KR20000044661A - Method for forming electrode of flat panel display using photo process - Google Patents

Abstract

PURPOSE: A method for forming an electrode of a flat panel display using a photo process is provided to reduce an energy loss during an exposure process through a photo process is provided. CONSTITUTION: A method for forming an electrode of a flat panel display using a photo process comprises the following steps. A photosensitive paste for electrode(23) is formed on a predetermined lower layer. A slope exposure is performed toward one side direction lain at right angles to a progress direction of an electrode(21). The slope exposure is performed toward the other side direction lain at right angles to a progress direction of the electrode. A developing process is performed to pattern the electrode.

Description

Electrode Formation Method of Flat Panel Display Using Photo Method

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to flat panel display technology, and more particularly to a method of forming an electrode of a flat panel display using a photo process method.

Flat panel displays such as plasma display panels (PDPs), liquid crystal displays (LCDs), field emission displays (FEDs), and electroluminescence displays (ELDs) have recently been used to replace conventional cathode ray tubes (CRTs). Be in the spotlight.

In particular, PDP has a number of unique advantages not found in other flat panel display devices, and has been considered as a large display device for multimedia that combines the functions of next-generation high-definition wall-mounted TVs, TVs, and PCs. There is a growing interest and it is nearing completion of mass production.

A plasma display panel (PDP) is a device that displays characters or images by using light emitted from a plasma generated during gas discharge, and is also called a gas discharge display device. PDP is largely exposed to direct plasma because the electrode used to apply external voltage to form plasma is directly exposed because the direct current (DC) type and conduction current flowing through the electrode are covered with dielectric. Therefore, it is classified into AC type through which displacement current flows. In addition, according to the electrode structure of the discharge cell, it is classified into a counter discharge type, a surface discharge type, a barrier discharge type, and the like. In the case of directly using the visible light emitted from the discharge gas, it is mostly used in a monochromatic display PDP device. There is a PDP using orange color, and when full color display is required, ultraviolet light emitted from discharge gas such as Kr or Xe excites red (R), green (G) and blue (B) phosphors. Visible light is used. However, there are still problems such as low brightness and contrast ratio, high driving voltage, low power consumption efficiency, and low manufacturing yield due to the difficulty in manufacturing process technology due to large size. I have a problem to do.

The front plate of a typical AC PDP forms a transparent electrode formed on a glass substrate, a bus electrode formed thereon, and then covers an upper portion of the structure by covering a transparent dielectric and a dielectric protective film. After the bus electrode is formed, a black stripe is further formed between the transparent electrodes in order to improve contrast.

Looking at this in more detail, the transparent electrode is typically used indium tin oxide (ITO) using a sputtering method, the bus electrode is usually made of a laminated structure of black electrode / white electrode, printing method, photo method, etc. It is formed using.

The photo method is a process developed by Dupont, USA. It is called FODEL ^TM method. The photosensitive paste is applied using a printing method and dried, and then exposed and developed using a photo process. It is a method of baking and forming a thick film.

In the case of forming a bus electrode using such a photo method, a pattern of a right shape is formed after exposure / development of the photosensitive paste. Due to this, there is a problem that an edge-curl phenomenon A in which the edge portion of the electrode is rolled up is caused as shown in FIG. 1. Reference numeral '10' denotes transparent electrodes, and '11a' and '11b' denote black electrodes and white electrodes constituting bus electrodes, respectively.

This edge-curl causes a problem that residues remain when performing a printing / drying / exposure / development process for forming a black stripe, which is a subsequent process, and also a subsequent transparent dielectric in an edge-induced state. If the formation proceeds, a lot of bubbles are generated in the transparent dielectric, and bubbles of the transparent dielectric burst during the PDP discharge, causing the electrodes to open, and an increase in the discharge voltage due to the unevenness of the electrode height and an uneven discharge are generated. There was a problem. In addition, when forming a subsequent seal layer, pores are induced by edge-curling of the bus electrode, which is a main factor of leakage of the panel during sealing / exhaust.

Table 1 below simply compares the advantages and disadvantages according to the method of forming the bus electrode.

division Photo method Printing method Advantages Full exposure Back exposure method Easy electrode thickness adjustment Low edge-curling Low energy loss during exposure Slightly less edge-curls Disadvantages Lots of edge-curls High energy loss during exposure (16%) Difficult to process (pattern formation), difficult to adjust electrode width and height

As shown in Table 1, the electrode formed by the printing method has a bottom width that is wider than the top width so that the edge-curls due to shrinkage of the bottom surface in contact with the transparent electrode when subjected to the firing process. While there is an advantage of less generation, there is a problem that the difficulty of the process is high and the control of the height and width of the bus electrode is difficult.

