KR20000042745A - Apparatus and method for automatically arranging thin film micro mirror array and tape carrier package - Google Patents

Abstract

PURPOSE: An apparatus and method for automatically arranging a thin film micro mirror array and a tape carrier package are provided to duplicate leading parts of a TMA(Thin film Micro-mirror Array actuated) and a TCP(Tape Carrier Package), read a duplicated state of the leading parts with an image data, and automatically arrange the leading parts. CONSTITUTION: An image data of a left leading part(1',14) is read from a left camera(160). An ROI(Region Of Interest) value is extracted and stored from the image data. A camera is switched to a right camera to read an image data from the right camera with a video selector(210). The image data of the right leading part(1',14) is read from the right camera. An ROI value is extracted and stored from the image data of the right leading part. The ROI values of the left and the right are converted in a binary value. An image data of a first line and an image data of a last line are extracted among the binary value as a boundary data. A sum of pixel number of the left and the right boundary data(L1,LN) is founded. The maximum value and a deviation value of the sum of the pixel number are calculated and selected as a feature data. Four feature data and a stored feature data are compared to judge an arrangement degree.

Description

Automatic alignment method of thin film micro-mirror array and tape carrier package and its device

The present invention relates to a method of automatically arranging a thin film micro-mirror array and a tape carrier package, and a device thereof, and more particularly, to a lead portion of a tape carrier package (TCP) as a drive drive, each thin film micro-mirror array actuated. In the thermocompression bonding of the lead part of the TCP to the lead part of the TMA to which the ACF (anisotropic conductive film) is pressed to electrically connect the lead part, The present invention relates to a method of automatically arranging a thin film micro-mirror array and a tape carrier package, and an apparatus, which can automatically read the image data by reading the image data.

1 and 4 show one example of a tape carrier package as a plan view.

1 and 4, the TCP 10 has a TMA 1 or an IC chip 11 for a driving drive for an LCD, and an input lead 16 for electrical connection to an external device and the TMA 1. The output lead portion 14 is formed via the pattern portions 13 and 15, and the test pad portion 14 ′ is formed in the output lead portion 14.

The TCP 10 formed as described above is formed by the TMA 1 by the ACF 18 as shown in FIG. 1 by the tape automated bonding (TAB) method at the input lead portion 16 and the output lead portion 14. It is mounted on a device such as

However, as described above, the method of mounting the TCP 10 to the TMA 1 via the ACF 18 may use a device for connecting a drive driver of an existing LCD, but presses only one side. However, the configuration thereof is very complicated and it is difficult to apply the TMA 1 to which the TCP 10 must be connected six times on four sides.

Accordingly, the present invention is to solve this problem, an ACOS (anisotropic conductive) to electrically connect the lead portion of the tape drive package (TCP) as a drive drive lead portion of each thin film micro-mirror array actuated (TMA) film: When anisotropic conductive film is thermally compressed by superimposing a TCP lead portion on a lead portion of a pressurized TMA, the lead portion can be automatically aligned by reading the superimposed state with image data for automatic alignment of the lead portion. It is an object of the present invention to provide a method and an apparatus for automatically aligning a thin film micro-mirror array and a tape carrier package.

1 is a plan view showing a state in which a tape carrier package (TCF) is mounted on a thin film micro-mirror array (TMA) using an anisotropic conductive film (ACF),

2 is a schematic process diagram showing a thermocompression bonding method for mounting a tape carrier package to a TMA according to the present invention;

3 is a schematic view showing the configuration of a thermocompression bonding apparatus for applying the present invention;

4 is a plan view showing a mounting state of FIG.

5 is an enlarged view of a portion of FIG. 4;

Figure 6 is a schematic perspective view showing an example of the detection means of the automatic alignment device according to an embodiment of the present invention,

7a to 7d are partially enlarged plan views showing overlapping states of the lid portion;

8A and 8B are overlapping state diagrams based on the image data of the lead unit for explaining the image processing method of the present invention;

9 is a flow chart illustrating a method for automatically aligning a thin film micro-mirror array and a tape carrier package according to one embodiment of the invention.

