the nozzle plate is bonded to produce an inkjet print head.

As described above, according to the present invention, the shape of the chamber 110 and the chamber wall 120, which are partition walls between the chambers 110, which have a direct influence on the ejection efficiency of the ink in the inkjet print head are formed to correspond to each other. In this way, the improved chamber 110 maximizes the bending strain of the diaphragm 200 so that the ink injection efficiency can be improved, and the chamber wall 120 further enhances the structure of the ink providing the flow path of the ink. By providing the bonding strength, there is an advantage to provide a stable drive and a solid durability of the actuator.

In particular, the ink injection efficiency improves the print quality through the print head, and the increase in the bonding strength extends the service life of the actuator, thereby providing more advantageous inkjet printing in terms of performance and maintenance.

Claims (17)

A diaphragm of the plate; A plurality of chambers integrally coupled to the diaphragm and penetrating up and down the plate surface to introduce and discharge a predetermined ink are formed at regular intervals, and the chamber has a horizontal cross-sectional area gradually decreasing from the upper end of the diaphragm to the lower end thereof. A chamber plate having a shape in which a horizontal cross-sectional area gradually widens from an upper end portion of the diaphragm side to a lower end portion; It is stacked on a surface corresponding to the chamber of the diaphragm, the shape is a combination of a piezoelectric body and the electrode for supplying power to the piezoelectric body for mechanical deformation while repeating deformation and restoration by electrical force, the drive to deflect the diaphragm Way; Will be The horizontal force (Fh) generated during deformation and restoration of the piezoelectric body and the moment (Mh) generated by the horizontal force (Fh) in the bending moment (M _B ) generated during the bending deformation of the diaphragm, Mh = Fh The total moment (M _total ) generated by the driving means is M _total = M _B + Mh = M _B + Fh · h, and the bonding force of the chamber plate is F _A. When the resistance moment (M _R ) by this is M _R = F _A · d (d is the resistance length to be bonded between the end of the chamber side from the center at the joining surface of the chamber wall), the resistance moment (M _R ) An inkjet printhead actuator that satisfies the formula F _A · d >> M _B + Fh · h that is at least greater than the total moment (M _total ). Forming a diaphragm to a predetermined thickness on top of the substrate; Applying a photoresist with a predetermined thickness on top of the diaphragm; Exposing and developing the photoresist using a mask and cleaning the photoresist, leaving the photoresist at regular intervals and removing the rest of the photoresist in a shape such that the lower horizontal cross-sectional area is wider than the upper horizontal cross-sectional area; Forming a chamber plate to a predetermined thickness by electroforming around the photo resistor remaining in the diaphragm, wherein the chamber plate is deposited so as not to exceed the height of the photo resistor; Separating the vibrating plate and the chamber plate integrally coupled to each other after removing the remaining photoresist from a substrate; Depositing driving means in which a piezoelectric body and an electrode are coupled to a portion corresponding to the chamber of the diaphragm; Actuator manufacturing method of an inkjet printhead carried out as. The method of claim 2, wherein the photo register is Actuator manufacturing method of an inkjet printhead using a positive photoresist. The diaphragm of claim 2, wherein the diaphragm An actuator manufacturing method of an inkjet printhead deposited to a thickness of about 10 μm to 20 μm. The method of claim 2, wherein the chamber plate An actuator manufacturing method of an inkjet printhead deposited to a thickness of about 100 μm to 150 μm. The diaphragm of claim 2, wherein the diaphragm An actuator manufacturing method of an inkjet printhead deposited by electroforming. The method of claim 2, wherein the chamber plate An actuator manufacturing method of an inkjet printhead deposited by electroforming. Manufacturing a chamber plate to a predetermined thickness; Applying photoresist with a constant thickness to both plate surfaces of the chamber plate; Exposing and developing the photoresist applied to the plate surface on one side of the chamber plate by using a mask, and then cleaning the photoresist to remove unnecessary portions of the photoresist; Etching is performed until the photoresist is removed and the etching liquid is supplied to the chamber plate where the surface is exposed to reach the photoresist applied to the corresponding surface; Removing the photoresist applied to both plate surfaces of the chamber plate using a cleaning liquid; Depositing a diaphragm with a predetermined thickness on the substrate; Bonding the diaphragm deposited on the substrate to one surface having a larger horizontal cross-sectional area of the chamber opened from the chamber plate; Separating the substrate from the diaphragm; Depositing driving means in which a piezoelectric body and an electrode are coupled to a portion corresponding to the chamber of the diaphragm; Actuator manufacturing method of an inkjet printhead carried out as. The method of claim 8, wherein the chamber plate An actuator manufacturing method of an inkjet printhead manufactured to a thickness of about 100 µm to 150 µm. The method of claim 8, wherein the diaphragm An actuator manufacturing method of an inkjet printhead is deposited on the substrate to a thickness of about 10㎛ ~ 20㎛. The method of claim 8, wherein the chamber plate Actuator manufacturing method of the inkjet printhead roll is produced. The method of claim 8, wherein the diaphragm An actuator manufacturing method of an inkjet printhead deposited by electroforming. Manufacturing a chamber plate to a predetermined thickness; Inserting the chamber plate between the stationary mold of the press and the punch; Driving the punch to form a chamber in the chamber plate by punching; Polishing a portion projecting from the flat plate surface by the punch of the chamber plate; Depositing a diaphragm with a predetermined thickness on the substrate; Bonding the diaphragm deposited on the substrate to one surface such that a horizontal cross-sectional area of the chamber is larger; Separating the substrate from the diaphragm; Depositing driving means in which a piezoelectric body and an electrode are coupled to a portion corresponding to the chamber of the diaphragm; Actuator manufacturing method of an inkjet printhead carried out as. The method of claim 13, wherein the chamber plate An actuator manufacturing method of an inkjet printhead manufactured to a thickness of about 100 µm to 150 µm. The method of claim 13, wherein the diaphragm An actuator manufacturing method of an inkjet printhead is deposited on the substrate to a thickness of about 10㎛ ~ 20㎛. The method of claim 13, wherein the chamber plate Actuator manufacturing method of the inkjet printhead roll is produced. The method of claim 13, wherein the diaphragm An actuator manufacturing method of an inkjet printhead deposited by electroforming.