In addition, the back exposure photo method, which is an improvement of the conventional front exposure photo method, can freely adjust the height and width of the electrode compared to the printing method, and has an advantage in that edge-curls are somewhat reduced compared to the conventional front exposure photo method. The disadvantage is that the energy loss during exposure is very large.

This problem is not only caused when forming the bus electrode of the PDP, but also may be caused when forming the electrodes of other flat panel displays such as LCD, FED, and ELD.

SUMMARY OF THE INVENTION An object of the present invention is to provide a flat panel display electrode forming method capable of minimizing energy loss during exposure while using a photo method and minimizing edge-curling of a bus electrode.

1 is a cross-sectional view of a bus electrode of a plasma display panel formed according to the prior art.

2A to 2C are diagrams illustrating a bus electrode forming process of a plasma display panel according to an exemplary embodiment of the present invention.

* Explanation of symbols for the main parts of the drawings

20: transparent substrate 21: transparent electrode

22 photosensitive paste 22a bus electrode

23: photo mask

The present invention basically uses the front exposure type photo method. Therefore, the loss of the exposure energy has an advantage, and overcomes the edge-curl phenomenon, which is a disadvantage of the front exposure type photo method, by applying a double oblique exposure technique. That is, in the present invention, the photosensitive paste for the electrode is applied, and the exposure is performed twice by inclination of + Θ and -Θ so that the cross section of the electrode has a trapezoidal shape.

In order to achieve the above technical problem, a bus electrode forming method of a characteristic flat panel display provided from the present invention includes a first step of forming a photosensitive paste for electrodes on a predetermined base layer; A second step of performing oblique exposure in one direction perpendicular to the advancing direction of the electrode; A third step of performing oblique exposure in the other direction perpendicular to the advancing direction of the electrode; And a fourth step of patterning the electrode by performing the developing process.

Hereinafter, preferred embodiments of the present invention will be introduced in order to enable those skilled in the art to more easily carry out the present invention.

2A to 2C are diagrams illustrating a process of forming a bus electrode according to an exemplary embodiment of the present invention.

In the bus electrode forming process according to the present embodiment, first, as shown in FIG. 2A, a transparent electrode 21 is formed on a glass substrate 20 in a conventional manner, and the photosensitive paste 22 for electrodes is formed on the entire structure. Apply. Next, the photomask 23 is shifted in one direction among directions perpendicular to the traveling direction of the bus electrode, and oblique exposure (+ Θ) is performed.

Next, as shown in FIG. 2B, the photomask 23 is shifted in the other direction among the directions orthogonal to the traveling direction of the bus electrode, and oblique exposure (−Θ) is performed.

Subsequently, as illustrated in FIG. 2C, a development process and a firing process are performed to form the bus electrode 22a. Thereafter, a real layer is formed.

Through the above process, the edge-curl of the bus electrode can be minimized while using the photo method, which makes it easy to adjust the height and width of the electrode, thereby making full use of the advantages of the existing photo method, and prevents the occurrence of pores when forming a real layer. Therefore, leakage of the panel can be prevented during sealing / exhaust.

The present invention described above is not limited to the above-described embodiments and the accompanying drawings, and various substitutions, modifications, and changes can be made in the art without departing from the technical spirit of the present invention. It will be apparent to those of ordinary knowledge.

For example, in the above-described embodiment, the case of forming the bus electrode of the PDP has been described as an example. However, the present invention can be applied to the formation of electrodes of other flat panel displays such as LCD, FED, and ELD.

The present invention has the effect of preventing the edge-curling phenomenon of the electrode by improving the front exposure photo method, which consumes less exposure energy and easily adjusts the width and height of the pattern, and can expect stable discharge and drop of discharge voltage. In addition, the present invention can be expected to stabilize the subsequent process, the effect of increasing the production yield.

Claims (5)

A first step of forming a photosensitive paste for electrodes on a predetermined base layer; A second step of performing oblique exposure in one direction perpendicular to the advancing direction of the electrode; A third step of performing oblique exposure in the other direction perpendicular to the advancing direction of the electrode; And Fourth step of patterning electrode by developing process Electrode forming method of a flat panel display comprising a. The method of claim 1, After performing the fourth step, And forming a fifth step of firing the electrode. The method according to claim 1 or 2, The electrode, It is a bus electrode of a plasma display panel, The electrode formation method of the flat panel display characterized by the above-mentioned. The method according to claim 1 or 2, In the second and third steps, Exposure is performed in the state which shifted the said photo mask for electrode formation to the predetermined direction each in the different direction, The electrode formation method of the flat panel display characterized by the above-mentioned. The method of claim 2, After performing the fifth step, The method of forming an electrode of a flat panel display, further comprising a sixth step of forming a seal layer.