<Description of the symbols for the main parts of the drawings>

1: TMA (thin film micro-mirror array actuated) 1 ': lead portion

10: TCP (tape carrier package) 11: IC chip

12: film portion 13, 15: pattern portion

14,16: lead portion 14 ': pad portion

18: ACF ((anisotropic conductive film) 100: thermocompression bonding device

110: TMA jig 120: TCP jig

130: XYθ table 140: thermocompression head

141: front thermal compression head 142: rear thermal compression head

143: thermocouple 150: lifting device

160: left camera 170: right camera

210: video selector 220: image processing device

230: display device L1: video data of the first line

L2: Video data of the last line

In order to achieve the above object, an automatic alignment method of a thin film micro-mirror array and a tape carrier package according to an exemplary embodiment of the present invention is performed through an ACF 18 at each lead part 1 ′ and 14 for thermocompression bonding. In the automatic sorting method of the TMA (1) and the TCP (10) which is loaded overlapping: Left image data reading step (S2) for reading the image data of the left lead portion (1 ', 14) from the left camera 160 ; A left ROI value storing step (S3) of extracting and storing a region of interest (ROI) value from the image data of the left lead portions 1 'and 14; A switching step (S4) of switching to the right camera 170 by the video selector 210 to read the image data from the right camera 170; A right image data reading step (S2) of reading the image data of the right leads 1 'and 14 from the right camera 170; A right ROI value storing step (S3) of extracting and storing a region of interest (ROI) value from the image data of the right lead portions 1 'and 14; Binarization step (S7) of binarizing the left and right ROI values; A boundary data extraction step (S8) of extracting image data L1 of the first line and image data LN of the last line from the binarization data; Obtaining a sum of the number of pixels of the respective boundary data L1 and LN on the left and right sides (S9); A feature data selection step (S10) of selecting and calculating a maximum value and a deviation value of the sum of the number of pixels on the left and the right as feature data; And a comparison determination step (S11, S12, S13) of judging the degree of alignment by comparing the four feature data with the stored feature data as good criteria.

As a result of the comparison determination step (S11, S12, S13), it is controlled to be automatically aligned by the difference with the reference feature data, when the TMA jig 110 and the TCP jig 120 is fixed to a different table, XYθ It is preferable that the XYθ table 130 be controlled so as to be automatically aligned by the table 130.

In addition, the automatic alignment device of the thin film micro-mirror array and the tape carrier package according to another embodiment of the present invention is loaded to overlap each other via the ACF 18 in each of the leads (1 ', 14) for thermocompression bonding. An automatic alignment device of the TMA (1) and the TCP (10), comprising: a left camera (160) for reading image data of the left lead portions (1 ', 14); A right camera 170 for reading image data of the right leads 1 'and 14; A video selector 210 for selectively reading image data from the left camera 160 and the right camera 170; Read image data of the leads 1 'and 14 from the left and right cameras 160 and 170, extract ROI (region of interest) values from the image data of the leads 1' and 14, and store the extracted data. Binary the left and right ROI values to extract the first line of image data L1 and the last line of image data LN, and the sum of the number of pixels of each of the left and right boundary data L1 and LN. Image processing apparatus for determining the alignment degree by selecting and calculating the maximum value and the deviation value of the sum of the number of pixels on the left and the right, and comparing the four feature data with the stored feature data which are good criteria. And 220).

A display device (230) for displaying the results from the image processing device (220) may be further included; As a result of the comparison of the image processing apparatus 220, the controller may further include a control unit which controls the alignment unit to automatically align the lead units 1 'and 14 according to the difference value from the reference feature data. In this case, when the TMA jig 110 fixing the TMA 1 and the TCP jig 120 fixing the TCP 10 are fixed to different tables, the TMA jig 110 is automatically aligned by the XYθ table 130. Preferably, the driving unit of the XYθ table 130 is connected to the control unit.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 2 is a schematic process diagram of a thermocompression method for mounting a tape carrier package on a TMA in accordance with the present invention, and FIG. 3 is a schematic diagram of a configuration of a thermocompression apparatus according to another embodiment of the present invention.

First, in FIG. 3, the thermocompression apparatus of the tape carrier package to the thin film micro-mirror array includes a TMA jig 110, a TCP jig 120, an XYθ table 130, a thermocompression head 140, and an elevator 150. And alignment detection means (160, 170, 180).

The TMA jig 110 is configured to fix the TMA 1 to which the ACF 18 is pressurized by conventional vacuum suction means at a fixed position on the XYθ table 130, and the TCP jig 120 is It is configured to fix the TCP 10 by vacuum suction means at a predetermined position on the XYθ table 130 such that one set of leads 1 'and one lead 14 on one side of the TMA 1 overlap. .

