KR19990068086A - 워크 반송 방법 및 시스템 - Google Patents
워크 반송 방법 및 시스템 Download PDFInfo
- Publication number
- KR19990068086A KR19990068086A KR1019990002057A KR19990002057A KR19990068086A KR 19990068086 A KR19990068086 A KR 19990068086A KR 1019990002057 A KR1019990002057 A KR 1019990002057A KR 19990002057 A KR19990002057 A KR 19990002057A KR 19990068086 A KR19990068086 A KR 19990068086A
- Authority
- KR
- South Korea
- Prior art keywords
- storage shelf
- workpieces
- stored
- processing unit
- processing
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000003860 storage Methods 0.000 claims abstract description 120
- 235000012431 wafers Nutrition 0.000 description 12
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000284 extract Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Multi-Process Working Machines And Systems (AREA)
- General Factory Administration (AREA)
- Warehouses Or Storage Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10011658A JPH11214472A (ja) | 1998-01-23 | 1998-01-23 | ワーク搬送方法 |
| JP1998-011658 | 1998-01-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR19990068086A true KR19990068086A (ko) | 1999-08-25 |
Family
ID=11784086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019990002057A KR19990068086A (ko) | 1998-01-23 | 1999-01-22 | 워크 반송 방법 및 시스템 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH11214472A (ja) |
| KR (1) | KR19990068086A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190100384A (ko) * | 2017-02-20 | 2019-08-28 | 무라다기카이가부시끼가이샤 | 퍼지 스토커 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4090990B2 (ja) * | 2001-06-25 | 2008-05-28 | 武秀 林 | 半導体または液晶ウエハー枚葉搬送及び移載システム |
| WO2003024673A1 (fr) * | 2001-09-12 | 2003-03-27 | Takehide Hayashi | Main de robot a fonction de positionnement pour tranche en semiconducteur et substrat de verre a cristaux liquides |
| TWI246501B (en) | 2003-02-03 | 2006-01-01 | Murata Machinery Ltd | Overhead traveling carriage system |
| KR100847627B1 (ko) * | 2003-11-06 | 2008-07-21 | 신꼬오덴끼가부시끼가이샤 | 기판 반입출 장치 |
-
1998
- 1998-01-23 JP JP10011658A patent/JPH11214472A/ja active Pending
-
1999
- 1999-01-22 KR KR1019990002057A patent/KR19990068086A/ko not_active Application Discontinuation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190100384A (ko) * | 2017-02-20 | 2019-08-28 | 무라다기카이가부시끼가이샤 | 퍼지 스토커 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH11214472A (ja) | 1999-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E601 | Decision to refuse application |