The XYθ table 130 may be a conventionally known one, and the TMA 1 and the TCP 10 may be thermally compressed through the loaded and fixed TMA jig 110 and the TCP jig 120. It is configured to transfer to the thermocompression position of.

The thermocompression head 140 has a built-in heater such that the lead portion 14 of the TCP 10 is thermocompressed via the ACF 18 in a set of lead portions 1 'of the TMA 1, The elevating device 150, such as an air cylinder, is lifted between the lowered thermocompression position and the elevated standby position.

The thermocompression head 140 is shown in Figure 3 is a dual type consisting of a front thermocompression head 141 and a rear thermocompression head 142 rotatable for heterogeneous models, but is not limited thereto.

Alignment detecting means (160, 170), when the TMA (1) and TCP (10) is loaded and fixed on the TMA jig 110 and TCP jig 120, the respective lead portions (1 ', 14) is aligned It is configured to detect whether there is, and through the alignment means to be electrically energized according to the state of the detection. Alignment detecting means (160, 170) according to the present invention is as shown in Figure 6, will be described later.

In addition, the thermocouple 143 may be installed at the end of the thermocompression head 140 to measure the temperature of the thermocompression head 140.

In addition, the control system may be configured by a conventionally well-known timer, other control means and the like for thermocompression temperature, pressure, time and alignment.

The method of thermally compressing the TCP 10 to the above-described TMA 1 using the above-mentioned thermocompression bonding apparatus 100 in FIG. 2 includes a TMA injection step P1, a TCP injection step P2, and a transfer step P3. ), A thermal compression step (P4), a rising and returning step (P5) and a translation and rotation step (P6).

First, the ACF 18 is cut and pressed onto each set of leads 1 'of the TMA 1, and in the TMA injection step P1, the positive on the XYθ table 130 is shown in FIG. The TMA 1, to which the ACF 18 is pressed, is loaded on the TMA jig 110 fixed in position and fixed by vacuum suction means or the like.

In the TCP injection step (P2), on the XYθ table 130 to fix the TCP 10 at a position on the XYθ table 130 that is thermally crimped with one set of lead portions 1 'of one side of the TMA 1. The TCP 10 is loaded on the TCP jig 120 fixed to the upper part, and the read parts 1 'and 14 are aligned and fixed. At this time, various alignment means may be used, an example of which will be described later with reference to FIG. 6.

In the transfer step P3, the loaded and fixed TMA 1 and TCP 10 are driven by moving the XYθ table 130 to the thermocompression position of the thermocompression head 140, and thereafter, the TMA (1). The thermocompression head 140 is lowered and heat is applied for a predetermined time so as to thermo-compress with the lead portion 14 of the TCP 10 through the ACF 18 in one set of the lead portions 1 ' Thermocompression step (P4).

In this way, when one TCP 10 is thermocompressed, it is preferable to cure rapidly and to perform rapid cooling for the next process.

Thereafter, the thermocompression head 140 is raised and the XYθ table 130 returns to the loading position of the TCP 10 before the TCP injection step P2 (loading and returning) for loading another TCP 10. Step P5.

The translation and rotation step P6 is performed by the XYθ table 130, which opens the lead portion 14 of the TCP 10 to the other set of lead portions 1 'of one side of the TMA 1. When crimping, the other set of leads 1 'on one side thereof is translated and moved by the XYθ table 130 so as to be located at the loading position of the TCP 10, and one of the other sides of the TMA 1 is moved. When thermocompression bonding the lead portion 14 of the TCP 10 to the lead portions 1 'of the set, XYθ so that one set of lead portions 1' on the other side is positioned at the loading position of the TCP 10. It rotates by the table 130.

In this way, in order to thermocompress the TCP 10 to another set of lead portions 1 ', the TCP injection step P2, the transfer step P3, and the thermocompression step P4 in the first iteration step P7. And the ascending step P5 is repeated.

In addition, in order to thermo-compress the lead portion 14 of the TCP 10 to the six sets of lead portions 1 'on the four sides of the TMA 1, a translational transfer and rotation step (P6) and a TCP injection step (P2) ), The transfer step P3, the thermocompression step P4 and the ascending step P5 are repeated (second repetition step P8).

In this way, the thermocompression bonding is performed four times and six times of the TMA (1). If the alignment of the leads 1 'and 14 is not satisfactory at each thermocompression bonding, they are shorted or disconnected. Correct operation of the TMA 1 cannot be expected.

In FIG. 5, a state in which the TMA 1 via the ACF 18 and the lead portions 1 ′ and 14 on the left side of the TCP 10 and the lead portions 1 ′ and 14 on the right side are overlapped is illustrated. 7A to 7D show image data being read by the left camera 160 and the right camera 170 which are the alignment detecting means 160 and 170 of FIG. 7 in the overlapped state.

As shown in FIG. 7A, the read portions 1 ′ and 14 read out have the same predetermined number of lead portions 1 ′ and 14 as the image data of the predetermined number of lead portions 1 ′ and 14 on the left side. 7b shows a good alignment, FIG. 7c shows a large deviation from left and right (X direction), and FIG. 7d shows an obliquely overlapping state (rotation in θ direction). do.

6 is a schematic perspective view of an example of an alignment detection system of an automatic alignment device according to an embodiment of the present invention.

In Fig. 6, the alignment according to the invention in the automatic alignment device of the TMA 1 and the TCP 10, which are superimposed on each lead part 1 'and 14 via the ACF 18 for thermal compression, is shown. The detection system includes a left camera 160, a right camera 170, a video selector 210, an image processing device 220, and a display device 230, and automatically controls the leads 1 ′ and 14. Alignment means for aligning, or the control unit may be used conventional ones with the memory means, in Figure 3 TMA jig 110 for fixing the TMA (1), TCP jig 120 for fixing the TCP (10) ) Is fixed to different tables, the driving unit of the XYθ table 130 may be connected to the control unit so as to be automatically aligned by the XYθ table 130.

The left camera 160 and the right camera 170 are preferably CCD cameras for reading image data, and are arranged to read image data of a predetermined number of leads 1 'and 14 on the left and right sides. The video selector 210 selects a connection to the image processing apparatus 220 to selectively read image data from the left camera 160 and the right camera 170.

The image processing apparatus 220 reads image data of the lead portions 1 'and 14 from the left and right cameras 160 and 170, and ROI (region of interest) from the image data of the lead portions 1' and 14. Extract and store values, and binarize the left and right ROI values to extract the first line of image data L1 and the last line of image data LN, and the respective boundary data L1, By selecting the sum of the pixel number of LN) and selecting and calculating the maximum value and the deviation value of the sum of the number of pixels on the left and the right, it is selected as the feature data, and comparing the four feature data with the stored feature data as a good reference The image processing apparatus 220 may also be used in the related art.

FIG. 8B is a state diagram showing the result of a region of interest (ROI) value of image data read out from the image of FIG. 8A extracted by the image processing method of the present invention, and the image data L1 of the first line at the ROI value. And the image data LN of the last line are used in the method of the present invention.

FIG. 9 is a flow chart illustrating an automatic alignment method of a thin film micro-mirror array and a tape carrier package according to an embodiment of the present invention using the apparatus shown in FIG. 6.

The initial value setting step S1 sets and stores good reference feature data and its range, initializes each image device, and determines other ROI value sizes and binarization values.

Then, in the step of reading the left image data (S2), the image data of the lead portions 1 'and 14 on the left is read from the left camera 160, and from the image data of the lead portions 1' and 14 on the left side. The ROI value is extracted and stored (left ROI value storage step S3), and the video selector 210 switches to the right camera 170 to read image data from the right camera 170 (switching step S4). )) The image data of the right leads 1 'and 14 are read from the right camera 170, and the ROI values are extracted and stored (steps S5 and S6).

Then, the left and right ROI values are binarized (step S7), and the image data L1 of the first line and the image data LN of the last line are extracted from the binarization data (boundary data extraction step S8).

The sum of the number of pixels between the respective boundary data L1 and LN extracted in this way is obtained (step S9), and the maximum and deviation values of the sum of the number of pixels on the left and right sides are selected and calculated. Four values are selected as the feature data (feature data selection step S10).

The four feature data are compared with the previously stored feature data on a good basis to determine the degree of alignment (comparison determination steps S11, S12, S13).

In step S11, the display device 230 can be displayed as text on the display device 230 in step S12. If it is determined in step S13 that it is within the range, the processing result and end in step S14 are sent to the display device 230. If the display is to be terminated and the range is not within the range, the moving direction and the moving amount may be obtained and displayed according to the difference from the reference feature data. Based on this, the operator manually sets the position of the TCP 10 in step S15. You may make changes and repeat the above process.

In addition, it can be controlled to be automatically aligned by the conventional control means and the drive means and the alignment means by using the movement direction and the amount of movement obtained by the difference with the reference feature data to be automatically aligned, and also, TMA jig ( When the 110 and the TCP jig 120 are fixed to different tables from each other, the XYθ table 130 may be used as the alignment means to be automatically aligned by the XYθ table 130, and the driving motor may be interposed between the driving parts. Method controlled by the control unit or the system will be possible by those known in the art.

According to the structure and function of the automatic alignment of the thin film micro-mirror array and the tape carrier package according to the embodiments of the present invention described above, and the apparatus thereof, ACF (continuously connected to the lead portion 1 'of the TMA 1). 18, it is possible to automatically detect the alignment of the grid portions 1 'and 14 so that the TCP 10 can be automatically thermocompressed several times through a plurality of sides, and can be automatically aligned based on this. There is such an effect.

Claims (4)

In the automatic alignment method of the TMA (1) and the TCP (10) that is loaded overlapping through the ACF (18) in each lead portion (1 ', 14) for thermocompression bonding: A left image data reading step (S2) of reading the image data of the left lead portions 1 'and 14 from the left camera 160; A left ROI value storing step (S3) of extracting and storing a region of interest (ROI) value from the image data of the left lead portions 1 'and 14; A switching step (S4) of switching to the right camera 170 by the video selector 210 to read the image data from the right camera 170; A right image data reading step (S5) of reading the image data of the right leads 1 'and 14 from the right camera 170; A right ROI value storing step (S6) of extracting and storing a region of interest (ROI) value from the image data of the right-side leads 1 'and 14; Binarization step (S7) of binarizing the left and right ROI values; A boundary data extraction step (S8) of extracting image data L1 of the first line and image data LN of the last line from the binarization data; Obtaining a sum of the number of pixels of the respective boundary data L1 and LN on the left and right sides (S9); A feature data selection step (S10) of selecting and calculating a maximum value and a deviation value of the sum of the number of pixels on the left and the right as feature data; Automatic alignment of the thin film micro-mirror array and the tape carrier package, comprising a comparison determination step (S11, S12, S13) for comparing the four feature data with the stored feature data as a good reference. Way. The table according to claim 1, wherein the comparison determination step (S11, S12, S13) is controlled so as to be automatically aligned according to the difference between the reference characteristic data, and the TMA jig 110 and the TCP jig 120 are different from each other. And the XYθ table (130) is controlled to automatically align by the XYθ table (130) when fixed to the thin film micro-mirror array and tape carrier package. In the automatic alignment device of the TMA (1) and the TCP (10) which are loaded overlapping through the ACF (18) in each lead portion (1 ', 14) for thermocompression bonding: A left camera 160 for reading image data of the lead parts 1 'and 14 on the left side; A right camera 170 for reading image data of the right leads 1 'and 14; A video selector 210 for selectively reading image data from the left camera 160 and the right camera 170; Read image data of the leads 1 'and 14 from the left and right cameras 160 and 170, extract ROI (region of interest) values from the image data of the leads 1' and 14, and store the extracted data. Binary the left and right ROI values to extract the first line of image data L1 and the last line of image data LN, and the sum of the number of pixels of each of the left and right boundary data L1 and LN. Image processing apparatus for determining the alignment degree by selecting and calculating the maximum value and the deviation value of the sum of the number of pixels on the left and the right, and comparing the four feature data with the stored feature data which are good criteria. Automatic alignment device of the thin film micro-mirror array and tape carrier package. 4. The apparatus of claim 3, further comprising a display device (230) for displaying results from said image processing device (220); As a result of the comparison of the image processing apparatus 220, the controller may further include a control unit which controls the alignment unit to automatically align the lead units 1 'and 14 according to the difference value from the reference feature data. In this case, when the TMA jig 110 fixing the TMA 1 and the TCP jig 120 fixing the TCP 10 are fixed to different tables, the TMA jig 110 is automatically aligned by the XYθ table 130. The drive unit of the XYθ table (130) is connected to the control unit automatic alignment device of the thin film micro-mirror array and tape carrier package.